ATE341776T1 - Optischer mikroverschluss mit elektrostatischem antrieb und mikroverschlussmatrix mit vereinfachter steuerung - Google Patents

Optischer mikroverschluss mit elektrostatischem antrieb und mikroverschlussmatrix mit vereinfachter steuerung

Info

Publication number
ATE341776T1
ATE341776T1 AT02005580T AT02005580T ATE341776T1 AT E341776 T1 ATE341776 T1 AT E341776T1 AT 02005580 T AT02005580 T AT 02005580T AT 02005580 T AT02005580 T AT 02005580T AT E341776 T1 ATE341776 T1 AT E341776T1
Authority
AT
Austria
Prior art keywords
petal
fixed support
micro shutter
condition
microshutter
Prior art date
Application number
AT02005580T
Other languages
English (en)
Inventor
Marco Pizzi
Original Assignee
Fiat Ricerche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fiat Ricerche filed Critical Fiat Ricerche
Application granted granted Critical
Publication of ATE341776T1 publication Critical patent/ATE341776T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/04—Networks or arrays of similar microstructural devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Liquid Crystal (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
AT02005580T 2001-03-16 2002-03-12 Optischer mikroverschluss mit elektrostatischem antrieb und mikroverschlussmatrix mit vereinfachter steuerung ATE341776T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT2001TO000251A ITTO20010251A1 (it) 2001-03-16 2001-03-16 Micro-otturatore ottico a controllo elettrostatico, e matrice di micro-otturatori a controllo semplificato.

Publications (1)

Publication Number Publication Date
ATE341776T1 true ATE341776T1 (de) 2006-10-15

Family

ID=11458701

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02005580T ATE341776T1 (de) 2001-03-16 2002-03-12 Optischer mikroverschluss mit elektrostatischem antrieb und mikroverschlussmatrix mit vereinfachter steuerung

Country Status (5)

Country Link
EP (1) EP1241508B1 (de)
AT (1) ATE341776T1 (de)
DE (1) DE60215067T2 (de)
ES (1) ES2272591T3 (de)
IT (1) ITTO20010251A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20011142A1 (it) * 2001-12-07 2003-06-09 C R F Societa Con Sortile Per ,,micro-specchio con micro-otturatore a controllo elettrostatico, matrice di micro-specchi e spettrofotometro infrarosso comprendente tale m
US8576469B2 (en) 2009-05-13 2013-11-05 Samsung Electronics Co., Ltd. Light screening apparatus including roll-up actuators
KR20120068569A (ko) * 2010-12-17 2012-06-27 삼성전자주식회사 광 차폐 장치 및 이를 구비한 전자 기기
KR101878719B1 (ko) 2011-06-24 2018-07-16 삼성전자 주식회사 광 차폐 장치 및 그 제조 방법
WO2016049759A1 (en) * 2014-09-29 2016-04-07 Aero-Shade Technologies Canada, Inc. Light blocking microshutter

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5233459A (en) * 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
US6239777B1 (en) * 1997-07-22 2001-05-29 Kabushiki Kaisha Toshiba Display device
JPH1195693A (ja) * 1997-07-22 1999-04-09 Toshiba Corp 表示装置
US6236491B1 (en) * 1999-05-27 2001-05-22 Mcnc Micromachined electrostatic actuator with air gap

Also Published As

Publication number Publication date
ES2272591T3 (es) 2007-05-01
EP1241508A3 (de) 2004-09-29
EP1241508B1 (de) 2006-10-04
ITTO20010251A0 (it) 2001-03-16
ITTO20010251A1 (it) 2002-09-16
DE60215067T2 (de) 2007-01-25
DE60215067D1 (de) 2006-11-16
EP1241508A2 (de) 2002-09-18

Similar Documents

Publication Publication Date Title
CN101151206B (zh) 用于作动显示器的方法和装置
CN103336362B (zh) 用于作动显示器的方法和装置
EP1350758A3 (de) Elektrostatischer bimorpher Aktor
US7551344B2 (en) Methods for manufacturing displays
CA2479301C (en) Micro light modulator arrangement
US20060187530A1 (en) Methods and apparatus for actuating displays
DE602004020778D1 (de) Variables optisches dämpfungsglied
WO2005036575A3 (en) Micro-electromechanical switching backplane
EP2005243A2 (de) Analoges mems mit nichtlinearer unterstützung
CN104360559B (zh) 光阀、显示基板、显示装置
DE60215067D1 (de) Optischer Mikroverschluss mit elektrostatischem Antrieb und Mikroverschlussmatrix mit vereinfachter Steuerung
ES2115723T3 (es) Conjuntos de acristalamiento.
US6879429B2 (en) Drive circuit for a MEMS device
ATE276532T1 (de) Mikrospiegel mit elektrostatisch gesteuertem mikroverschluss, anordnung von mikrospiegeln und infrarot-spektrophotometer mit dieser anordnung
JPH07274545A (ja) 電気−機械変換素子を使用した駆動装置の駆動方法
CN110346930B (zh) 一种mems微镜及mems光开关
JP6378838B2 (ja) バックライトモジュール及び液晶表示装置
KR970028633A (ko) 변배광학계
US20110025657A1 (en) Method of operating electromechanical pixels
CN210123518U (zh) 镜头结构及投影装置
ATE293258T1 (de) Optische vorrichtung mit magnetisch betriebenen mikroverschlüssen oder mikrospiegeln
TWI438556B (zh) 快門及使用該快門之相機模組
KR940023216A (ko) 투사형화상표시장치의 광로조절수단
KR20040057322A (ko) 이중거울 구조를 이용한 초소형 광감쇄기
KR950024164A (ko) 광자기 디스크 드라이브의 포커싱 장치

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties