ATE393962T1 - Automatisches kalibrationssystem für einen wafertransferroboter - Google Patents
Automatisches kalibrationssystem für einen wafertransferroboterInfo
- Publication number
- ATE393962T1 ATE393962T1 AT00105965T AT00105965T ATE393962T1 AT E393962 T1 ATE393962 T1 AT E393962T1 AT 00105965 T AT00105965 T AT 00105965T AT 00105965 T AT00105965 T AT 00105965T AT E393962 T1 ATE393962 T1 AT E393962T1
- Authority
- AT
- Austria
- Prior art keywords
- robot
- wand
- controller
- enclosures
- wafer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
- H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H10P72/3402—Mechanical parts of transfer devices
Landscapes
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/270,261 US6075334A (en) | 1999-03-15 | 1999-03-15 | Automatic calibration system for wafer transfer robot |
| EP00105965A EP1137052B1 (de) | 1999-03-15 | 2000-03-24 | Automatisches Kalibrationssystem für einen Wafertransferroboter |
| CA002302794A CA2302794C (en) | 1999-03-15 | 2000-03-28 | Automatic calibration system for wafer transfer robot |
| JP2000108883A JP4722251B2 (ja) | 1999-03-15 | 2000-04-11 | ウエハ移送ロボットの自動較正装置及び自動較正方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE393962T1 true ATE393962T1 (de) | 2008-05-15 |
Family
ID=27427591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT00105965T ATE393962T1 (de) | 1999-03-15 | 2000-03-24 | Automatisches kalibrationssystem für einen wafertransferroboter |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6075334A (de) |
| EP (1) | EP1137052B1 (de) |
| JP (1) | JP4722251B2 (de) |
| AT (1) | ATE393962T1 (de) |
| CA (1) | CA2302794C (de) |
Families Citing this family (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19845504A1 (de) * | 1998-10-02 | 2000-04-20 | Wacker Siltronic Halbleitermat | Hordenaufnahmevorrichtung |
| US6405101B1 (en) * | 1998-11-17 | 2002-06-11 | Novellus Systems, Inc. | Wafer centering system and method |
| US6304051B1 (en) * | 1999-03-15 | 2001-10-16 | Berkeley Process Control, Inc. | Self teaching robotic carrier handling system |
| JP3458768B2 (ja) * | 1999-06-10 | 2003-10-20 | 株式会社デンソー | 負荷駆動装置 |
| US6463782B1 (en) * | 2000-01-13 | 2002-10-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Self-centering calibration tool and method of calibrating |
| US6438448B1 (en) * | 2000-02-08 | 2002-08-20 | Storage Technology Corporation | Self aligning robotic arm calibration apparatus |
| US6553280B2 (en) | 2000-07-07 | 2003-04-22 | Applied Materials, Inc. | Valve/sensor assemblies |
| US6578893B2 (en) | 2000-10-02 | 2003-06-17 | Ajs Automation, Inc. | Apparatus and methods for handling semiconductor wafers |
| US7054713B2 (en) * | 2002-01-07 | 2006-05-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Calibration cassette pod for robot teaching and method of using |
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| US6567725B1 (en) | 2002-07-15 | 2003-05-20 | Speedfam-Ipec Corporation | Method and apparatus for teaching robot station location |
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| US6996456B2 (en) * | 2002-10-21 | 2006-02-07 | Fsi International, Inc. | Robot with tactile sensor device |
| US6852644B2 (en) * | 2002-11-25 | 2005-02-08 | The Boc Group, Inc. | Atmospheric robot handling equipment |
| US20050012938A1 (en) * | 2003-07-18 | 2005-01-20 | Jun-Ming Chen | Apparatus and method for detecting wafer position |
| US20050228542A1 (en) * | 2003-10-01 | 2005-10-13 | Varian Semiconductor Equipment Associates, Inc. | Auto-calibration method and device for wafer handler robots |
| US7230702B2 (en) * | 2003-11-13 | 2007-06-12 | Applied Materials, Inc. | Monitoring of smart pin transition timing |
| US8000837B2 (en) | 2004-10-05 | 2011-08-16 | J&L Group International, Llc | Programmable load forming system, components thereof, and methods of use |
| US20070001638A1 (en) * | 2005-07-01 | 2007-01-04 | Fsi International, Inc. | Robot with vibration sensor device |
| WO2007047163A2 (en) * | 2005-10-04 | 2007-04-26 | Applied Materials, Inc. | Methods and apparatus for drying a substrate |
| US7933685B1 (en) * | 2006-01-10 | 2011-04-26 | National Semiconductor Corporation | System and method for calibrating a wafer handling robot and a wafer cassette |
| CN101190525A (zh) * | 2006-11-22 | 2008-06-04 | 富士迈半导体精密工业（上海）有限公司 | 自动校正机械手臂 |
| JP2009049250A (ja) * | 2007-08-22 | 2009-03-05 | Yaskawa Electric Corp | ティーチング用機構を備えたカセットステージ及びそれを備えた基板搬送装置、半導体製造装置 |
| NL1036673A1 (nl) * | 2008-04-09 | 2009-10-12 | Asml Holding Nv | Robot Position Calibration Tool (RPCT). |
| US8185242B2 (en) * | 2008-05-07 | 2012-05-22 | Lam Research Corporation | Dynamic alignment of wafers using compensation values obtained through a series of wafer movements |
| US8242730B2 (en) * | 2008-06-10 | 2012-08-14 | Nichols Michael J | Automated robot teach tool and method of use |
| US8641351B2 (en) * | 2008-07-10 | 2014-02-04 | Kawasaki Jukogyo Kabushiki Kaisha | Robot and instruction method thereof |
| US8459922B2 (en) * | 2009-11-13 | 2013-06-11 | Brooks Automation, Inc. | Manipulator auto-teach and position correction system |
| US8692503B2 (en) * | 2009-12-18 | 2014-04-08 | Varian Medical Systems, Inc. | Homing and establishing reference frames for motion axes in radiation systems |
| DE102012200220A1 (de) * | 2011-06-20 | 2012-12-20 | Semilev Gmbh | Verfahren zum Kalibrieren eines aktiv magnetgelagerten Roboters |
| US20130173039A1 (en) * | 2012-01-04 | 2013-07-04 | Seagate Technology Llc | Methods and devices for determining a teaching point location using pressure measurements |
| CN102581745B (zh) * | 2012-02-29 | 2014-09-10 | 清华大学 | 一种化学机械抛光传输机器人系统 |
| JP5532110B2 (ja) * | 2012-11-16 | 2014-06-25 | 株式会社安川電機 | 基板搬送ロボットおよび基板搬送方法 |
| TWI623994B (zh) | 2013-07-08 | 2018-05-11 | 布魯克斯自動機械公司 | 具有即時基板定心的處理裝置 |
| US9666465B2 (en) * | 2013-12-12 | 2017-05-30 | Seagate Technology Llc | Positioning apparatus |
| US10002781B2 (en) | 2014-11-10 | 2018-06-19 | Brooks Automation, Inc. | Tool auto-teach method and apparatus |
| JP2016143787A (ja) * | 2015-02-03 | 2016-08-08 | 川崎重工業株式会社 | 基板搬送ロボットおよび基板搬送方法 |
| US20160346923A1 (en) * | 2015-05-29 | 2016-12-01 | Boris Kesil | Robotic station with self-teaching functions |
| JP6965378B2 (ja) * | 2016-06-13 | 2021-11-10 | 東京エレクトロン株式会社 | 基板搬送装置および基板搬送装置の異常検出方法 |
| CN113874173B (zh) | 2019-02-08 | 2025-02-14 | 安川美国有限公司 | 对射式自动示教 |
| US11469123B2 (en) | 2019-08-19 | 2022-10-11 | Applied Materials, Inc. | Mapping of a replacement parts storage container |
| JP7413062B2 (ja) * | 2020-02-13 | 2024-01-15 | 東京エレクトロン株式会社 | 搬送装置の教示方法及び処理システム |
| US12330289B2 (en) * | 2020-08-26 | 2025-06-17 | WaferPath, Inc. | Determining the center position of a semiconductor wafer |
| US11911915B2 (en) * | 2021-06-09 | 2024-02-27 | Intrinsic Innovation Llc | Determining robotic calibration processes |
| CN113394149B (zh) * | 2021-06-30 | 2024-08-13 | 乐孜芯创自动化设备(上海)有限公司 | 具备位置检测功能的硅片传输片叉、机械手及传输方法 |
| KR102622984B1 (ko) * | 2021-08-25 | 2024-01-10 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
| KR20240008588A (ko) * | 2022-07-12 | 2024-01-19 | 삼성전자주식회사 | 자동 티칭이 가능한 웨이퍼 이송 장치 및 이를 포함하는 반도체 공정 시스템 |
| JP2024078532A (ja) * | 2022-11-30 | 2024-06-11 | 株式会社安川電機 | 基板搬送ロボットシステムおよび基板搬送ロボットの教示方法 |
| US20250214245A1 (en) * | 2023-12-27 | 2025-07-03 | Kawasaki Jukogyo Kabushiki Kaisha | Substrate transfer apparatus and method of calibrating substrate transfer apparatus |
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| US3986109A (en) * | 1975-01-29 | 1976-10-12 | Ade Corporation | Self-calibrating dimension gauge |
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-
1999
- 1999-03-15 US US09/270,261 patent/US6075334A/en not_active Expired - Lifetime
-
2000
- 2000-03-24 AT AT00105965T patent/ATE393962T1/de active
- 2000-03-24 EP EP00105965A patent/EP1137052B1/de not_active Expired - Lifetime
- 2000-03-28 CA CA002302794A patent/CA2302794C/en not_active Expired - Fee Related
- 2000-04-11 JP JP2000108883A patent/JP4722251B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001287178A (ja) | 2001-10-16 |
| US6075334A (en) | 2000-06-13 |
| EP1137052A1 (de) | 2001-09-26 |
| EP1137052B1 (de) | 2008-04-30 |
| CA2302794C (en) | 2010-02-02 |
| CA2302794A1 (en) | 2001-09-28 |
| JP4722251B2 (ja) | 2011-07-13 |
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| UEP | Publication of translation of european patent specification |
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