WO2004105200A1 - Emetteur laser - Google Patents

Emetteur laser Download PDF

Info

Publication number
WO2004105200A1
WO2004105200A1 PCT/JP2003/006289 JP0306289W WO2004105200A1 WO 2004105200 A1 WO2004105200 A1 WO 2004105200A1 JP 0306289 W JP0306289 W JP 0306289W WO 2004105200 A1 WO2004105200 A1 WO 2004105200A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser
vacuum vessel
gantry
laser beam
legs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2003/006289
Other languages
English (en)
Japanese (ja)
Inventor
Miki Kurosawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to PCT/JP2003/006289 priority Critical patent/WO2004105200A1/fr
Priority to TW092114659A priority patent/TWI221687B/zh
Publication of WO2004105200A1 publication Critical patent/WO2004105200A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0071—Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
    • H01S3/027—Constructional details of solid state lasers, e.g. housings or mountings comprising a special atmosphere inside the housing

Definitions

  • the present invention relates to a laser oscillator, and more particularly, to improvement of optical axis stability (pointing stability) of laser light emitted from the laser oscillator.
  • a laser oscillator that normally generates laser light and a laser processing machine that transmits laser light to a workpiece to perform processing are used.
  • the laser light inlet provided on the laser beam machine side must be spatially aligned with the optical axis of the laser beam emitted from the laser oscillator. There is a need. For this reason, the position of the optical axis of the laser light emitted from the laser oscillator is designed according to the laser processing machine.
  • a plurality of folding mirrors are provided adjacent to the outside of the laser oscillator.
  • a mirror made of is provided and the height of the optical axis is adjusted.
  • a folding mirror provided for the purpose of adjusting the position and height of the optical axis adjacent to the outside of the laser oscillator is included in the inside of the laser oscillator.
  • the folding mirror is provided inside the laser oscillator, it is not necessary to separately provide a structure for holding the mirror outside the laser oscillator, and the optical path on the laser processing machine side can be simplified.
  • the installation space of the equipment can be reduced, the number of parts can be reduced, the cost can be reduced, and the time required for installing the equipment can be reduced. There is an advantage that it can be reduced.
  • a laser processing machine for processing a metal material as disclosed in Japanese Patent Publication No.
  • laser light is converted into circularly polarized light or reflected light from the material is reflected on a laser oscillator side.
  • a polarizing element and a polarizing mirror are required to prevent the return to the above.
  • Such an optical component such as a polarizing element or a polarizing mirror needs to be arranged at a predetermined angle with respect to the polarization plane of the laser beam in order to exert its function. Since the plane of polarization of this laser beam is determined by the optical resonator that is the light source of the laser beam built into the laser oscillator, these optical components must be adjacent to the optical resonator in order to accurately arrange the plane of polarization with respect to the plane of polarization. It is desirable to arrange. That is, it is more convenient to include the above-mentioned optical components inside the laser oscillator, similarly to the folding mirror.
  • pointing stability which indicates that the direction of emitted laser light is always constant.
  • the pointing stability is achieved when the attitude of the optical resonator as the light source is always stable.
  • a design has been made in consideration of the stable maintenance of the optical resonator as disclosed in Japanese Patent Application Laid-Open No. 11-238585. .
  • a laser gas which is a laser medium filled in a vacuum vessel
  • a laser gas which is a laser medium filled in a vacuum vessel
  • the temperature of the laser gas in the vacuum vessel rises due to the energy of the discharge. Due to this temperature rise, the temperature of the vacuum vessel itself that confines the gas also rises, so that the vacuum vessel is slightly deformed by the linear expansion of the constituent materials.
  • the optical resonator is held in a vacuum vessel that causes such thermal deformation.
  • a holding structure is disclosed in Japanese Patent Application Laid-Open No. 2001-32640. Optical resonance in which thermal deformation of the vacuum vessel is held It secures the pointing stability by not transmitting it to the container.
  • FIG. 10 illustrates a structure in which an optical resonator and a folding mirror are provided inside a gas laser oscillator.
  • an optical resonator 1 and a folding mirror 8 are installed on a base 3 serving as a base of a laser oscillator 20.
  • the optical resonator 1 is held in a strongly made vacuum vessel 2 for sealing gas.
  • the vacuum vessel 2 is fixed to the gantry 3 via each leg 4. That is, the optical resonator 1 is fixed to the gantry 3 via the legs 4 provided on the vacuum vessel 2.
  • Two folding mirrors 8 are used to change the height of the laser beam 1.0 extracted from the laser oscillator 20.One is installed on the gantry 3 and the other is held on the optical resonator 1. Shall be done.
  • the gantry 3 of the laser oscillator 20 is mounted on an immovable installation surface 21 such as the ground.
  • the above-described thermal deformation of the vacuum vessel 2 causes the gantry 3 to move through the legs 4.
  • the base 3 itself is deformed.
  • the folding mirror 8 installed on the gantry 3 tilts, so that the pointing stability of the laser oscillator 20 as a whole is reduced. There is a problem of damage.
  • the heat generated during laser oscillation causes the entire vacuum vessel 2 to have a temperature of about 10 ° C. Rises.
  • the vacuum vessel 2 is made of a structure in which steel sheets are welded to withstand vacuum pressure, and is made firmly.
  • a linear expansion coefficient specific to steel is generated.
  • the linear expansion coefficient increases the distance between the legs 4. For example, assuming that the interval between the legs 4 is 100 mm, the interval between the legs 4 is slightly increased by 0.1 mm due to the linear expansion coefficient inherent in steel due to a temperature rise of 10 ° C.
  • leg 4 is 6 O mm square, 3.2 mm thick, and 10 O mm long.
  • a 0.12 nim elongation between each leg 4 produces a bending moment M of 1 1620 kg-cm at the joint.
  • the gantry 3 is made of a steel pipe having a width of 125 mm and a wall thickness of 6 m, the gantry 3 ′ is bent due to the bending moment M, and the position of the leg portion 4 with respect to the installation surface 21.
  • a gradient of ⁇ 2 15 ⁇ ad occurs. Since the bending of the gantry 3 occurs symmetrically with respect to the center of the interval between the legs 4, even if the gantry 3 is bent, the posture of the vacuum vessel 2 itself does not tilt with respect to the installation surface 21. Due to the configuration of the laser oscillator 20, it is installed near the end of the gantry 3 due to the structure of the laser oscillator 20. The posture is tilted by the angle ⁇ .
  • the present invention has been made in view of the above-described problems, and provides a laser oscillator in which an optical resonator that generates laser light is supported on a mount together with a vacuum vessel.
  • the optical axis stability of laser light (pointing stability)
  • An object of the present invention is to provide a laser oscillator having excellent performance.
  • a folding mirror is provided to change the position and height of the optical axis of the laser beam emitted from the optical resonator
  • a laser oscillator with excellent optical axis stability is provided. The purpose is to provide. Disclosure of the invention
  • an optical resonator that generates a laser beam
  • a vacuum vessel that holds the optical resonator
  • a gantry that supports the vacuum vessel
  • a laser beam of the optical resonator It is characterized in that it comprises a support means for connecting the vacuum vessel to the gantry with a degree of freedom to move the laser beam only in a parallel direction when the vacuum vessel is thermally deformed due to the generation.
  • the laser light generated by the optical resonator is moved only in the parallel direction by the support means, so that the laser light emitted from the optical resonator is folded.
  • the angle of the laser beam reaching the turning mirror becomes constant.
  • the thermal deformation of the vacuum vessel is absorbed by the supporting means and does not affect the gantry, even when the fold mirror is provided on the gantry, it is possible to maintain the optical axis stability of the laser beam by suppressing the inclination of the attitude of the fold mirror. it can.
  • FIG. 1 is a perspective view showing a laser oscillator according to the present invention
  • FIGS. 2 (a) to (c) show Embodiment 1 having a flexible structure having a degree of freedom only in a desired direction with respect to a leg
  • 3 (a) and 3 (b) are side views showing Embodiment 2 in which the legs have a degree of freedom only in a desired direction
  • FIG. 4 is another side view of the legs.
  • FIG. 5 (a) is a plan view showing the operation of the legs and the deviation of the optical axis in the first and second embodiments
  • FIG. ) Is a plan view showing the operation of the leg in the third embodiment.
  • FIG. 6 is a side view showing the arrangement of the folding mirror in the fourth embodiment, and FIGS.
  • FIG. 7 (a) and 7 (b) ) Is a side view showing the operation in Embodiment 4,
  • FIG. 8 is a perspective view showing Embodiment 5 showing the arrangement of the folding mirror, and
  • FIG. 9 is a folding mirror.
  • FIG. 10 is a side view showing a conventional laser oscillator
  • FIG. 11 is a side view showing a state where a gantry is deformed in the conventional laser oscillator. .
  • FIG. 1 shows a laser oscillator according to the present invention. As shown in Figure 1
  • the laser oscillator 20 mainly includes an optical resonator 1, a vacuum vessel 2, a gantry 3, legs 4 as supporting means, and folding mirrors 8 and 9.
  • the optical resonators 1 are paired so as to hold the rear mirror 5 and the front mirror 6, respectively.
  • the optical resonator 1 is connected by three support rods 7 made of a low thermal expansion material.
  • the mirrors 5 and 6 are held at regular intervals.
  • the optical resonator 1 is configured to obtain laser light 10 by reciprocating light between the mirrors 5 and 6 in the front-rear direction.
  • the vacuum vessel 2 confines the laser gas, which is a laser medium, inside, and excites the laser gas with discharge energy to promote stimulated emission of light.
  • the vacuum vessel 2 is made of a steel material such as a thick steel plate or a stainless steel plate so as to withstand a vacuum pressure.
  • the vacuum container 2 is a portion indicated by a broken line in FIG. 1 and is formed in a rectangular shape.
  • the optical resonator 1 is held in a vacuum vessel 2 via a support rod 7. Note that a discharge electrode, a heat exchanger, a blower, and the like are built in the vacuum vessel 2, but are omitted here for simplicity.
  • the laser oscillator 20 requires a power supply for generating discharge energy. This power source is usually placed on the vacuum vessel 2 or separately in order to prevent the heat generation from adversely affecting the pointing performance of the laser oscillator 20.
  • the gantry 3 forms the base of the laser oscillator 20 and has a structure in which the steel pipes 3a and 3b are welded.
  • the gantry 3 supports the vacuum vessel 2 horizontally and has a function of holding the folding mirror 9.
  • the gantry 3 has a pair of steel pipes 3a so as to be substantially parallel in the front-rear direction, and connects the steel pipes 3a by a pair of steel pipes 3b that are substantially parallel in the horizontal direction.
  • a plurality of legs 4 as support means are provided on the lower surface of the vacuum vessel 2 and are interposed between the vacuum vessel 2 and the gantry 3 to connect the vacuum vessel 2 to the gantry 3. Thereby, the vacuum container 2 is supported by the gantry.
  • the folding mirror 8 is provided on the optical resonator 1 that holds the front mirror 6.
  • the folding mirror 9 is provided on the steel pipe 3 b on the front side of the gantry 3.
  • the folding mirrors 8 and 9 reflect the laser beam 10 emitted from the front mirror 6 on the folding mirror 8 and the folding mirror 9. As a result, the laser beam 10 is adjusted to a laser beam machine whose position of the optical axis is not shown, and is taken out of the laser oscillator 20.
  • the inside of the vacuum vessel 2 is filled with a laser gas of about 1 Z 10 atm.
  • a part of the discharge energy injected to excite the laser gas is converted into laser light energy and extracted from the front mirror 6, but most is consumed for heating the laser gas. .
  • a part of the laser gas whose temperature has risen due to this heating is cooled by the heat exchanger, but the inside of the vacuum vessel 2 during laser oscillation equilibrates at about 10 ° C higher than when laser oscillation is not performed. State.
  • the legs 4 are provided at four locations near the corners of the vacuum vessel 2 between the vacuum vessel 2 and the gantry 3, and are arranged so as to form a quadrilateral shape.
  • the legs 4 a, 4 b, 4 c, 4 1 one leg 4 a is firmly fixedly connected to the gantry 3.
  • the legs 4b, 4c, and 4d as shown by the arrow in FIG. In the rear direction, the legs 4c are connected to the gantry 3 by adopting a flexible structure that has a degree of freedom in the horizontal direction and the legs 4d in the lateral direction.
  • the front-back direction is a direction along the laser light 10 generated by the optical resonator 1
  • the horizontal direction is a direction orthogonal to the laser light 10 on a horizontal plane
  • the horizontal direction is the front-rear direction.
  • the horizontal direction is the front-rear direction.
  • the leg 4b located at a position along the laser beam 10 with respect to the leg 4a has a degree of freedom in the direction along the laser beam 10.
  • the leg 4c which is diagonally oblique to the laser beam 10 with respect to the leg 4a, has a degree of freedom in a direction along the laser beam 10 and in a direction orthogonal to the laser beam 10.
  • the leg 4d which is perpendicular to the laser beam 10 with respect to the leg 4a, has a degree of freedom in the direction perpendicular to the laser beam 10 on the horizontal plane.
  • the legs 4a, 4b, 4c, 4d due to the thermal deformation of the vacuum vessel 2
  • the change in the spacing is canceled out by the flexible legs 4b and 4c4d, and the bending moment acting on the gantry 3 can be avoided.
  • One leg 4a was fixed, and the other three legs 4b, 4c, and 4d had their degrees of freedom limited. This is because the movement of the resonator 1 in the horizontal plane is restricted only in the parallel direction. In other words, regarding the pointing stability, the positional deviation due to the angle component increases in proportion to the propagation distance, and must be suppressed as much as possible. Originally, the amount of deformation of the vacuum vessel 2 is very small, so that even the angle component should not be generated.
  • the direction of the side connecting the legs 4b located in the front-rear direction along the laser beam with the fixed legs 4a as the reference, or orthogonal to the laser beam with the fixed legs 4a as the reference Foot 4d What is necessary is just to regulate so that the direction of the connecting side does not move with respect to the gantry 3.
  • the degree of freedom for each of the legs 4b, 4c, 4d is limited only in the direction of the arrow shown in FIG. It should be noted that by providing such a restriction on the degree of freedom, the vibration of the vacuum vessel 2 with respect to the gantry 3 can also be suppressed, and the optical axis stability of the laser beam with respect to the vibration is not impaired.
  • the fixed leg may be any one of 4a, 4b, 4c and 4d.
  • FIGS. 2 (a) to 2 (c) show a first embodiment in which the legs 4b, 4c and 4d have a flexible structure having a degree of freedom only in a desired direction.
  • the legs 4c are sufficiently small in rigidity as compared with the steel pipes constituting the gantry 3, and have such strength that they do not buckle under the load of the vacuum vessel 2. 3 is formed.
  • the legs 4b and 4d extend in the direction orthogonal to the above-described desired degree of freedom with respect to the thin steel pipe 13 and the gantry 3 It has a structure with ribs 14 connected to it. The lower end of the thin steel pipe 13 is welded to the gantry 3.
  • the ribs 14 have a substantially triangular plate shape, and are welded at sides of the thin steel pipes 13 and the pedestal 3. As a result, the strength of the ribs 14 in the direction parallel to the plate surface is increased, and the strength is not given in the direction perpendicular thereto, so that the freedom of deformation of the legs 4b and 4d is required. It regulates only in the direction.
  • the bending rigidity of the thin steel tube 13 is smaller than that of the base 3 in order to minimize the deformation of the gantry 3.
  • the second moment of area which is a value corresponding to the bending stiffness determined by the cross-sectional shape, be as small as about 100 in the thin steel pipe 13 with respect to the gantry 3.
  • the gantry 3 is a JIS standard product.
  • the thin steel pipe 13 used for the legs 4 b, 4 c, and 4 d is a JIS standard product
  • the secondary moment of area of the thin steel tube 13 will be 1Z107 of the gantry 3. That is, the bending generated in the gantry 3 can be reduced as compared with the case where a steel pipe having a poor flexibility of 60 mm square and a wall thickness of 3.2 mm like the leg 4 described in the background art is used.
  • the inclination of the reflecting mirror 9 disposed on the pedestal 3 can be reduced to 36 ⁇ ⁇ ad 1/6 of 215 ⁇ ad.
  • the laser beam displacement of 4.3 mm can be reduced to 0.7 mm, and the quality of the laser It is possible to obtain an acceptable range of pointing stability.
  • the pointing stability of the oscillator can be improved relatively inexpensively without providing a special mechanism. Can be.
  • FIGS. 3 (a) and 3 (b) show a second embodiment in which the legs 4b, 4c and 4d have a degree of freedom only in desired directions.
  • a linear slide mechanism 12 having a degree of freedom in one direction is used.
  • the direction of the linear motion slide mechanism 12 matches the direction in which the degree of freedom is desired to be given.
  • two linear slide mechanisms 12 are overlapped on the leg 4c so that the degrees of freedom are orthogonal.
  • the legs 4 b, 4 c, and 4 d can be given a degree of freedom in desired directions as in the first embodiment, and deformation of the gantry 3 can be avoided.
  • the present invention can be applied to the case where the number of the legs 4 is three.
  • one leg 4 e is disposed on the front side of the vacuum vessel 2 immediately below the optical axis of the laser beam 10 generated by the optical resonator 1, and is located between the vacuum vessel 2 and the mount 3.
  • the connection is firmly fixed without giving any degree of freedom.
  • the remaining legs 4 f and 4 g are arranged so as to form an isosceles triangle having a center line in the direction along the laser beam 10 and having the leg 4 e as the apex, and each of The vacuum vessel 2 and the gantry 3 are connected with a degree of freedom in the horizontal direction, which is the horizontal direction. Even with such a configuration, it is possible to avoid transmitting the deformation of the vacuum vessel 2 to the gantry 3.
  • FIG. 6 shows Embodiment 4 showing the arrangement of the folded mirror.
  • the fourth embodiment is another structure for securing pointing stability in the laser oscillator 20.
  • the flexible structure of the leg 4 described in the first, second, and third embodiments is sufficiently functional. This is an embodiment in which the deformation of the gantry 3 is unavoidable and the pointing stability is ensured even if the positions of the folding mirrors 8 and 9 change.
  • the folding mirror 8 placed immediately after the front mirror 6 is integrated with the folding mirror 9 by the structure 15.
  • Each of the folding mirrors 8 and 9 is supported by the gantry 3 via the structure 15 to form a folding mirror unit.
  • the structure 15 has a sufficiently strong structure, and has a function that the relative angle between the two folding mirrors 8 and 9 fixed thereto is always constant.
  • the folding mirror 8 is deformed by the deformation of the gantry 3 due to the thermal deformation of the vacuum vessel 2. Even if the posture of 9 changes, both mirrors 8 and 9 will be tilted by exactly the same angle.
  • the incident angle with respect to the folding mirror 8 is 0 °
  • the reflection angle with respect to the folding mirror 9 is ⁇ 2
  • the laser beam incident on the folding mirror 8 and the laser reflected from the folding mirror 9 The angle between the light and the light is ⁇ .
  • ⁇ 2 ( ⁇ 2 ⁇ ⁇ ).
  • FIG. 7 (b) when the folding-back mirror 8, 9 fixed to the structure 15 is inclined an angle [delta], the angle of incidence on the folding mirror 8 9 t one [delta], about folding mirror 9
  • the reflection angle is ⁇ 2 — ⁇ .
  • the two folding mirrors 8, 9 forming a folding mirror unit by the structure 15 are integrated so that the relative angle between them is always constant, and the folding mirror 3 is deformed by the deformation of the gantry 3 holding them. Even if the postures 8 and 9 are inclined, it is possible to prevent the pointing stability from being adversely affected. ⁇
  • the folding mirrors 8 and 9 are provided inside the laser oscillator 20 in accordance with the laser processing machine.
  • the pair of folding mirror units are fixed on the base 3 serving as the base of the laser oscillator 20 so that the relative angles of the mirrors 8 and 9 do not move.
  • the base 3 is deformed and the posture of the two folding mirrors 8 and 9 is inclined, the inclination is offset between the two folding mirrors 8 and 9, and the laser emitted from the laser oscillator 20 is removed. Ponte of Light 10 Stability can be ensured.
  • the laser beam 10 emitted from the front mirror 6 is folded so as to be folded at an angle of 45 ° in the horizontal direction with respect to the vertical direction.
  • the folding mirrors 8 and 9 are placed on the rooster.
  • a sturdy structure 15 having a through hole for passing the laser beam 10 through the block material is used.
  • the folding mirrors 8 and 9 are fixed to both ends of the structure 15, the mirrors can be fixed as a pair so that their relative angles are constant. If this structure 15 is fixed to the gantry 3, the inclination between the two folding mirrors 8 and 9 can be canceled even if the folding mirrors 8 and 9 are inclined not only vertically but also horizontally.
  • the pumping stability of the laser beam 10 emitted from the laser oscillator 20 can be ensured.
  • a shutter for blocking the laser beam 10 between the turning mirrors 8 and 9 of the structure 15 is provided.
  • a mechanism 18 can be provided. With such a configuration, it is not necessary to secure a space for newly providing the shutter mechanism 18, so that the size of the laser oscillator 10 can be reduced.
  • the laser oscillator of the present invention when a frame as a base is provided inside the laser oscillator, and the optical resonator is installed on the frame via a vacuum vessel, thermal deformation occurs in the vacuum vessel. Even if it occurs, the optical axis stability (pointing stability) of the laser light generated by the optical resonator can be improved. In particular, to improve the optical axis stability of the laser beam usefully in a laser oscillator equipped with a folding mirror to change the position and height of the optical axis of the laser beam emitted from the optical resonator with respect to the mount be able to.

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

L'invention concerne un émetteur laser dans lequel un résonateur optique (1) générant un faisceau laser (10) est renfermé dans un récipient à vide (2) reposant sur un support en forme de cadre (3), sur des parties pattes (4), ces dernières reliant le récipient à vide (2) au cadre de support (3) avec un degré de liberté qui permet de déplacer le faisceau laser (10) uniquement dans une direction parallèle. Même si le récipient à vide (2) subit des déformations thermiques sous l'influence du faisceau laser (10) provenant du résonateur optique (1), on parvient à éviter toute déformation du cadre (3) grâce au système de support du récipient à vide (2) qui est fait en sorte que le faisceau laser (10) ne puisse être déplacé qu'en direction parallèle, avec le degré de liberté prédéterminé par rapport aux parties pattes (4).
PCT/JP2003/006289 2003-05-20 2003-05-20 Emetteur laser Ceased WO2004105200A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2003/006289 WO2004105200A1 (fr) 2003-05-20 2003-05-20 Emetteur laser
TW092114659A TWI221687B (en) 2003-05-20 2003-05-30 Laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2003/006289 WO2004105200A1 (fr) 2003-05-20 2003-05-20 Emetteur laser

Publications (1)

Publication Number Publication Date
WO2004105200A1 true WO2004105200A1 (fr) 2004-12-02

Family

ID=33463133

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2003/006289 Ceased WO2004105200A1 (fr) 2003-05-20 2003-05-20 Emetteur laser

Country Status (2)

Country Link
TW (1) TWI221687B (fr)
WO (1) WO2004105200A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007329260A (ja) * 2006-06-07 2007-12-20 Mitsubishi Electric Corp レーザ発振装置
JP2012071351A (ja) * 2011-11-04 2012-04-12 Mitsubishi Electric Corp レーザ発振装置
CN113904204A (zh) * 2020-07-06 2022-01-07 住友重机械工业株式会社 激光装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651885A (en) * 1979-10-05 1981-05-09 Hitachi Ltd Laser device
JPS5952887A (ja) * 1982-09-20 1984-03-27 Hitachi Ltd レ−ザ発生装置
JPS6350083A (ja) * 1986-08-20 1988-03-02 Matsushita Electric Ind Co Ltd ガスレ−ザ装置
JPH05235454A (ja) * 1992-02-19 1993-09-10 Fanuc Ltd レーザ発振器
JPH07111352A (ja) * 1993-10-12 1995-04-25 Toshiba Corp レーザー発振器
JP2002316291A (ja) * 2001-04-18 2002-10-29 Amada Co Ltd レーザ加工機

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651885A (en) * 1979-10-05 1981-05-09 Hitachi Ltd Laser device
JPS5952887A (ja) * 1982-09-20 1984-03-27 Hitachi Ltd レ−ザ発生装置
JPS6350083A (ja) * 1986-08-20 1988-03-02 Matsushita Electric Ind Co Ltd ガスレ−ザ装置
JPH05235454A (ja) * 1992-02-19 1993-09-10 Fanuc Ltd レーザ発振器
JPH07111352A (ja) * 1993-10-12 1995-04-25 Toshiba Corp レーザー発振器
JP2002316291A (ja) * 2001-04-18 2002-10-29 Amada Co Ltd レーザ加工機

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007329260A (ja) * 2006-06-07 2007-12-20 Mitsubishi Electric Corp レーザ発振装置
JP2012071351A (ja) * 2011-11-04 2012-04-12 Mitsubishi Electric Corp レーザ発振装置
CN113904204A (zh) * 2020-07-06 2022-01-07 住友重机械工业株式会社 激光装置
JP2022014176A (ja) * 2020-07-06 2022-01-19 住友重機械工業株式会社 レーザ装置
CN113904204B (zh) * 2020-07-06 2024-05-28 住友重机械工业株式会社 激光装置
JP7499627B2 (ja) 2020-07-06 2024-06-14 住友重機械工業株式会社 レーザ装置

Also Published As

Publication number Publication date
TWI221687B (en) 2004-10-01
TW200427160A (en) 2004-12-01

Similar Documents

Publication Publication Date Title
US8755102B2 (en) Optical scanning device
JPH07211972A (ja) レーザ発振器
CN107534262B (zh) 激光器装置及极端远紫外光生成装置
WO2004105200A1 (fr) Emetteur laser
US9263845B2 (en) Air-cooled gas lasers with heat transfer resonator optics and associated systems and methods
JPH07307506A (ja) レーザ発振器
JP4001136B2 (ja) 音波浮揚装置
JPH0595142A (ja) レーザ発振装置
JP2010045336A (ja) ガスレーザ共振器
JPS6232634B2 (fr)
JP4958973B2 (ja) レーザ発振器
US6920170B2 (en) Orthogonally excited-type laser oscillator
JP4979277B2 (ja) レーザ発振装置
JP3835116B2 (ja) レーザ発振器
JPS5952887A (ja) レ−ザ発生装置
JP2681319B2 (ja) レーザ発振器
TW202604090A (zh) 光學裝置及雷射裝置
JP3731117B2 (ja) レーザ発振器
JP3594938B2 (ja) ガスレーザ発振器
JP5400123B2 (ja) レーザ発振装置
JP2003332655A (ja) ガスレーザ発振装置における光共振器、及びガスレーザ発振装置
JPH0587034B2 (fr)
JP2022013224A (ja) レーザ発振器
JPH0391275A (ja) レーザ発振器の筺体
JPH02109383A (ja) ガスレーザ発振器

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): CN JP KR US

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP