ATE95632T1 - Halbleiterspeicher. - Google Patents

Halbleiterspeicher.

Info

Publication number
ATE95632T1
ATE95632T1 AT87108924T AT87108924T ATE95632T1 AT E95632 T1 ATE95632 T1 AT E95632T1 AT 87108924 T AT87108924 T AT 87108924T AT 87108924 T AT87108924 T AT 87108924T AT E95632 T1 ATE95632 T1 AT E95632T1
Authority
AT
Austria
Prior art keywords
trench
longitudinal axis
disposed
major surface
storage means
Prior art date
Application number
AT87108924T
Other languages
English (en)
Inventor
Richard Raymond Garnache
Donald Kenney
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of ATE95632T1 publication Critical patent/ATE95632T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/39—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench
    • H10B12/395—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench the transistor being vertical

Landscapes

  • Semiconductor Memories (AREA)
  • Micro-Organisms Or Cultivation Processes Thereof (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Medicines Containing Material From Animals Or Micro-Organisms (AREA)
  • Immobilizing And Processing Of Enzymes And Microorganisms (AREA)
  • Image Processing (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
AT87108924T 1986-07-15 1987-06-23 Halbleiterspeicher. ATE95632T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/885,618 US4769786A (en) 1986-07-15 1986-07-15 Two square memory cells
EP87108924A EP0254046B1 (de) 1986-07-15 1987-06-23 Halbleiterspeicher

Publications (1)

Publication Number Publication Date
ATE95632T1 true ATE95632T1 (de) 1993-10-15

Family

ID=25387321

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87108924T ATE95632T1 (de) 1986-07-15 1987-06-23 Halbleiterspeicher.

Country Status (11)

Country Link
US (1) US4769786A (de)
EP (1) EP0254046B1 (de)
JP (1) JPH07101731B2 (de)
AT (1) ATE95632T1 (de)
AU (1) AU594169B2 (de)
BR (1) BR8703296A (de)
CA (1) CA1283480C (de)
DE (1) DE3787687T2 (de)
DK (1) DK365487A (de)
ES (1) ES2044872T3 (de)
NO (1) NO172714C (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0682800B2 (ja) * 1985-04-16 1994-10-19 株式会社東芝 半導体記憶装置
US4751558A (en) * 1985-10-31 1988-06-14 International Business Machines Corporation High density memory with field shield
US4811067A (en) * 1986-05-02 1989-03-07 International Business Machines Corporation High density vertically structured memory
USRE33972E (en) * 1986-07-15 1992-06-23 International Business Machines Corporation Two square memory cells
JPS63245954A (ja) * 1987-04-01 1988-10-13 Hitachi Ltd 半導体メモリ
US4812885A (en) * 1987-08-04 1989-03-14 Texas Instruments Incorporated Capacitive coupling
US5109259A (en) * 1987-09-22 1992-04-28 Texas Instruments Incorporated Multiple DRAM cells in a trench
JPH01125858A (ja) * 1987-11-10 1989-05-18 Fujitsu Ltd 半導体装置およびその製造方法
JPH07105477B2 (ja) * 1988-05-28 1995-11-13 富士通株式会社 半導体装置及びその製造方法
US5008214A (en) * 1988-06-03 1991-04-16 Texas Instruments Incorporated Method of making crosspoint dynamic RAM cell array with overlapping wordlines and folded bitlines
US4926224A (en) * 1988-06-03 1990-05-15 Texas Instruments Incorporated Crosspoint dynamic ram cell for folded bitline array
US4977436A (en) * 1988-07-25 1990-12-11 Motorola, Inc. High density DRAM
US5001525A (en) * 1989-03-27 1991-03-19 International Business Machines Corporation Two square memory cells having highly conductive word lines
US4989055A (en) * 1989-06-15 1991-01-29 Texas Instruments Incorporated Dynamic random access memory cell
US5034787A (en) * 1990-06-28 1991-07-23 International Business Machines Corporation Structure and fabrication method for a double trench memory cell device
US5064777A (en) * 1990-06-28 1991-11-12 International Business Machines Corporation Fabrication method for a double trench memory cell device
US5365097A (en) * 1992-10-05 1994-11-15 International Business Machines Corporation Vertical epitaxial SOI transistor, memory cell and fabrication methods
US5641694A (en) * 1994-12-22 1997-06-24 International Business Machines Corporation Method of fabricating vertical epitaxial SOI transistor
US6074909A (en) * 1998-07-31 2000-06-13 Siemens Aktiengesellschaft Apparatus and method for forming controlled deep trench top isolation layers
US6730540B2 (en) 2002-04-18 2004-05-04 Tru-Si Technologies, Inc. Clock distribution networks and conductive lines in semiconductor integrated circuits
US20070082454A1 (en) * 2005-10-12 2007-04-12 Infineon Technologies Ag Microelectronic device and method of manufacturing a microelectronic device

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3387286A (en) * 1967-07-14 1968-06-04 Ibm Field-effect transistor memory
US3811076A (en) * 1973-01-02 1974-05-14 Ibm Field effect transistor integrated circuit and memory
US3841926A (en) * 1973-01-02 1974-10-15 Ibm Integrated circuit fabrication process
US4225945A (en) * 1976-01-12 1980-09-30 Texas Instruments Incorporated Random access MOS memory cell using double level polysilicon
US4222062A (en) * 1976-05-04 1980-09-09 American Microsystems, Inc. VMOS Floating gate memory device
US4462040A (en) * 1979-05-07 1984-07-24 International Business Machines Corporation Single electrode U-MOSFET random access memory
US4271418A (en) * 1979-10-29 1981-06-02 American Microsystems, Inc. VMOS Memory cell and method for making same
JPS5681968A (en) * 1979-12-07 1981-07-04 Toshiba Corp Manufacture of semiconductor device
US4295924A (en) * 1979-12-17 1981-10-20 International Business Machines Corporation Method for providing self-aligned conductor in a V-groove device
US4335450A (en) * 1980-01-30 1982-06-15 International Business Machines Corporation Non-destructive read out field effect transistor memory cell system
KR920010461B1 (ko) * 1983-09-28 1992-11-28 가부시끼가이샤 히다찌세이사꾸쇼 반도체 메모리와 그 제조 방법
JPS60136378A (ja) * 1983-12-26 1985-07-19 Hitachi Ltd 半導体装置およびその製造方法
JPH0648719B2 (ja) * 1984-01-20 1994-06-22 株式会社日立製作所 半導体記憶装置
EP0164829B1 (de) * 1984-04-19 1988-09-28 Nippon Telegraph And Telephone Corporation Halbleiterspeicherbauelement und Verfahren zur Herstellung
US4672410A (en) * 1984-07-12 1987-06-09 Nippon Telegraph & Telephone Semiconductor memory device with trench surrounding each memory cell
US4673962A (en) * 1985-03-21 1987-06-16 Texas Instruments Incorporated Vertical DRAM cell and method
JPH0682800B2 (ja) * 1985-04-16 1994-10-19 株式会社東芝 半導体記憶装置
JPH0680805B2 (ja) * 1985-05-29 1994-10-12 日本電気株式会社 Ｍｉｓ型半導体記憶装置
US4673963A (en) * 1985-08-27 1987-06-16 Texas Instruments Incorporated High well capacity CCD imager

Also Published As

Publication number Publication date
DK365487A (da) 1988-01-16
EP0254046A1 (de) 1988-01-27
NO172714B (no) 1993-05-18
DE3787687T2 (de) 1994-05-05
BR8703296A (pt) 1988-03-15
ES2044872T3 (es) 1994-01-16
NO872721L (no) 1988-01-18
US4769786A (en) 1988-09-06
DK365487D0 (da) 1987-07-14
AU594169B2 (en) 1990-03-01
EP0254046B1 (de) 1993-10-06
CA1283480C (en) 1991-04-23
DE3787687D1 (de) 1993-11-11
JPS6321866A (ja) 1988-01-29
JPH07101731B2 (ja) 1995-11-01
NO872721D0 (no) 1987-06-29
NO172714C (no) 1993-08-25
AU7524887A (en) 1988-01-21

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee