ATE176038T1 - Methode und vorrichtung zur erzeugung von trockenem dampf - Google Patents

Methode und vorrichtung zur erzeugung von trockenem dampf

Info

Publication number
ATE176038T1
ATE176038T1 AT95105759T AT95105759T ATE176038T1 AT E176038 T1 ATE176038 T1 AT E176038T1 AT 95105759 T AT95105759 T AT 95105759T AT 95105759 T AT95105759 T AT 95105759T AT E176038 T1 ATE176038 T1 AT E176038T1
Authority
AT
Austria
Prior art keywords
manifold assembly
block
vessel
vapor
port
Prior art date
Application number
AT95105759T
Other languages
English (en)
Inventor
Peter F Ebbing
Kien N Chuc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of ATE176038T1 publication Critical patent/ATE176038T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/30—Accessories for evaporators ; Constructional details thereof
    • B01D1/305—Demister (vapour-liquid separation)
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22—STEAM GENERATION
    • F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
    • F22B1/00—Methods of steam generation characterised by form of heating method
    • F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
    • F22B1/284—Methods of steam generation characterised by form of heating method in boilers heated electrically with water in reservoirs

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Sustainable Development (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
  • Treatments For Attaching Organic Compounds To Fibrous Goods (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Extraction Or Liquid Replacement (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Sampling And Sample Adjustment (AREA)
AT95105759T 1994-04-15 1995-04-18 Methode und vorrichtung zur erzeugung von trockenem dampf ATE176038T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/227,973 US5537508A (en) 1993-03-22 1994-04-15 Method and dry vapor generator channel assembly for conveying a liquid from a liquid source to a liquid vaporizer with minimal liquid stagnation

Publications (1)

Publication Number Publication Date
ATE176038T1 true ATE176038T1 (de) 1999-02-15

Family

ID=22855225

Family Applications (2)

Application Number Title Priority Date Filing Date
AT98113092T ATE198648T1 (de) 1994-04-15 1995-04-18 Methode und vorrichtung zur erzeugung von trockenem dampf
AT95105759T ATE176038T1 (de) 1994-04-15 1995-04-18 Methode und vorrichtung zur erzeugung von trockenem dampf

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT98113092T ATE198648T1 (de) 1994-04-15 1995-04-18 Methode und vorrichtung zur erzeugung von trockenem dampf

Country Status (6)

Country Link
US (1) US5537508A (de)
EP (2) EP0677703B1 (de)
JP (1) JPH0882402A (de)
KR (1) KR100362770B1 (de)
AT (2) ATE198648T1 (de)
DE (2) DE69519880T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5949958A (en) * 1995-06-07 1999-09-07 Steris Corporation Integral flash steam generator
ATE522926T1 (de) * 1997-02-14 2011-09-15 Imec Verfahren zur entfernung organischer kontamination von einer halbleiteroberfläche
US6350322B1 (en) 1997-03-21 2002-02-26 Micron Technology, Inc. Method of reducing water spotting and oxide growth on a semiconductor structure
DE19810833B4 (de) * 1998-03-12 2004-08-12 Herz, Helmut, Dr.-Ing. Einrichtung zur thermischen Behandlung von Flüssigkeiten
FR2793703B1 (fr) * 1999-05-19 2001-06-29 Inst Francais Du Petrole Procede de fabrication de compositions utilisables comme agents de surface emulsifiants et dispersants, les compositions obtenues et leurs utilisations
JP2003190725A (ja) * 2001-12-25 2003-07-08 Maruyasu Industries Co Ltd 気液分離器
US7003215B2 (en) * 2002-01-21 2006-02-21 Air Products And Chemicals, Inc. Vapor flow controller
US20030234929A1 (en) * 2002-06-24 2003-12-25 Applied Materials, Inc. Method and system to reduce/detect a presence of gas in a flow of a cleaning fluid
EP1553342A1 (de) * 2003-12-31 2005-07-13 Electrodomesticos Taurus S.L. Druckaufgeladener Dampferzeuger
US7776228B2 (en) * 2006-04-11 2010-08-17 Ebara Corporation Catalyst-aided chemical processing method
EP1890097A1 (de) * 2006-08-07 2008-02-20 Electrolux Home Products Corporation N.V. Kühlschrank mit Trinkflüssigkeitabgabeeinrichtung, und System zur Versorgung von Informationen bezüglich des Zustands der Flüssigkeit in der Abgabeeinrichtung
US8297223B2 (en) * 2007-10-02 2012-10-30 Msp Corporation Method and apparatus for particle filtration and enhancing tool performance in film deposition
US8734661B2 (en) 2007-10-15 2014-05-27 Ebara Corporation Flattening method and flattening apparatus
US9259533B2 (en) * 2008-03-31 2016-02-16 Covidien Lp Safety needle with spring biased retraction mechanism
US9451792B1 (en) * 2014-09-05 2016-09-27 Atmos Nation, LLC Systems and methods for vaporizing assembly
CN105714271B (zh) * 2014-12-22 2020-07-31 株式会社堀场Stec 汽化系统

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US570790A (en) * 1896-11-03 Separator
US1355935A (en) * 1920-10-19 benjamin
US644862A (en) * 1899-05-06 1900-03-06 David S Jacobus Boiler.
DE359303C (de) * 1921-03-27 1922-09-21 Bbc Brown Boveri & Cie Einrichtung zum Betrieb von Elektrodendampfkesseln
US2494654A (en) * 1948-09-07 1950-01-17 Super Mold Corp Boiler
GB681356A (en) * 1949-03-23 1952-10-22 Frank George Jefferies Improvements in or relating to electrically operated steam generating apparatus and the like
DE1117228B (de) * 1959-02-21 1961-11-16 Peter Franken Als Handgeraet ausgebildeter, elektrisch beheizter Dampfapparat, vorzugsweise fuer die Koerper- und Gesundheitspflege
FR1237897A (fr) * 1959-06-25 1960-08-05 C E V I N Générateur portatif de vapeur
GB890306A (en) * 1959-08-13 1962-02-28 Parnall & Sons Ltd An improved water evaporating unit for dispersing de-frost water from a refrigerator
US3267678A (en) * 1964-05-06 1966-08-23 Camp Nat Vapor-generating device
US3339531A (en) * 1965-06-29 1967-09-05 William J Fitzgerald Flash-type steam generators
US3637979A (en) * 1969-01-16 1972-01-25 Sprinkler Corp Of America Educational apparatus
US3654780A (en) * 1971-04-21 1972-04-11 Dart Ind Inc Clothes steamer device
US4091056A (en) * 1972-06-28 1978-05-23 Veikko Hamalainen Method of vaporizing liquids
US4098853A (en) * 1974-03-25 1978-07-04 Chemetron Corporation Humidifier and automatic control system therefor
US4276243A (en) * 1978-12-08 1981-06-30 Western Electric Company, Inc. Vapor delivery control system and method
SU832247A1 (ru) * 1979-04-04 1981-05-23 Одесский Филиал Научно-Производственногообъединения "Агроприбор" Электродный котел
US4281636A (en) * 1979-06-07 1981-08-04 Vegh Elmer S Steam processor
US4356834A (en) * 1979-11-02 1982-11-02 Lemay Dan B Vapor feed regulator
US4436674A (en) * 1981-07-30 1984-03-13 J.C. Schumacher Co. Vapor mass flow control system
FR2512473A1 (fr) * 1981-09-09 1983-03-11 Maksa Christian Dispositif de repassage a vapeur sous pression
US4878458A (en) * 1987-08-31 1989-11-07 Nelson Clinton D Method and apparatus for generating pressurized fluid
US4977094A (en) * 1987-12-28 1990-12-11 Ionics, Incorporated Process for monitoring the quality of water
FR2625794B1 (fr) * 1988-01-08 1990-05-04 Bourgeois Ste Coop Production Generateur de vapeur d'eau pour appareil de cuisson
JPH01249666A (ja) * 1988-03-31 1989-10-04 Nippon Steel Corp 溶射によるセラミックの接合方法
JPH02267985A (ja) * 1989-04-07 1990-11-01 Matsushita Electric Ind Co Ltd Ｃｏ↓２ガスレーザ制御装置
US5063609A (en) * 1989-10-11 1991-11-05 Applied Materials, Inc. Steam generator
FR2653208B3 (fr) * 1989-10-13 1991-12-06 Bonnet Sa Chaudiere pour l'alimentation en vapeur d'un four de cuisson d'aliments.
JPH05164878A (ja) * 1991-12-17 1993-06-29 Hitachi Ltd 気水分離器・蒸気乾燥器一体構造
JPH0629277A (ja) * 1992-07-08 1994-02-04 Hitachi Ltd ベーパ乾燥装置
US5399200A (en) * 1994-03-10 1995-03-21 Stauffer; Craig M. Module in an integrated delivery system for chemical vapors from liquid sources

Also Published As

Publication number Publication date
KR100362770B1 (ko) 2003-02-11
DE69507365D1 (de) 1999-03-04
EP0677703B1 (de) 1999-01-20
DE69519880D1 (de) 2001-02-15
EP0874193B1 (de) 2001-01-10
ATE198648T1 (de) 2001-01-15
EP0874193A2 (de) 1998-10-28
JPH0882402A (ja) 1996-03-26
EP0874193A3 (de) 1998-12-16
KR950034569A (ko) 1995-12-28
US5537508A (en) 1996-07-16
EP0677703A1 (de) 1995-10-18
DE69519880T2 (de) 2001-08-02

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Legal Events

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