WO2009132005A2 - Appareil et procedes d’utilisation d’une cassette a ruban de polissage - Google Patents

Appareil et procedes d’utilisation d’une cassette a ruban de polissage Download PDF

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Publication number
WO2009132005A2
WO2009132005A2 PCT/US2009/041256 US2009041256W WO2009132005A2 WO 2009132005 A2 WO2009132005 A2 WO 2009132005A2 US 2009041256 W US2009041256 W US 2009041256W WO 2009132005 A2 WO2009132005 A2 WO 2009132005A2
Authority
WO
WIPO (PCT)
Prior art keywords
polishing tape
cassette
polishing
supply
spool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2009/041256
Other languages
English (en)
Other versions
WO2009132005A3 (fr
Inventor
Antoine P. Manens
Gary C. Ettinger
Paul D. Butterfield
Shou-Sung Chang
Ricardo Martinez
Eashwer Kollata
Robert A. Ewald
Kuldip Sumbria
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of WO2009132005A2 publication Critical patent/WO2009132005A2/fr
Publication of WO2009132005A3 publication Critical patent/WO2009132005A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/004—Machines or devices using grinding or polishing belts; Accessories therefor using abrasive rolled strips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers

Definitions

  • the present invention relates generally to electronic device processing, and more particularly to methods and apparatus for using a polishing tape cassette.
  • undesirable materials may build up on the edge of a substrate.
  • the materials may include dielectrics, photoresist and metals used in IC manufacture. Therefore, it may be desirable to clean or polish the bevel and outer edge of the substrate to remove these materials to prepare the substrate for electronic (e.g. semiconductor) device manufacturing.
  • an abrasive polishing tape is applied with some degree of force to polish bevels on the edge of the substrate. Generally contact between the abrasive polishing and portions of the substrate reserved for device fabrication ( Mevice region') is avoided.
  • a buffer zone or ⁇ edge exclusion zone, ' is provided between the device region and the edge of the substrate to protect the device region.
  • a cassette for housing a polishing tape adapted to polish a substrate includes a body portion; and a head portion, wherein the head portion includes: a pair of guide walls; one or more supply rollers positioned between the guide walls in the head portion; and wherein the guide walls are adapted to guide a polishing tape housed in the body over the one or more supply rollers.
  • a system for polishing an edge of a substrate is provided.
  • the system includes a substrate support adapted to support a substrate; a polishing head adapted to press a polishing tape against an edge of the substrate; and a cassette for housing the polishing tape, the cassette including: a body portion; and [0022] a head portion, wherein the head portion includes: a pair of guide walls; one or more supply rollers positioned between the guide walls in the head portion; and wherein the guide walls are adapted to guide the polishing tape housed in the body over the one or more supply rollers.
  • a method in another aspect of the invention, includes providing a supply spool including a length of polishing tape; routing the length of polishing tape over a supply roller positioned between two walls in a head portion of a cassette; and providing a take- up spool adapted to receive the length of polishing tape from the supply roller, wherein the supply spool and take-up spool are housed in a body portion of the cassette.
  • FIG. 1 is a schematic illustration depicting an example embodiment of a substrate cleaning apparatus according to the present invention.
  • FIG. 2 is a schematic illustration of a tape cassette according to the present invention.
  • FIG. 3A is a schematic illustration of a tape cassette according to the present invention.
  • FIG. 3B is a schematic illustration of a tape cassette according to the present invention.
  • FIG. 4 is a flow chart depicting an example application method of embodiments for replacing a tape cassette according to the present invention.
  • FIG. 5A is a schematic illustration of a spool including a length of polishing tape according to the present invention.
  • FIG. 5B is a schematic illustration of a spool according to the present invention.
  • FIG. 6 is a schematic illustration of a cross- section of a spool including a length of polishing tape according to the present invention.
  • the present invention provides improved methods and apparatus for cleaning and/or polishing an edge of a substrate, for example, before fabrication processes (e.g. deposition and etching processes) , are performed.
  • One method of cleaning and polishing a substrate edge includes applying an abrasive film or tape ("polishing tape") to the substrate edge, and moving the polishing tape relative to the substrate edge, while the substrate is fixed in a particular position.
  • the force, or pressure, applied to the polishing tape while contacting the substrate edge, as well as the degree of contact between the polishing tape and the substrate edge may contribute to polishing efficiency.
  • Another factor that may contribute to polishing efficiency is the degree of movement of the polishing tape relative to the substrate edge.
  • the relative movement may be provided by advancing the polishing tape over a surface of the substrate edge.
  • the degree of relative movement between the polishing tape and the substrate edge may be further increased by moving the substrate as the polishing tape is advanced over the surface of the substrate edge, thereby increasing the polishing efficiency and the cost-effectiveness thereof.
  • the polishing tape may be supplied to the substrate edge via a supply spool, while the used or worn polishing tape may be routed to a take-up spool.
  • Both the supply spool and the take-up spool may be housed in a cassette.
  • the cassette may also include one or more rotatable rollers, positioned between the supply and the take-up spools, to aide in routing or guiding/aligning the polishing tape through the cassette.
  • the rollers may be flange rollers or crown rollers, for example. In conventional systems using flange rollers, the flanges may prevent the polishing tape from migrating off of the rollers.
  • the crown roller In conventional systems using crown rollers, the crown roller is convex in shape and may have a center diameter that is the largest diameter, and the crown roller is symmetric from that center point. In conventional systems, the polishing tape may tend to stay centered over the larger center diameter of the crown rollers.
  • the mechanical properties of the polishing tape e.g., high level of flexibility
  • the polishing tape may migrate towards one of the flanges. The migration may be due to the normal course of rotation or may be due to a misalignment between the supply spool and the supply roller, for example.
  • the polishing tape When the polishing tape contacts the rotating flange, the polishing tape may bunch up along the rotating flange and subsequently, the polishing tape may fold or roll over itself, thereby impeding the polishing process. Also, the flexible nature of the polishing tape may cause the polishing tape to migrate from the largest center of the crown roller.
  • the present invention provides apparatus and methods for effectively aligning and routing or guiding the polishing tape.
  • the present invention provides a smooth flangeless supply roller having a constant diameter to aide in routing the polishing tape through the cassette, wherein the cassette includes a body portion and a head portion.
  • the inventive supply roller may be positioned in the cassette such that the fixed walls of the cassette head act as guides to prevent the polishing tape from migrating off of the roller.
  • the supply roller may also be the same width as the polishing tape to further prevent the migration of the polishing tape to an end of the roller.
  • the relative motion between the supply roller and the fixed cassette walls may prevent the polishing tape from bunching and folding, even when there is a misalignment between the supply spool and the supply roller, for example.
  • the cassette head walls may control the location of the polishing tape and allow a repeatable alignment of the polishing head.
  • the present invention provides a method for replacing the used or worn polishing tape in the cassette. It may be beneficial to provide a method for quickly replacing the supply and take-up spools, to aide in efficient throughput while minimizing polishing tool downtime.
  • the cassette may include two portions, the body which houses the spools, and the head which interfaces with the polishing tool, for example, and through which the polishing tape is routed.
  • the spools in a first step, the spools may be disengaged from the motors. The motors may be used to index or advance the polishing tape. Then the cassette may be removed from the polishing tool.
  • the cassette may be opened, and the polishing tape may be disengaged from the rollers in the cassette head.
  • the spools and used polishing tape may then be removed from the cassette.
  • the new supply spool with unused polishing tape and the new take-up spool may be installed in the cassette.
  • the polishing tape may be threaded or routed from the supply spool, through the head and connected to the take-up spool.
  • the cassette may be closed and placed back into the tool. While the used or spent cassette is being rebuilt, a fresh or new cassette having an unused polishing tape supply may be inserted into the polishing tool, such that downtime of the tool may be reduced.
  • the cassette having the used polishing tape may remain in the polishing tool, while the used spools may be replaced with new or unused spools.
  • the polishing apparatus 100 may include a substrate driver 104 (e.g., a servomotor, gear, belt, chain, etc.), which may be mounted on a pedestal 106.
  • a support 108 e.g., a vacuum chuck
  • the support 108 may support the substrate 102, for example.
  • the substrate driver 104 may rotate the substrate 102, via the support 108, about a center 110 of the substrate 102 or another suitable axis.
  • the substrate driver 104 may be connected to a substrate driver control unit (not shown) , which may control the angular displacement, angular velocity, and angular acceleration of the substrate 102.
  • the polishing apparatus 100 may further include a polishing arm 112 aligned in the horizontal plane approximately tangential to an edge of the substrate 102 and supported by a frame 114. In other embodiments, the polishing arm 112 may be aligned differently, for example, vertically or at an angle with respect to the horizontal plane.
  • the polishing arm 112 may include a polishing head section 116 ( ⁇ head' ) .
  • the polishing head 116 may include a backing pad 118, which may be moved towards or away from the substrate 102 by an actuator (e.g., hydraulic actuator, pneumatic actuator, servomotor, etc.) (not shown) .
  • Polishing tape 120 may wrap around the polishing head 116, and over the backing pad 118, and be tensioned between spools housed in a cassette 200. In some embodiments, one cassette may be supplied per polishing head 116.
  • the spools may be driven by spool drivers 122, 124 (e.g., servomotors), respectively.
  • the spool drivers 122, 124 may be indexed to precisely control the amount of the polishing tape 120 that is advanced over the polishing head 116 from, for example, the spools, in order to polish the substrate 102.
  • the cassette 200 may include a body portion 202 and a head portion 204.
  • the cassette body 202 may house a supply spool 206 and a take-up spool 208, shown in more detail in FIGS. 5A, 5B and 6. While only one supply and take-up spool 206, 208 are shown herein, other numbers of supply and take-up spools may be used.
  • the supply spool 206 and take-up spool 208 may each include a pair of flanges 500 (FIG. 5A and 5B), coupled to a core 502.
  • the length of polishing tape 120 may be wound around, or unwound from, the core 502.
  • the cassette body 202 may include a selectively removable cover 201 (FIG. 1) .
  • the supply spool 206 may store unused polishing tape 120 available to be unwound and pulled into the polishing apparatus 100, positioned adjacent the substrate 102, while the take-up spool 208 may be adapted to receive used and/or worn polishing tape 120.
  • One or both of the supply and take-up spools 206, 208 may be indexed to precisely control the amount of polishing tape 120 that is advanced to the polishing apparatus 100.
  • the polishing tape 120 may be continuously moving.
  • the take-up spool 208 may advance at a particular speed, and the supply spool 206 may create the tension.
  • a tape loop 210 indicates the portion of polishing tape 120 that is routed around the polishing head 116, shown in FIG. 1.
  • the cassette body 202 may also include a plurality of rollers 212 to further guide and route the polishing tape 120 through the cassette 200.
  • the supply and take-up spools 206, 208 may have a diameter of approximately 1 inch and be capable of holding about 500 inches of polishing tape 120, or may be a diameter of approximately 3 inches and be capable of holding about 30,000 inches of polishing tape 120. Other spool dimensions may be used.
  • the spools 206, 208 may be constructed from materials such as polyurethane, polyvinyl difluoride (PVDF) , etc. Other materials may also be used.
  • the supply and take-up spools 206, 208 may be formed by selectively coupling two flanges (not shown) to a core (not shown) , where the supply of polishing tape 120 is wound around the core, and each of the two flanges is coupled to opposite ends of the core.
  • FIGs. 3A and 3B a schematic view of the cassette head 204, with and without the polishing tape 120, respectively, is provided.
  • the cassette head 204 may include a supply roller 300 and a take-up roller 302. Other suitable amounts of supply and take-up rollers may be used. Similarly to the rollers 212 described above with respect to FIG. 2, the supply and take-up rollers 300, 302 may be used to guide the polishing tape 120.
  • the supply roller 300 may be smooth, flat and have a constant diameter, unlike conventional crown rollers, for example.
  • the supply roller 300 may be positioned in the cassette head 204 such that a pair of walls 304 (shown in FIG.
  • FIG. 4 a flow chart depicting an exemplary method 400 for replacing the used and/or worn/spent polishing tape, after the supply has been exhausted, for example, may be provided.
  • each of the supply and take-up spools 206, 208 may be coupled to, and driven by, spool drivers 122, 124 (e.g., servomotors) .
  • spool drivers 122, 124 e.g., servomotors
  • the spools and motors may include male and female connectors that are adapted to selectively matably engage the spool to the motor. These male and female connectors may be cone shaped. For example, a cone-shaped female connector 600 is shown in FIG. 6. Other suitable shapes may be used.
  • One of the benefits of a male and female connector is that spools and motors are centered during mating.
  • additional fastening devices 602 e.g., a screw
  • the cassette 200 may be further secured to the polishing apparatus 100 by a toggle clamp or cam, for example.
  • these additional fastening and securing devices may be removed.
  • the cassette 200 may be removed from the polishing apparatus 100.
  • the cassette cover 201 may then be removed from the cassette body 202.
  • the used and/or worn polishing tape 120 may be removed from the cassette head 204.
  • the cassette head 204 may not include a cover, and consequently, to remove the spent polishing tape therefrom, the polishing tape 120 may be severed from the supply spool 206 and pulled out of the cassette head 204.
  • the spent or used supply and take-up spools 206, 208 may be removed from the cassette body 202 in S108.
  • new supply and take-up spools may be inserted into the cassette body 202 in SIlO.
  • the fresh or new supply of polishing tape 120 may then be routed from the new supply spool through the polishing head and fastened to the new take-up spool, following the same path of the used polishing tape 120.
  • the cassette cover 201 if one is provided, may then be replaced in S114.
  • the rebuilt cassette may be re-installed on the polishing tool 100. Therefore, when the polishing tape supply needs to be replaced, the cassette may be replaced with a second unused or rebuilt cassette while the first original cassette is being rebuilt, thereby reducing the downtime of the polishing tool 100.
  • the cassette 200 may remain coupled to the polishing tool 100 while the used polishing tape 120 is replaced with new polishing tape.
  • the cassette body cover 201 may be removed from the cassette 200, and one or more flanges 500, 502 (FIG. 5A and 5B) coupled to a core 504 of the used supply and take-up spools 206, 208 may be removed therefrom.
  • the used supply core may be replaced with a new supply core including a supply of polishing tape, and the used take-up core having the length of used tape may be replaced with a new empty take-up core.
  • the used supply core may be re-purposed as the new take-up core.
  • inventive edge polishing apparatus described herein may be employed in apparatuses other than those adapted for bevel and edge polishing and/or removal of films on substrates. Further, as will be apparent to those of ordinary skill in the art, the apparatus describe herein may be employed to polish and/or remove films on an edge of a substrate supported in any orientation (e.g., horizontal, vertical, diagonal, etc) .
  • the present invention could be modified to clean substrates having other shapes (e.g., a glass or polymer plate for flat panel displays) .
  • processing of a single substrate by the apparatus is shown above, in some embodiments, the apparatus may process a plurality of substrates concurrently.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

L’invention concerne des procédés et un appareil destiné à contenir un ruban de polissage conçu pour polir un substrat. L’appareil selon l’invention comprend : une cassette constituée d’une partie corps et d’une partie tête, la partie tête comprenant une paire de parois de guidage ; et au moins un rouleau d’acheminement disposé entre les parois de guidage dans la partie tête, les parois de guidage étant conçues pour guider un ruban de polissage contenu dans le corps sur ledit rouleau d’acheminement au moins. L’invention présente également de nombreux autres aspects.
PCT/US2009/041256 2008-04-21 2009-04-21 Appareil et procedes d’utilisation d’une cassette a ruban de polissage Ceased WO2009132005A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US4645308P 2008-04-21 2008-04-21
US61/046,453 2008-04-21

Publications (2)

Publication Number Publication Date
WO2009132005A2 true WO2009132005A2 (fr) 2009-10-29
WO2009132005A3 WO2009132005A3 (fr) 2010-03-04

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PCT/US2009/041256 Ceased WO2009132005A2 (fr) 2008-04-21 2009-04-21 Appareil et procedes d’utilisation d’une cassette a ruban de polissage

Country Status (3)

Country Link
US (1) US20090264053A1 (fr)
TW (1) TW201002472A (fr)
WO (1) WO2009132005A2 (fr)

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CN105397597A (zh) * 2015-10-26 2016-03-16 长安大学 一种多级一体化全自动金相磨抛机

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US10416575B2 (en) * 2016-11-16 2019-09-17 Suss Microtec Photomask Equipment Gmbh & Co. Kg Apparatus and method for cleaning a partial area of a substrate
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CN105397597B (zh) * 2015-10-26 2017-07-11 长安大学 一种多级一体化全自动金相磨抛机

Also Published As

Publication number Publication date
WO2009132005A3 (fr) 2010-03-04
TW201002472A (en) 2010-01-16
US20090264053A1 (en) 2009-10-22

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