ATE484847T1 - Verfahren zur herstellung einer dünnen schicht, einschliesslich eines schrittes des korrigierens der dicke durch hilfsoxidation und zugehörige vorrichtung - Google Patents
Verfahren zur herstellung einer dünnen schicht, einschliesslich eines schrittes des korrigierens der dicke durch hilfsoxidation und zugehörige vorrichtungInfo
- Publication number
- ATE484847T1 ATE484847T1 AT03784416T AT03784416T ATE484847T1 AT E484847 T1 ATE484847 T1 AT E484847T1 AT 03784416 T AT03784416 T AT 03784416T AT 03784416 T AT03784416 T AT 03784416T AT E484847 T1 ATE484847 T1 AT E484847T1
- Authority
- AT
- Austria
- Prior art keywords
- thickness
- layer
- correcting
- thin layer
- producing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
- H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
- H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
- H10P14/6302—Non-deposition formation processes
- H10P14/6304—Formation by oxidation, e.g. oxidation of the substrate
- H10P14/6306—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials
- H10P14/6308—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials of Group IV semiconductors
- H10P14/6309—Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials of Group IV semiconductors of silicon in uncombined form, i.e. pure silicon
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
- H10P14/6302—Non-deposition formation processes
- H10P14/6322—Formation by thermal treatments
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
- H10P74/23—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Formation Of Insulating Films (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Physical Vapour Deposition (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0210208A FR2843486B1 (fr) | 2002-08-12 | 2002-08-12 | Procede d'elaboration de couches minces de semi-conducteur comprenant une etape de finition |
| FR0210209A FR2843487B1 (fr) | 2002-08-12 | 2002-08-12 | Procede d'elaboration de couche mince comprenant une etape de correction d'epaisseur par oxydation sacrificielle, et machine associee |
| US46724103P | 2003-04-30 | 2003-04-30 | |
| PCT/IB2003/003640 WO2004015759A2 (en) | 2002-08-12 | 2003-08-11 | A method of preparing a thin layer, the method including a step of correcting thickness by sacrificial oxidation, and an associated machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE484847T1 true ATE484847T1 (de) | 2010-10-15 |
Family
ID=31721058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT03784416T ATE484847T1 (de) | 2002-08-12 | 2003-08-11 | Verfahren zur herstellung einer dünnen schicht, einschliesslich eines schrittes des korrigierens der dicke durch hilfsoxidation und zugehörige vorrichtung |
Country Status (7)
| Country | Link |
|---|---|
| EP (2) | EP2190010A2 (de) |
| JP (1) | JP4684650B2 (de) |
| AT (1) | ATE484847T1 (de) |
| AU (1) | AU2003263391A1 (de) |
| DE (1) | DE60334555D1 (de) |
| TW (1) | TWI298919B (de) |
| WO (1) | WO2004015759A2 (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2991099B1 (fr) | 2012-05-25 | 2014-05-23 | Soitec Silicon On Insulator | Procede de traitement d'une structure semi-conducteur sur isolant en vue d'uniformiser l'epaisseur de la couche semi-conductrice |
| JP6747386B2 (ja) * | 2017-06-23 | 2020-08-26 | 信越半導体株式会社 | Ｓｏｉウェーハの製造方法 |
| WO2020167944A1 (en) * | 2019-02-15 | 2020-08-20 | Lam Research Corporation | Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes |
| FR3099291A1 (fr) | 2019-07-23 | 2021-01-29 | Soitec | procédé de préparation d’une couche mince, incluant une séquence d’étapes pour ameliorer l’uniformité d’epaisseur de ladite couche mince |
| FR3104810B1 (fr) | 2019-12-17 | 2023-03-31 | Soitec Silicon On Insulator | Procede de gravure de substrats comportant une couche mince superficielle, pour ameliorer l’uniformite d’epaisseur de ladite couche |
| CN114894132A (zh) * | 2022-05-08 | 2022-08-12 | 三河建华高科有限责任公司 | 一种半导体晶圆厚度检测控制系统 |
| FR3155359A1 (fr) | 2023-11-14 | 2025-05-16 | Soitec | Procede d’amincissement de la couche superficielle d’un substrat soi |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3154100B2 (ja) * | 1991-08-02 | 2001-04-09 | キヤノン株式会社 | 液晶画像表示装置の製造方法 |
| JP3272815B2 (ja) * | 1993-05-20 | 2002-04-08 | 株式会社東芝 | レジスト感度調整装置および方法 |
| JP3612836B2 (ja) * | 1996-01-26 | 2005-01-19 | 三菱化学株式会社 | 薄膜製造方法 |
| JP3660469B2 (ja) * | 1996-07-05 | 2005-06-15 | 日本電信電話株式会社 | Ｓｏｉ基板の製造方法 |
| TW346649B (en) * | 1996-09-24 | 1998-12-01 | Tokyo Electron Co Ltd | Method for wet etching a film |
| JP2002118242A (ja) * | 1996-11-15 | 2002-04-19 | Canon Inc | 半導体部材の製造方法 |
| US6111634A (en) * | 1997-05-28 | 2000-08-29 | Lam Research Corporation | Method and apparatus for in-situ monitoring of thickness using a multi-wavelength spectrometer during chemical-mechanical polishing |
| FR2777115B1 (fr) | 1998-04-07 | 2001-07-13 | Commissariat Energie Atomique | Procede de traitement de substrats semi-conducteurs et structures obtenues par ce procede |
| TW455973B (en) * | 1999-04-05 | 2001-09-21 | Applied Materials Inc | Endpoint detection in the fabrication of electronic devices |
| FR2797714B1 (fr) * | 1999-08-20 | 2001-10-26 | Soitec Silicon On Insulator | Procede de traitement de substrats pour la microelectronique et substrats obtenus par ce procede |
| FR2797713B1 (fr) | 1999-08-20 | 2002-08-02 | Soitec Silicon On Insulator | Procede de traitement de substrats pour la microelectronique et substrats obtenus par ce procede |
| JP2001118832A (ja) * | 1999-10-21 | 2001-04-27 | Toshiba Corp | エッチング溝深さ、膜厚および段差の測定方法、およびその装置 |
| US6750460B2 (en) | 2000-05-02 | 2004-06-15 | Epion Corporation | System and method for adjusting the properties of a device by GCIB processing |
| US7006235B2 (en) * | 2000-09-20 | 2006-02-28 | Kla-Tencor Technologies Corp. | Methods and systems for determining overlay and flatness of a specimen |
| JP2002134466A (ja) * | 2000-10-25 | 2002-05-10 | Sony Corp | 半導体装置の製造方法 |
-
2003
- 2003-08-11 AT AT03784416T patent/ATE484847T1/de not_active IP Right Cessation
- 2003-08-11 WO PCT/IB2003/003640 patent/WO2004015759A2/en not_active Ceased
- 2003-08-11 DE DE60334555T patent/DE60334555D1/de not_active Expired - Lifetime
- 2003-08-11 JP JP2004527229A patent/JP4684650B2/ja not_active Expired - Lifetime
- 2003-08-11 AU AU2003263391A patent/AU2003263391A1/en not_active Abandoned
- 2003-08-11 EP EP10155844A patent/EP2190010A2/de not_active Withdrawn
- 2003-08-11 EP EP03784416A patent/EP1547143B1/de not_active Expired - Lifetime
- 2003-08-12 TW TW092122092A patent/TWI298919B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| EP1547143A2 (de) | 2005-06-29 |
| DE60334555D1 (de) | 2010-11-25 |
| EP2190010A2 (de) | 2010-05-26 |
| EP1547143B1 (de) | 2010-10-13 |
| JP4684650B2 (ja) | 2011-05-18 |
| TW200414392A (en) | 2004-08-01 |
| AU2003263391A1 (en) | 2004-02-25 |
| WO2004015759A2 (en) | 2004-02-19 |
| JP2005536043A (ja) | 2005-11-24 |
| TWI298919B (en) | 2008-07-11 |
| WO2004015759A3 (en) | 2004-06-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |