ATE99001T1 - Verfahren zur herstellung einer keramischen beschichtung auf einem metallischen substrat sowie mittels des verfahrens beschichteter gegenstand. - Google Patents

Verfahren zur herstellung einer keramischen beschichtung auf einem metallischen substrat sowie mittels des verfahrens beschichteter gegenstand.

Info

Publication number
ATE99001T1
ATE99001T1 AT90400374T AT90400374T ATE99001T1 AT E99001 T1 ATE99001 T1 AT E99001T1 AT 90400374 T AT90400374 T AT 90400374T AT 90400374 T AT90400374 T AT 90400374T AT E99001 T1 ATE99001 T1 AT E99001T1
Authority
AT
Austria
Prior art keywords
producing
ceramic coating
metallic substrate
articles coated
coating
Prior art date
Application number
AT90400374T
Other languages
English (en)
Inventor
Jean-Francois Nowak
Francis Maury
Djarollah Oquab
Roland Morancho
Original Assignee
Nitruvid
Fortech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitruvid, Fortech filed Critical Nitruvid
Application granted granted Critical
Publication of ATE99001T1 publication Critical patent/ATE99001T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemically Coating (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Ceramic Capacitors (AREA)
AT90400374T 1989-02-16 1990-02-12 Verfahren zur herstellung einer keramischen beschichtung auf einem metallischen substrat sowie mittels des verfahrens beschichteter gegenstand. ATE99001T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8902048A FR2643087B1 (fr) 1989-02-16 1989-02-16 Procede de depot d'un revetement de type ceramique sur un substrat metallique et element comportant un revetement obtenu par ce procede
EP90400374A EP0387113B1 (de) 1989-02-16 1990-02-12 Verfahren zur Herstellung einer keramischen Beschichtung auf einem metallischen Substrat sowie mittels des Verfahrens beschichteter Gegenstand

Publications (1)

Publication Number Publication Date
ATE99001T1 true ATE99001T1 (de) 1994-01-15

Family

ID=9378851

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90400374T ATE99001T1 (de) 1989-02-16 1990-02-12 Verfahren zur herstellung einer keramischen beschichtung auf einem metallischen substrat sowie mittels des verfahrens beschichteter gegenstand.

Country Status (10)

Country Link
US (1) US5302422A (de)
EP (1) EP0387113B1 (de)
JP (1) JPH032374A (de)
AT (1) ATE99001T1 (de)
CA (1) CA2010119A1 (de)
DE (1) DE69005331T2 (de)
FI (1) FI93556C (de)
FR (1) FR2643087B1 (de)
IL (1) IL93378A (de)
ZA (1) ZA901151B (de)

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US6162513A (en) * 1996-04-19 2000-12-19 Korea Institute Of Science And Technology Method for modifying metal surface
JP4022048B2 (ja) * 2001-03-06 2007-12-12 株式会社神戸製鋼所 ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法
PT1598456E (pt) * 2004-05-17 2008-12-29 Braecker Ag Viajante e processo para a sua produção
FR2904007B1 (fr) * 2006-07-21 2008-11-21 Toulouse Inst Nat Polytech Procede de depot de revetements ceramiques non oxydes.
CA2724334A1 (en) * 2008-05-13 2009-11-19 Sub-One Technology, Inc. Method of coating inner and outer surfaces of pipes for thermal solar and other applications
CN105177526B (zh) 2008-08-04 2018-12-11 北美Agc平板玻璃公司 等离子体源和用等离子体增强的化学气相沉积来沉积薄膜涂层的方法
ES2900321T3 (es) 2014-12-05 2022-03-16 Agc Flat Glass Na Inc Fuente de plasma que utiliza un recubrimiento de reducción de macropartículas y procedimiento para usar una fuente de plasma que utiliza un recubrimiento de reducción de macropartículas para la deposición de recubrimientos de película delgada y modificación de superficies
KR102272311B1 (ko) 2014-12-05 2021-07-06 에이쥐씨 글래스 유럽 중공형 음극 플라즈마 소스
US9721765B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Plasma device driven by multiple-phase alternating or pulsed electrical current
US10242846B2 (en) 2015-12-18 2019-03-26 Agc Flat Glass North America, Inc. Hollow cathode ion source
US10573499B2 (en) 2015-12-18 2020-02-25 Agc Flat Glass North America, Inc. Method of extracting and accelerating ions
FR3056816B1 (fr) * 2016-09-28 2021-03-05 Commissariat Energie Atomique Composant nucleaire avec revetement de crc amorphe, utilisations contre l'oxydation/hydruration.
FR3056601B1 (fr) * 2016-09-28 2020-12-25 Commissariat Energie Atomique Procede de fabrication d'un composant nucleaire a substrat metallique par dli-mocvd
FR3056815B1 (fr) * 2016-09-28 2021-01-29 Commissariat Energie Atomique Composant nucleaire a substrat metallique et utilisations contre l'oxydation/hydruration.
FR3056602B1 (fr) * 2016-09-28 2021-01-01 Commissariat Energie Atomique Procede de fabrication par dli-mocvd d'un composant nucleaire avec revetement de crc amorphe
HUE051186T2 (hu) * 2016-09-28 2021-03-01 Commissariat Energie Atomique Nukleáris komponens fém szubsztráttal, eljárás annak elõállítására DLI-MOCVD módszerrel és alkalmazásai oxidáció/hidridképzõdés szabályozására
JP6735914B2 (ja) 2016-09-28 2020-08-05 コミサーリャ ア レナジー アトミック エー オー エナジー アルタナティブＣｏｍｍｉｓｓａｒｉａｔ Ａ Ｌ’Ｅｎｅｒｇｉｅ Ａｔｏｍｉｑｕｅ Ｅｔ Ａｕｘ Ｅｎｅｒｇｉｅｓ Ａｌｔｅｒｎａｔｉｖｅｓ 準安定クロム被覆を有する原子炉コンポーネント、ｄｌｉ−ｍｏｃｖｄによる製造方法および酸化／水素化に対する使用
WO2018060644A1 (fr) 2016-09-28 2018-04-05 Commissariat A L'energie Atomique Et Aux Energies Alternatives Composant nucléaire composite, procédé de fabrication par dli-mocvd et utilisations contre l'oxydation/hydruration
EP3519605B1 (de) 2016-09-28 2020-08-05 Commissariat à l'Énergie Atomique et aux Énergies Alternatives Nukleare komponente mit amorpher crc-beschichtung, verfahren zur herstellung davon mittels dli-mocvd und verwendung davon zur kontrolle von oxidation/hydridation
US10633740B2 (en) 2018-03-19 2020-04-28 Applied Materials, Inc. Methods for depositing coatings on aerospace components
CN116892011A (zh) * 2018-03-19 2023-10-17 应用材料公司 使用含铬薄膜保护金属部件以抗腐蚀的方法
EP3784815A4 (de) 2018-04-27 2021-11-03 Applied Materials, Inc. Schutz von komponenten vor korrosion
US11009339B2 (en) 2018-08-23 2021-05-18 Applied Materials, Inc. Measurement of thickness of thermal barrier coatings using 3D imaging and surface subtraction methods for objects with complex geometries
WO2020219332A1 (en) 2019-04-26 2020-10-29 Applied Materials, Inc. Methods of protecting aerospace components against corrosion and oxidation
US11794382B2 (en) 2019-05-16 2023-10-24 Applied Materials, Inc. Methods for depositing anti-coking protective coatings on aerospace components
US11697879B2 (en) 2019-06-14 2023-07-11 Applied Materials, Inc. Methods for depositing sacrificial coatings on aerospace components
US11466364B2 (en) 2019-09-06 2022-10-11 Applied Materials, Inc. Methods for forming protective coatings containing crystallized aluminum oxide
US11519066B2 (en) 2020-05-21 2022-12-06 Applied Materials, Inc. Nitride protective coatings on aerospace components and methods for making the same
EP4175772A4 (de) 2020-07-03 2024-08-28 Applied Materials, Inc. Verfahren zur sanierung von luft- und raumfahrtkomponenten

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Also Published As

Publication number Publication date
DE69005331D1 (de) 1994-02-03
DE69005331T2 (de) 1994-06-09
FI93556B (fi) 1995-01-13
JPH032374A (ja) 1991-01-08
FI900758A0 (fi) 1990-02-15
EP0387113B1 (de) 1993-12-22
EP0387113A1 (de) 1990-09-12
US5302422A (en) 1994-04-12
FR2643087B1 (fr) 1991-06-07
ZA901151B (en) 1991-09-25
IL93378A0 (en) 1990-11-29
IL93378A (en) 1994-08-26
FR2643087A1 (fr) 1990-08-17
FI93556C (fi) 1995-04-25
CA2010119A1 (en) 1990-08-16

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