ATE109593T1 - Photoelektrisches umwandlungselement und verfahren zu seiner herstellung. - Google Patents

Photoelektrisches umwandlungselement und verfahren zu seiner herstellung.

Info

Publication number
ATE109593T1
ATE109593T1 AT87300853T AT87300853T ATE109593T1 AT E109593 T1 ATE109593 T1 AT E109593T1 AT 87300853 T AT87300853 T AT 87300853T AT 87300853 T AT87300853 T AT 87300853T AT E109593 T1 ATE109593 T1 AT E109593T1
Authority
AT
Austria
Prior art keywords
insulating layer
forming
manufacture
electrode
photoelectric conversion
Prior art date
Application number
AT87300853T
Other languages
English (en)
Inventor
Junichi Hoshi
Tamotsu Satoh
Shiro Arikawa
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61023282A external-priority patent/JPS62179760A/ja
Priority claimed from JP61125937A external-priority patent/JPH0691234B2/ja
Priority claimed from JP61156266A external-priority patent/JPS6313369A/ja
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE109593T1 publication Critical patent/ATE109593T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/197—Bipolar transistor image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/016—Manufacture or treatment of image sensors covered by group H10F39/12 of thin-film-based image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors

Landscapes

  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Photovoltaic Devices (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
AT87300853T 1986-02-04 1987-01-30 Photoelektrisches umwandlungselement und verfahren zu seiner herstellung. ATE109593T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP61023282A JPS62179760A (ja) 1986-02-04 1986-02-04 光電変換装置の製造方法
JP61125937A JPH0691234B2 (ja) 1986-06-02 1986-06-02 光電変換装置
JP61156266A JPS6313369A (ja) 1986-07-04 1986-07-04 光電変換装置

Publications (1)

Publication Number Publication Date
ATE109593T1 true ATE109593T1 (de) 1994-08-15

Family

ID=27284192

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87300853T ATE109593T1 (de) 1986-02-04 1987-01-30 Photoelektrisches umwandlungselement und verfahren zu seiner herstellung.

Country Status (4)

Country Link
US (1) US5089425A (de)
EP (1) EP0232148B1 (de)
AT (1) ATE109593T1 (de)
DE (1) DE3750300T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3061891B2 (ja) * 1991-06-21 2000-07-10 キヤノン株式会社 半導体装置の製造方法
US5416344A (en) * 1992-07-29 1995-05-16 Nikon Corporation Solid state imaging device and method for producing the same
US5552619A (en) * 1995-05-10 1996-09-03 National Semiconductor Corporation Capacitor coupled contactless imager with high resolution and wide dynamic range
JP2004134514A (ja) * 2002-10-09 2004-04-30 Canon Inc 裏面入射型撮像センサ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3533158A (en) * 1967-10-30 1970-10-13 Hughes Aircraft Co Method of utilizing an ion beam to form custom circuits
US3816769A (en) * 1969-12-17 1974-06-11 Integrated Photomatrix Ltd Method and circuit element for the selective charging of a semiconductor diffusion region
US3624428A (en) * 1970-03-20 1971-11-30 Rca Corp Electric signal processing circuit employing capacitively scanned phototransistor array
JPS49105490A (de) * 1973-02-07 1974-10-05
NL7308240A (de) * 1973-06-14 1974-12-17
JPS6057714B2 (ja) * 1978-01-27 1985-12-16 株式会社日立製作所 光半導体装置
FR2461360A1 (fr) * 1979-07-10 1981-01-30 Thomson Csf Procede de fabrication d'un transistor a effet de champ du type dmos a fonctionnement vertical et transistor obtenu par ce procede
JPS5795769A (en) * 1980-12-05 1982-06-14 Fuji Photo Film Co Ltd Semiconductor image pickup device
US4686554A (en) * 1983-07-02 1987-08-11 Canon Kabushiki Kaisha Photoelectric converter
JPS60142561A (ja) * 1983-12-28 1985-07-27 Matsushita Electric Ind Co Ltd 撮像装置の製造方法
JPS60251657A (ja) * 1984-05-28 1985-12-12 Canon Inc 半導体装置
US4794443A (en) * 1984-05-28 1988-12-27 Canon Kabushiki Kaisha Semiconductor device and process for producing same
JPH0760888B2 (ja) * 1985-06-12 1995-06-28 キヤノン株式会社 光電変換装置

Also Published As

Publication number Publication date
DE3750300D1 (de) 1994-09-08
DE3750300T2 (de) 1994-12-15
US5089425A (en) 1992-02-18
EP0232148A3 (en) 1988-04-20
EP0232148A2 (de) 1987-08-12
EP0232148B1 (de) 1994-08-03

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties