ATE259542T1 - Mehrschichtiger elektrostatischer substrathalter und verfahren zu seiner herstellung - Google Patents

Mehrschichtiger elektrostatischer substrathalter und verfahren zu seiner herstellung

Info

Publication number
ATE259542T1
ATE259542T1 AT96908686T AT96908686T ATE259542T1 AT E259542 T1 ATE259542 T1 AT E259542T1 AT 96908686 T AT96908686 T AT 96908686T AT 96908686 T AT96908686 T AT 96908686T AT E259542 T1 ATE259542 T1 AT E259542T1
Authority
AT
Austria
Prior art keywords
layer
insulating layer
clamping
electrodes
metallization
Prior art date
Application number
AT96908686T
Other languages
English (en)
Inventor
Anwar Husain
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Application granted granted Critical
Publication of ATE259542T1 publication Critical patent/ATE259542T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0432—Apparatus for thermal treatment mainly by conduction
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
    • H10P72/722—Details of electrostatic chucks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/23—Chucks or sockets with magnetic or electrostatic means

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
  • Laminated Bodies (AREA)
AT96908686T 1995-03-10 1996-03-01 Mehrschichtiger elektrostatischer substrathalter und verfahren zu seiner herstellung ATE259542T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/401,524 US5671116A (en) 1995-03-10 1995-03-10 Multilayered electrostatic chuck and method of manufacture thereof
PCT/US1996/003076 WO1996028842A1 (en) 1995-03-10 1996-03-01 Multilayered electrostatic chuck and method of manufacture thereof

Publications (1)

Publication Number Publication Date
ATE259542T1 true ATE259542T1 (de) 2004-02-15

Family

ID=23588119

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96908686T ATE259542T1 (de) 1995-03-10 1996-03-01 Mehrschichtiger elektrostatischer substrathalter und verfahren zu seiner herstellung

Country Status (8)

Country Link
US (2) US5671116A (de)
EP (1) EP0813748B1 (de)
JP (1) JP4059349B2 (de)
KR (1) KR100369106B1 (de)
CN (2) CN1123062C (de)
AT (1) ATE259542T1 (de)
DE (1) DE69631523T2 (de)
WO (1) WO1996028842A1 (de)

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Also Published As

Publication number Publication date
CN1242453C (zh) 2006-02-15
EP0813748A1 (de) 1997-12-29
KR100369106B1 (ko) 2003-03-15
US5671116A (en) 1997-09-23
CN1515380A (zh) 2004-07-28
JP4059349B2 (ja) 2008-03-12
DE69631523D1 (de) 2004-03-18
JPH11502062A (ja) 1999-02-16
CN1178600A (zh) 1998-04-08
CN1123062C (zh) 2003-10-01
DE69631523T2 (de) 2004-12-16
US5880922A (en) 1999-03-09
EP0813748B1 (de) 2004-02-11
WO1996028842A1 (en) 1996-09-19
KR19980702925A (ko) 1998-09-05

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