SG55386A1 - Control of si02 etch rate using dilute chemical etchants in the presence of a megasonic field - Google Patents
Control of si02 etch rate using dilute chemical etchants in the presence of a megasonic fieldInfo
- Publication number
- SG55386A1 SG55386A1 SG1997003613A SG1997003613A SG55386A1 SG 55386 A1 SG55386 A1 SG 55386A1 SG 1997003613 A SG1997003613 A SG 1997003613A SG 1997003613 A SG1997003613 A SG 1997003613A SG 55386 A1 SG55386 A1 SG 55386A1
- Authority
- SG
- Singapore
- Prior art keywords
- control
- etch rate
- chemical etchants
- dilute chemical
- megasonic field
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P70/00—Cleaning of wafers, substrates or parts of devices
- H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H10P70/15—Cleaning before device manufacture, i.e. Begin-Of-Line process by wet cleaning only
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
- H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
- H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
- H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/749,906 US5919311A (en) | 1996-11-15 | 1996-11-15 | Control of SiO2 etch rate using dilute chemical etchants in the presence of a megasonic field |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG55386A1 true SG55386A1 (en) | 1998-12-21 |
Family
ID=25015712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG1997003613A SG55386A1 (en) | 1996-11-15 | 1997-09-29 | Control of si02 etch rate using dilute chemical etchants in the presence of a megasonic field |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5919311A (de) |
| EP (1) | EP0844650A3 (de) |
| JP (1) | JPH10154690A (de) |
| KR (1) | KR19980042006A (de) |
| MY (1) | MY141358A (de) |
| SG (1) | SG55386A1 (de) |
| TW (1) | TW399255B (de) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6074960A (en) | 1997-08-20 | 2000-06-13 | Micron Technology, Inc. | Method and composition for selectively etching against cobalt silicide |
| KR100290703B1 (ko) * | 1997-08-26 | 2001-06-01 | 윤종용 | 정량공급조건을갖는반도체웨이퍼세정방법 |
| US6632321B2 (en) | 1998-01-06 | 2003-10-14 | Applied Materials, Inc | Method and apparatus for monitoring and controlling wafer fabrication process |
| JP2000117208A (ja) * | 1998-10-13 | 2000-04-25 | Kurita Water Ind Ltd | 電子材料の洗浄方法 |
| DE19853486A1 (de) * | 1998-11-19 | 2000-05-31 | Wacker Siltronic Halbleitermat | Verfahren zur naßchemischen Behandlung von Halbleiterscheiben |
| US6799583B2 (en) | 1999-05-13 | 2004-10-05 | Suraj Puri | Methods for cleaning microelectronic substrates using ultradilute cleaning liquids |
| US6230720B1 (en) * | 1999-08-16 | 2001-05-15 | Memc Electronic Materials, Inc. | Single-operation method of cleaning semiconductors after final polishing |
| WO2001026144A1 (en) * | 1999-10-01 | 2001-04-12 | Fsi International, Inc. | Methods for cleaning microelectronic substrates using ultradilute cleaning liquids |
| US6429144B1 (en) * | 1999-12-28 | 2002-08-06 | Koninklijke Philips Electronics N.V. | Integrated circuit manufacture method with aqueous hydrogen fluoride and nitric acid oxide etch |
| US6403267B1 (en) * | 2000-01-21 | 2002-06-11 | Taiwan Semiconductor Manufacturing Company | Method for high transmittance attenuated phase-shifting mask fabrication |
| US7156927B2 (en) * | 2002-04-03 | 2007-01-02 | Fsi International, Inc. | Transition flow treatment process and apparatus |
| US20030232507A1 (en) * | 2002-06-12 | 2003-12-18 | Macronix International Co., Ltd. | Method for fabricating a semiconductor device having an ONO film |
| EP1753032A1 (de) * | 2004-05-28 | 2007-02-14 | Sharp Kabushiki Kaisha | Halbleitersubstrat für eine solarzelle, herstellungsverfahren dafür und solarzelle |
| US7655094B2 (en) * | 2004-07-07 | 2010-02-02 | Nano Om, Llc | Systems and methods for charging a cleaning solution used for cleaning integrated circuit substrates |
| US7731800B2 (en) | 2004-07-07 | 2010-06-08 | Nano Om, Llc | Systems and methods for single integrated substrate cleaning and rinsing |
| KR100580117B1 (ko) * | 2004-09-03 | 2006-05-12 | 에스티마이크로일렉트로닉스 엔.브이. | 반도체 메모리 소자의 소자 분리막 형성방법 |
| US20060142689A1 (en) * | 2004-10-13 | 2006-06-29 | Suraj Puri | Systems, methods and compositions for cleaning wounds |
| US20060078850A1 (en) * | 2004-10-13 | 2006-04-13 | Suraj Puri | Systems, methods and compositions for promoting oral hygiene |
| FR2884647B1 (fr) * | 2005-04-15 | 2008-02-22 | Soitec Silicon On Insulator | Traitement de plaques de semi-conducteurs |
| US8741066B2 (en) * | 2007-02-16 | 2014-06-03 | Akrion Systems, Llc | Method for cleaning substrates utilizing surface passivation and/or oxide layer growth to protect from pitting |
| US7776713B2 (en) * | 2007-05-30 | 2010-08-17 | Macronix International Co., Ltd. | Etching solution, method of surface modification of semiconductor substrate and method of forming shallow trench isolation |
| FR2923947B1 (fr) | 2007-11-20 | 2010-06-11 | Inst Polytechnique Grenoble | Procede et dispositif de gravure selective. |
| US20090142247A1 (en) * | 2007-12-03 | 2009-06-04 | Applied Materials, Inc. | Chemical treatment to reduce machining-induced sub-surface damage in semiconductor processing components comprising silicon carbide |
| JP2010226089A (ja) * | 2009-01-14 | 2010-10-07 | Rohm & Haas Electronic Materials Llc | 半導体ウェハをクリーニングする方法 |
| FR2945662B1 (fr) | 2009-05-18 | 2012-02-17 | Inst Polytechnique Grenoble | Procede de gravure d'un materiau en presence d'un gaz. |
| EP3067949A1 (de) | 2015-03-09 | 2016-09-14 | Heraeus Deutschland GmbH & Co. KG | Leitfähige Polymer/Si-Schnittstellen auf der Rückseite von Solarzellen |
| EP3276693A1 (de) | 2016-07-28 | 2018-01-31 | Heraeus Deutschland GmbH & Co. KG | Solarzellen mit leitfähigen polymerpassivierungsschichten auf der rückseite |
| US10553720B2 (en) * | 2016-11-29 | 2020-02-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of removing an etch mask |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3893869A (en) * | 1974-05-31 | 1975-07-08 | Rca Corp | Megasonic cleaning system |
| US4339340A (en) * | 1975-11-26 | 1982-07-13 | Tokyo Shibaura Electric Co., Ltd. | Surface-treating agent adapted for intermediate products of a semiconductor device |
| US4264374A (en) * | 1978-09-25 | 1981-04-28 | International Business Machines Corporation | Cleaning process for p-type silicon surface |
| US5037481B1 (en) * | 1987-04-29 | 1993-05-11 | Verteq, Inc. | Megasonic cleaning method |
| US4804007A (en) * | 1987-04-29 | 1989-02-14 | Verteq, Inc. | Cleaning apparatus |
| US5090432A (en) * | 1990-10-16 | 1992-02-25 | Verteq, Inc. | Single wafer megasonic semiconductor wafer processing system |
| US5279316A (en) * | 1992-08-18 | 1994-01-18 | P.C.T. Systems, Inc. | Multiprocessing sonic bath system for semiconductor wafers |
| US5439569A (en) * | 1993-02-12 | 1995-08-08 | Sematech, Inc. | Concentration measurement and control of hydrogen peroxide and acid/base component in a semiconductor bath |
| US5464480A (en) * | 1993-07-16 | 1995-11-07 | Legacy Systems, Inc. | Process and apparatus for the treatment of semiconductor wafers in a fluid |
| JP2586304B2 (ja) * | 1993-09-21 | 1997-02-26 | 日本電気株式会社 | 半導体基板の洗浄液および洗浄方法 |
| US5656097A (en) * | 1993-10-20 | 1997-08-12 | Verteq, Inc. | Semiconductor wafer cleaning system |
| US5516730A (en) * | 1994-08-26 | 1996-05-14 | Memc Electronic Materials, Inc. | Pre-thermal treatment cleaning process of wafers |
-
1996
- 1996-11-15 US US08/749,906 patent/US5919311A/en not_active Expired - Fee Related
-
1997
- 1997-09-29 SG SG1997003613A patent/SG55386A1/en unknown
- 1997-09-30 EP EP97307698A patent/EP0844650A3/de not_active Withdrawn
- 1997-10-06 TW TW086114587A patent/TW399255B/zh active
- 1997-10-10 MY MYPI97004757A patent/MY141358A/en unknown
- 1997-10-31 KR KR1019970057312A patent/KR19980042006A/ko not_active Withdrawn
- 1997-11-14 JP JP9313233A patent/JPH10154690A/ja not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| TW399255B (en) | 2000-07-21 |
| KR19980042006A (ko) | 1998-08-17 |
| MY141358A (en) | 2010-04-16 |
| EP0844650A3 (de) | 1999-05-26 |
| US5919311A (en) | 1999-07-06 |
| EP0844650A2 (de) | 1998-05-27 |
| JPH10154690A (ja) | 1998-06-09 |
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