CA2019026A1 - Structure d'electrode d'element semiconducteur iii-v et methode de fabrication de cette structure - Google Patents

Structure d'electrode d'element semiconducteur iii-v et methode de fabrication de cette structure

Info

Publication number
CA2019026A1
CA2019026A1 CA2019026A CA2019026A CA2019026A1 CA 2019026 A1 CA2019026 A1 CA 2019026A1 CA 2019026 A CA2019026 A CA 2019026A CA 2019026 A CA2019026 A CA 2019026A CA 2019026 A1 CA2019026 A1 CA 2019026A1
Authority
CA
Canada
Prior art keywords
layer
iii
semiconductor element
compound semiconductor
electrode structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2019026A
Other languages
English (en)
Other versions
CA2019026C (fr
Inventor
Takashi Yano
Naoyuki Yamabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2019026A1 publication Critical patent/CA2019026A1/fr
Application granted granted Critical
Publication of CA2019026C publication Critical patent/CA2019026C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor
    • H10D64/0116—Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group III-V semiconductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/62—Electrodes ohmically coupled to a semiconductor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Electrodes Of Semiconductors (AREA)
CA002019026A 1989-06-16 1990-06-14 Structure d'electrode d'element semiconducteur iii-v et methode de fabrication de cette structure Expired - Fee Related CA2019026C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP155516/1989 1989-06-16
JP15551689 1989-06-16

Publications (2)

Publication Number Publication Date
CA2019026A1 true CA2019026A1 (fr) 1990-12-16
CA2019026C CA2019026C (fr) 1998-01-06

Family

ID=15607765

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002019026A Expired - Fee Related CA2019026C (fr) 1989-06-16 1990-06-14 Structure d'electrode d'element semiconducteur iii-v et methode de fabrication de cette structure

Country Status (7)

Country Link
US (1) US5077599A (fr)
EP (1) EP0402936B1 (fr)
JP (1) JPH0387067A (fr)
KR (1) KR940006688B1 (fr)
AU (1) AU636616B2 (fr)
CA (1) CA2019026C (fr)
DE (1) DE69015458T2 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5160793A (en) * 1991-06-07 1992-11-03 Eastman Kodak Company Shallow ohmic contacts to n-Alx Ga1-x As
JP3115148B2 (ja) * 1993-03-31 2000-12-04 株式会社東芝 半導体装置の製造方法
US5523623A (en) * 1994-03-09 1996-06-04 Matsushita Electric Industrial Co., Ltd. Ohmic electrode for a p-type compound semiconductor and a bipolar transistor incorporating the ohmic electrode
US5646069A (en) * 1995-06-07 1997-07-08 Hughes Aircraft Company Fabrication process for Alx In1-x As/Gay In1-y As power HFET ohmic contacts
JP3022765B2 (ja) * 1996-03-27 2000-03-21 日本電気株式会社 半導体装置及び半導体素子の実装方法
WO2000049645A1 (fr) * 1999-02-18 2000-08-24 The Furukawa Electric Co., Ltd. Electrode pour dispositif a semi-conducteur et son procede de fabrication
KR100376424B1 (ko) * 1999-08-05 2003-03-15 청인산업개발(주) 폐유리를 이용한 보도블럭 시공방법
DE10329364B4 (de) * 2003-06-30 2007-10-11 Osram Opto Semiconductors Gmbh Elektrischer Kontakt für ein optoelekronisches Bauelement und Verfahren zu dessen Herstellung
JPWO2008120432A1 (ja) * 2007-03-28 2010-07-15 パナソニック株式会社 オーミック電極構造体および半導体素子
JP5237628B2 (ja) * 2007-12-28 2013-07-17 スタンレー電気株式会社 半導体素子の製造方法
JP2009224499A (ja) * 2008-03-14 2009-10-01 Sumitomo Electric Ind Ltd 電極構造および半導体装置
EP2518758B1 (fr) * 2009-12-22 2015-09-16 Tokuyama Corporation Procédé de formation d'une électrode de contact de type n comportant un semi-conducteur de nitrure du groupe iii
US8829567B2 (en) * 2012-12-28 2014-09-09 Sematech, Inc. Metal alloy with an abrupt interface to III-V semiconductor
US11195721B2 (en) * 2018-01-16 2021-12-07 Princeton Optronics, Inc. Ohmic contacts and methods for manufacturing the same
DE102019006099B4 (de) * 2019-08-29 2022-03-17 Azur Space Solar Power Gmbh Stapelförmige Mehrfachsolarzelle mit einer ein Mehrschichtsystem umfassenden Metallisierung
JP7653078B2 (ja) * 2021-07-06 2025-03-28 ウシオ電機株式会社 赤外ｌｅｄ素子

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654047A (en) * 1979-10-08 1981-05-13 Nec Corp Compound semiconductor device
JPS5713756A (en) * 1980-06-27 1982-01-23 Nec Corp Electrode for semiconductor device
JPS5890773A (ja) * 1982-11-01 1983-05-30 Toshiba Corp 化合物半導体の電極
JPS605559A (ja) * 1983-06-23 1985-01-12 Nec Corp 半導体素子の電極構造
JPS60242619A (ja) * 1984-05-16 1985-12-02 Nippon Telegr & Teleph Corp <Ntt> 半導体オ−ム性電極の形成方法
JPH0658896B2 (ja) * 1984-06-15 1994-08-03 株式会社日立製作所 半導体装置の製造方法
JPS6360526A (ja) * 1986-08-30 1988-03-16 Sharp Corp 半導体装置の製造方法
JPS63252471A (ja) * 1987-04-09 1988-10-19 Toshiba Corp 化合物半導体電極構体

Also Published As

Publication number Publication date
DE69015458D1 (de) 1995-02-09
JPH0387067A (ja) 1991-04-11
EP0402936A2 (fr) 1990-12-19
CA2019026C (fr) 1998-01-06
KR940006688B1 (ko) 1994-07-25
DE69015458T2 (de) 1995-08-24
AU5713490A (en) 1990-12-20
KR910002000A (ko) 1991-01-31
EP0402936A3 (fr) 1991-05-02
US5077599A (en) 1991-12-31
AU636616B2 (en) 1993-05-06
EP0402936B1 (fr) 1994-12-28

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