UA102545C2 - Галогенированный полисилан и термический способ его получения - Google Patents
Галогенированный полисилан и термический способ его полученияInfo
- Publication number
- UA102545C2 UA102545C2 UAA201014142A UAA201014142A UA102545C2 UA 102545 C2 UA102545 C2 UA 102545C2 UA A201014142 A UAA201014142 A UA A201014142A UA A201014142 A UAA201014142 A UA A201014142A UA 102545 C2 UA102545 C2 UA 102545C2
- Authority
- UA
- Ukraine
- Prior art keywords
- polysilane
- producing
- thermal process
- halogenated
- halogenated polysilane
- Prior art date
Links
- 229920000548 poly(silane) polymer Polymers 0.000 title abstract 7
- 238000000034 method Methods 0.000 title abstract 3
- 150000001875 compounds Chemical class 0.000 abstract 2
- 238000005133 29Si NMR spectroscopy Methods 0.000 abstract 1
- 238000001237 Raman spectrum Methods 0.000 abstract 1
- 238000009776 industrial production Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 238000001228 spectrum Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Silicon Polymers (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102008025260A DE102008025260B4 (de) | 2008-05-27 | 2008-05-27 | Halogeniertes Polysilan und thermisches Verfahren zu dessen Herstellung |
| PCT/DE2009/000727 WO2009143824A1 (de) | 2008-05-27 | 2009-05-27 | Halogeniertes polysilan und thermisches verfahren zu dessen herstellung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| UA102545C2 true UA102545C2 (ru) | 2013-07-25 |
Family
ID=41128217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| UAA201014142A UA102545C2 (ru) | 2008-05-27 | 2009-05-27 | Галогенированный полисилан и термический способ его получения |
Country Status (14)
| Country | Link |
|---|---|
| US (1) | US9617391B2 (pt) |
| EP (1) | EP2296804B1 (pt) |
| JP (1) | JP5639047B2 (pt) |
| KR (1) | KR101659098B1 (pt) |
| CN (1) | CN102099104B (pt) |
| AU (1) | AU2009253523B2 (pt) |
| BR (1) | BRPI0912045B1 (pt) |
| CA (1) | CA2725366C (pt) |
| DE (1) | DE102008025260B4 (pt) |
| IL (1) | IL209578A0 (pt) |
| MX (1) | MX2010012992A (pt) |
| RU (1) | RU2502554C2 (pt) |
| UA (1) | UA102545C2 (pt) |
| WO (1) | WO2009143824A1 (pt) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008042934A1 (de) * | 2008-10-17 | 2010-04-22 | Wacker Chemie Ag | Verfahren zur Herstellung von Neopentasilanen |
| DE102009027194A1 (de) * | 2009-06-25 | 2010-12-30 | Wacker Chemie Ag | Verfahren zur Herstellung von Dodecahalogenneopentasilanen |
| DE102009056438B4 (de) | 2009-12-02 | 2013-05-16 | Spawnt Private S.À.R.L. | Verfahren zur Herstellung von Hexachlordisilan |
| DE102009056436B4 (de) | 2009-12-02 | 2013-06-27 | Spawnt Private S.À.R.L. | Chloridhaltiges Silicium |
| DE102009056731A1 (de) | 2009-12-04 | 2011-06-09 | Rev Renewable Energy Ventures, Inc. | Halogenierte Polysilane und Polygermane |
| SG185123A1 (en) | 2010-05-05 | 2012-11-29 | Spawnt Private Sarl | Nano-wires made of novel precursors and method for the production thereof |
| DE102010045260A1 (de) * | 2010-09-14 | 2012-03-15 | Spawnt Private S.À.R.L. | Verfahren zur Herstellung von fluorierten Polysilanen |
| DE102010043646A1 (de) | 2010-11-09 | 2012-05-10 | Evonik Degussa Gmbh | Verfahren zur Herstellung von Trichlorsilan |
| DE102014203810A1 (de) * | 2014-03-03 | 2015-09-03 | Evonik Degussa Gmbh | Verfahren zur Herstellung reiner Octachlortrisilane und Decachlortetrasilane |
| DE102014007767B4 (de) | 2014-05-21 | 2025-08-28 | Christian Bauch | Verfahren zur Herstellung halogenierter Oligosilane aus Silicium und Tetrachlorsilan |
| DE102014007768B4 (de) | 2014-05-21 | 2025-07-03 | Sven Holl | Verfahren zur Herstellung von Mischungen chlorierter Silane mit erhöhten Anteilen von Si4Cl10 und/oder Si5Cl12 |
| DE102014007766B4 (de) | 2014-05-21 | 2025-10-16 | Christian Bauch | Verfahren zur plasmachemischen Herstellung halogenierter Oligosilane aus Tetrachlorsilan |
| DE102014109275A1 (de) | 2014-07-02 | 2016-01-07 | Spawnt Private S.À.R.L. | Verfahren zur Herstellung von Nanopartikeln, Nanopartikel und deren Verwendung |
| CN106604924B (zh) | 2014-07-22 | 2020-04-03 | 迈图高新材料有限责任公司 | 用于裂解单硅烷、聚硅烷和/或低聚硅烷中的硅-硅键和/或硅-氯键的方法 |
| EP3088359B1 (de) | 2015-04-28 | 2018-09-12 | Evonik Degussa GmbH | Verfahren zur herstellung von octachlortrisilan und höherer polychlorsilane unter verwertung von hexachlordisilan |
| CN118594430B (zh) * | 2024-08-08 | 2024-12-13 | 内蒙古大全半导体有限公司 | 一种集成电路用超纯八氯三硅烷的生产工艺及其系统 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB702349A (en) | 1950-07-08 | 1954-01-13 | British Thomson Houston Co Ltd | Improvements in and relating to the preparation of chloropolysilanes |
| DE955414C (de) | 1954-09-04 | 1957-01-03 | Kali Cheime Ag | Verfahren zur Herstellung von Siliciumsubbromiden |
| US2840588A (en) * | 1956-03-22 | 1958-06-24 | Du Pont | Process for the preparation of difluorosilylene and the polymers thereof |
| SU435190A1 (ru) | 1972-12-08 | 1974-07-05 | Способ получения гексахлордисилана | |
| US4070444A (en) | 1976-07-21 | 1978-01-24 | Motorola Inc. | Low cost, high volume silicon purification process |
| US4138509A (en) | 1977-12-23 | 1979-02-06 | Motorola, Inc. | Silicon purification process |
| US4309259A (en) | 1980-05-09 | 1982-01-05 | Motorola, Inc. | High pressure plasma hydrogenation of silicon tetrachloride |
| US4374182A (en) | 1980-07-07 | 1983-02-15 | Dow Corning Corporation | Preparation of silicon metal through polymer degradation |
| JPS591505A (ja) | 1982-06-28 | 1984-01-06 | Tdk Corp | 低摩擦薄膜付き物品 |
| JPS59162121A (ja) * | 1983-03-02 | 1984-09-13 | Mitsui Toatsu Chem Inc | 高純度ポリクロロシランの製造方法 |
| JPS59182222A (ja) | 1983-03-30 | 1984-10-17 | Mitsui Toatsu Chem Inc | ポリクロロシランの製造方法 |
| JPS6270425A (ja) * | 1985-09-25 | 1987-03-31 | Mitsubishi Metal Corp | クロロポリシランの製法 |
| JPS6389414A (ja) * | 1986-10-03 | 1988-04-20 | Mitsubishi Metal Corp | クロロポリシランの製造方法 |
| JPH0676496B2 (ja) | 1987-09-25 | 1994-09-28 | 三井東圧化学株式会社 | 有機ポリシランの製造方法 |
| US5202115A (en) * | 1988-08-17 | 1993-04-13 | The Mennen Company | Basic aluminum antiperspirant active material having enhanced activity, antiperspirant active composition containing such material, and methods for preparation of such material and composition |
| US6013824A (en) | 1998-12-01 | 2000-01-11 | Dow Corning Corporation | Redistributing silalkylenes in an alkyl-rich silalkylene-containing residue |
| DE10059625A1 (de) | 2000-09-18 | 2002-05-16 | Peter Plichta | Verfahren zur Herstellung von Höheren Silanen im Hinblick auf ihre Verwendung als Treibstoffe |
| US6858196B2 (en) | 2001-07-19 | 2005-02-22 | Asm America, Inc. | Method and apparatus for chemical synthesis |
| KR20070013329A (ko) * | 2004-05-14 | 2007-01-30 | 다우 코닝 코포레이션 | 분지된 폴리실란의 제조방법 |
| WO2006118718A1 (en) * | 2005-04-28 | 2006-11-09 | Dow Corning Corporation | Method of making branched polysilane copolymers |
| DE102005024041A1 (de) | 2005-05-25 | 2006-11-30 | City Solar Ag | Verfahren zur Herstellung von Silicium aus Halogensilanen |
| JP5888831B2 (ja) | 2005-10-05 | 2016-03-22 | シン フィルム エレクトロニクス エーエスエー | 架橋済みポリマー及びその製造方法 |
| DE102006034061A1 (de) * | 2006-07-20 | 2008-01-24 | REV Renewable Energy Ventures, Inc., Aloha | Polysilanverarbeitung und Verwendung |
| DE102006043929B4 (de) | 2006-09-14 | 2016-10-06 | Spawnt Private S.À.R.L. | Verfahren zur Herstellung von festen Polysilanmischungen |
| KR101506136B1 (ko) | 2006-10-24 | 2015-03-26 | 다우 코닝 코포레이션 | 네오펜타실란을 포함하는 조성물 및 이의 제조 방법 |
| DE102007013219A1 (de) | 2007-03-15 | 2008-09-18 | Rev Renewable Energy Ventures, Inc. | Plasmagestützte Synthese |
| DE102008025261B4 (de) | 2008-05-27 | 2010-03-18 | Rev Renewable Energy Ventures, Inc. | Halogeniertes Polysilan und plasmachemisches Verfahren zu dessen Herstellung |
-
2008
- 2008-05-27 DE DE102008025260A patent/DE102008025260B4/de not_active Expired - Fee Related
-
2009
- 2009-05-27 UA UAA201014142A patent/UA102545C2/ru unknown
- 2009-05-27 EP EP09753540.5A patent/EP2296804B1/de not_active Revoked
- 2009-05-27 AU AU2009253523A patent/AU2009253523B2/en not_active Ceased
- 2009-05-27 MX MX2010012992A patent/MX2010012992A/es active IP Right Grant
- 2009-05-27 CN CN200980119335.2A patent/CN102099104B/zh not_active Expired - Fee Related
- 2009-05-27 JP JP2011510824A patent/JP5639047B2/ja not_active Expired - Fee Related
- 2009-05-27 US US12/995,174 patent/US9617391B2/en not_active Expired - Fee Related
- 2009-05-27 BR BRPI0912045-9A patent/BRPI0912045B1/pt not_active IP Right Cessation
- 2009-05-27 RU RU2010152678/05A patent/RU2502554C2/ru not_active IP Right Cessation
- 2009-05-27 WO PCT/DE2009/000727 patent/WO2009143824A1/de not_active Ceased
- 2009-05-27 CA CA2725366A patent/CA2725366C/en not_active Expired - Fee Related
- 2009-05-27 KR KR1020107029330A patent/KR101659098B1/ko not_active Expired - Fee Related
-
2010
- 2010-11-25 IL IL209578A patent/IL209578A0/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP2296804A1 (de) | 2011-03-23 |
| BRPI0912045B1 (pt) | 2017-10-17 |
| US20110284796A1 (en) | 2011-11-24 |
| DE102008025260B4 (de) | 2010-03-18 |
| RU2502554C2 (ru) | 2013-12-27 |
| KR101659098B1 (ko) | 2016-09-22 |
| CA2725366A1 (en) | 2009-12-03 |
| IL209578A0 (en) | 2011-01-31 |
| CA2725366C (en) | 2017-07-18 |
| BRPI0912045A2 (pt) | 2016-01-05 |
| JP5639047B2 (ja) | 2014-12-10 |
| WO2009143824A1 (de) | 2009-12-03 |
| KR20110040784A (ko) | 2011-04-20 |
| EP2296804B1 (de) | 2014-03-12 |
| MX2010012992A (es) | 2011-05-30 |
| DE102008025260A1 (de) | 2009-12-17 |
| CN102099104B (zh) | 2014-08-27 |
| US9617391B2 (en) | 2017-04-11 |
| AU2009253523A1 (en) | 2009-12-03 |
| CN102099104A (zh) | 2011-06-15 |
| AU2009253523B2 (en) | 2015-09-03 |
| JP2011523926A (ja) | 2011-08-25 |
| RU2010152678A (ru) | 2012-07-10 |
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