DE69534764D1 - Hybrider Sensor mit Korrekturvorrichtung - Google Patents
Hybrider Sensor mit KorrekturvorrichtungInfo
- Publication number
- DE69534764D1 DE69534764D1 DE69534764T DE69534764T DE69534764D1 DE 69534764 D1 DE69534764 D1 DE 69534764D1 DE 69534764 T DE69534764 T DE 69534764T DE 69534764 T DE69534764 T DE 69534764T DE 69534764 D1 DE69534764 D1 DE 69534764D1
- Authority
- DE
- Germany
- Prior art keywords
- correction device
- hybrid sensor
- hybrid
- sensor
- correction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
- G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
- G01C21/12—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
- G01C21/16—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/006—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of fluid seismic masses
- G01P15/008—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of fluid seismic masses by using thermal pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Automation & Control Theory (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05412294A JP3294707B2 (ja) | 1994-03-24 | 1994-03-24 | 加速度センサ内蔵ガスレートセンサ |
| JP5412294 | 1994-03-24 | ||
| JP6627794 | 1994-04-04 | ||
| JP6627794A JPH07280584A (ja) | 1994-04-04 | 1994-04-04 | ハイブリッドセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69534764D1 true DE69534764D1 (de) | 2006-04-13 |
| DE69534764T2 DE69534764T2 (de) | 2006-09-28 |
Family
ID=26394856
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69527454T Expired - Fee Related DE69527454T2 (de) | 1994-03-24 | 1995-03-24 | Hybrid-Messaufnehmer |
| DE69534764T Expired - Fee Related DE69534764T2 (de) | 1994-03-24 | 1995-03-24 | Hybrider Sensor mit Korrekturvorrichtung |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69527454T Expired - Fee Related DE69527454T2 (de) | 1994-03-24 | 1995-03-24 | Hybrid-Messaufnehmer |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US5786744A (de) |
| EP (2) | EP0674182B1 (de) |
| DE (2) | DE69527454T2 (de) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5808197A (en) * | 1995-01-13 | 1998-09-15 | Remec, Inc. | Vehicle information and control system |
| US5835077A (en) * | 1995-01-13 | 1998-11-10 | Remec, Inc., | Computer control device |
| US5581034A (en) * | 1995-01-13 | 1996-12-03 | Remec, Inc. | Convective accelerometer and inclinometer |
| US6182509B1 (en) | 1996-06-26 | 2001-02-06 | Simon Fraser University | Accelerometer without proof mass |
| WO1997049998A1 (en) * | 1996-06-26 | 1997-12-31 | Simon Fraser University | Accelerometer without proof mass |
| US6589433B2 (en) | 1996-06-26 | 2003-07-08 | Simon Fraser University | Accelerometer without proof mass |
| DE19808836B4 (de) * | 1998-03-03 | 2006-03-09 | Ghh Fahrzeuge Gmbh | Verfahren zur Flugzeugmuster- und Bugradlenkwinkelerkennung beim Manövrieren eines Flugzeuges mit einem Flugzeugschlepper |
| US6937113B2 (en) * | 1998-06-09 | 2005-08-30 | Oki Electric Industry Co., Ltd. | Branching filter package |
| JP3435665B2 (ja) * | 2000-06-23 | 2003-08-11 | 株式会社村田製作所 | 複合センサ素子およびその製造方法 |
| DE10230198A1 (de) * | 2002-07-05 | 2004-01-22 | Robert Bosch Gmbh | Sensor mit einer Heizeinrichtung und Verfahren |
| DE10348245B4 (de) * | 2003-05-09 | 2007-07-19 | Plöchinger, Heinz, Dipl.-Ing. | Sensoren auf der Basis von Dichte-Unterschieden in Fluiden und Verfahren zum Betrieb und zur Herstellung derartiger Sensoren zur Erfassung von Bewegung, Lage, Fluid-Eigenschaften |
| US7516660B2 (en) | 2004-05-21 | 2009-04-14 | Met Tech, Inc. | Convective accelerometer |
| US7392703B2 (en) | 2004-06-09 | 2008-07-01 | Memsic, Inc. | Z-axis thermal accelerometer |
| US7188511B2 (en) * | 2004-06-11 | 2007-03-13 | Robert Bosch Gmbh | Stress wave sensor |
| US7231803B2 (en) * | 2004-06-11 | 2007-06-19 | Robert Bosch Gmbh | Hybrid impact sensor |
| US7684913B2 (en) | 2005-01-24 | 2010-03-23 | Trw Automotive U.S. Llc | System and method for adjusting a zero point of a seat load sensing system |
| JP4955334B2 (ja) * | 2006-08-03 | 2012-06-20 | ローム株式会社 | 加速度センサ |
| CN100453972C (zh) * | 2007-06-01 | 2009-01-21 | 北京沃尔康科技有限责任公司 | 气体摆式惯性传感器 |
| CN101349560B (zh) | 2008-07-07 | 2011-07-06 | 北京信息工程学院 | 水平姿态敏感芯片及其制造方法、水平姿态传感器 |
| CA2658651A1 (en) * | 2009-03-13 | 2010-09-13 | G.B.D. Corp. | Surface cleaning apparatus |
| US9171964B2 (en) | 2010-11-23 | 2015-10-27 | Honeywell International Inc. | Systems and methods for a three-layer chip-scale MEMS device |
| US8748206B2 (en) * | 2010-11-23 | 2014-06-10 | Honeywell International Inc. | Systems and methods for a four-layer chip-scale MEMS device |
| RU2548612C2 (ru) * | 2013-08-05 | 2015-04-20 | Федеральное государственное унитарное предприятие "Центральный аэрогидродинамический институт имени профессора Н.Е. Жуковского" (ФГУП "ЦАГИ") | Способ изготовления термоанемометра (варианты) |
| WO2017056697A1 (ja) * | 2015-09-30 | 2017-04-06 | 日立オートモティブシステムズ株式会社 | 慣性力センサ |
| DE102020134366A1 (de) * | 2020-12-21 | 2022-06-23 | Infineon Technologies Ag | Sensor zum Messen einer Gaseigenschaft |
Family Cites Families (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2455394A (en) * | 1943-06-29 | 1948-12-07 | Sperry Corp | Accelerometer |
| US2440189A (en) * | 1945-04-13 | 1948-04-20 | Rca Corp | Convection current responsive instrument |
| US3241374A (en) * | 1962-07-13 | 1966-03-22 | G V Controls Inc | Sensing of acceleration |
| US3247723A (en) * | 1964-07-20 | 1966-04-26 | Raphael O Yavne | Accelerometer, gravity meter and gas flow responsive instrument |
| US3631729A (en) * | 1969-06-05 | 1972-01-04 | Hercules Inc | Fluid jet deflection-type instrument with jet buoyancy control |
| US3635095A (en) * | 1969-06-05 | 1972-01-18 | Hercules Inc | Gravity-compensating means for fluid jet deflection-type instrument |
| US4026159A (en) * | 1976-02-23 | 1977-05-31 | United Technologies Corporation | Fluidic angular rate sensor null error compensation |
| IL49777A0 (en) * | 1976-06-13 | 1976-08-31 | Sandler B | Accelerometer |
| US4156364A (en) * | 1977-07-28 | 1979-05-29 | The Johns Hopkins University | Ionic conduction angular rate sensor |
| US4147063A (en) * | 1977-09-23 | 1979-04-03 | Systron-Donner Corporation | Two axis gas damped angular velocity sensor |
| US4254659A (en) * | 1979-01-12 | 1981-03-10 | Kbg Corporation | Fluid dynamic angular rate sensor |
| JPS55177655U (de) * | 1979-06-08 | 1980-12-19 | ||
| JPS5945944B2 (ja) * | 1980-03-27 | 1984-11-09 | 本田技研工業株式会社 | ガスレ−トセンサ |
| JPS57200813A (en) * | 1981-06-04 | 1982-12-09 | Honda Motor Co Ltd | Method for adjusting zero point of rate sensor |
| US4470124A (en) * | 1981-06-01 | 1984-09-04 | Honda Giken Kogyo Kabushiki Kaisha | Method of adjusting the zero-point of rate type sensor |
| US4407161A (en) * | 1982-02-11 | 1983-10-04 | United Technologies Corporation | Fluid jet displacement detector |
| US4542650A (en) * | 1983-08-26 | 1985-09-24 | Innovus | Thermal mass flow meter |
| US4592232A (en) * | 1984-05-07 | 1986-06-03 | United Technologies Corporation | Angular velocity sensor |
| US4920655A (en) * | 1984-07-30 | 1990-05-01 | Applied Technologies Associates | High speed well surveying and land navigation |
| US4584878A (en) * | 1984-09-24 | 1986-04-29 | Tamagawa Seigi Kabushiki Kaisha | Gas-rate sensor |
| JPH07120946B2 (ja) * | 1985-06-25 | 1995-12-20 | キヤノン株式会社 | 位相同期回路 |
| GB2179748B (en) * | 1985-08-20 | 1989-09-06 | Sharp Kk | Thermal flow sensor |
| JPS6293668A (ja) * | 1985-10-21 | 1987-04-30 | Hitachi Ltd | 角速度・加速度検出器 |
| JPS6381269A (ja) * | 1986-09-25 | 1988-04-12 | Tamagawa Seiki Co Ltd | ガスレ−トセンサの温度制御装置 |
| US4756670A (en) * | 1986-10-17 | 1988-07-12 | Andros Analyzers Incorporated | Detecting method and apparatus using heat sensitive devices |
| JPH0654322B2 (ja) * | 1987-05-27 | 1994-07-20 | 本田技研工業株式会社 | ガスレ−トセンサ |
| JPS63293472A (ja) * | 1987-05-27 | 1988-11-30 | Honda Motor Co Ltd | ガスレ−トセンサ |
| JPS63298068A (ja) * | 1987-05-29 | 1988-12-05 | Honda Motor Co Ltd | ガスレ−トセンサ |
| US4930349A (en) * | 1987-05-29 | 1990-06-05 | Honda Giken Kogyo Kabushiki Kaisha & Stanley Electric Co. | Gas rate sensor |
| JPS63298066A (ja) * | 1987-05-29 | 1988-12-05 | Honda Motor Co Ltd | ガスレ−トセンサ本体 |
| JPS63298067A (ja) * | 1987-05-29 | 1988-12-05 | Honda Motor Co Ltd | ガスレ−トセンサ本体 |
| JPH0614063B2 (ja) * | 1988-01-13 | 1994-02-23 | 本田技研工業株式会社 | ガスレートセンサ |
| JPH01180458A (ja) * | 1988-01-13 | 1989-07-18 | Honda Motor Co Ltd | ガスレートセンサ |
| US4951510A (en) * | 1988-07-14 | 1990-08-28 | University Of Hawaii | Multidimensional force sensor |
| JP2721840B2 (ja) * | 1989-06-28 | 1998-03-04 | 本田技研工業株式会社 | ガス式角速度検出器 |
| JPH0830710B2 (ja) * | 1990-03-08 | 1996-03-27 | 本田技研工業株式会社 | 角速度検出器 |
| JPH0493622A (ja) * | 1990-08-03 | 1992-03-26 | Yamatake Honeywell Co Ltd | 地震センサ |
| JP2992660B2 (ja) * | 1991-06-19 | 1999-12-20 | 本田技研工業株式会社 | ガスレートセンサ |
| JPH05133762A (ja) * | 1991-11-11 | 1993-05-28 | Mitsubishi Precision Co Ltd | 慣性航法装置 |
| US5385046A (en) * | 1992-04-10 | 1995-01-31 | Honda Giken Kogyo Kabushiki Kaisha | Gas flow type angular velocity sensor |
| JP3247533B2 (ja) * | 1994-02-04 | 2002-01-15 | 本田技研工業株式会社 | 半導体ガスレートセンサの製造方法 |
-
1995
- 1995-03-23 US US08/409,197 patent/US5786744A/en not_active Expired - Lifetime
- 1995-03-24 DE DE69527454T patent/DE69527454T2/de not_active Expired - Fee Related
- 1995-03-24 DE DE69534764T patent/DE69534764T2/de not_active Expired - Fee Related
- 1995-03-24 EP EP95301989A patent/EP0674182B1/de not_active Expired - Lifetime
- 1995-03-24 EP EP01125445A patent/EP1211515B1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1211515B1 (de) | 2006-02-01 |
| DE69534764T2 (de) | 2006-09-28 |
| DE69527454D1 (de) | 2002-08-29 |
| EP0674182A3 (de) | 1997-05-21 |
| EP1211515A1 (de) | 2002-06-05 |
| EP0674182A2 (de) | 1995-09-27 |
| US5786744A (en) | 1998-07-28 |
| EP0674182B1 (de) | 2002-07-24 |
| DE69527454T2 (de) | 2003-03-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |