ATE353477T1 - Herstellungsverfahren für ein monolithisches piezoelektrisches bauelement - Google Patents

Herstellungsverfahren für ein monolithisches piezoelektrisches bauelement

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Publication number
ATE353477T1
ATE353477T1 AT03016741T AT03016741T ATE353477T1 AT E353477 T1 ATE353477 T1 AT E353477T1 AT 03016741 T AT03016741 T AT 03016741T AT 03016741 T AT03016741 T AT 03016741T AT E353477 T1 ATE353477 T1 AT E353477T1
Authority
AT
Austria
Prior art keywords
monolithic piezoelectric
mol
ceramic
piezoelectric
stoichiometric composition
Prior art date
Application number
AT03016741T
Other languages
English (en)
Inventor
Horikawa Katsuhiro
Ogawa Tomoyuki
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Application granted granted Critical
Publication of ATE353477T1 publication Critical patent/ATE353477T1/de

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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
    • C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
    • C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based
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    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3279—Nickel oxides, nickalates, or oxide-forming salts thereof
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    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3294—Antimony oxides, antimonates, antimonites or oxide forming salts thereof, indium antimonate
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    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602—Making the green bodies or pre-forms by moulding
    • C04B2235/6025—Tape casting, e.g. with a doctor blade
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    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
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    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6583—Oxygen containing atmosphere, e.g. with changing oxygen pressures
    • C04B2235/6584—Oxygen containing atmosphere, e.g. with changing oxygen pressures at an oxygen percentage below that of air
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    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C04B2235/786—Micrometer sized grains, i.e. from 1 to 100 micron
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    • C04B2235/74—Physical characteristics
    • C04B2235/79—Non-stoichiometric products, e.g. perovskites (ABO3) with an A/B-ratio other than 1

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  • Engineering & Computer Science (AREA)
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  • Ceramic Engineering (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT03016741T 2002-07-25 2003-07-22 Herstellungsverfahren für ein monolithisches piezoelektrisches bauelement ATE353477T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002216120 2002-07-25
JP2003002988A JP3678234B2 (ja) 2002-07-25 2003-01-09 積層型圧電部品の製造方法、及び積層型電子部品

Publications (1)

Publication Number Publication Date
ATE353477T1 true ATE353477T1 (de) 2007-02-15

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AT03016741T ATE353477T1 (de) 2002-07-25 2003-07-22 Herstellungsverfahren für ein monolithisches piezoelektrisches bauelement

Country Status (8)

Country Link
US (1) US7431785B2 (de)
EP (1) EP1387417B1 (de)
JP (1) JP3678234B2 (de)
KR (1) KR100553226B1 (de)
CN (1) CN100382352C (de)
AT (1) ATE353477T1 (de)
DE (1) DE60311613T2 (de)
TW (1) TWI226714B (de)

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KR101109223B1 (ko) * 2010-01-20 2012-01-30 삼성전기주식회사 피에조액츄에이터
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JP6079773B2 (ja) 2012-03-30 2017-02-15 日本電気株式会社 シート積層装置およびシート積層方法
TW201434789A (zh) * 2013-01-29 2014-09-16 Canon Kk 壓電材料、壓電元件及電子裝備
US10308557B2 (en) * 2013-01-29 2019-06-04 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric element, and electronic equipment
JP6106009B2 (ja) * 2013-04-03 2017-03-29 太陽誘電株式会社 セラミック電子部品
JP5679010B2 (ja) * 2013-05-07 2015-03-04 Tdk株式会社 圧電素子およびその製造方法
CN105939983A (zh) * 2014-01-29 2016-09-14 佳能株式会社 压电陶瓷、压电陶瓷的制造方法、压电元件、多层压电元件、液体喷出头、液体喷出装置、超声马达、光学设备、振动装置、尘埃去除装置、成像装置和电子设备
KR101630606B1 (ko) * 2014-11-07 2016-06-15 포항공과대학교 산학협력단 전극 삽입형 분말사출성형을 이용한 적층형 압전소자 제조방법 및 그에 의해 제조된 적층형 압전 소자
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TW200409390A (en) 2004-06-01
CN1474467A (zh) 2004-02-11
JP3678234B2 (ja) 2005-08-03
KR20040010144A (ko) 2004-01-31
EP1387417A2 (de) 2004-02-04
JP2004111895A (ja) 2004-04-08
CN100382352C (zh) 2008-04-16
EP1387417B1 (de) 2007-02-07
US7431785B2 (en) 2008-10-07
US20040129919A1 (en) 2004-07-08
DE60311613T2 (de) 2007-11-22
EP1387417A3 (de) 2006-02-15
DE60311613D1 (de) 2007-03-22
KR100553226B1 (ko) 2006-02-22
TWI226714B (en) 2005-01-11

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