EP2295813A3 - Rotor de pompe turbo-moléculaire - Google Patents

Rotor de pompe turbo-moléculaire Download PDF

Info

Publication number: EP2295813A3
Authority: EP; European Patent Office
Prior art keywords: turbomolecular pump; pump rotor; pumping; pumping structure; rotor
Prior art date: 2009-08-01
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP10007376.6A

Other languages

German (de)

English (en)

Other versions

EP2295813B1 (fr

EP2295813A2 (fr

Inventor

Helmut Bernhardt

Bernhard Tatzber

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Pfeiffer Vacuum GmbH

Original Assignee

Pfeiffer Vacuum GmbH

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2009-08-01

Filing date

2010-07-16

Publication date

2015-08-19

2010-07-16 Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH

2011-03-16 Publication of EP2295813A2 publication Critical patent/EP2295813A2/fr

2015-08-19 Publication of EP2295813A3 publication Critical patent/EP2295813A3/fr

2019-09-18 Application granted granted Critical

2019-09-18 Publication of EP2295813B1 publication Critical patent/EP2295813B1/fr

Status Active legal-status Critical Current

2030-07-16 Anticipated expiration legal-status Critical

Links

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

EP10007376.6A 2009-08-01 2010-07-16 Rotor de pompe turbo-moléculaire Active EP2295813B1 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE102009035812A DE102009035812A1 (de)	2009-08-01	2009-08-01	Turbomolekularpumpenrotor

Publications (3)

Publication Number	Publication Date
EP2295813A2 EP2295813A2 (fr)	2011-03-16
EP2295813A3 true EP2295813A3 (fr)	2015-08-19
EP2295813B1 EP2295813B1 (fr)	2019-09-18

Family

ID=43036975

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP10007376.6A Active EP2295813B1 (fr)	2009-08-01	2010-07-16	Rotor de pompe turbo-moléculaire

Country Status (3)

Country	Link
EP (1)	EP2295813B1 (fr)
JP (1)	JP2011033027A (fr)
DE (1)	DE102009035812A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE102014100622A1 (de) *	2014-01-21	2015-07-23	Pfeiffer Vacuum Gmbh	Verfahren zur Herstellung einer Rotoranordnung für eine Vakuumpumpe und Rotoranordnung für eine Vakuumpumpe

Citations (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE1950328A1 (de) *	1969-09-30	1971-04-01	Siemens Ag	Geraet,insbesondere Korpuskularstrahlgeraet,mit einer Pumpenanlage
EP1128069A2 (fr) *	2000-02-24	2001-08-29	Pfeiffer Vacuum GmbH	Pompe à effet visqueux
JP2002081397A (ja) *	2000-09-06	2002-03-22	Ebara Corp	真空ポンプ
DE202005019644U1 (de) *	2005-12-16	2007-04-26	Leybold Vacuum Gmbh	Turbomolekularpumpe
DE602004008089T2 (de) *	2003-09-30	2008-04-17	Edwards Ltd., Crawley	Vakuumpumpe
DE102007048703A1 (de) *	2007-10-11	2009-04-16	Oerlikon Leybold Vacuum Gmbh	Mehrstufiger Turbomolekularpumpen-Pumpenrotor
EP2088325A2 (fr) *	2008-02-05	2009-08-12	Ebara Corporation	Pompe à vide turbomoléculaire
EP2775149A1 (fr) *	2008-11-07	2014-09-10	Oerlikon Leybold Vacuum GmbH	rotor de pompe à vide

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE3239328C2 (de) *	1982-10-23	1993-12-23	Pfeiffer Vakuumtechnik	Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
JPH0259294U (fr) *	1988-10-25	1990-04-27
JP3784250B2 (ja) *	2000-11-06	2006-06-07	株式会社荏原製作所	真空ポンプ
JP2002168249A (ja) *	2000-11-29	2002-06-14	Shimadzu Corp	回転機械
GB0229355D0 (en) *	2002-12-17	2003-01-22	Boc Group Plc	Vacuum pumping arrangement
EP1517042A1 (fr) *	2003-09-17	2005-03-23	Mecos Traxler AG	Pallier magnétique pour une pompe à vide
DE502004003752D1 (de)	2004-01-29	2007-06-21	Pfeiffer Vacuum Gmbh	Gasreibungspumpe

2009
- 2009-08-01 DE DE102009035812A patent/DE102009035812A1/de not_active Ceased
2010
- 2010-07-16 EP EP10007376.6A patent/EP2295813B1/fr active Active
- 2010-07-27 JP JP2010167827A patent/JP2011033027A/ja active Pending

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE1950328A1 (de) *	1969-09-30	1971-04-01	Siemens Ag	Geraet,insbesondere Korpuskularstrahlgeraet,mit einer Pumpenanlage
EP1128069A2 (fr) *	2000-02-24	2001-08-29	Pfeiffer Vacuum GmbH	Pompe à effet visqueux
JP2002081397A (ja) *	2000-09-06	2002-03-22	Ebara Corp	真空ポンプ
DE602004008089T2 (de) *	2003-09-30	2008-04-17	Edwards Ltd., Crawley	Vakuumpumpe
DE202005019644U1 (de) *	2005-12-16	2007-04-26	Leybold Vacuum Gmbh	Turbomolekularpumpe
DE102007048703A1 (de) *	2007-10-11	2009-04-16	Oerlikon Leybold Vacuum Gmbh	Mehrstufiger Turbomolekularpumpen-Pumpenrotor
EP2088325A2 (fr) *	2008-02-05	2009-08-12	Ebara Corporation	Pompe à vide turbomoléculaire
EP2775149A1 (fr) *	2008-11-07	2014-09-10	Oerlikon Leybold Vacuum GmbH	rotor de pompe à vide

Also Published As

Publication number	Publication date
JP2011033027A (ja)	2011-02-17
EP2295813B1 (fr)	2019-09-18
EP2295813A2 (fr)	2011-03-16
DE102009035812A1 (de)	2011-02-03

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