ATE346748T1 - Piezoelektrisches antriebselement, tintenstrahldruckkopf, herstellungsverfahren dafür, und tintenstrahldrucker - Google Patents

Piezoelektrisches antriebselement, tintenstrahldruckkopf, herstellungsverfahren dafür, und tintenstrahldrucker

Info

Publication number
ATE346748T1
ATE346748T1 AT00104371T AT00104371T ATE346748T1 AT E346748 T1 ATE346748 T1 AT E346748T1 AT 00104371 T AT00104371 T AT 00104371T AT 00104371 T AT00104371 T AT 00104371T AT E346748 T1 ATE346748 T1 AT E346748T1
Authority
AT
Austria
Prior art keywords
piezoelectric
group
ceramic particles
piezoelectric ceramic
inkjet
Prior art date
Application number
AT00104371T
Other languages
English (en)
Inventor
Hong Qui
Koji Sumi
Tsutomu Nishiwaki
Haruo Nakamura
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of ATE346748T1 publication Critical patent/ATE346748T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
    • H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Compositions Of Oxide Ceramics (AREA)
AT00104371T 1999-03-02 2000-03-02 Piezoelektrisches antriebselement, tintenstrahldruckkopf, herstellungsverfahren dafür, und tintenstrahldrucker ATE346748T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5393199 1999-03-02
JP2000056138A JP3508682B2 (ja) 1999-03-02 2000-03-01 圧電アクチュエータ、インクジェット式記録ヘッド、これらの製造方法及びインクジェットプリンタ

Publications (1)

Publication Number Publication Date
ATE346748T1 true ATE346748T1 (de) 2006-12-15

Family

ID=26394664

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00104371T ATE346748T1 (de) 1999-03-02 2000-03-02 Piezoelektrisches antriebselement, tintenstrahldruckkopf, herstellungsverfahren dafür, und tintenstrahldrucker

Country Status (5)

Country Link
US (1) US6419848B1 (de)
EP (1) EP1033250B1 (de)
JP (1) JP3508682B2 (de)
AT (1) ATE346748T1 (de)
DE (1) DE60032041T2 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6566983B2 (en) * 2000-09-02 2003-05-20 Lg Electronics Inc. Saw filter using a carbon nanotube and method for manufacturing the same
JP4721507B2 (ja) * 2000-11-29 2011-07-13 京セラ株式会社 圧電磁器組成物及びこれを用いたインクジェット記録ヘッド
JP4688301B2 (ja) * 2001-01-23 2011-05-25 京セラ株式会社 圧電磁器組成物及びこれを用いたインクジェット記録ヘッド
SG115500A1 (en) 2002-10-09 2005-10-28 Inst Materials Research & Eng Method to produce a reliable piezoelectric thick film on a substrate
GB0229655D0 (en) * 2002-12-20 2003-01-22 Xaar Technology Ltd Droplet deposition apparatus
JP4521751B2 (ja) * 2003-03-26 2010-08-11 国立大学法人東京工業大学 チタン酸ジルコニウム酸鉛系膜、誘電体素子、誘電体膜の製造方法
JP4179029B2 (ja) 2003-04-15 2008-11-12 株式会社村田製作所 圧電セラミックの製造方法
US7399067B2 (en) 2004-02-27 2008-07-15 Canon Kabushiki Kaisha Piezoelectric thin film, method of manufacturing piezoelectric thin film, piezoelectric element, and ink jet recording head
US7565723B2 (en) * 2004-03-30 2009-07-28 Brother Kogyo Kabushik Kaisha Piezoelectric actuator and method of fabricating piezoelectric actuator
US7527363B2 (en) * 2004-07-16 2009-05-05 Fujifilm Corporation Discharge head of image forming apparatus with piezoelectric body for generating and sensing pressure
US8356011B2 (en) * 2005-07-26 2013-01-15 Microsoft Corporation Organizing presence information into collections of publications
JP4925007B2 (ja) * 2006-02-17 2012-04-25 独立行政法人産業技術総合研究所 圧電体球状微粒子の製造方法
JP4640222B2 (ja) * 2006-03-15 2011-03-02 セイコーエプソン株式会社 インクジェットヘッドの製造方法
US20070235500A1 (en) * 2006-03-31 2007-10-11 Daewoong Suh Room temperature joining process with piezoelectric ceramic-activated reactive multilayer foil
US8108345B2 (en) 2006-03-31 2012-01-31 Microsoft Corporation Managing rich presence collections in a single request
US8234559B2 (en) * 2006-03-31 2012-07-31 Microsoft Corporation Managing rich presence collections
JP4940389B2 (ja) * 2007-01-19 2012-05-30 国立大学法人 名古屋工業大学 無鉛圧電磁器複合体及びこれを用いた圧電素子
JP5281786B2 (ja) * 2007-11-14 2013-09-04 日本碍子株式会社 （Ｌｉ，Ｎａ，Ｋ）（Ｎｂ，Ｔａ）Ｏ３系圧電材料、及びその製造方法
JP5011227B2 (ja) * 2008-07-28 2012-08-29 日本碍子株式会社 （Ｌｉ，Ｎａ，Ｋ，Ｂｉ）（Ｎｂ，Ｔａ）Ｏ３系圧電材料及びその製造方法
JP5244749B2 (ja) * 2009-09-14 2013-07-24 富士フイルム株式会社 液体吐出ヘッド、液体吐出ヘッドの駆動方法、及び、画像記録装置
FR2950197A1 (fr) * 2009-09-15 2011-03-18 Commissariat Energie Atomique Membrane piezoelectrique a actionnement optimise et procede de fabrication de la membrane
US8766511B2 (en) * 2011-08-17 2014-07-01 The Boeing Company Method and system for distributed network of nanoparticle ink based piezoelectric sensors for structural health monitoring
JP6186784B2 (ja) * 2013-03-22 2017-08-30 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、圧電素子及び超音波センサー
JP5984774B2 (ja) * 2013-09-30 2016-09-06 三菱重工業株式会社 超音波探触子
JP6597987B2 (ja) * 2014-03-18 2019-10-30 セイコーエプソン株式会社 圧電素子、アクチュエーター装置、液体噴射ヘッド、液体噴射装置及び超音波測定装置
CN107266072A (zh) * 2017-03-02 2017-10-20 中国兵器工业第五二研究所烟台分所 一种低温烧结pzt95‑5压电陶瓷的制备方法
CN113004025A (zh) * 2021-02-24 2021-06-22 广西中科鑫玺电子科技有限公司 一种压电陶瓷工艺配方
CN113264766A (zh) * 2021-06-07 2021-08-17 西安交通大学 一种无铅压电薄膜材料及其制备方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2842448B2 (ja) 1989-07-11 1999-01-06 日本碍子株式会社 圧電／電歪膜型アクチュエータ
DE69026765T2 (de) 1989-07-11 1996-10-24 Ngk Insulators Ltd Einen piezoelektrischen/elektrostriktiven Film enthaltende piezoelektrischer/elektrostriktiver Antrieb
JP2825366B2 (ja) * 1991-05-23 1998-11-18 松下電器産業株式会社 圧電セラミックス
JP3254750B2 (ja) * 1992-09-28 2002-02-12 セイコーエプソン株式会社 強誘電体薄膜素子、インクジェット記録装置および強誘電体薄膜素子の製造方法
JP3128681B2 (ja) 1994-07-08 2001-01-29 新日本製鐵株式会社 可動モールド式連続鋳造機のモールド用コーティング剤
US5634999A (en) 1994-09-06 1997-06-03 Ngk Insulators, Ltd. Method of producing ceramic diaphragm structure having convex diaphragm portion
JPH08104568A (ja) * 1994-09-30 1996-04-23 Matsushita Electric Ind Co Ltd 圧電セラミックスおよびその製造方法
JPH09157019A (ja) 1995-11-30 1997-06-17 Mita Ind Co Ltd 複合酸化物膜
JPH1093153A (ja) 1996-09-13 1998-04-10 Ricoh Co Ltd 電気機械変換素子及びその製造方法並びにインクジェットヘッド
JP3682684B2 (ja) 1997-10-20 2005-08-10 セイコーエプソン株式会社 圧電体薄膜素子の製造方法
US6402304B1 (en) 1998-08-12 2002-06-11 Seiko Epson Corporation Piezoelectric actuator, ink jet printing head, printer, method for manufacturing piezoelectric actuator, and method for manufacturing ink jet printing head

Also Published As

Publication number Publication date
JP3508682B2 (ja) 2004-03-22
EP1033250B1 (de) 2006-11-29
EP1033250A1 (de) 2000-09-06
DE60032041D1 (de) 2007-01-11
US6419848B1 (en) 2002-07-16
JP2000315827A (ja) 2000-11-14
DE60032041T2 (de) 2007-03-08

Similar Documents

Publication Publication Date Title
ATE346748T1 (de) Piezoelektrisches antriebselement, tintenstrahldruckkopf, herstellungsverfahren dafür, und tintenstrahldrucker
US6441537B1 (en) Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
EP1726050A4 (de) Piezoelektrischer dünnfilm, verfahren zur herstellung eines piezoelektrischen dünnfilms, piezoelektrisches element und inkjet-aufzeichnungskopf
US20150062220A1 (en) Liquid ejecting apparatus, print head unit, and drive substrate
EP0827833A3 (de) Tintenstrahlkopfvorrichtung
ATE327893T1 (de) Tintenstrahlaufzeichnungskopf, verfahren zur herstellung und tintenstrahlaufzeichnungsgerät
ATE498913T1 (de) Piezoelektrisches verbundelement und dessen herstellungsverfahren
EP0911891A3 (de) Verfahren zum Herstellen einer piezoelektrischen Dünnschicht und Tintenstrahldruckkopf mit Verwendung dieser Dünnschicht
ATE381964T1 (de) Fokussierte akustische energie in der herstellung und screening von kombinatorischen bibliotheken
CA2451629A1 (en) Compact ink jet printhead
DE69935777D1 (de) Hydrophile struktur
EP1124266A3 (de) Piezoelektrisches Vibrationselement, Flüssigkeitsstrahlkopf, Herstellungsverfahren des piezoelektrischen Vibrationselements sowie Herstellungsverfahren des Flüssigkeitsstrahlkopfs
DE50310112D1 (de) Mehrschichtmaterialien zum herstellen von verpackungen
DE60102346D1 (de) Tintenstrahlaufzeichnungsmaterial
ATE389541T1 (de) Tintenstrahlkopf und kopfmodule
CN100475536C (zh) 致动器装置、液体喷射头以及液体喷射装置
DE69910336D1 (de) Tintenstrahldruckkopf und dessen Herstellungsverfahren
ATE293048T1 (de) Aufzeichnungsmedium und bilderzeugungsverfahren damit
CN109304936A (zh) 微机电系统器件的制造方法以及微机电系统器件
DE60009240D1 (de) Aufzeichnungsmaterial, Herstellungsverfahren davon, Aufzeichnungsverfahren und damit aufgezeichnetes Produkt
CN100335285C (zh) 喷墨头的制造方法
JP2007287744A5 (ja) インクジェット式記録ヘッドおよびインクジェットプリンタ
JP2007284262A5 (ja) インクジェット式記録ヘッドおよびインクジェットプリンタ
US6844661B2 (en) Piezoelectric ceramic composition and piezoelectric actuator for ink-jet head based on use of the same
JPS58194572A (ja) インクジエツト用複合体励振器

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties