ATE407010T1 - Träger, tintenstrahldruckkopf mit träger, und herstellungsverfaren von tintenstrahldruckkopf mit träger - Google Patents
Träger, tintenstrahldruckkopf mit träger, und herstellungsverfaren von tintenstrahldruckkopf mit trägerInfo
- Publication number
- ATE407010T1 ATE407010T1 AT04029558T AT04029558T ATE407010T1 AT E407010 T1 ATE407010 T1 AT E407010T1 AT 04029558 T AT04029558 T AT 04029558T AT 04029558 T AT04029558 T AT 04029558T AT E407010 T1 ATE407010 T1 AT E407010T1
- Authority
- AT
- Austria
- Prior art keywords
- carrier
- ink jet
- print head
- jet print
- production method
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000463 material Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14145—Structure of the manifold
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
- Y10T428/24322—Composite web or sheet
- Y10T428/24331—Composite web or sheet including nonapertured component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24562—Interlaminar spaces
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/2457—Parallel ribs and/or grooves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24612—Composite web or sheet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003416843A JP4522086B2 (ja) | 2003-12-15 | 2003-12-15 | 梁、梁の製造方法、梁を備えたインクジェット記録ヘッド、および該インクジェット記録ヘッドの製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE407010T1 true ATE407010T1 (de) | 2008-09-15 |
Family
ID=34510594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT04029558T ATE407010T1 (de) | 2003-12-15 | 2004-12-14 | Träger, tintenstrahldruckkopf mit träger, und herstellungsverfaren von tintenstrahldruckkopf mit träger |
Country Status (8)
| Country | Link |
|---|---|
| US (3) | US7275813B2 (de) |
| EP (1) | EP1543974B1 (de) |
| JP (1) | JP4522086B2 (de) |
| KR (1) | KR100882631B1 (de) |
| CN (1) | CN1326702C (de) |
| AT (1) | ATE407010T1 (de) |
| DE (1) | DE602004016275D1 (de) |
| TW (1) | TWI247684B (de) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005205889A (ja) * | 2003-12-26 | 2005-08-04 | Canon Inc | インクジェット記録ヘッドの製造方法及び該製造方法により製造されるインクジェット記録ヘッド |
| JP2006130868A (ja) * | 2004-11-09 | 2006-05-25 | Canon Inc | インクジェット記録ヘッド及びその製造方法 |
| JP4641440B2 (ja) * | 2005-03-23 | 2011-03-02 | キヤノン株式会社 | インクジェット記録ヘッドおよび該インクジェット記録ヘッドの製造方法 |
| JP4766658B2 (ja) * | 2005-05-10 | 2011-09-07 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法 |
| US7578943B2 (en) | 2005-05-23 | 2009-08-25 | Canon Kabushiki Kaisha | Liquid discharge head and producing method therefor |
| US7637013B2 (en) * | 2005-08-23 | 2009-12-29 | Canon Kabushiki Kaisha | Method of manufacturing ink jet recording head |
| US7721441B2 (en) * | 2006-03-03 | 2010-05-25 | Silverbrook Research Pty Ltd | Method of fabricating a printhead integrated circuit attachment film |
| US7837297B2 (en) | 2006-03-03 | 2010-11-23 | Silverbrook Research Pty Ltd | Printhead with non-priming cavities for pulse damping |
| JP4681654B2 (ja) * | 2006-03-03 | 2011-05-11 | シルバーブルック リサーチ ピーティワイ リミテッド | インクジェットプリンタ |
| US7824560B2 (en) | 2006-03-07 | 2010-11-02 | Canon Kabushiki Kaisha | Manufacturing method for ink jet recording head chip, and manufacturing method for ink jet recording head |
| JP5028112B2 (ja) * | 2006-03-07 | 2012-09-19 | キヤノン株式会社 | インクジェットヘッド用基板の製造方法およびインクジェットヘッド |
| US8562845B2 (en) * | 2006-10-12 | 2013-10-22 | Canon Kabushiki Kaisha | Ink jet print head and method of manufacturing ink jet print head |
| KR100818282B1 (ko) * | 2006-10-26 | 2008-04-01 | 삼성전자주식회사 | 잉크젯 프린트헤드 |
| KR20080046865A (ko) * | 2006-11-23 | 2008-05-28 | 삼성전자주식회사 | 헤드칩 및 이를 포함하는 화상형성장치용 잉크카트리지 |
| JP4981491B2 (ja) * | 2007-03-15 | 2012-07-18 | キヤノン株式会社 | インクジェットヘッド製造方法及び貫通電極の製造方法 |
| US7758177B2 (en) * | 2007-03-21 | 2010-07-20 | Silverbrook Research Pty Ltd | High flowrate filter for inkjet printhead |
| JP5031493B2 (ja) * | 2007-09-06 | 2012-09-19 | キヤノン株式会社 | インクジェットヘッド用基板の製造方法 |
| JP5031492B2 (ja) * | 2007-09-06 | 2012-09-19 | キヤノン株式会社 | インクジェットヘッド基板の製造方法 |
| JP5448581B2 (ja) * | 2008-06-19 | 2014-03-19 | キヤノン株式会社 | 液体吐出ヘッド用基板の製造方法及び基板の加工方法 |
| JP5404331B2 (ja) * | 2008-12-17 | 2014-01-29 | キヤノン株式会社 | インクジェット記録ヘッド、記録素子基板、インクジェット記録ヘッドの製造方法、および記録素子基板の製造方法 |
| JP5566130B2 (ja) * | 2009-02-26 | 2014-08-06 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| US8012773B2 (en) * | 2009-06-11 | 2011-09-06 | Canon Kabushiki Kaisha | Method for manufacturing liquid discharge head |
| US8206998B2 (en) * | 2009-06-17 | 2012-06-26 | Canon Kabushiki Kaisha | Method for manufacturing liquid discharge head |
| CN102468326B (zh) * | 2010-10-29 | 2015-01-07 | 中国科学院微电子研究所 | 接触电极制造方法和半导体器件 |
| EP2697068B1 (de) * | 2011-04-13 | 2015-04-08 | OCE-Technologies B.V. | Verfahren zur herstellung einer düse einer flüssigkeitsausstossvorrichtung |
| JP6544909B2 (ja) * | 2013-12-17 | 2019-07-17 | キヤノン株式会社 | 記録素子基板、液体吐出ヘッドおよびインクジェット記録装置 |
| JP2018153978A (ja) * | 2017-03-16 | 2018-10-04 | キヤノン株式会社 | シリコン基板の加工方法および液体吐出ヘッドの製造方法 |
| JP6602337B2 (ja) * | 2017-05-09 | 2019-11-06 | キヤノン株式会社 | 液体吐出ヘッド |
| CN110168558B (zh) * | 2017-12-05 | 2022-07-05 | 深圳市为通博科技有限责任公司 | 光路调制器及其制作方法、指纹识别装置和终端设备 |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5451837A (en) | 1977-09-30 | 1979-04-24 | Ricoh Co Ltd | Ink jet head device |
| JP2783647B2 (ja) | 1990-04-27 | 1998-08-06 | キヤノン株式会社 | 液体噴射方法および該方法を用いた記録装置 |
| DE69110958T2 (de) * | 1990-04-27 | 1995-11-30 | Canon Kk | Aufzeichnungsverfahren und Vorrichtung. |
| JPH0412859A (ja) * | 1990-04-28 | 1992-01-17 | Canon Inc | 液体噴射方法、該方法を用いた記録ヘッド及び該方法を用いた記録装置 |
| JPH0410941A (ja) | 1990-04-27 | 1992-01-16 | Canon Inc | 液滴噴射方法及び該方法を用いた記録装置 |
| JPH0410942A (ja) | 1990-04-27 | 1992-01-16 | Canon Inc | 液体噴射方法および該方法を用いた記録装置 |
| JP2960608B2 (ja) * | 1992-06-04 | 1999-10-12 | キヤノン株式会社 | 液体噴射記録ヘッドの製造方法 |
| JPH06140661A (ja) * | 1992-10-27 | 1994-05-20 | Yokogawa Electric Corp | 物理量検出素子及びその製造方法 |
| JP3143307B2 (ja) | 1993-02-03 | 2001-03-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
| JPH09211019A (ja) | 1996-02-01 | 1997-08-15 | Mazda Motor Corp | 半導体梁構造およびこの半導体梁構造を用いた半導体センサならびに半導体梁構造の製造方法 |
| JP3601239B2 (ja) * | 1996-04-05 | 2004-12-15 | セイコーエプソン株式会社 | インクジェット式記録ヘッド及びそれを用いたインクジェット式記録装置 |
| JP3984689B2 (ja) | 1996-11-11 | 2007-10-03 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
| JPH11245413A (ja) * | 1998-02-27 | 1999-09-14 | Fuji Xerox Co Ltd | 液体噴射記録装置およびその製造方法 |
| JP4298066B2 (ja) * | 1999-06-09 | 2009-07-15 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェット記録装置 |
| JP3647365B2 (ja) * | 1999-08-24 | 2005-05-11 | キヤノン株式会社 | 液体吐出ヘッド用基板ユニットおよびその製造方法ならびに液体吐出ヘッド,カートリッジおよび画像形成装置 |
| JP2001334675A (ja) * | 2000-03-21 | 2001-12-04 | Nec Corp | インクジェットヘッドおよびその製造方法 |
| JP2001322278A (ja) * | 2000-05-16 | 2001-11-20 | Fuji Xerox Co Ltd | インクジェット記録ヘッド及びその製造方法 |
| JP2003072090A (ja) * | 2001-09-06 | 2003-03-12 | Ricoh Co Ltd | 液滴吐出ヘッド及びその製造方法、マイクロデバイス、インクカートリッジ並びにインクジェット記録装置 |
| JP3794311B2 (ja) * | 2001-10-25 | 2006-07-05 | 株式会社デンソー | 薄膜構造部を有するセンサおよびその製造方法 |
| US6626523B2 (en) | 2001-10-31 | 2003-09-30 | Hewlett-Packard Development Company, Lp. | Printhead having a thin film membrane with a floating section |
| JP4011952B2 (ja) * | 2002-04-04 | 2007-11-21 | キヤノン株式会社 | 液体吐出ヘッドおよび該液体吐出ヘッドを備える記録装置 |
| US6672712B1 (en) * | 2002-10-31 | 2004-01-06 | Hewlett-Packard Development Company, L.P. | Slotted substrates and methods and systems for forming same |
| CN100355573C (zh) * | 2002-12-27 | 2007-12-19 | 佳能株式会社 | 用于制造喷墨记录头的基础件 |
| CN100581824C (zh) * | 2003-02-13 | 2010-01-20 | 佳能株式会社 | 喷墨记录喷头用基板的制造方法 |
| JP2005205889A (ja) * | 2003-12-26 | 2005-08-04 | Canon Inc | インクジェット記録ヘッドの製造方法及び該製造方法により製造されるインクジェット記録ヘッド |
| JP4537246B2 (ja) * | 2004-05-06 | 2010-09-01 | キヤノン株式会社 | インクジェット記録ヘッド用基体の製造方法及び該方法により製造された前記基体を用いた記録ヘッドの製造方法 |
-
2003
- 2003-12-15 JP JP2003416843A patent/JP4522086B2/ja not_active Expired - Fee Related
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2004
- 2004-12-08 TW TW093137974A patent/TWI247684B/zh not_active IP Right Cessation
- 2004-12-10 US US11/008,101 patent/US7275813B2/en not_active Expired - Fee Related
- 2004-12-14 EP EP04029558A patent/EP1543974B1/de not_active Expired - Lifetime
- 2004-12-14 KR KR1020040105375A patent/KR100882631B1/ko not_active Expired - Fee Related
- 2004-12-14 AT AT04029558T patent/ATE407010T1/de not_active IP Right Cessation
- 2004-12-14 DE DE602004016275T patent/DE602004016275D1/de not_active Expired - Lifetime
- 2004-12-15 CN CNB200410081989XA patent/CN1326702C/zh not_active Expired - Fee Related
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2007
- 2007-08-08 US US11/835,746 patent/US7833608B2/en not_active Expired - Fee Related
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2010
- 2010-10-14 US US12/904,539 patent/US7998555B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1543974B1 (de) | 2008-09-03 |
| KR100882631B1 (ko) | 2009-02-06 |
| US20050140737A1 (en) | 2005-06-30 |
| CN1628982A (zh) | 2005-06-22 |
| US20080032073A1 (en) | 2008-02-07 |
| DE602004016275D1 (de) | 2008-10-16 |
| EP1543974A1 (de) | 2005-06-22 |
| JP2005169603A (ja) | 2005-06-30 |
| US20110027530A1 (en) | 2011-02-03 |
| KR20050060009A (ko) | 2005-06-21 |
| US7998555B2 (en) | 2011-08-16 |
| CN1326702C (zh) | 2007-07-18 |
| JP4522086B2 (ja) | 2010-08-11 |
| US7275813B2 (en) | 2007-10-02 |
| TW200531841A (en) | 2005-10-01 |
| US7833608B2 (en) | 2010-11-16 |
| TWI247684B (en) | 2006-01-21 |
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