WO2007018191A1 - Capteur horizontal et marqueur laser - Google Patents

Capteur horizontal et marqueur laser Download PDF

Info

Publication number
WO2007018191A1
WO2007018191A1 PCT/JP2006/315619 JP2006315619W WO2007018191A1 WO 2007018191 A1 WO2007018191 A1 WO 2007018191A1 JP 2006315619 W JP2006315619 W JP 2006315619W WO 2007018191 A1 WO2007018191 A1 WO 2007018191A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
level
horizontal sensor
light receiving
horizontal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2006/315619
Other languages
English (en)
Japanese (ja)
Inventor
Koji Sakamoto
Yukihiko Okamura
Kuninori Nakamura
Koichi Teraura
Koji Yamato
Takashi Yoneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005230102A external-priority patent/JP4270181B2/ja
Priority claimed from JP2005230101A external-priority patent/JP4270180B2/ja
Priority claimed from JP2006143797A external-priority patent/JP5362175B2/ja
Priority claimed from JP2006144504A external-priority patent/JP4747946B2/ja
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Publication of WO2007018191A1 publication Critical patent/WO2007018191A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02—Details
    • G01C9/06—Electric or photoelectric indication or reading means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
    • G01C15/02—Means for marking measuring points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G01C9/18—Measuring inclination, e.g. by clinometers, by levels by using liquids
    • G01C9/24—Measuring inclination, e.g. by clinometers, by levels by using liquids in closed containers partially filled with liquid so as to leave a gas bubble

Definitions

  • the present invention relates to a horizontal sensor used for detecting a level of a facility, an apparatus, an instrument, or the like and detecting a tilt, and a laser marking device using the level sensor.
  • a horizontal sensor detects the level of a bubble in a level and detects the level and the degree of inclination.
  • This bubble position detection method is an optical transmission type that irradiates light with a force to the level and detects the position of the projected light of the bubble with the light receiving element.
  • An electrode is provided in the level, and the distance between the electrodes changes depending on the bubble position.
  • a capacitance type that detects the resistance between the electrodes with the same configuration as the capacitance type.
  • the optical transmission type is widely used because it is superior in terms of accuracy in detecting the level and inclination, and the workability of the level! /
  • Such a conventional optical transmission type horizontal sensor is composed of main components such as a light source composed of a light emitting diode, a level, and four light receiving elements as disclosed in Japanese Patent No. 3370619.
  • a horizontal sensor is known in which a light source and a light receiving element are opposed to each other with a spirit level interposed therebetween, and the central axes of the light source, the spirit level, and the light receiving element are arranged in a substantially straight line.
  • the bubble diameter when the bubble diameter is constant, the diameter of the bubble projection light increases as the distance between the light source and the level decreases, so the light receiving element needs to be increased accordingly.
  • the diameter of the bubble and the diameter of the projection light of the bubble are made substantially equal.
  • Light receiving elements that receive light have been used that have the same size as the bubble diameter. That is, in order to make the size of the light receiving surface of each light receiving element approximately the same as the size of the bubbles, parallel light rays as much as possible were required. For this reason, it is necessary to provide a certain distance or more between the light source and the spirit level to lengthen the light path, and it is difficult to downsize the horizontal sensor.
  • the light source irradiates the bubble 303a (or moved bubble 303b) in the level sensor 301 with the upper surface force of the horizontal sensor, and the light projected from the bubble 303a (this shadow is called a bubble shadow) constitutes the light receiving unit 302.
  • Light is received by the substantially square light receiving diodes 302a.
  • the four light receiving diodes 302a are arranged so that the light receiving surface is square as a whole, the vertical and horizontal dimensions are set to be approximately the same as the diameter of the bubble 303a, and detection of light received by the light receiving surface is performed.
  • the voltage corresponding to the quantity is output, and the inclination can be detected by comparing these voltages.
  • the level of the horizontal sensor is maintained and the center of the bubble shadow of the bubble 303a coincides with the center of the light receiving surface of the light receiving unit 302, the light reception levels of the four light receiving diodes 302a coincide.
  • the received light amount distribution P3 is a distribution when the bubble 303a does not move
  • the received light amount distribution P4 is a distribution when the bubble 303a moves to the bubble 303b.
  • the case where the size of the light receiving portion 302 is made smaller than the diameter of the bubble 303a will be described with reference to FIGS. 45 (a) and (b). I will explain. If the light receiving diode 302b is made smaller than the above example, the light receiving area of the four light receiving diodes 302b is smaller than the area of the bubble shadow of the bubble 303a. Therefore, the four light-receiving diodes 302b remain in the bubble shadow of the bubble 303b even if the bubble 303a moves minutely to the position of the bubble 303b.
  • the four light receiving diodes 302b remain in the shadow of the bubble 303a and the bubble 303b even when they are displaced, so the amount of received light does not change and the inclination cannot be detected. For this reason, in the conventional horizontal sensor, the light receiving element cannot be made smaller than the size of the bubbles, which makes it more difficult to reduce the size of the horizontal sensor.
  • a mechanism for horizontally controlling a horizontal control stage on which a laser irradiation unit is mounted is provided in a laser indexer that irradiates a reference line by a laser beam using a conventional force level sensor. It has been.
  • this horizontal control mechanism for example, JP-A-11 5165 As shown in Publication No. 2, there is a horizontal control mechanism that controls the laser irradiation unit horizontally by supporting the laser irradiation unit with one spindle and two drive shafts and moving the two drive shafts up and down. are known.
  • the laser irradiation section in order to provide the laser irradiation section for the ground ink, the laser irradiation section is arranged outside the space between the support shaft and the drive shaft.
  • the horizontal control mechanism becomes large.
  • the size of the ink discharger becomes larger and the structure becomes complicated, and as a result, the handling property, usability, manufacturing efficiency, and the like are lowered.
  • the present invention has been made to solve the above-described problems, and is a small-sized device that can detect even a small inclination by reducing the size of the light receiving section and shortening the distance between the light source and the level.
  • An object is to provide a high-performance optical transmission type horizontal sensor.
  • Another object of the present invention is to provide a compact laser marking device using this type of horizontal sensor.
  • the present invention comprises a level that encloses a liquid so that bubbles remain, a light source, and four or more light receiving elements that convert received light into an electrical signal,
  • the light level of the light source is directed toward the level
  • the shadow of the bubble is projected onto the light receiving element
  • the position of the projected light on the light receiving element is detected by the light receiving element, thereby achieving horizontal alignment.
  • the light intensity distribution of the projection light on the light receiving element has a minimum point near the central axis of the bubble, and is within the same range as the radius of the bubble. It has a characteristic that it increases monotonously as it moves away from the central axis of the bubble.
  • the light quantity distribution of the projection light on the light receiving element has a minimum point near the central axis of the bubble, and as the central axial force of the bubble is separated in the same range as the radius of the bubble. Because it has a monotonically increasing characteristic, it is possible to detect the change in the amount of light when the bubble moves even if the light receiving element is small, and it is possible to obtain a compact and highly accurate optical transmission type horizontal sensor. Monkey.
  • the present invention in the above-described improved invention, includes a surface light emitting unit having a light emitting area larger than the area of the projected light generated when the bubbles are projected by parallel light. What is necessary is just to irradiate the diffused light toward the said level. This makes it possible to obtain a characteristic in which the light intensity distribution of the amount of received light increases monotonically as the distance from the central axis of the bubble is approximately within the same range as the radius of the bubble, so that the light receiving element is made smaller than the diameter of the bubble, Can detect changes in microscopic movement of bubbles and improve measurement accuracy
  • the present invention is such that the light source and the light receiving element are disposed on the same side with respect to the level, and the light from the light source is incident and the light is guided to the surface light emitting unit.
  • a light guide is provided, and the light guide may have a reflecting surface that totally reflects light from the light source.
  • the present invention provides a light guide plate having an unevenness or a groove shape on a transparent member so that light incident from the light guide is reflected and bent so as to radiate substantially uniformly. What is necessary is just to arrange
  • the present invention is such that the optical axis of the exit surface that emits light from the light guide, the central axis of the spirit level, and the optical axis of the light receiving element are substantially in a straight line.
  • a sheet-like member having a diffusion effect may be disposed between the emission surface and the level.
  • minute irregularities for diffusing light may be formed on the surface of at least one level other than the surface on which the bubbles slide.
  • the present invention is the above-described improved invention, wherein the light guide has a convex cylindrical shape so that the light emitted from the light source is substantially parallel to the light incident surface of the light guide.
  • the axis of the cylindrical portion may be parallel to a normal line of a plane including the optical axis of the light source and the axis formed by reflecting the optical axis of the light source with respect to the reflection surface of the light guide. .
  • the reflection efficiency at the total reflection surface is improved, so that the transmission efficiency of the light guide is increased, and the light transmission loss in the light guide can be reduced.
  • the present invention is the above-described improved invention, wherein the reflection surface of the light guide is a plane including an optical axis of the light source and an axis formed by reflecting the optical axis of the light source with respect to the reflection surface.
  • the reflection surface of the light guide is a plane including an optical axis of the light source and an axis formed by reflecting the optical axis of the light source with respect to the reflection surface.
  • What is necessary is just to form so that a cross-sectional shape may form a paraboloid and the focal point of this paraboloid may be near the entrance of the said surface emitting part.
  • This increases the amount of light incident on the surface light emitting portion and improves the incident efficiency.
  • the intensity of the light emitted from the surface light emitting portion is improved, so that the resolution of the horizontal sensor is improved, the power applied to the light source can be reduced, and low current consumption can be realized.
  • the present invention is the above-described improved invention, wherein the light guide may have a plurality of grooves for diffusing light in the axial direction of the cylinder along the cylindrical surface of the cylindrical portion. .
  • the light guide may have a plurality of grooves for diffusing light in the axial direction of the cylinder along the cylindrical surface of the cylindrical portion. .
  • the present invention is the above-described improved invention, wherein the light guide is formed with a plurality of grooves having a triangular cross-sectional shape parallel to the cylindrical axis of the cylindrical portion on the reflecting surface of the surface light emitting portion.
  • the base angle of the light incident side of the groove is 20 to 40 °, and a triangle with an apex angle of 90 ° is formed between the exit surface of the surface emitting portion of the optical guide and the level.
  • the sheet-like member on which the prism is formed may be disposed so that the ridge line of the prism is parallel to the ridge line of the groove of the light guide. This improves the symmetry of the surface emission distribution of the light incident on the surface emitting unit force level, thereby suppressing the influence of temperature on the horizontal detection and increasing the horizontal detection accuracy. You can
  • the present invention provides the above-described improved invention, wherein a plane parallel to the surface light emitting portion is formed between the triangular grooves formed on the reflecting surface of the surface light emitting portion of the light guide. do it. As a result, since the same amount of light reaches the entrance side and the back side in the surface light emitting portion, the light emission uniformity of the surface light emitting portion is further improved.
  • the present invention is the above-described improved invention, wherein a light source and a light receiving element are opposed to the level, and an optical axis of the light source, a central axis of the level, and an optical axis of the light receiving element are
  • the light diffusing portion may be disposed so as to be substantially in a straight line, and between the light source and the level. For this reason, since the number of components disposed in the horizontal direction is reduced, the size in the horizontal direction can be reduced.
  • the present invention provides the above-described improved invention comprising four of the light receiving elements, and of the vertexes of each of the light receiving elements, the vertex closest to the center of the entire light receiving element is selected from the other vertices. What is necessary is just to arrange
  • the present invention provides the above-described improved invention, wherein the optical axis of the exit surface of the light guide, the central axis of the level, and the optical axis of the light receiving element are arranged in a substantially straight line.
  • a convex lens may be disposed between the light source and the level so that the light emitted from the light guide is refracted substantially in parallel. This means that the light from the light guide exit surface can be collected and incident on the level, and the distance between the light guide exit surface and the level can be shortened, thus reducing the thickness of the horizontal sensor. It becomes possible to do.
  • the surface of the level on the side on which the light from the light source enters is centered on the level of the level so that the light of the light source power is refracted substantially in parallel.
  • the shape may be substantially rotationally symmetric and convex toward the light source.
  • the spirit level itself has a light condensing function, so that it is not necessary to insert an optical component such as a convex lens between the light-emitting diode 1 and the spirit level. Low cost can be achieved through reduction.
  • the present invention detects a laser irradiation unit that emits a laser beam for inking, a horizontal control stage on which the laser irradiation unit can be controlled, and a tilt angle of the horizontal control stage.
  • a horizontal sensor, and the horizontal control stage is supported by one support shaft that supports the stage and two drive shafts that are driven to control the stage in a horizontal state.
  • the support shaft and the drive shaft include a straight line connecting the connection point of the support shaft to the horizontal control stage and the connection point of the one drive shaft, and the connection point of the support shaft and the connection point of the other drive shaft.
  • the connecting point of the support shaft with respect to the horizontal control stage is located near the center of the stage so as not to obstruct the optical path of the ink brush laser that irradiates directly under the equipment. Avoided periphery
  • the horizontal sensor as described above may be used as the horizontal sensor. As a result, since the support shaft of the horizontal control stage is disposed in the peripheral portion avoiding the vicinity of the center of the stage, the horizontal control mechanism is not increased in size, and good ink marking can be performed with a simple structure. it can.
  • the present invention is the above-described improved invention, wherein the laser irradiating portion is constituted by two prism forces having a columnar shape with a substantially right-angled cross section, and the inclined surface is reflected on an inclined surface of at least one prism.
  • a thin film is formed by vapor deposition so as to be branched into light and transmitted light, and a beam splitter is formed by bonding the slopes of these two prisms, and the beam splitter includes, among the light incident on the splitter, the beam splitter.
  • a thin film that divides the light into transmitted light and reflected light may be deposited on the plane of the splitter where light reflected by the thin film formed on the slope hits next. This allows incident light to be split in three directions with a single beam splitter, so that the size of the beam splitter and further the laser marking device can be reduced.
  • FIG. 1 is a configuration diagram of a horizontal sensor according to a first embodiment of the present invention.
  • FIG. 2 is an external view of the horizontal sensor.
  • FIG. 3 (a) is a diagram showing a light amount distribution by the light receiving surface of the horizontal sensor
  • FIG. 3 (b) is a graph of the light amount distribution.
  • FIG. 4 (a) is a diagram showing the positional relationship between the bubbles of the horizontal sensor and the light receiving element on a plane, and FIG. .
  • FIG. 5 (a) is a configuration diagram of a horizontal sensor according to a second embodiment of the present invention, and FIG. 5 (b) is an external view thereof.
  • FIG. 6 (a) is a configuration diagram of a horizontal sensor according to a third embodiment of the present invention
  • FIG. 6 (b) is an external view thereof.
  • FIG. 7 (a) is a configuration diagram of a horizontal sensor according to the fourth embodiment of the present invention
  • FIG. 7 (b) is an external view thereof.
  • FIG. 8 is a configuration diagram of a horizontal sensor according to a fifth embodiment of the present invention.
  • FIG. 9 (a) is a configuration diagram of a horizontal sensor according to a sixth embodiment of the present invention
  • FIG. 9 (b) is an external view thereof.
  • FIG. 10 (a) is a configuration diagram of a horizontal sensor according to the seventh embodiment of the present invention
  • FIG. 10 (b) is a diagram showing an arrangement relationship between four light receiving elements and a level.
  • FIG. 11 is a configuration diagram of a modified example of the horizontal sensor according to the seventh embodiment.
  • FIG. 12 (a) is a configuration diagram of a horizontal sensor according to an eighth embodiment of the present invention
  • FIG. 12 (b) is a diagram for explaining the reflection of light in the light guide
  • FIG. It is a figure for demonstrating reflection.
  • FIG. 13 is a configuration diagram of a horizontal sensor according to a ninth embodiment of the present invention.
  • FIG. 14 (a) is a configuration diagram of the light guide of the horizontal sensor according to the tenth embodiment of the present invention
  • FIG. 14 (b) is a front view of the light guide
  • FIG. 14 (c) is FIG. 14 (d) is an enlarged view of part B of FIG. 14 (b)
  • FIG. 14 (e) is a front view showing light diffusion of the light guide
  • FIG. 14 (f) is a partial view. It is a perspective view.
  • FIG. 15 (a) is a configuration diagram of a horizontal sensor according to an eleventh embodiment of the present invention
  • FIG. 15 (b) is an enlarged view of a portion C in FIG. 15 (a)
  • FIG. Fig. 15 (d) is an enlarged view of part D in Fig. 15 (c)
  • Fig. 15 (e) is an enlarged view of part E in Fig. 15 (d). It is.
  • FIG. 16 is a view showing before the surface emission distribution is improved in the light guide of the sensor, and FIG. 16 (b) is a view showing after the improvement.
  • FIG. 17 (a) is a diagram showing the effect of temperature on the light quantity detection of the light receiving element before improvement of the light guide
  • FIG. 17 (b) is a diagram showing the result after improvement.
  • FIG. 18 (a) is a configuration diagram of a horizontal sensor according to a twelfth embodiment of the present invention
  • FIG. 18 (b) is a diagram showing a surface emission distribution when the thickness of the surface emitting portion in the sensor is appropriate.
  • FIG. 18 (c) is a diagram showing a case where the thickness is large.
  • FIG. 19 (a) is a configuration diagram of a light guide of a horizontal sensor according to a thirteenth embodiment of the present invention
  • FIG. 19 (b) is an enlarged view of a portion F in FIG. 19 (a).
  • FIG. 20 (a) is a configuration diagram of a horizontal sensor according to a fourteenth embodiment of the present invention
  • FIG. 20 (b) is an external view thereof.
  • FIG. 21 (a) is a configuration diagram of a horizontal sensor according to a fifteenth embodiment of the present invention
  • FIG. 21 (b) is an external view thereof.
  • FIG. 22 is a front external view of the horizontal control mechanism of the laser marking device according to the embodiment of the present invention.
  • FIG. 23 is a rear external view of the horizontal control mechanism.
  • FIG. 24 is a perspective plan view showing the arrangement of the support shaft and the drive shaft of the horizontal control stage in the laser marking device.
  • FIG. 25 is an external view of a drive system in the X direction in the laser marking device.
  • FIG. 26 is an external view of a drive system in the Y direction in the laser marking device.
  • FIG. 27 is a schematic view of a horizontal control mechanism in the laser marking device.
  • FIG. 28 is an external view of a drive module in the laser marking device.
  • FIG. 29 is a front view of the horizontal control mechanism.
  • FIG. 30 is a side view of the horizontal control mechanism.
  • FIG. 31 (a) is a configuration diagram of a beam splitter according to an embodiment of the present invention
  • FIG. 31 (b) is a configuration diagram of a triangular prism constituting the beam splitter.
  • FIG. 32 is a transmission characteristic diagram of the surface 221 of the beam splitter.
  • FIG. 33 is a transmission characteristic diagram of surface 222 of the beam splitter.
  • FIG. 34 is a transmission characteristic diagram of surface 223 of the beam splitter.
  • FIG. 35 is a schematic diagram of the optical path of the beam splitter.
  • FIG. 36 is a schematic diagram of an optical path when the arrangement direction of the beam splitter is changed.
  • FIG. 37 is an external view of a laser marking device according to another embodiment of the present invention.
  • FIG. 38 is a schematic optical path diagram of a beam splitter of the laser marking device.
  • FIG. 39 is an angle adjustment diagram of the beam splitter of the laser marking device.
  • FIG. 40 is a schematic view of an optical path of a beam splitter according to still another embodiment of the present invention.
  • FIG. 41 is a diagram showing a state of use of a laser marking device using the beam splitter.
  • FIG. 42 shows a use state of a laser marking device according to still another embodiment of the present invention.
  • FIG. 43 is a plan view of the vertical reference optical system of the laser marking device
  • FIG. 43 (b) is a front view of the vertical reference optical system of the laser marking device.
  • FIG. 44 (a) is a diagram showing the positional relationship between bubbles and light receiving elements of a conventional horizontal sensor
  • FIG. 44 (b) is a diagram showing changes in the amount of received light due to the movement of the bubbles.
  • FIG. 45 (a) is a diagram showing the positional relationship between a bubble and a light receiving element in a state where the conventional light receiving element is made smaller
  • FIG. 45 (b) is a diagram showing a light receiving state before and after the movement of the bubble.
  • the horizontal sensor 10 includes a light emitting diode 1 as a light source, a level 2 having a cylindrical container 2a in which a substantially transparent liquid 2w is encapsulated so that bubbles 21 remain, and parallel light from the bubbles 21.
  • Light receiving area 3 consisting of four light receiving elements 31-34 and a light guide plate 4 that guides light incident from light emitting diode 1 to level 2 .
  • the light guide plate 4 is formed of a transparent member, and includes a light guide portion 4a (light guide) that guides light from the light source power to the surface light emitting portion 4b and a surface light emitting portion 4b that irradiates the level 2.
  • the light guide portion 4a includes a light incident surface 44 on which light from a light source force enters, and a reflection plate 41 that totally reflects incident light and guides it to the surface light emitting portion 4b.
  • the surface light emitting unit 4b emits light from the reflective surface 42 provided with a minute unevenness or groove-shaped uneven part 46 on the surface for making incident light from the light guide part 4a as surface light emission, and the surface light emitting part 4b. And an end face 45.
  • the uneven portion 46 is further processed to diffuse light.
  • the surface light-emitting portion 4b of the light guide plate 4 is surface-emitting on at least one surface of the transparent member forming the surface light-emitting portion 4b. It is only necessary to have a minute unevenness or groove shape for the purpose.
  • the light emitting diode 1 and the light receiving unit 3 are both mounted on one printed circuit board 5 and arranged on the same side with respect to the level 2.
  • the central axis thereof and the optical axis of the light receiving unit 3 are arranged on a substantially straight line, and are arranged between the light receiving unit 3 and the emission surface 43 of the surface light emitting unit 4b.
  • the cylindrical container 2a of the level 2 has an upper bottom portion having a hollow inside, and at least one of the inner surfaces having a curved surface shape that is substantially rotationally symmetric, and having an emission surface 23 facing the light receiving portion 3. 2b, a lower bottom portion 2c having a light incident surface 22 and an output surface 26 on both sides of the bottom thickness, and a side wall portion 2d.
  • the area of the exit surface 43 of the surface light emitting part 4b is set to be substantially the same as the area of the entrance surface 22 of the opposing level 2.
  • the light emitted from the light emitting diode 1 is incident on the light incident surface 44 of the light guide portion 4a.
  • This incident light is totally reflected by the reflecting surface 41 for guiding the light to the level 2 in the light path in the light guide portion 4a, and the traveling direction is changed to the right in the figure, and the reflecting surface 42 and the outgoing light are emitted.
  • the light enters the area of the surface light emitting portion 4b sandwiched between the surfaces 43. Since the incident light has minute unevenness or groove-shaped unevenness 46 formed on the surface of the reflection surface 42, the light hitting the reflection surface 42 is reflected in the direction determined by the reflection surface 42. The light exits from the exit surface 43 and travels toward the level 2.
  • the reflecting surface 42 diffuses incident light from the light emitting diode 1 and irradiates diffused light having a substantially uniform light amount from the entire emitting surface 43 and having a wide angle light amount distribution.
  • the emission surface 43 of the surface light emitting unit 4b becomes an irradiation surface that irradiates diffused light from the entire surface.
  • the exit surface 43 of the surface light emitting unit 4b has a light emitting area larger than the area of the bubble shadow formed when the bubble 21 is projected by parallel light, and irradiates the level 2 with diffuse light. .
  • the thickness of the light guide plate 4 of the surface light emitting portion 4b can be reduced, so that the light guide plate 4
  • the size of the horizontal sensor 10 can be kept small, and the thickness of the horizontal sensor 10 (the axial size of the cylindrical level) can be kept small.
  • the light diffusing structure is provided in the light guide plate 4 of the surface light emitting portion 4b, no light diffusing parts are required, which can contribute to the reduction in the number of parts and the downsizing of the sensor.
  • the diffused light that has also exited the entire output surface 43 is incident on the level 2 facing the output surface 43.
  • Light is incident on the surface 22, hits the interface between the liquid 2w in the level 2 and the bubble 21 and is refracted or totally reflected at this interface and emitted from the output surface 23 of the level 2, and the light receiving elements 31 to 34 of the light receiving unit 3 Is incident on.
  • the projection light of the bubble 21 irradiated with the diffused light is projected onto the light receiving unit 3 and received by the light receiving elements 31 to 34.
  • Fig. 3 (a) shows the two-dimensional received light amount distribution (black-and-white shading distribution) on the plane in the light receiving unit 3
  • Fig. 3 (b) shows a one-dimensional horizontal direction with the center of the bubble 21 as a reference. Shows the light intensity distribution.
  • the two-dimensional light amount distribution is determined by the light amount detected by the light receiving elements 31 to 34 for the projection light of the bubble 21 irradiated by the diffused light from the emission surface 43, and the whiter the more the received light amount is, the blacker it is. Indicated. Diffused light from the exit surface 43 is irradiated at almost any angle forward from the exit surface 43, unlike parallel light. Therefore, this diffused light enters the bubble 21 in the level 2 from the incident surface 22 of the level 2 with a wide angle range.
  • the two-dimensional received light amount distribution is small (black part) at the center and outer periphery of the bubble 21 and has a maximum point (white part) between the center and outer periphery.
  • the light quantity distribution at the horizontal position of the projection light has a minimum point near the central axis of the bubble 21 and is substantially in the same range as the radius of the bubble 21 as shown in FIG. 3 (b).
  • a characteristic that monotonously increases as the distance from the central axis (the center of the bubble) of the bubble 21 can be obtained. Due to this characteristic, even if the light receiving unit 3 is smaller than the bubble shadow 21a having the diameter of the bubble 21, it is possible to detect a change in the amount of received light by the light receiving elements 31 to 34 when the bubble 21 is slightly moved.
  • the monotonically increasing characteristic is configured to have a characteristic that linearly increases as the distance from the central axis (for example, including electrical correction) is changed. Since linearization can be detected linearly, the linearity of detection is improved, and errors in tilt detection accuracy can be further reduced.
  • FIG. 4A shows the positional relationship between the bubble 21 and the light receiving elements 31 to 34 of the light receiving unit 3 when viewed from the upper surface of the horizontal sensor 10 of the present embodiment.
  • the diffused light from the exit surface 43 of the surface light emitting unit 4b irradiates the bubble 21 in the level 2 and is received by the light receiving diodes 31 to 34 which are four substantially square light receiving elements constituting the light receiving unit 3. .
  • the four light-receiving diodes 31 to 34 are arranged symmetrically with respect to the center of the light-receiving surface so that the light-receiving surface has a square shape as a whole, and the vertical and horizontal dimensions are smaller than the diameter of the bubble 21. Is set. Then, a voltage corresponding to the detected amount of light received by the light receiving surface is output, and the inclination can be detected by comparing these voltages. When the level of the horizontal sensor 10 is maintained and the center of the bubble shadow of the bubble 21 coincides with the center of the light receiving surface of the light receiving unit 3, the light receiving levels of the four light receiving diodes 31 to 34 match.
  • FIG. 4 (b) shows the light amount distribution on the light receiving surface before and after the movement when the light receiving surface 3 moves smaller than the bubble shadow 21a in the horizontal sensor 10 when the light receiving surface central force also moves. Shows changes.
  • the received light amount distribution P1 is a distribution when the bubble 21 does not move
  • the received light amount distribution P2 (broken line) is a distribution when the bubble 21 moves and the bubble shadow 21a shifts to the bubble shadow 21b.
  • the received light amount distribution P1 has a local minimum point near the center axis of the bubble 21, and from the center axis of the bubble 21 within the same range as the radius of the bubble.
  • the received light amount distribution P1 is the minimum at the center of the light receiving surface, and the light receiving level always changes when moving away from the center.
  • the light receiving amounts of the light receiving elements 31 to 34 are all the same and balanced at level 11 of the light receiving amount distribution P1.
  • the received light amount distribution P1 shifts to the received light amount distribution P2, so that the received light amount of the light receiving elements 31 to 32 becomes level 12 of the received light amount distribution P2, and the light receiving elements 33 to 34.
  • the amount of received light is greatly shifted to level 13 of the received light amount distribution P2.
  • each of the light receiving elements 31 to 34 outputs a voltage corresponding to the amount of received light, and compares these voltages, thereby making it possible to detect a finer degree of inclination.
  • the light receiving part 3 occupying a large mounting area is made smaller than the bubble shadow 21a of the bubble 21, and a thin surface light emitting part 4b capable of irradiating diffused light is formed.
  • the light intensity distribution of the projected light on the element has a minimum point near the central axis of the bubble 21, and a light distribution characteristic that monotonously increases as the central axial force of the bubble 21 is separated in the same range as the radius of the bubble 21.
  • a sheet provided with minute unevenness having a function of diffusing light between the exit surface 43 of the surface light emitting portion 4b of the light guide plate 4 and the entrance surface 22 of the level 2 By disposing a shaped member (see Fig. 5 (a) described later), it becomes unnecessary to perform diffusion processing on the uneven shape of the reflective surface 42 or the groove-shaped uneven shape portion 46 of the surface light emitting portion 4b. Accordingly, it is possible to make the amount of light emitted from the entire emission surface 43 more uniform. Further, instead of arranging the sheet-like member, diffused light may be formed by making the incident surface 22 of the level 2 rough.
  • a sheet-like or plate-like highly reflective member is disposed on the reflective surface 41 of the light guide portion 4a and the reflective surface 42 of the surface light emitting portion 4b, so that the light guide portion 4a enters the light incident surface 44.
  • the ratio of the amount of light emitted to the amount of light emitted from the emission surface 43 of the surface light emitting portion 4b can be increased.
  • the current of the light emitting diode 1 serving as a light source can be reduced in order to obtain the required tilt detection accuracy, and the power consumption of the horizontal sensor 10 can be reduced.
  • the light emitting diode 1 and the light receiving unit 3 are arranged on the same side with respect to the level 2 and the light guide plate 4 generally having a flat plate shape is connected from the light source to the surface light emitting unit 4b.
  • the sensor size (thickness) in the direction of the level of the level is greatly increased. It becomes possible to make it small.
  • the present invention is not limited thereto. Not a thing. For example, when both are arranged in a substantially straight line in the level axis direction, the size of the horizontal sensor 10 in the horizontal direction orthogonal to the axis direction of the level 2 can be reduced.
  • the horizontal sensor 10 includes a light emitting diode 1 as a light source, a level 2 having a cylindrical container 2a filled with a substantially transparent liquid 2w so that bubbles 21 remain, and a light receiving area smaller than the projection light by the parallel light of the bubbles 21. And a sheet-like member 6 (diffusion part) disposed between the light-emitting diode 1 and the level 2.
  • the optical axis of the light emitting diode 1, the central axis of the level 2 and the optical axis of the light receiving unit 3 are arranged so as to be substantially in a straight line, and the level 2 is disposed between the light emitting diode 1 and the light receiving unit 3. It is arranged.
  • the sheet-like member 6 has irregularities formed so as to have a light diffusion effect, and functions as a surface light emitting part.
  • the cylindrical container 2a of the spirit level 2 has a hollow inside, and at least one of the inner faces has a curved surface shape that is substantially rotationally symmetric. It has an upper base 2b, a lower base 2c having a light incident surface 22 and an output surface 26 on both surfaces of the bottom thickness, and a side wall 2d.
  • the light emitting diode sheet-like member 6, the level 2 and the light receiving elements 31 to 34 are assembled by a frame as shown in FIG.
  • the light 11 irradiated from the light emitting diode 1 is diffused by the sheet-like member 6 to become diffused light 12.
  • the diffused light 12 is incident on the incident surface 22 of the level 2, hits the interface between the liquid 2w and the bubble 21 in the level 2, is refracted or totally reflected at the interface, and is emitted from the exit surface 23 of the level 2. Then, the light enters the light receiving elements 31 to 34. Thereby, the projection light of the bubble 21 is projected onto the light receiving elements 31 to 34, and the amount of received light is detected.
  • the light irradiated to the bubble 21 is diffused light obtained by diffusing the light of the light-emitting diode 1 by the sheet-like member 6. Therefore, in the light receiving unit 3, the light shown in Figs. A light distribution characteristic similar to that shown in Fig. 1 can be obtained. Therefore, when the level 2 is tilted and the bubbles 21 in the level 2 are slightly moved, the change amount can be read and the tilt angle can be detected as described above.
  • the horizontal sensor 10 includes a sheet-like member 6 between the light emitting diode 1 and the level 2. , And the light receiving area of the light receiving unit 3 is made smaller than the bubble shadow of the bubble 21, the same light quantity distribution characteristic as described above can be obtained. Therefore, this light quantity distribution characteristic can detect a change in the light quantity of the light receiving elements 31 to 34 when the bubble 21 moves minutely, thereby obtaining a highly accurate detection characteristic.
  • the light source, the sheet-like member 6, the level 2 and the light receiving part 3 are on a substantially straight line on the central axis of the level 2, the number of components disposed in the horizontal direction is reduced, so that the horizontal The direction can be reduced.
  • the diffused light can be efficiently formed by the sheet-like member 6, the current of a light source such as a light emitting diode for obtaining the required tilt detection accuracy can be reduced, and the power consumption can be reduced.
  • the sheet-like member 6 is used as a member for diffusing the light from the light source 1, but in addition to this, a light guide plate 4 subjected to diffusion processing, a diffusion processing applied to one surface of the level 2 and the like are used. May be. Furthermore, in addition to the sheet-like member 6, by making the incident surface 22 of the spirit level 2 rough, it is possible to further increase the divergence angle of the light that is double-diffused and incident on the incident surface 22 of the spirit level 2. Therefore, it is possible to obtain a light distribution characteristic that is clearer and has a higher light receiving sensitivity, and the light receiving section 3 can be made smaller.
  • the horizontal sensor 10 includes four light emitting diodes 1 as light sources, a level 2 having a cylindrical container 2a filled with a substantially transparent liquid 2w so that bubbles 21 remain, and light reception smaller than the projection light by the parallel light of the bubbles 21. It has a light receiving part 3 composed of four light receiving elements 31 to 34 having an area.
  • the four light emitting diodes 1 are arranged so as to be substantially rotationally symmetric with respect to the central axis of the level 2.
  • the level 2 is disposed so that the central axis of the level 2 and the optical axis of the light receiving unit 3 are substantially in a straight line, and is disposed between the light emitting diode 1 and the light receiving unit 3.
  • the cylindrical container 2a of the level 2 has a hollow inside, and one of the inner surfaces has a curved surface shape that is substantially rotationally symmetric, and has an upper bottom 2b having an emission surface 23 facing the light receiving portion 3.
  • a lower bottom portion 2c having a light incident surface 22 and an output surface 26 on both surfaces of the bottom thickness, and a side wall portion 2d are provided.
  • each light 11 emitted from the four light-emitting diodes 1 uses the plurality of light-emitting diodes 1 as light sources, so that the spread angle of the light incident on the incident surface 22 of the level 2 is entirely Can be further increased to form diffuse light.
  • This diffused light 12 is incident on the incident surface 22 of the level 2, hits the interface between the liquid 2 w and the bubble 21 in the level 2, and is refracted or totally reflected at the interface, from the exit surface 23 of the level 2. It is emitted and enters the light receiving elements 31 to 34. Thereby, the projection light of the bubble 21 is projected onto the light receiving elements 31 to 34, and the received light amount is detected.
  • the light receiving unit 3 is the same as that shown in Figs. 3 (a) and 3 (b). Can be obtained. Therefore, when the level 2 is tilted and the bubbles 21 in the level 2 are slightly moved, the change amount can be read and the tilt angle can be detected in the same manner as described above.
  • the horizontal sensor 10 of the present embodiment uses a plurality of light emitting diodes 1 to increase the amount of incident light and to increase the light divergence angle. In particular, it is possible to further reduce the size of the light receiving portion 3 that requires a large mounting area, thereby contributing to high sensitivity and miniaturization of the sensor. In addition, since the area of the light source is substantially increased, the light source can be brought closer to the level, and further contribute to reduction in thickness and size. In addition, by arranging the sheet-like member 6 between the light emitting diode 1 and the level 2 or by making the incident surface 22 of the level 2 rough, the uniformity of the amount of light incident on the level 2 is improved. It is possible to further improve the inclination detection accuracy.
  • the horizontal sensor 10 includes a light source 1 that is a light source, a level 2 that has a cylindrical container 2a filled with a substantially transparent liquid 2w so that bubbles 21 remain, and a light level from the light emitting diode 1 to the level 2
  • a light guide 7 made of a transparent member, a sheet-like member 6, and a light receiving portion 3 made up of four light receiving elements 31 to 34 having a light receiving area smaller than the projection light by the parallel light of the bubbles 21.
  • the light guide 7 has a light incident surface 74 on which light from the light emitting diode 1 is incident, reflection surfaces 71 and 72 that totally reflect the incident light, and an emission surface 73 that emits the reflected light. Yes.
  • the light emitting diode 1 and the light receiving unit 3 are mounted on the same printed circuit board 5, and are on the same side with respect to the level 2 Placed in.
  • the level 2 is arranged so that the central axis thereof and the optical axis of the light receiving unit 3 are substantially in a straight line, and is arranged between the light receiving unit 3 and the emission surface 73 of the light guide 7. Yes. Further, the sheet-like member 6 is disposed between the light emitting surface 73 of the light guide 7 and the level 2.
  • the cylindrical container 2a of the spirit level 2 is a cylindrical container 2a of the spirit level 2 and has a curved shape in which the inside is hollow and at least one of the inner faces is substantially rotationally symmetric.
  • An upper base 2b having an exit surface 23 opposite to the upper surface, a lower base 2c having an incident surface 22 and an output surface 26 on both sides of the bottom thickness, and a side wall 2d.
  • the light emitted from the light emitting diode 1 is incident on the light incident surface 74 of the light guide 7, and the light incident on the light incident surface 74 is totally reflected by the reflecting surface 71 in the light guide 7, The traveling direction is changed to the right, and the light is further totally reflected by the reflecting surface 72 and emitted from the emitting surface 73.
  • the light that has also been emitted from the exit surface 73 is diffused by the sheet-like member 6 and is incident on the entrance surface 22 of the level 2 as diffused light. When this diffused light hits the interface between the liquid 2w and the bubble 21, it is bent or totally reflected at the interface, exits from the exit surface 23 of the level 2, and enters the light receiving elements 31-34. Thereby, the shadow of the bubble 21 is projected onto the light receiving elements 31 to 34 by the light from the light emitting diode 1, and the amount of received light is detected.
  • the spread angle of the light incident on the entrance surface 22 of the level 2 is increased.
  • the light quantity distribution characteristic similar to the above can be obtained. Therefore, when the level 2 is tilted and the bubble 21 in the level 2 is slightly moved by this light quantity distribution characteristic, the change amount can be read and the tilt angle can be detected as described above.
  • the horizontal sensor 10 of the present embodiment can reduce the size of the horizontal sensor because the light receiving unit 3 that requires a large mounting area among the electronic components used in the horizontal sensor can be reduced while ensuring the above-described detection characteristics. It can contribute to the conversion.
  • the incident light can be efficiently transmitted using the light guide 7, the ratio of the amount of light incident from the light incident surface 74 of the light guide 7 to the amount of light emitted from the output surface 73 can be increased, and the sheet can be increased.
  • the diffused light can be efficiently formed with the shaped member 6. For this reason, the current of the light emitting diode 1 for obtaining the required tilt detection accuracy can be reduced, and the power consumption of the horizontal sensor 10 can be reduced.
  • light guide 7 In this case, the same light output part as that of the first embodiment can be obtained. Further, in this case, by providing the sheet-like member 6, light diffusion processing in the light guide plate can be unnecessary or simplified. Also, light reflection and refraction by the reflecting surfaces 71 and 72 of the light guide 7 can guide the light from the light source to the vicinity of the level 2 as in the first embodiment. Can be made thinner.
  • the horizontal sensor 10 includes a light emitting diode 1 as a light source, a level 2 having a cylindrical container 2a filled with a substantially transparent liquid 2w so that bubbles 21 remain, and a light receiving area smaller than the projection light by the parallel light of the bubbles 21.
  • the light receiving unit 3 is composed of four light receiving elements 31 to 34 having a small and uneven surface for diffusing light on at least one surface other than the surface on which bubbles in the level 2 slide.
  • the optical axis of the light emitting diode 1, the central axis of the level 2 and the optical axis of the light receiving unit 3 are arranged so as to be substantially in line with each other, and the level 2 is connected between the light emitting diode 1 and the light receiving unit 3. Arranged between.
  • the level 2 has minute irregularities for diffusing light on a surface other than the surface on which the bubbles 21 slide, for example, at least one of the incident surface 22, the side wall inner surface 24, and the exit surface 26. Formed. Therefore, now assuming that a minute unevenness is formed on the exit surface 26, the light emitted from the light emitting diode 1 enters the entrance surface 22 of the level 2 and is diffused by the exit surface 26, It becomes diffused light and irradiates the bubble 21 in the level 2. Similarly, similar diffused light can be generated even if minute irregularities are formed on the incident surface 22 or the side wall inner surface 24.
  • the light irradiated on the bubble 21 is diffused in the level 2 and becomes diffused light, so that the light amount distribution similar to that shown in Figs. 3 (a) and (b) is used. Characteristics can be obtained. Therefore, when the level 2 is tilted and the bubble 21 in the level 2 is slightly moved, the light receiving unit 3 can read the change amount and detect the tilt angle as described above.
  • the horizontal sensor 10 of the present embodiment diffuses light by forming minute irregularities on the level 2 in order to diffuse light on at least one surface other than the surface on which the bubbles 21 slide.
  • the effect can be formed with the spirit level 2 itself. Therefore, the sheet-like member 6 and the like can be omitted, the number of parts can be reduced, and the thickness of the sensor can be reduced, contributing to the downsizing of the sensor.
  • a horizontal sensor 10 according to a sixth embodiment of the present invention will be described with reference to FIGS. 9 (a) and 9 (b).
  • the horizontal sensor 10 includes a light emitting diode 1 as a light source, a level 2 having a cylindrical container 2a filled with a substantially transparent liquid 2w so that bubbles 21 remain, and a light reception smaller than the projection light by the parallel light of the bubbles 21. It has a light receiving part 3 composed of four light receiving elements 31 to 34 having an area, and a light guide 7 for guiding incident light from the light emitting diode 1 to the side surface of the level 2.
  • the central axis of the level 2 and the optical axis of the light receiving unit 3 are arranged so as to be substantially in a straight line.
  • the level 2 includes a light incident part 25 on which light from the light guide 7 enters near the lower bottom part 2c on the side far from the light receiving part 3 of the side wall part 2d, and the light receiving part 3 at the bottom thickness of the lower base part 2c.
  • a reflection surface 22a having minute irregularities or groove shapes for diffusing light is provided on the surface far from the surface.
  • the light guide 7 is formed of a transparent member, and a light incident surface 74 on which incident light from a light source enters, a reflection surface 71 that totally reflects the incident light, and an incident surface on the side surface of the level 2 at the end surface of the light guide 7.
  • the light section 25 has an emission surface 73 that emits light.
  • the light emitting diode 1 and the light receiving unit 3 are mounted on the same printed circuit board 5 and arranged on the same side with respect to the level 2.
  • the light emitted from the light emitting diode 1 enters the light incident surface 74 of the light guide 7, is totally reflected by the reflecting surface 71 in the light guide 7, and is changed in the traveling direction to the right in the figure.
  • the light exits from the exit surface 73 and enters the light incident part 25 of the level 2.
  • the light incident on the light incident part 25 of the level 2 travels to the right in the figure while being repeatedly reflected by the reflecting surface 22a and the emitting surface 26.
  • the reflecting surface 22a since the reflecting surface 22a has a light diffusing shape due to minute irregularities or grooves, the light hitting the reflecting surface 22a is reflected in a direction determined by the scattering shape of the reflecting surface 22a. Then, the light exits from the exit surface 26, and proceeds toward the liquid 2w and the bubbles 21 in the level 2 in a directed manner.
  • the concavo-convex shape or groove shape formed on the reflecting surface 22a is formed so that a substantially uniform amount of light is emitted from the entire emitting surface 26, and the light amount distribution of the emitted light is broadened. For this reason, the light that has also been emitted from the entire output surface 26 becomes diffused light, and can irradiate the bubble 21.
  • the light irradiated to the bubble 21 becomes diffused light by irradiation from the reflecting surface 22a having a scattering shape, and therefore, in the light receiving unit 3, the above-described Fig. 3 (a), (b) It is possible to obtain a light distribution characteristic similar to that shown in. Therefore, when the level 2 is tilted and the bubble 21 in the level 2 is slightly moved, the change amount can be read and the tilt angle can be detected as described above. It can be done.
  • the horizontal sensor 10 of the present embodiment can reduce the size of the horizontal sensor because the light receiving unit 3 that requires a large mounting area can be reduced among the electronic components of the horizontal sensor while ensuring the above-described detection characteristics. Can contribute.
  • light from the light guide 7 is incident from the side surface of the level 2 and a light diffusion component is attached to the outside of the level 2 by forming an uneven shape or a groove shape on the reflection surface 22a of the level 2 It becomes possible to further reduce the thickness of the horizontal sensor that is not necessary.
  • the light-emitting diode 1 and the light-receiving unit 3 can obtain the same effect even if the forces mounted on the same substrate are mounted on different substrates.
  • the horizontal sensor 10 includes a light emitting diode 1 serving as a light source, a level 2 having a cylindrical container 2a filled with a substantially transparent liquid 2w so that bubbles 21 remain, and a light receiving unit 3 including four light receiving elements 31 to 34. Is provided. Each of the light receiving elements 31 to 34 is arranged so that it is closest to the optical axis of the light receiving unit 3 and has a vertex far from the exit surface 23 of the level 2 as compared with the other vertexes. The area of the equivalent light receiving portion 3 viewed from the optical axis is equal to or smaller than the area of the projection light by the parallel light of the bubbles 21.
  • the optical axis of the light emitting diode 1, the central axis of the level 2 and the optical axis of the light receiving unit 3 are arranged so as to be substantially in a straight line, and the level 2 is connected to the light emitting diode 1 and the light receiving unit 3 It is arranged between.
  • the cylindrical container 2a of the level 2 has an upper bottom portion that has a hollow inside, and at least one of the inner surfaces has a curved surface shape that is substantially rotationally symmetric, and has an emission surface 23 facing the light receiving portion 3. 2b, a lower bottom portion 2c having a light incident surface 22 and an output surface 26 on both surfaces of the bottom thickness, and a side wall portion 2d.
  • the light emitted from the light emitting diode 1 is incident on the incident surface 22 of the level 2 and hits the interface between the liquid 2w and the bubble 21, and is refracted or totally reflected at the interface. It is emitted from 23 and enters the light receiving elements 31-34. Thereby, the shadow of the bubble 21 is projected onto the light receiving elements 31 to 34 by the light from the light emitting diode 1.
  • the light receiving elements 31 to 34 of the light receiving unit 3 are positioned so that the vertex force closest to the optical axis of the light receiving unit 3 is far from the exit surface 23 of the level 2 compared to the other vertexes. Placed, so The light receiving surfaces of the light receiving elements 31 to 34 are equivalently shaped like diamonds when viewed from the light exit surface 23 of the level 2. Therefore, the area becomes smaller as it is directed to the upper and lower apexes where the area is larger at the center of each light receiving element 31-34. As a result, the light quantity distribution received by the light receiving unit 3 can have the same light quantity distribution characteristics as those shown in FIGS. 3 (a) and 3 (b). Therefore, with this light quantity distribution characteristic, it is possible to obtain a highly accurate detection characteristic capable of detecting a change in the light quantity of the light receiving elements 31 to 34 when the bubble 21 is moved minutely.
  • the same light quantity distribution characteristic can be obtained only by the light receiving unit 3. Therefore, the light guide plate 4 provided with the reflection surface 42 for diffusion that does not necessarily require diffused light as incident light.
  • the sheet-like member 6 or the like since the sheet-like member 6 or the like is not necessary, the configuration can be simplified and the sensor can be reduced in size. Further, since the light guide plate 4 having the reflecting surface 42 for diffusion, the sheet-like member 6 and the like are not necessary, the number of parts can be reduced and the cost can be reduced.
  • FIG. 11 shows a modification of the seventh embodiment, in which the light source diode 1 is mounted on the same substrate as the light receiving unit 3, and the light that guides incident light from the light emitting diode 1 to the level 2. It differs in that it has a guide 7.
  • the light guide 7 is formed of a transparent member, and includes a light incident surface 74 on which incident light enters, a reflective surface 71 that totally reflects incident light, and an output surface 73 that irradiates light toward the level 2
  • the optical axis of the exit surface 73 of the light guide 7, the central axis of the level 2, and the optical axis of the light receiver 3 are arranged so as to be substantially in a straight line, and the level 2 is the exit surface of the light guide 7.
  • 73 and the light receiving unit 3 are arranged.
  • the light from the light emitting diode 1 irradiates the incident surface 22 of the level 2 from the exit surface 73 through the light guide 74.
  • the incident light from the incident surface 22 strikes the interface between the liquid 2w and the bubble 21, it is refracted or totally reflected at the interface, exits from the exit surface 23 of the level 2, and enters the light receiving elements 31-34.
  • the projection light of the bubble 21 is projected onto the light receiving elements 31 to 34 by the light from the light emitting diode 1.
  • the light receiving elements 31 to 34 of the light receiving unit 3 are positioned farther from the exit surface 23 of the level 2 as compared to the other apexes of the apex force closest to the optical axis of the light receiving unit 3.
  • the light guide 7 guides the light from the light source on the same substrate as the light receiving unit 3 to the vicinity of the incident surface 22 of the level 2 so that the same light quantity distribution characteristics can be obtained only by the light receiving unit 3.
  • the size (thickness) of the horizontal sensor 10 in the axial direction of the vessel 2 can be reduced.
  • the horizontal sensor 10 of the present embodiment includes a member obtained by modifying the light guide plate 4 in the first embodiment shown in FIGS. 1 to 4, and this member will be referred to as a light guide and will be described below. Note that the spirit level light receiving unit as the horizontal sensor 10 is the same as in the above-described embodiment, and is not shown.
  • the light guide 7 is provided with a convex cylindrical portion 75 so that the light L1 emitted from the light source is substantially parallel to the light incident surface 76 of the light guide.
  • the cylindrical axis R1 is a plane including the optical axis R2 of the light source and the axis R3 formed by reflecting the optical axis R2 of the light source with respect to the reflection surface 71 (total reflection surface) of the light guide. It is formed so as to be parallel to the normal.
  • the cylindrical portion 75 functions as a convex lens by having a convex cylindrical light incident surface 76.
  • the light L1 incident on the light incident surface 76 of the light guide 7 is also refracted in the direction along the optical axis of the convex lens by the convex lens action of the cylindrical portion 75, and this optical axis is within the optical guide 7.
  • Light L2 is almost parallel to Thereby, the light L2 reflected by the reflecting surface 71 of the light guide 7 is easily totally reflected.
  • FIG. 12 (c) when the light guide 7 has a flat light incident surface 74, the light incident surface 74 has no lens action, so that the light incident from the light incident surface 74 is reflected on the reflective surface.
  • the light Lx emitted from the reflecting surface 71 to the outside of the light guide increases, and the amount of light that guides the light source power toward the level 2 is reduced. It will end up.
  • the light guide 7 includes the cylindrical portion 75 having the convex cylindrical light incident surface 76, so that the condition of total reflection at the reflection surface 71 of the light guide 7 is achieved.
  • This makes it easier to satisfy the above conditions, suppresses the light emitted from the light guide 7 to the outside, increases the light guide transmission efficiency, and reduces the light transmission loss in the light guide.
  • the intensity of the uniform light emitted from the surface light emitting unit is improved, and therefore the resolution of the horizontal sensor 10 is improved, the power applied to the light emitting diode 1 of the light source can be reduced, and the level of the horizontal sensor 10 is reduced. Current consumption can be realized.
  • the light guide 7 includes a light guide plate-shaped surface light emitting unit 77, the reflecting surface 71 of the light guide 7 reflects the optical axis R2 of the light source, and the optical axis R2 is reflected by the reflecting surface 71.
  • Axis R The cross-sectional shape in a plane including both axes 3 and 3 forms a paraboloid, and the focal point of the paraboloid is formed near the entrance of the surface light emitting portion 77 of the light guide 7.
  • the light guide 7 includes a light-emitting plate-like surface light emitting portion 77 having a reflection surface 72 having unevenness and grooves for reflecting light, and an emission surface 73 for emitting light from the plane.
  • the reflecting surface 71 has a parabolic surface formed by a cross-sectional shape including both the optical axis R2 of the light source and the axis R3 formed by reflecting the optical axis R2 with the reflecting surface 71.
  • the focal point of the surface is formed in the vicinity of the entrance of the surface light emitting portion 77 of the light guide 7.
  • the light L1 incident on the light incident surface 76 of the light guide 7 from the light emitting diode 1 of the light source is refracted in the direction along the optical axis R2 by the cylindrical portion 75 having a convex lens action.
  • Light L2 that is substantially parallel to R2 is reflected by the reflecting surface 71 that forms a paraboloid.
  • this parallel light L2 is reflected by this paraboloid, it is focused to the focal point (focal line) F1 of the paraboloid.
  • This focal point F1 is positioned so as to be near the entrance of the surface light emitting portion 77 of the light guide 7.
  • the thickness of the surface light emitting portion 77 is the largest in the light guide 7 compared to the light guide portion of the light guide 7 (the portion from the light incident surface 76 to the reflecting surface 71 and the surface light emitting portion 77). It is a thin part, and it is difficult for light to enter near the entrance of the surface light emitting part 77. Therefore, the light L2 in the light guide 7 is reflected by the reflecting surface 71 that forms the paraboloid of the light guide, and is collected near the entrance of the surface emitting portion 77 having the thinnest thickness, thereby being reflected on the surface emitting portion 77. Light enters easily, and the efficiency of light incident on the surface light emitting portion 77 is improved.
  • the light guide 7 has the reflecting surface 71 having a parabolic surface, and the parabolic surface reflects the parallel light L2 from the light incident surface 76, thereby allowing the light to be a parabolic surface.
  • the amount of light incident on the surface light emitting unit 77 is increased by setting the focal point near the entrance of the surface light emitting unit 77.
  • the intensity of the light emitted from the surface light emitting unit 77 is improved, so that the resolution of the horizontal sensor 10 is improved, the power applied to the light source can be reduced, and low current consumption can be realized.
  • the light guide 7 includes a plurality of diffusion grooves 76a (grooves) having a triangular or trapezoidal cross-sectional shape along the cylinder of the light incident surface in the cylindrical portion 75.
  • Each groove of the diffusion groove 76a (groove) is on a plane orthogonal to the cylindrical axis R1.
  • the cylindrical surfaces are arranged almost at equal intervals in the direction of the axis R1 of the cylinder. Further, as shown in FIGS.
  • the surface light emitting unit 77 can improve surface light emission uniformity in the direction of the axis R1 of the cylindrical surface.
  • the plurality of diffusion grooves 76 a having a triangular or trapezoidal cross-sectional shape are provided along the cylindrical surface of the light incident surface 76, thereby The surface emission uniformity in the direction of the axis R1 is improved, and the resolution of the horizontal sensor 10 is improved when the bubble 21 moves in the direction of the axis R1 of the cylindrical surface.
  • a horizontal sensor 10 according to an eleventh embodiment of the present invention will be described with reference to FIGS. 15 (a) to 15 (e).
  • a plurality of triangular grooves 72a (grooves) having a triangular cross-sectional shape are formed on the reflecting surface 72 of the surface light emitting unit 77, and the light emitting surface 77 of the surface light emitting unit 77 of the light guide 7
  • a triangular prism 6p having an apex angle of 90 ° is formed.
  • the triangular groove 72a is disposed in parallel to the cylindrical axis R1 of the cylindrical portion 75, and forms a base angle ⁇ force 3 ⁇ 40-40 ° of the light incident side surface 72b in the reflector 72 of the surface light emitting portion 77.
  • the triangular prism 6p and the triangular groove 72a are arranged so that the ridge line Q2 of the prism 6p is parallel to the ridge line Q1 of the triangular groove 72a of the light guide 7.
  • an auxiliary reflecting plate 78 is provided outside the reflecting surface 72 in parallel to the reflecting surface 72.
  • the incident light L4 passes through the surface light emitting unit 77.
  • the reflection surface 72 of the surface light emitting section 77 is reflected by the incident side surface 72b where the base angle ⁇ of the triangular groove 72a forms 20 to 40 degrees, so that it is emitted at 20 ° to 40 ° with respect to the normal of the emission surface 73. Will do.
  • the light that is not reflected by the incident side surface 72b but is emitted from the reflecting surface 72 in the direction opposite to the emitting surface 73 is substantially totally reflected by the auxiliary reflecting plate 78 provided under the reflecting surface 72, and is again surface-emitting. Reflective surface of part 77 7 2 and exits from the exit surface 73. As a result, the surface light emission efficiency of the surface light emitting unit 77 is increased.
  • the light emitted from the emission surface 73 sequentially enters the sheet-like members 6a and 6b, and first, along the central axis direction of the cylinder of the level 2 by the triangular prism 6p of the sheet-like member 6a. Since it is bent and then bent again in the same manner by the sheet-like member 6b, the light beam becomes more parallel to the central axis of the spirit level 2.
  • the central force of the light distribution that has passed through the triangular prism 6p of the sheet-like members 6a and 6b is substantially perpendicular to the emission surface 73 of the surface light emitting section 77, and the surface emission distribution is the center of the level 2 It becomes substantially symmetrical with respect to the axis, and the symmetry is improved.
  • the light L5 whose surface light distribution is substantially symmetrical is incident on the level 2, passes through the bubble 21 of the level 2, and is symmetric with respect to the central axis of the level 2 in the light receiving unit 3.
  • the light is received by each of the light receiving elements 31, 32, 33, and 34 of the four-division photodiode (PD) arranged in Fig. 1, and the amount of light is detected.
  • the light guide 7 does not include the sheet-like member 6 having the triangular groove 72a and the triangular prism 6p of the surface light emitting unit 77, so that the light emitted from the emission surface 73
  • the direction forms an asymmetric surface light emission distribution G1 on the emission surface 73 that is inclined and deviated from the direction parallel to the central axis of the level 2. Therefore, the direction of light hitting the bubble 21 of the level 2 is oblique with respect to the central axis of the level 2.
  • the amount of light received through the spherical bubble 21 differs between the left and right sides of the light receiving elements 31 and 32 on the A side and the light receiving elements 33 and 34 on the B side.
  • the direction of the light emitted from the emission surface 73 is substantially parallel to the emission surface 73 and the central axis of the level 2 and the surface emission distribution G2 is substantially symmetric. Therefore, the amount of light that has passed through the bubble 21 of the level 2 is substantially the same and symmetrical on the left and right sides of the A side and B side.
  • FIGS. 17 (a) and 17 (b) show the case where the temperature changes due to the environmental temperature change in the horizontal state where the bubble 21 on the central axis of the level 2 is present, for example, when the temperature rises.
  • the respective light quantity detection states of the light receiving elements 31, 32, 33, and 34 before the improvement of the surface light emission distribution and after the improvement according to the eleventh embodiment are shown. If the temperature rises in the horizontal state, the position of the bubble 21 does not change on the central axis of the level 2 but the diameter of the bubble 21 is small. Become. Before the improvement, the light receiving amount La of the light receiving elements 31 and 32 on the A side of the light passing through the bubble 21 is defined as the light receiving amount Lb of the light receiving elements 33 and 34 on the B side.
  • the surface emission distribution G1 force gradient is improved before improvement, so neither ⁇ 1 nor ⁇ 2 becomes zero.
  • This difference ⁇ ⁇ 1, ⁇ ⁇ indicates the level of level 2 ( ⁇ ⁇ 1, ⁇ ⁇ is horizontal at the opening), so in this case, level is not shown even though level 2 is horizontal. As a result, an error occurs.
  • the surface emission distribution G2 is symmetric with respect to the central axis of the level 2, so even if the temperature changes, the light reception amount La on the ⁇ side of each light receiving element and the light reception amount Lb on the B side The differences A ql and A q2 are both almost zero. As a result, it is confirmed that the position of the bubble 21 does not change even when the temperature changes, and it is possible to accurately detect the horizontal state.
  • the center of the distribution of light emitted from the surface light emitting portion 77 of the light guide 7 is 20 ° with respect to the normal line of the emission surface 73 of the surface light emitting portion 77.
  • the center of the distribution of light that has passed through the triangular prism having an apex angle of 90 ° is substantially perpendicular to the emission surface 73 of the surface light emitting portion.
  • the surface emission distribution is symmetric with respect to the central axis of the spirit level 2, so that in the horizontal state where the bubble 21 is in the center of the four-segment PD light receiving elements 31 to 34, even if the bubble diameter increases or decreases, the difference between the four-segment PD Outputs A ql and A q2 are kept almost zero. As a result, even when the bubble diameter changes due to temperature changes, the level can be reliably detected.
  • the thickness t of the surface light emitting portion 77 of the light guide 7 can be freely changed depending on the design of the light guide 7.
  • the surface light emission distribution G3 of the amount of light emitted from the surface light emitting unit 77 is uniform with little amplitude fluctuation. It becomes almost flat and the size of t is appropriate.
  • the surface emission distribution G4 has bright and dark parts in the amount of light emitted from the surface light emitting part 77 with large amplitude fluctuations.
  • the condensing position of the optical guide 7 (focal point F1 position) varies depending on the tolerance of the light source position, etc. If the condensing position is shifted even a little, the amount of light incident on the surface light emitting unit 77 will drop sharply.
  • the thickness t of the surface light emitting portion 77 is set to a value in the range of 0.7 to 1.5 mm, the surface light emission is uniform while ensuring the amount of light incident on the surface light emitting portion 77. Improves.
  • FIGS. 19 (a) and 19 (b) a horizontal sensor 10 according to a thirteenth embodiment of the present invention is described with reference to FIGS. 19 (a) and 19 (b).
  • a plane 72 c parallel to the reflecting surface 72 is provided between the grooves of the plurality of triangular grooves 72 a of the reflecting surface 72 of the surface light emitting unit 77.
  • the light L4 incident on the surface light emitting portion 77 is totally reflected by hitting the flat surface 72c, and from the vicinity of the entrance of the surface light emitting portion 77 to the back. And proceed. Accordingly, since the same amount of light reaches the entrance side and the back side in the surface light emitting portion 77, the light emission uniformity of the surface light emitting portion 77 is further improved.
  • the horizontal sensor 10 of the present embodiment is different from that of the fourth embodiment in that a convex lens 8 is disposed between the light emitting diode 1 and the level 2 so as to refract the light emitted from the light guide 7 substantially in parallel. And different.
  • the horizontal sensor 10 includes a light emitting diode 1 as a light source, a level 2 having a cylindrical container 2a enclosing a substantially transparent liquid 2w so that bubbles 21 remain, and projection light by parallel light of the bubbles 21.
  • the light receiving part 3 consisting of four light receiving elements 31 to 34 with a small light receiving area, the light guide 7 that guides the incident light from the light emitting diode 1 to the level 2, and the spread angle of the light emitted from the light guide 7 is narrowed And a convex lens 8 having a convex shape.
  • the light emitting diode 1 and the light receiving unit 3 are mounted on the same printed circuit board 5.
  • the light guide 7 is formed of a transparent member, and includes a light incident surface 74 on which incident light enters, a reflective surface 71 that totally reflects incident light, and an output surface 73 that emits light toward the level 2
  • the level 2 is arranged between the light receiving unit 3 and the light exit surface 73 of the light guide 7 so that the central axis of the level 2 and the optical axis of the light receiving unit 3 are substantially in a straight line.
  • a convex lens 8 is disposed between the exit surface 73 of the light guide 7 and the level 2.
  • the convex lens 8 is arranged so that the optical axis of the convex lens 8, the central axis of the level 2 and the optical axis of the exit surface 73 of the light guide 7 are substantially in a straight line.
  • the cylindrical container 2a of the level 2 has a hollow inside, and at least one of the inner faces has a substantially rotationally symmetric curved shape, and has an exit surface 23 facing the light receiving unit 3. It has an upper base 2b, a lower base 2c having a light incident surface 22 and an output surface 26 on both surfaces of the bottom thickness, and a side wall 2d.
  • the light emitted from the light-emitting diode 1 is incident on the light incident surface 74 of the light guide 7, is totally reflected by the reflecting surface 71 in the light guide 7, and is further totally reflected by the reflecting surface 72 to be emitted. Ejected from 73.
  • the light emitted from the exit surface 73 is refracted and condensed by the convex lens 8 so that the light divergence angle is narrowed, and then enters the entrance surface 22 of the level 2.
  • the incident light hits the interface between the liquid 2w and the bubble 21, is refracted or totally reflected at the interface, is emitted from the exit surface 23 of the level 2, and enters the light receiving elements 31 to 34.
  • the projection light of the bubble 21 is projected onto the light receiving elements 31 to 34 by the light from the light emitting diode 1.
  • the lens 8 to condense light with the light source power, the amount of light incident on the level can be increased, and the light-emitting diode current required to ensure tilt detection accuracy can be reduced. .
  • the position of the projection light of the bubble 21 projected onto the light receiving elements 31 to 34 changes, and as a result, the light receiving elements 31 to 34
  • the amount of light received changes.
  • the tilt angle can be detected by reading the amount of change.
  • a convex lens 8 having a convex shape is disposed between the light exit surface 73 of the light guide 7 and the level 2 so that the light divergence angle is narrowed. The light divergence angle can be reduced to / J.
  • the light from the exit surface 73 of the light guide 7 can be incident on the level 2 by the convex lens 8, and the light receiving unit 3
  • the size of can be reduced to the same level as the size of the bubble 21.
  • the distance between the exit surface 43 of the light guide 7 and the level 2 can be shortened, and the thickness of the horizontal sensor can be reduced.
  • the horizontal sensor 10 has a light emitting diode 1 as a light source, a level 2 having a cylindrical container 2a filled with a substantially transparent liquid 2w so that bubbles 21 remain, and a light receiving area smaller than the parallel light of the bubbles 21 and four And a light receiving unit 3 including light receiving elements 31 to 34.
  • the level 2 is disposed between the light emitting diode 1 and the light receiving unit 3, and the central axis of the level 2, the optical axis of the light emitting diode 1, and the optical axis of the light receiving unit 3 are substantially on the same straight line.
  • the cylindrical container 2a of the level 2 is provided with a lower bottom portion 2c having a light incident surface 22b and an output surface 26 on both surfaces of the bottom thickness.
  • the incident surface 22b is substantially rotationally symmetric with respect to the central axis of the level 2 so that the light from the light emitting diode 1 is refracted substantially parallel to the optical axis, and is convex on the light emitting diode 1 side. It is configured.
  • the light emitted from the light emitting diode 1 is incident on the convex incident surface 22b of the level 2, and is refracted at the incident surface 22b so that the light divergence angle is narrowed.
  • the refracted light is refracted or totally reflected at the interface between the liquid 2w and the bubble 21, and is emitted from the exit surface 23 of the level 2 and enters the light receiving elements 31 to 34.
  • the projection light of the bubble 21 is projected onto the light receiving elements 31 to 34 by the light from the light emitting diode 1.
  • the horizontal sensor 10 of the present embodiment forms a parallel light by disposing a level 2 having a shape such that the incident surface 22b is directed to the light emitting diode 1 to become a convex shape, thereby forming a light receiving unit.
  • the size of 3 can be reduced to the same level as the size of the bubble 21, and the light receiving sensitivity can be increased.
  • the level 2 itself has a condensing function, it is not necessary to insert an optical component such as a convex lens between the light emitting diode 1 and the level 2 for condensing.
  • the size of the level axis (horizontal sensor thickness) can be reduced, the horizontal sensor can be downsized, and at the same time, the cost can be reduced by reducing the number of parts.
  • the laser marking device of this embodiment includes the above-described horizontal sensor 10 for detecting the tilt angle of the horizontal control stage.
  • Laser marking device is for marking ink It has a laser irradiation unit 101 that emits laser light, and a horizontal control stage 103 on which the laser irradiation unit 101 is mounted and capable of controlling the level.
  • the horizontal control stage 103 includes a laser irradiation unit 101 that emits a laser beam for inking and a horizontal sensor 10 that detects the level.
  • the horizontal control stage 103 is supported at three points from below, one of which is a support shaft 104, the other two are two drive shafts 105 and 106, and two drive shafts 105 106 are connected to drive systems 107 and 108, respectively, and are driven up and down by the drive systems 107 and 108, whereby the level of the horizontal control stage 103 is controlled.
  • the support shaft 104 is held by a support shaft metal fitting 104a, and the support shaft metal fitting 104a is fixed to the bottom plate 117.
  • the laser irradiation unit 101 emits the ground ink laser 119 downward.
  • the horizontal sensor 10 detects the level of the horizontal control stage 103.
  • the drive shafts 105 and 106 and the support shaft 104 are tiltably coupled to the horizontal control stage 103 by ball joints 120, respectively.
  • the support shaft 104, the drive shafts 105 and 106, and the drive systems 107 and 108 will be described.
  • the support shaft 104 is disposed near the end, avoiding the vicinity of the center of the horizontal control stage 103, and the drive shaft 105 is disposed in the X direction of the horizontal control stage 103 with reference to the support shaft 104 in FIG.
  • the drive shaft 106 is also disposed in the Y direction with respect to the support shaft 104.
  • the horizontal control stage 103 is coupled to the support shaft 104 at the support shaft coupling point 121, coupled at the drive shaft 105 to the X drive shaft coupling point 122, and coupled to the drive shaft 106 at the Y drive shaft coupling point 123. Yes.
  • the support shaft 4 and the drive shafts 105 and 106 include a straight line connecting the support shaft coupling point 121 and the X drive shaft coupling point 122 and a straight line connecting the support shaft coupling point 121 and the Y drive shaft coupling point 123. It is arranged so as to be orthogonal to each other. Each coupling point is arranged at the end of the horizontal control stage 103 so that the distance between the support shaft coupling point 121, the X drive shaft coupling point 122, and the Y drive shaft coupling point 123 is as wide as possible.
  • the distance between the support shaft coupling point 121 and the X drive shaft coupling point 122 is 25.5 mm
  • the distance between the support shaft coupling point 121 and the Y drive shaft coupling point 123 is 15.5 mm. Since each coupling point is arranged near the end of the horizontal control stage 103, the horizontal control stage 103 can be provided with an optical path hole 103a through which the ground ink laser 119 passes, and the distance between each coupling point can be set. By separating, the tilt angle of the horizontal control stage 103 can be finely adjusted. In this way, the laser marking device is large Ink printing can be performed well with a simple structure while securing the optical path of the inking laser 119.
  • the drive systems 107 and 108 for driving the drive shafts 105 and 106 will be described with reference to Figs.
  • the drive systems 107 and 108 are engaged with the drive source motor 109, the worm 110 fixed to the shaft of the motor 109, the worm wheel 111 meshing with the worm 110, and the worm wheel 111.
  • the drive system 107 includes a plate 113 and the drive system 108 includes a plate 114 above the fitting screw 112.
  • the worm 110 is fixed to the shaft of the motor 109 and meshes with the worm wheel 111 to reduce the rotation of the motor 109 and transmit it to the worm wheel 111.
  • the worm wheel 111 has a female screw for moving the fitting screw 112 up and down inside.
  • the female screw rotates with the worm wheel 111.
  • the fitting screw 112 has a male screw shape, is inserted into the female screw, and is fixed to the plates 113 and 114 at the upper end portion of the fitting screw 112. Since the plates 113 and 114 are coupled to the horse drive shafts 105 and 106, the rotary motion of the motor 109 passes through the worm 110, the worm wheel 111, the fitting screw 112, and the plates 11 3 and 114. Thus, it is converted into the vertical movement of the drive shafts 105 and 106.
  • the motor 109 is fixed to the bracket 115 by a fixing screw 115a, and the worm wheel 111 is held by the bracket 115.
  • a guide shaft 116 for guiding the plates 115 and 114 so as to be movable up and down is provided in parallel with the fitting screw 112.
  • Fig. 28 shows modularized parts of the drive systems 107 and 108.
  • the motor 109, the worm 110, and the worm wheel 111 are integrated with a bracket 115 to constitute a drive module 124. Since the drive module 124 having the same configuration is used to drive both the drive shaft 105 and the drive shaft 106, individual components are not required, and the cost of components can be reduced.
  • FIG. 29 and 30 the arrangement configuration of the drive module 124 will be described with reference to FIGS. 29 and 30.
  • FIG. The two drive modules 124 are shifted up and down with respect to the case side plate 118, and are arranged so that the axial directions of the motor 109 are opposite to each other.
  • the bracket 115 is fixed to the case plate with the fixing screw 115b substantially perpendicular to the bottom plate 117. It is fixed to 118. Is it placed on the same housing side plate 118? As a result, the installation work with screws can be performed from one direction, and the assembly cost can be reduced.
  • the drive module 124 is shifted up and down and arranged in the opposite direction, so that the compactness can be achieved and the optical path of the inking laser 119 can be secured. Further, by making the plate 113 into a shape having different upper and lower surfaces, the drive shaft 105 located below the fitting screw 112 and away from the fitting screw 112 is avoided, avoiding the optical path of the inking laser. , And the horizontal control stage 103 can be tilted.
  • the horizontal sensor 10 detects the level of the horizontal control stage 103, and transmits the detected data to a horizontal control unit (not shown).
  • the horizontal control unit rotates the motor 109 to level the horizontal control stage 103 based on the detection data of the horizontal sensor 10.
  • the rotation of the motor 109 causes the worm 110 attached to the shaft of the motor 109 to rotate, and the worm 110 decelerates and rotates the meshing worm wheel 111.
  • a female screw is formed inside the worm wheel 111. When the worm wheel 111 rotates, the female screw also rotates, and the fitting screw 112 fitted to the female screw is coupled to the plates 113 and 114. It moves up and down without rotating.
  • the drive shafts 105 and 106 and the support shaft 104 are coupled by a horizontal control stage 103 and a ball joint 120.
  • the ball joint 120 moves so that the coupled portion can tilt and is fitted with the female screw of the worm wheel 111. Since a margin is expected between the joint screw 112 and between the plates 113 and 114 and the guide shaft 116, the horizontal movement of the drive shafts 105 and 106 causes the horizontal control stage 103 to move horizontally. It is driven and controlled.
  • the tilt angle of the horizontal control stage 103 due to the displacement of the fitting screw 112 of 0.00075 mm is determined by the support shaft coupling point 121 and the X drive shaft coupling point 122 when the motor 109 of the drive system 107 rotates one step. Since the distance to the drive shaft 105 is tilted 0.001 degree and the motor 109 of the drive system 108 rotates one step, the support shaft coupling point 121 and the Y drive shaft coupling point 123 Since the distance is 15.5 mm, it is tilted by 0.00028 degree in the direction of the drive shaft 106. In this way, a minute displacement can be realized. Further, since the motor 109 is decelerated only by the worm wheel 111 and the worm 110 without using a plurality of spur gears, the size can be reduced, and the part cost can be reduced.
  • the worm wheel 111 has a female screw, and the fitting screw 1 12 has a male screw shape.
  • the worm wheel 111 has a male screw and has a fitting screw 112.
  • a female screw may be used.
  • various coupling methods capable of force tilting in which the horizontal control stage 103, the support shaft 104, and the drive shafts 105 and 106 are coupled by the ball joint 120, can be employed. Further, various coupling methods can be employed without coupling the drive module 124 and the case side plate 118 with the fixed screw 115b.
  • the shape of the plates 113 and 114 is not limited to the shape in the above embodiment, and various shapes that transmit the movement of the fitting screw 112 to the drive shafts 105 and 106 can be employed.
  • a beam splitter used in the laser irradiation unit 101 will be described with reference to FIGS. 31 (a) and 31 (b).
  • cylindrical triangular prisms 202 and triangular prisms 203 each having a substantially right-angled cross section are shelled on the surfaces 222 and 231 of the respective inclined surfaces.
  • the material of the triangular prisms 202 and 203 is preferably a transparent glass, but a resin material can also be used.
  • the light is reflected from the surface 222 with the surface 221 facing the laser light A side, and the light is irradiated upward.
  • the incident light is transmitted and reflected on the surfaces 221, 222, and 223 of the triangular prism 202, respectively.
  • Thin films 221a, 222a, and 223a that are branched into two are deposited.
  • the transmittance representing the ratio of the amount of transmitted light to the amount of incident light varies depending on the wavelength of light.
  • the transmittance of surfaces 221, 222, and 223 will be described. 32 shows the transmittance of surface 221, FIG. 33 shows the transmittance of surface 222, and FIG. 34 shows the transmittance of surface 223.
  • the horizontal axis indicates the wavelength of light, and the vertical axis indicates the transmittance.
  • the dotted line indicates the wavelength of the laser diode used as the light source of the laser marking device.
  • the transmittance of the surface 221 at 635 nm is about 100%
  • the transmittance of the surface 222 is 80%
  • the transmittance of the surface 223 is 70%.
  • Fig. 35 shows a state in which laser light that also emits laser diode power enters from the surface 221 and diverges on each surface.
  • the ratio of each branched light when the amount of laser light A is 1 is attached to each laser light. It is written in the Katsuko of the symbol.
  • the laser beam A incident on the surface 221 is transmitted through the triangular prism 202 without being reflected almost entirely.
  • 80% of the incident light to the triangular prism 202 is transmitted light B and 20% is reflected upward on the surface 222.
  • 70% of the reflected laser light is laser light C transmitted through the surface 223, and its light quantity is 0.14.
  • the remaining 30% becomes the downward laser beam D, and the amount of light is 0.06.
  • the laser beam D is branched at the surface 222 and is 80% of the light amount 0.06.
  • 0.048 is the laser beam E that passes through the surface 222 and exits from the surface 23 2, and the amount of light.
  • the amount of light that is 20% of 06. .012 becomes the laser beam F that reflects the surface 222 and returns to the direction of the laser diode. Therefore, assuming that the amount of laser light generated by the laser diode force is 1, the amount of each branched light is 0.8 for transmitted light B, 0.14 for upward laser light C, and for downward laser light.
  • the light E is 0.048, and the laser light F returning to the laser diode is 0.012.
  • incident light can be branched in three directions by one beam splitter, the beam splitter can be downsized, and the cost can be reduced by reducing the number of components. Can do.
  • Fig. 36 the arrangement of the beam splitter 101a is turned upside down so that the reflected light from the first surface 222 irradiates downward, and the incident light is branched at the same rate as in the above configuration.
  • a configuration with adjusted permeability is shown.
  • the transmittance of surface 222 is 77.5% and the transmittance of surface 223 is 21 %.
  • the amount of each branched light is 0.775 for the transmitted light B forward of the beam splitter 101a, 0.138 for the laser light E passing through the surface 232, and the laser light C passing through the surface 223.
  • the ratio of branching to three directions is approximately the same as in the seventeenth embodiment, but the laser beam F to the laser diode becomes 0.040, which is not suitable because the loss is large.
  • a semi-cylindrical lens may be used instead of the cylindrical lens 209.
  • the transmittance of each surface of the beam splitter 101a can be set to a value suitable for the purpose of use.
  • Fig. 37 shows the use of the laser marking device using the beam splitter in a rectangular parallelepiped room.
  • the laser marking device includes a vertical reference optical system 204 and a horizontal reference optical system 205.
  • the vertical reference optical system 204 includes a laser diode 206 that emits laser light for marking, and a laser beam.
  • a cylindrical lens 209 for line light.
  • the laser diode 206 is placed sideways so as to emit laser light horizontally.
  • the beam splitter 101a for branching the laser light is held by the casing 210, and holes of an aperture 211 having a diameter of 1 to 3 mm are formed in the upper and lower surfaces of the casing 210.
  • the casing 210 is rotatable and adjustable around an axis parallel to the column axis of the columnar triangular prism.
  • the cylindrical lens 209 has a cylindrical shape, and is arranged so that the cylinder axis is perpendicular to the laser beam and horizontal.
  • the horizontal reference optical system 205 includes a laser diode 206, a collimating lens 207, and a cylindrical lens 209.
  • the horizontal reference optical system 205 is disposed below the vertical reference optical system 204 and is below the vertical reference optical system 204. It has a lower point hole 212 through which laser light at point 244 passes.
  • Laser diode 206 of horizontal reference optical system 205 irradiates in the same direction as laser diode 206 of vertical reference optical system 204, and in front of lower point hole 212 so as not to obstruct the optical path of lower point 244, And it arrange
  • the laser diode 206 emits laser light in the horizontal direction, and the laser light is collimated by the collimating lens 207 and enters the beam splitter 101a. And Since the beam splitter 101a according to the seventeenth embodiment is used, the laser light that has passed through the beam splitter 101a is reflected obliquely upward by the reflecting mirror 208, spreads in a fan shape in the vertical direction by the cylindrical lens 209, and is vertically Reference line 241 is used to illuminate the front of the room and the ceiling.
  • the laser beam branched vertically upward by the beam splitter 101a is squeezed by the aperture 211 to irradiate the ceiling surface to become an upper point 243, and the laser beam branched vertically downward by the beam splitter 101a irradiates the floor surface. Lower point 244.
  • the laser diode 206 emits laser light in the horizontal direction.
  • the laser light is collimated by the collimating lens 207 and spreads in a fan shape in the horizontal direction by the cylindrical lens 209. Irradiate the front of the room with reference line 242.
  • the vertical reference line 241, the upper point 243, and the lower point 24 4 can be irradiated by one laser diode 206 and one beam splitter 101a. It is possible to irradiate the upper point 243 and the lower point 244 on the same line. By reducing the number of parts, the laser marking device can be reduced in size and cost, and the optical axis can be easily adjusted. Further, since the beam splitter 101a according to the above-described embodiment is used, the ratio of the laser light is as follows: vertical reference line 241 force SO. 8, upper point 243 force SO. 14, lower point 244 force 0.048 become.
  • the vertical reference line 241 needs more light than the upper point 243 and the lower point 244, and the distance to the upper point 243 is longer than the lower point 244.
  • 243 is a force that requires more light than the lower point 244.
  • the brightness is balanced and the requirement is satisfied. Visibility of dark parts is bad! /, So to make the parts brighter, the whole is brightened and does not exceed Class 2 of the JIS laser standard. Further, since the ratio of the laser light returning to the laser diode 206 is as small as 0.012, the control of the laser diode driving circuit in which the temperature rise due to the laser light can be stabilized, and the laser light is not wasted.
  • the beam splitter 10 la is positioned by temperature change or external force. Even if fluctuates, the position of the vertical reference line 241 is not affected.
  • the upper point 243 and lower point 244 are The laser beam is narrowed down by the chia 211 so as to be substantially circular and small, so that the visibility is improved. Further, since the vertical reference line 241 is irradiated to the vertically upper side of the laser marker by the reflecting mirror and the cylindrical lens, workability can be improved.
  • the optical path of the vertical reference line 241 can be avoided, so that the laser marking device can be reduced in size and cost. Can be achieved.
  • the vertical reference line 241, the upper point 243, and the lower point 244 are not necessary in the work that requires the horizontal reference line 242, and the horizontal reference line 241, in the work that requires the vertical reference line 241.
  • Reference line 242 is not required.
  • the current consumption can be suppressed by turning on the laser diode 206 of the horizontal reference optical system 205 and turning off the laser diode 206 of the vertical reference optical system 204.
  • the current consumption can be suppressed by turning on the laser diode 206 of the vertical reference optical system 204 and turning off the laser diode 206 of the horizontal reference optical system 205.
  • a laser marker that emits only the vertical reference line 241, the upper point 243 and the lower point 244 a laser marker that emits only the horizontal reference line 242, and the vertical reference line 241, the upper point 243 and the lower point
  • Three types of laser marking devices that emit all of 244 and horizontal reference line 242 can be easily made by combining vertical reference optical system 204 and horizontal reference optical system 205.
  • FIG. 38 shows the relationship between the incident light, transmitted light, and reflected light angles in the beam splitter 101a.
  • the beam splitter 101a is placed so that the normal line of the surface 221 is parallel to the horizontal line 251, and the laser beam A is incident on the surface 221 at an angle H with the horizontal line 251 of ⁇ 1.
  • the incident laser light is transmitted through the surface 222. Since the triangular prism 202 and the triangular prism 203 are made of the same material, the angles I and Q are equal, and the refractive indexes of the surfaces 221 and 233 are the same. Angle H and angle K are also equal. Therefore, the angle K between the transmitted light B of the beam splitter 101a and the horizontal line 251 is ⁇ 1 like the laser light A.
  • the laser beam C to the upper point 243 is reflected by the surface 222, but the angle I and the angle L are equal, so the angle M and the angle N are equal, and the refractive index of the surface 221 and the surface 223 Is the same, the angle O is equal to the angle H and ⁇ 1.
  • the laser beam E to the lower point 244 has an angle P equal to the angle N.
  • the angle 3 ⁇ 4 is also equal to the angle P. Therefore, the angle ⁇ is equal to the angle M, and the refractive indexes of the surface 221 and the surface 232 are the same, so the angle R is equal to the angle H and ⁇ 1. Therefore, the angle of the laser beams C and E with respect to the upper point 243 and the lower point 244 with the vertical line 252 is equal to the angle with the horizontal line 251 of the laser light A.
  • FIG. 39 shows a method of adjusting the optical axes of the upper point 243 and the lower point 244 using the relationship between the angles of the laser light A and the laser lights C and E in the beam splitter 101a. From the relationship of FIG. 38 described above, the laser beam irradiating the upper point 243 and the lower point 244 will not be in a straight line unless the laser beam A and the normal of the surface 221 are parallel. At this time, the housing 210 holding the beam splitter 101a is rotated and adjusted around an axis parallel to the column axis of the columnar triangular prism 202, so that the incident laser beam and the normal of the surface 221 are parallel to each other. The laser beams irradiating the upper point 243 and the lower point 244 are aligned. In this way, the optical axis adjustment of the upper point 243 and the lower point 244 can be facilitated.
  • FIGS. 40 and 41 A beam splitter and a laser marking device according to still another embodiment of the present invention will be described with reference to FIGS. 40 and 41.
  • the laser marking device according to the present embodiment irradiates a ceiling cross line in place of the upper point 243, and the transmittance on the surface 222 and the surface 223 of the beam splitter 101a is different.
  • a cylindrical lens is provided above the body 210.
  • FIG. 40 shows a state in which the laser light emitted from the laser diode 206 is incident from the surface 221 of the beam splitter 1 Ola and branches on each surface, and the ratio of each branched light when the amount of incident light is 1 is roughly shown. It is described in.
  • the transmittance of surface 222 is 50%, and the transmittance of surface 222 is 90%.
  • the forward laser beam B has a light quantity of 0.5
  • the upward laser light C has a light quantity of 0.45
  • the downward laser light E has a light quantity of 0.025.
  • Fig. 41 shows the state of use of the laser marking device in a rectangular parallelepiped room.
  • the laser marking device includes a cylindrical lens 209 on the optical path of the laser beam above the casing 210 of the vertical reference optical system 204, and its column axis is parallel to the laser beam emitted horizontally from the laser diode 206. It is arranged to become.
  • the laser light emitted from the laser diode 206 enters the beam splitter 101a, and is divided into transmitted light, upward branched light, and downward branched light.
  • the transmitted light has a light quantity of 0.5 and becomes the vertical reference line 241.
  • the laser light branched upward is fanned by the cylindrical lens 209 with a light quantity of 0.45 and is perpendicular to the vertical reference line 241.
  • the laser beam that has split into the ceiling cross line 245 and branched downwards has a light amount of 0.025 and a lower point 244.
  • the vertical reference line 241 and the ceiling cross line 245 have the same brightness, and a laser beam suitable for downlight installation work can be emitted.
  • a laser marking device according to another embodiment of the present invention will be described with reference to FIG. 42 and FIG.
  • the laser marking device changes the orientation of the arrangement of the beam splitter 101a in the laser marking device, and irradiates both sides without irradiating the upper point 243 and the lower point 244.
  • Figure 42 shows the external appearance of the vertical reference optical system 204 of the laser marking device and the usage situation in a rectangular parallelepiped room.
  • 43 (a) is a diagram in which the force in the arrow U direction in FIG. 42 is also viewed
  • FIG. 43 (b) is a diagram in which the force in the arrow V direction in FIG. 42 is also viewed.
  • the laser marking device of the present embodiment is arranged so that the surface 223 of the beam splitter 101a faces the arrow W direction in FIG. 42 and the surface 232 faces the arrow X direction.
  • J has reflectors 208b and 208c and cylindrical lenses 209b and 209c!
  • the beam splitter 101a is rotatable and adjustable around an axis parallel to the column axis of the columnar triangular prism so that the optical axis can be adjusted.
  • the reflecting mirrors 208b and 208c are installed with their reflecting surfaces obliquely upward so as to reflect the horizontal laser light obliquely upward, and the cylindrical lenses 209b and 209c have a cylindrical axis of the laser light emitted from the laser diode 206.
  • the laser light emitted from the laser diode 206 and made parallel by the collimating lens 207 is split into transmitted light and reflected light in the arrow W direction and X direction in FIG. 42 by the beam splitter 101a. Then, the branched light in the direction of arrow W is reflected obliquely upward by the reflecting mirror 208b, spreads in a fan shape by the cylindrical lens 209b, becomes line light, irradiates the left side of the room and the ceiling, and becomes the left vertical reference line 246.
  • the branched light in the arrow X direction is reflected obliquely upward by the reflecting mirror 208c, spreads in a fan shape by the cylindrical lens 209c, becomes line light, irradiates the indoor right side surface and ceiling surface, and becomes the right vertical reference line 247.
  • the transmittance of each surface of the beam splitter 101a may be set to an appropriate value.
  • One laser diode 206 and one beam splitter 101a can irradiate the vertical reference line 241, left vertical reference line 246, and right vertical reference line 24 7. Therefore, the laser marking device can be reduced in size and cost can be reduced. .

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

La présente invention concerne un capteur horizontal (10) comprenant une diode électroluminescente (1) en tant que source lumineuse, un niveau d’eau (2) rempli de liquide (2w) afin de conserver une bulle d’air (21), une unité photoréceptrice (3) dotée de quatre éléments photorécepteurs (31-34), une unité de guide lumineux (4a) qui guide la lumière de la diode électroluminescente (1) et une unité électroluminescente planaire (4b) qui émet une lumière planaire. La lumière de l’unité de guide lumineux (4a) est appliquée comme lumière de diffusion au niveau d’eau (2) par l’unité électroluminescente planaire (4b). La diffusion de quantité de lumière projetée de la bulle d’air (21) sur l’unité photoréceptrice (3) présente un point minimal à proximité de l’axe central de la bulle (21) et augmente de manière monotone selon la distance depuis cet axe central dans une plage sensiblement identique au rayon de la bulle (21). Ainsi, la taille du plan de réception de lumière de l’unité photoréceptrice (3) peut devenir inférieure à une ombre de bulle d’air du diamètre de la bulle (21), ce qui réduit le capteur horizontal et accroît son exactitude.
PCT/JP2006/315619 2005-08-08 2006-08-08 Capteur horizontal et marqueur laser Ceased WO2007018191A1 (fr)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2005230102A JP4270181B2 (ja) 2005-08-08 2005-08-08 水平センサ
JP2005-230101 2005-08-08
JP2005-230100 2005-08-08
JP2005230100 2005-08-08
JP2005230101A JP4270180B2 (ja) 2005-08-08 2005-08-08 水平センサ
JP2005-230102 2005-08-08
JP2006-144504 2006-05-24
JP2006-143797 2006-05-24
JP2006143797A JP5362175B2 (ja) 2006-05-24 2006-05-24 レーザ墨出し器
JP2006144504A JP4747946B2 (ja) 2006-05-24 2006-05-24 レーザ墨出し器

Publications (1)

Publication Number Publication Date
WO2007018191A1 true WO2007018191A1 (fr) 2007-02-15

Family

ID=37727374

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2006/315619 Ceased WO2007018191A1 (fr) 2005-08-08 2006-08-08 Capteur horizontal et marqueur laser

Country Status (1)

Country Link
WO (1) WO2007018191A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101975586A (zh) * 2010-09-14 2011-02-16 上海诺司纬光电仪器有限公司 激光整平仪的整平系统及其调试方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924694B1 (fr) * 1970-11-25 1974-06-25
JPS6058508A (ja) * 1983-09-09 1985-04-04 Nippon Denso Co Ltd 角度検出装置
JPH09250926A (ja) * 1996-03-15 1997-09-22 Nitsushiyoo Kiki Kk 水平方向の墨出し用レーザー装置
JP2002243443A (ja) * 2001-02-20 2002-08-28 Yasaka:Kk 水平制御機構及びこの機構を備えたレーザー墨出し器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924694B1 (fr) * 1970-11-25 1974-06-25
JPS6058508A (ja) * 1983-09-09 1985-04-04 Nippon Denso Co Ltd 角度検出装置
JPH09250926A (ja) * 1996-03-15 1997-09-22 Nitsushiyoo Kiki Kk 水平方向の墨出し用レーザー装置
JP2002243443A (ja) * 2001-02-20 2002-08-28 Yasaka:Kk 水平制御機構及びこの機構を備えたレーザー墨出し器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101975586A (zh) * 2010-09-14 2011-02-16 上海诺司纬光电仪器有限公司 激光整平仪的整平系统及其调试方法

Similar Documents

Publication Publication Date Title
US6675489B2 (en) Laser sighting device
WO2000031618A1 (fr) Ecran tactile a balayage optique
JP2006030031A (ja) 分光器
JP4741017B2 (ja) 光源ユニット、及び画像表示装置
US6892464B2 (en) Laser sighting device
CN108693614A (zh) 照射装置、放线仪、及照射装置的调节方法
WO2017175672A1 (fr) Actionneur rotatif à axe unique
JP2018166039A (ja) 光射出装置および画像表示システム
KR100510890B1 (ko) 경사 광조사 장치
JP2006292728A (ja) 光電式エンコーダ
US7417217B2 (en) Regressive reflection type photoelectric switch
WO2007018191A1 (fr) Capteur horizontal et marqueur laser
JP7077822B2 (ja) 光測距装置
JP4270181B2 (ja) 水平センサ
CN111913305B (zh) 发射模组及深度传感器、电子设备
US6339490B1 (en) Optical scanning apparatus
CN112327471B (zh) 显微镜系统及其调校方法及测序系统
JP4928863B2 (ja) 水平センサ
US20100078582A1 (en) Beam irradiation device and position sensing device
JP2007046963A (ja) 水平センサ
JPH10232363A (ja) 光走査装置
CN112731574B (zh) 一种棱镜及激光扫描单元
US20250389534A1 (en) Simultaneous multi-axis displacement measurement device using optical system
TWI737474B (zh) 固態光學相位掃描構件
CN111736289B (zh) 光学模块

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application
NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 06782461

Country of ref document: EP

Kind code of ref document: A1