CA2024338A1 - Extensometre a semiconducteur et methode de fabrication de cet extensometre - Google Patents

Extensometre a semiconducteur et methode de fabrication de cet extensometre

Info

Publication number
CA2024338A1
CA2024338A1 CA2024338A CA2024338A CA2024338A1 CA 2024338 A1 CA2024338 A1 CA 2024338A1 CA 2024338 A CA2024338 A CA 2024338A CA 2024338 A CA2024338 A CA 2024338A CA 2024338 A1 CA2024338 A1 CA 2024338A1
Authority
CA
Canada
Prior art keywords
substrate
sensor chip
adhesive
shell
semiconductor strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2024338A
Other languages
English (en)
Other versions
CA2024338C (fr
Inventor
Munenari Kondo
Masahito Imai
Ryoichi Narita
Takushi Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Publication of CA2024338A1 publication Critical patent/CA2024338A1/fr
Application granted granted Critical
Publication of CA2024338C publication Critical patent/CA2024338C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
CA002024338A 1989-09-21 1990-08-30 Extensometre a semiconducteur et methode de fabrication de cet extensometre Expired - Fee Related CA2024338C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1-245852 1989-09-21
JP1245852A JPH0623780B2 (ja) 1989-09-21 1989-09-21 半導体加速度センサの製造方法

Publications (2)

Publication Number Publication Date
CA2024338A1 true CA2024338A1 (fr) 1991-03-22
CA2024338C CA2024338C (fr) 1998-09-01

Family

ID=17139801

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002024338A Expired - Fee Related CA2024338C (fr) 1989-09-21 1990-08-30 Extensometre a semiconducteur et methode de fabrication de cet extensometre

Country Status (3)

Country Link
US (1) US5150616A (fr)
JP (1) JPH0623780B2 (fr)
CA (1) CA2024338C (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5233873A (en) * 1991-07-03 1993-08-10 Texas Instruments Incorporated Accelerometer
US5507182A (en) * 1993-02-18 1996-04-16 Nippondenso Co., Ltd. Semiconductor accelerometer with damperless structure
JP3445641B2 (ja) * 1993-07-30 2003-09-08 株式会社デンソー 半導体装置
FR2729253A1 (fr) * 1995-01-11 1996-07-12 Sagem Module capteur a boitier et procede de fabrication d'un tel module
JPH08233848A (ja) * 1995-02-28 1996-09-13 Mitsubishi Electric Corp 半導体センサ
JPH08304447A (ja) * 1995-05-02 1996-11-22 Mitsubishi Electric Corp 半導体加速度センサおよびその製造方法
US5721162A (en) * 1995-11-03 1998-02-24 Delco Electronics Corporation All-silicon monolithic motion sensor with integrated conditioning circuit
US5986316A (en) * 1997-11-26 1999-11-16 Denso Corporation Semiconductor type physical quantity sensor
WO2000079232A1 (fr) * 1999-06-18 2000-12-28 Siemens Aktiengesellschaft Dispositif detecteur dote d'un element detecteur colle
SE0003852D0 (sv) * 2000-10-24 2000-10-24 St Jude Medical Pressure sensor
JP2004069349A (ja) * 2002-08-02 2004-03-04 Denso Corp 容量式加速度センサ
DE10347418A1 (de) * 2003-10-13 2005-05-19 Robert Bosch Gmbh Beschleunigungssensoranordnung
US11372018B2 (en) * 2019-11-29 2022-06-28 Seiko Epson Corporation Sensor unit, electronic apparatus, and moving object
CN115605765B (zh) * 2021-04-23 2025-10-24 深圳市韶音科技有限公司 加速度传感装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3609624A (en) * 1969-02-20 1971-09-28 Vishay Intertechnology Inc Strain gage and method of bonding the gage to a member under test
US3923581A (en) * 1971-06-25 1975-12-02 Texas Instruments Inc Method of making a thermal display system
JPS5441304B2 (fr) * 1974-01-25 1979-12-07
JPS5441306A (en) * 1977-09-05 1979-04-02 Yamanashi Prefecture Wood defatting method
EP0261555B1 (fr) * 1986-09-22 1992-07-08 Nippondenso Co., Ltd. Accéléromètre à semi-conducteur
WO1988008522A1 (fr) * 1987-04-24 1988-11-03 Kabushiki Kaisha Nexy Kenkyusho Detecteur de forces, d'acceleration et de magnetisme, utilisant des resistances
PT93637A (pt) * 1989-04-20 1990-11-20 Procter & Gamble Metodo para o tratamento de desordens funcionais intestinais/colonicas, especialmente o sindrome de irritacao intestinal
US4987781A (en) * 1989-05-03 1991-01-29 Sensym, Incorporated Accelerometer chip

Also Published As

Publication number Publication date
CA2024338C (fr) 1998-09-01
JPH0623780B2 (ja) 1994-03-30
US5150616A (en) 1992-09-29
JPH03107769A (ja) 1991-05-08

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Legal Events

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EEER Examination request
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