TW357265B - Probe card and method of forming the same - Google Patents

Probe card and method of forming the same

Info

Publication number
TW357265B
TW357265B TW086104848A TW86104848A TW357265B TW 357265 B TW357265 B TW 357265B TW 086104848 A TW086104848 A TW 086104848A TW 86104848 A TW86104848 A TW 86104848A TW 357265 B TW357265 B TW 357265B
Authority
TW
Taiwan
Prior art keywords
forming
probe card
same
substrate
insulation film
Prior art date
Application number
TW086104848A
Other languages
English (en)
Chinese (zh)
Inventor
Koji Soejima
Naoji Senba
Original Assignee
Nippon Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co filed Critical Nippon Electric Co
Application granted granted Critical
Publication of TW357265B publication Critical patent/TW357265B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06744—Microprobes, i.e. having dimensions as IC details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW086104848A 1996-04-15 1997-04-15 Probe card and method of forming the same TW357265B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8092079A JP3022312B2 (ja) 1996-04-15 1996-04-15 プローブカードの製造方法

Publications (1)

Publication Number Publication Date
TW357265B true TW357265B (en) 1999-05-01

Family

ID=14044451

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086104848A TW357265B (en) 1996-04-15 1997-04-15 Probe card and method of forming the same

Country Status (6)

Country Link
US (1) US6114864A (ja)
EP (1) EP0802419A3 (ja)
JP (1) JP3022312B2 (ja)
KR (1) KR100266759B1 (ja)
SG (1) SG55303A1 (ja)
TW (1) TW357265B (ja)

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US7073254B2 (en) 1993-11-16 2006-07-11 Formfactor, Inc. Method for mounting a plurality of spring contact elements
US6232789B1 (en) 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5729150A (en) 1995-12-01 1998-03-17 Cascade Microtech, Inc. Low-current probe card with reduced triboelectric current generating cables
US8033838B2 (en) 1996-02-21 2011-10-11 Formfactor, Inc. Microelectronic contact structure
US6310484B1 (en) * 1996-04-01 2001-10-30 Micron Technology, Inc. Semiconductor test interconnect with variable flexure contacts
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US7714235B1 (en) 1997-05-06 2010-05-11 Formfactor, Inc. Lithographically defined microelectronic contact structures
US6034533A (en) 1997-06-10 2000-03-07 Tervo; Paul A. Low-current pogo probe card
JP4006081B2 (ja) * 1998-03-19 2007-11-14 株式会社ルネサステクノロジ 半導体装置の製造方法
JP3553791B2 (ja) * 1998-04-03 2004-08-11 株式会社ルネサステクノロジ 接続装置およびその製造方法、検査装置並びに半導体素子の製造方法
JPH11326371A (ja) * 1998-05-15 1999-11-26 Toppan Printing Co Ltd 検査治具
JPH11354561A (ja) * 1998-06-09 1999-12-24 Advantest Corp バンプ形成方法及びバンプ
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
JP4160665B2 (ja) * 1998-07-22 2008-10-01 Ｈｏｙａ株式会社 コンタクトボード及びその構成部品
JP3958875B2 (ja) * 1998-07-24 2007-08-15 株式会社日本マイクロニクス プローバ及びプローブ針接触方法
US6344752B1 (en) 1998-08-12 2002-02-05 Tokyo Electron Limited Contactor and production method for contractor
JP2000055936A (ja) * 1998-08-12 2000-02-25 Tokyo Electron Ltd コンタクタ
US6441315B1 (en) 1998-11-10 2002-08-27 Formfactor, Inc. Contact structures with blades having a wiping motion
JP2000227446A (ja) * 1998-11-30 2000-08-15 Japan Electronic Materials Corp プローブカード
US6980017B1 (en) 1999-03-10 2005-12-27 Micron Technology, Inc. Test interconnect for bumped semiconductor components and method of fabrication
JPH11337581A (ja) * 1999-04-27 1999-12-10 Nec Corp プロ―ブカ―ド
WO2001009623A1 (en) * 1999-07-28 2001-02-08 Nanonexus, Inc. Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies
US6812718B1 (en) 1999-05-27 2004-11-02 Nanonexus, Inc. Massively parallel interface for electronic circuits
US7382142B2 (en) 2000-05-23 2008-06-03 Nanonexus, Inc. High density interconnect system having rapid fabrication cycle
US6799976B1 (en) 1999-07-28 2004-10-05 Nanonexus, Inc. Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies
US7349223B2 (en) 2000-05-23 2008-03-25 Nanonexus, Inc. Enhanced compliant probe card systems having improved planarity
US7247035B2 (en) 2000-06-20 2007-07-24 Nanonexus, Inc. Enhanced stress metal spring contactor
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US6218203B1 (en) * 1999-06-28 2001-04-17 Advantest Corp. Method of producing a contact structure
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US7435108B1 (en) 1999-07-30 2008-10-14 Formfactor, Inc. Variable width resilient conductive contact structures
US6713374B2 (en) 1999-07-30 2004-03-30 Formfactor, Inc. Interconnect assemblies and methods
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KR100621760B1 (ko) * 1999-10-18 2006-09-07 삼성전자주식회사 반도체 칩 테스트용 프로브 카드
JP2003203954A (ja) * 1999-11-18 2003-07-18 Ibiden Co Ltd 検査装置およびプローブカード
JP3696486B2 (ja) * 1999-11-18 2005-09-21 イビデン株式会社 検査装置
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US6838890B2 (en) 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US7262611B2 (en) 2000-03-17 2007-08-28 Formfactor, Inc. Apparatuses and methods for planarizing a semiconductor contactor
JP3650722B2 (ja) 2000-05-18 2005-05-25 株式会社アドバンテスト プローブカードおよびその製造方法
US7579848B2 (en) 2000-05-23 2009-08-25 Nanonexus, Inc. High density interconnect system for IC packages and interconnect assemblies
US7952373B2 (en) 2000-05-23 2011-05-31 Verigy (Singapore) Pte. Ltd. Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies
US6765400B2 (en) 2000-07-25 2004-07-20 Ibiden Co., Ltd. Inspection apparatus and probe card
KR20000064001A (ko) * 2000-08-16 2000-11-06 홍영희 프로브 및 프로브 카드
US6462568B1 (en) * 2000-08-31 2002-10-08 Micron Technology, Inc. Conductive polymer contact system and test method for semiconductor components
JP2002082130A (ja) * 2000-09-06 2002-03-22 Hitachi Ltd 半導体素子検査装置及びその製造方法
JP4527267B2 (ja) * 2000-11-13 2010-08-18 東京エレクトロン株式会社 コンタクタの製造方法
DE10143173A1 (de) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
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US7355420B2 (en) 2001-08-21 2008-04-08 Cascade Microtech, Inc. Membrane probing system
EP1509776A4 (en) 2002-05-23 2010-08-18 Cascade Microtech Inc PROBE TO TEST ANY TESTING EQUIPMENT
JP2003139799A (ja) * 2002-07-15 2003-05-14 Advantest Corp プローブカードおよびその製造方法
TWI236723B (en) * 2002-10-02 2005-07-21 Renesas Tech Corp Probe sheet, probe card, semiconductor inspection device, and manufacturing method for semiconductor device
US6724205B1 (en) 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
JP2004213923A (ja) * 2002-12-27 2004-07-29 Anritsu Corp 接点部材及び該接点部材を用いたマイクロ接点装置
US6982565B2 (en) * 2003-03-06 2006-01-03 Micron Technology, Inc. Test system and test method with interconnect having semiconductor spring contacts
KR100523745B1 (ko) * 2003-03-24 2005-10-25 주식회사 유니테스트 전자소자 검사용 마이크로 프로브 및 그 제조 방법
KR20040089244A (ko) * 2003-04-11 2004-10-21 주식회사 유림하이테크산업 프로브 카드의 니들 어셈블리
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JP2005156365A (ja) * 2003-11-26 2005-06-16 Shinko Electric Ind Co Ltd 電気特性測定用プローブ及びその製造方法
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TWI286606B (en) 2004-03-16 2007-09-11 Gunsei Kimoto Electric signal connecting device, and probe assembly and prober device using it
KR101157449B1 (ko) 2004-07-07 2012-06-22 캐스케이드 마이크로테크 인코포레이티드 멤브레인 서스펜디드 프로브를 구비한 프로브 헤드
KR20070058522A (ko) 2004-09-13 2007-06-08 캐스케이드 마이크로테크 인코포레이티드 양측 프루빙 구조
JP4535494B2 (ja) * 2004-10-20 2010-09-01 ルネサスエレクトロニクス株式会社 薄膜プローブシートの製造方法および半導体チップの検査方法
KR100633456B1 (ko) * 2004-11-24 2006-10-16 주식회사 유니테스트 깊게 파진 트렌치를 구비하는 프로브 카드 및 그 제조방법
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
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JP4884749B2 (ja) * 2005-10-31 2012-02-29 日本発條株式会社 導電性接触子ホルダの製造方法および導電性接触子ユニットの製造方法
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TWI397696B (zh) 2006-02-19 2013-06-01 木本軍生 Probe assembly
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US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
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JP2012198194A (ja) * 2011-03-09 2012-10-18 Shinko Electric Ind Co Ltd プローブカード及びその製造方法
TWI439698B (zh) * 2011-09-30 2014-06-01 Hermes Testing Solutions Inc 電路測試探針卡及其探針基板結構
US9899236B2 (en) * 2014-12-24 2018-02-20 Stmicroelectronics, Inc. Semiconductor package with cantilever pads
US9768126B2 (en) * 2014-12-24 2017-09-19 Stmicroelectronics, Inc. Stacked semiconductor packages with cantilever pads
DE102015004150A1 (de) * 2015-03-31 2016-10-06 Feinmetall Gmbh Verfahren zur Herstellung eines Kontaktabstandswandlers sowie Kontaktabstandswandler
CN106206516B (zh) * 2015-05-26 2019-08-06 意法半导体公司 带有悬臂式焊盘的叠层半导体封装体
JP6770798B2 (ja) * 2015-11-20 2020-10-21 日本電子材料株式会社 コンタクトプローブ
CN116783064A (zh) * 2021-02-24 2023-09-19 松下知识产权经营株式会社 连结结构物、装饰方法以及连结结构体组件

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Also Published As

Publication number Publication date
EP0802419A3 (en) 1998-08-12
JP3022312B2 (ja) 2000-03-21
JPH09281144A (ja) 1997-10-31
EP0802419A2 (en) 1997-10-22
KR100266759B1 (ko) 2000-09-15
US6114864A (en) 2000-09-05
KR970072105A (ko) 1997-11-07
SG55303A1 (en) 1998-12-21

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