ATE378695T1 - Piezoelektrisches bauelement und herstellungsverfahren für ein piezoelektrisches bauelement - Google Patents
Piezoelektrisches bauelement und herstellungsverfahren für ein piezoelektrisches bauelementInfo
- Publication number
- ATE378695T1 ATE378695T1 AT04101828T AT04101828T ATE378695T1 AT E378695 T1 ATE378695 T1 AT E378695T1 AT 04101828 T AT04101828 T AT 04101828T AT 04101828 T AT04101828 T AT 04101828T AT E378695 T1 ATE378695 T1 AT E378695T1
- Authority
- AT
- Austria
- Prior art keywords
- piezoelectric component
- material layer
- piezoelectric material
- production method
- piezoelectric
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000463 material Substances 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 2
- 239000011253 protective coating Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US46666403P | 2003-04-30 | 2003-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE378695T1 true ATE378695T1 (de) | 2007-11-15 |
Family
ID=32990985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT04101828T ATE378695T1 (de) | 2003-04-30 | 2004-04-29 | Piezoelektrisches bauelement und herstellungsverfahren für ein piezoelektrisches bauelement |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7105988B2 (de) |
| EP (1) | EP1473782B1 (de) |
| AT (1) | ATE378695T1 (de) |
| DE (1) | DE602004009987T2 (de) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100599083B1 (ko) | 2003-04-22 | 2006-07-12 | 삼성전자주식회사 | 캔틸레버 형태의 압전 박막 공진 소자 및 그 제조방법 |
| US7819870B2 (en) * | 2005-10-13 | 2010-10-26 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Tissue contact and thermal assessment for brush electrodes |
| JP2006214898A (ja) * | 2005-02-04 | 2006-08-17 | Seiko Epson Corp | 圧電デバイス及び電子機器 |
| DE102005020527A1 (de) * | 2005-05-03 | 2006-11-09 | Festo Ag & Co. | Piezoelektrisches Element |
| US8672936B2 (en) | 2005-10-13 | 2014-03-18 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Systems and methods for assessing tissue contact |
| AU2006305967B2 (en) * | 2005-10-27 | 2013-02-07 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Systems and methods for electrode contact assessment |
| US10085798B2 (en) | 2006-12-29 | 2018-10-02 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Ablation electrode with tactile sensor |
| US8226648B2 (en) | 2007-12-31 | 2012-07-24 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Pressure-sensitive flexible polymer bipolar electrode |
| DE102007000552A1 (de) * | 2007-10-08 | 2009-04-09 | Huf Hülsbeck & Fürst Gmbh & Co. Kg | Betätigbare Schalteinrichtung für ein Kraftfahrzeug |
| US11121647B2 (en) * | 2018-12-13 | 2021-09-14 | Magnecomp Corporation | Contact pad features |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1162336B (it) * | 1979-06-22 | 1987-03-25 | Consiglio Nazionale Ricerche | Procedimento per la realizzazione di trasduttori ultraacustici a cortina di linee o a matrice di punti e trasduttori ottenuti |
| JPS60189307A (ja) * | 1984-03-09 | 1985-09-26 | Toshiba Corp | 圧電薄膜共振器およびその製造方法 |
| JPS6140071A (ja) | 1984-07-31 | 1986-02-26 | Mitsubishi Petrochem Co Ltd | 可撓性圧電素子 |
| JPS61182286A (ja) * | 1985-02-07 | 1986-08-14 | Mitsubishi Petrochem Co Ltd | 可撓性圧電素子 |
| US4904894A (en) * | 1989-01-24 | 1990-02-27 | Pennwalt Corporation | Hail sensor |
| JP2665106B2 (ja) * | 1992-03-17 | 1997-10-22 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
| DE4217351C1 (de) | 1992-05-26 | 1993-10-21 | Wolfgang Schaefer Gmbh Elektro | Piezoelektrischer Taster |
| US6420819B1 (en) | 1994-01-27 | 2002-07-16 | Active Control Experts, Inc. | Packaged strain actuator |
| US6778090B2 (en) * | 1996-09-04 | 2004-08-17 | Paul Newham | Modular system for monitoring the presence of a person using a variety of sensing devices |
| JP3705559B2 (ja) * | 1996-12-16 | 2005-10-12 | Necトーキン株式会社 | 圧電トランス電源 |
| JPH114137A (ja) * | 1997-06-12 | 1999-01-06 | Murata Mfg Co Ltd | 圧電部品 |
| DE10023556A1 (de) | 2000-05-15 | 2001-11-29 | Festo Ag & Co | Piezo-Biegewandler sowie Verwendung desselben |
| US20030001696A1 (en) * | 2000-11-29 | 2003-01-02 | Kenji Yoshida | Acoustic wave device |
| JP4248777B2 (ja) * | 2000-12-28 | 2009-04-02 | 株式会社デンソー | インジェクタ用圧電体素子及びその製造方法,並びにインジェクタ |
| US20020140321A1 (en) | 2001-03-27 | 2002-10-03 | Waterfield Larry G. | Coated electroactive bender actuator |
| US6392332B1 (en) * | 2001-12-04 | 2002-05-21 | Kuan Kuan Sung | Laminated piezo ceramic transformer device |
-
2004
- 2004-04-28 US US10/834,683 patent/US7105988B2/en not_active Expired - Fee Related
- 2004-04-29 EP EP04101828A patent/EP1473782B1/de not_active Expired - Lifetime
- 2004-04-29 DE DE602004009987T patent/DE602004009987T2/de not_active Expired - Fee Related
- 2004-04-29 AT AT04101828T patent/ATE378695T1/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| US7105988B2 (en) | 2006-09-12 |
| EP1473782B1 (de) | 2007-11-14 |
| US20040217674A1 (en) | 2004-11-04 |
| DE602004009987D1 (de) | 2007-12-27 |
| DE602004009987T2 (de) | 2008-09-18 |
| EP1473782A2 (de) | 2004-11-03 |
| EP1473782A3 (de) | 2005-10-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |