TW202000403A - 具備墊構件之機械手 - Google Patents

具備墊構件之機械手 Download PDF

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Publication number
TW202000403A
TW202000403A TW108121018A TW108121018A TW202000403A TW 202000403 A TW202000403 A TW 202000403A TW 108121018 A TW108121018 A TW 108121018A TW 108121018 A TW108121018 A TW 108121018A TW 202000403 A TW202000403 A TW 202000403A
Authority
TW
Taiwan
Prior art keywords
pad
body portion
ring
flange
manipulator
Prior art date
Application number
TW108121018A
Other languages
English (en)
Chinese (zh)
Inventor
渡邊啓暉
酒井哲也
Original Assignee
日商平田機工股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商平田機工股份有限公司 filed Critical 日商平田機工股份有限公司
Publication of TW202000403A publication Critical patent/TW202000403A/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
TW108121018A 2018-06-28 2019-06-18 具備墊構件之機械手 TW202000403A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-122932 2018-06-28
JP2018122932A JP2021153076A (ja) 2018-06-28 2018-06-28 パッド部材を備えたロボットハンド

Publications (1)

Publication Number Publication Date
TW202000403A true TW202000403A (zh) 2020-01-01

Family

ID=68986294

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108121018A TW202000403A (zh) 2018-06-28 2019-06-18 具備墊構件之機械手

Country Status (3)

Country Link
JP (1) JP2021153076A (fr)
TW (1) TW202000403A (fr)
WO (1) WO2020003979A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102701437B1 (ko) * 2020-12-28 2024-09-03 세메스 주식회사 반송 유닛 및 이를 가지는 기판 처리 장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6094487U (ja) * 1983-11-30 1985-06-27 東芝機械株式会社 ウエハ吸着装置
JP3172375B2 (ja) * 1994-10-03 2001-06-04 大日本スクリーン製造株式会社 基板搬送装置
JPH08112793A (ja) * 1994-10-13 1996-05-07 Toshiba Corp 吸着保持装置及び実装装置
JPH10156778A (ja) * 1996-12-04 1998-06-16 Smc Corp 吸着用パッド
JP2002066972A (ja) * 2000-09-01 2002-03-05 Koganei Corp 吸着装置
JP3810714B2 (ja) * 2002-07-29 2006-08-16 エスペック株式会社 薄層基板製造方法、薄層基板移載装置及び薄層基板移載用吸着パッド
JP4740188B2 (ja) * 2007-05-08 2011-08-03 三菱電線工業株式会社 搬送アーム用パッド
JP2014072262A (ja) * 2012-09-28 2014-04-21 Hitachi High-Technologies Corp 真空処理装置及び搬送装置

Also Published As

Publication number Publication date
JP2021153076A (ja) 2021-09-30
WO2020003979A1 (fr) 2020-01-02

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