ATE373411T1 - Verfahren zur modifizierung von oberflächen - Google Patents

Verfahren zur modifizierung von oberflächen

Info

Publication number
ATE373411T1
ATE373411T1 AT98902332T AT98902332T ATE373411T1 AT E373411 T1 ATE373411 T1 AT E373411T1 AT 98902332 T AT98902332 T AT 98902332T AT 98902332 T AT98902332 T AT 98902332T AT E373411 T1 ATE373411 T1 AT E373411T1
Authority
AT
Austria
Prior art keywords
thereafter
conducting substrate
monomers
non conducting
pattern
Prior art date
Application number
AT98902332T
Other languages
English (en)
Inventor
Karl-Gunnar Larsson
Alf Pettersson
Stig Hedlund
Willis Forsling
Lars Gunneriusson
Mats Lindberg
Anna Selling
Original Assignee
Linea Tergi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Linea Tergi Ltd filed Critical Linea Tergi Ltd
Application granted granted Critical
Publication of ATE373411T1 publication Critical patent/ATE373411T1/de

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/182Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
    • H05K3/185Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method by making a catalytic pattern by photo-imaging
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1603Process or apparatus coating on selected surface areas
    • C23C18/1607Process or apparatus coating on selected surface areas by direct patterning
    • C23C18/1608Process or apparatus coating on selected surface areas by direct patterning from pretreatment step, i.e. selective pre-treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1603Process or apparatus coating on selected surface areas
    • C23C18/1607Process or apparatus coating on selected surface areas by direct patterning
    • C23C18/1612Process or apparatus coating on selected surface areas by direct patterning through irradiation means
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1635Composition of the substrate
    • C23C18/1639Substrates other than metallic, e.g. inorganic or organic or non-conductive
    • C23C18/1641Organic substrates, e.g. resin, plastic
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/20Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/2006Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30
    • C23C18/2026Pretreatment of the material to be coated of organic surfaces, e.g. resins by other methods than those of C23C18/22 - C23C18/30 by radiant energy
    • C23C18/204Radiation, e.g. UV, laser
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1168Graft-polymerization

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Chemically Coating (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Polymerisation Methods In General (AREA)
  • Chemical Treatment Of Metals (AREA)
AT98902332T 1997-01-31 1998-01-27 Verfahren zur modifizierung von oberflächen ATE373411T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9700307A SE508280C2 (sv) 1997-01-31 1997-01-31 Förfarande för att öka vidhäftningsförmågan hos ledande material till ytskikt av polymermaterial

Publications (1)

Publication Number Publication Date
ATE373411T1 true ATE373411T1 (de) 2007-09-15

Family

ID=20405596

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98902332T ATE373411T1 (de) 1997-01-31 1998-01-27 Verfahren zur modifizierung von oberflächen

Country Status (10)

Country Link
EP (1) EP0985333B1 (de)
JP (1) JP2001509213A (de)
AT (1) ATE373411T1 (de)
AU (1) AU5888798A (de)
DE (1) DE69838420T2 (de)
DK (1) DK0985333T3 (de)
ES (1) ES2293674T3 (de)
PT (1) PT985333E (de)
SE (1) SE508280C2 (de)
WO (1) WO1998034446A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005347424A (ja) * 2004-06-01 2005-12-15 Fuji Photo Film Co Ltd 多層配線板及びその製造方法
JP2007169763A (ja) * 2005-12-26 2007-07-05 Osaka Univ 二種以上の金属からなる金属ナノ粒子及びその形成方法
DE602007001344D1 (de) * 2006-04-10 2009-07-30 Linea Tergi Ltd Verfahren zur applizierung eines metalls auf ein substrat
SE0900936A1 (sv) * 2009-07-06 2010-12-28 Cathprint Ab Kateter och metod för tillverkning av sådan kateter
WO2012066018A2 (en) 2010-11-16 2012-05-24 Cuptronic Technology Ltd. Metal coating of objects using plasma polymerisation
EP2645830B1 (de) 2012-03-29 2014-10-08 Atotech Deutschland GmbH Herstellungsverfahren für Schaltungen mit feinen Linien
DK2847363T3 (da) 2012-05-07 2017-01-02 Cuptronic Tech Ltd Fremgangsmåde til påføring af metal
WO2014086844A2 (en) 2012-12-05 2014-06-12 Cuptronic Technology Ltd. Metalization of polymeric cavity filters
WO2015149825A1 (en) 2014-03-31 2015-10-08 Abb Technology Ltd Electric power cable and process for the production of electric power cable
JP6964409B2 (ja) 2014-04-28 2021-11-10 キュプトロニック テクノロジー リミテッド 表面のメタライゼーション
EP3354629A1 (de) * 2017-01-31 2018-08-01 Centre National De La Recherche Scientifique Material mit einer metallschicht und verfahren zur herstellung dieses materials
WO2022018136A1 (en) 2020-07-21 2022-01-27 Ncapt Ab METHOD FOR SURFACE TREATMENT PRIOR TO COATING and GLUING
SE545002C2 (en) 2020-07-24 2023-02-21 Cuptronic Tech Ltd Method for surface treatment prior to metallization

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117985A (en) * 1976-03-30 1977-10-03 Hitachi Chem Co Ltd Photosensitive polymer composition
JP2605010B2 (ja) * 1985-01-11 1997-04-30 インターナショナル・ビジネス・マシーンズ・コーポレーション 有機基板への金属付着方法
US4810326A (en) * 1987-08-31 1989-03-07 International Business Machines Corporation Interlaminate adhesion between polymeric materials and electrolytic copper surfaces
US5114757A (en) * 1990-10-26 1992-05-19 Linde Harold G Enhancement of polyimide adhesion on reactive metals
US5225495A (en) * 1991-07-10 1993-07-06 Richard C. Stewart, II Conductive polymer film formation using initiator pretreatment

Also Published As

Publication number Publication date
EP0985333A1 (de) 2000-03-15
DE69838420D1 (de) 2007-10-25
SE9700307D0 (sv) 1997-01-31
SE508280C2 (sv) 1998-09-21
ES2293674T3 (es) 2008-03-16
DK0985333T3 (da) 2008-01-21
EP0985333B1 (de) 2007-09-12
AU5888798A (en) 1998-08-25
DE69838420T2 (de) 2008-07-03
PT985333E (pt) 2007-12-17
SE9700307L (sv) 1998-08-01
JP2001509213A (ja) 2001-07-10
WO1998034446A1 (en) 1998-08-06

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