ES2094968T3 - Procedimiento para preparar un blindaje para reducir las particulas dentro de una camara de deposicion fisica por vapor. - Google Patents

Procedimiento para preparar un blindaje para reducir las particulas dentro de una camara de deposicion fisica por vapor.

Info

Publication number
ES2094968T3
ES2094968T3 ES93109942T ES93109942T ES2094968T3 ES 2094968 T3 ES2094968 T3 ES 2094968T3 ES 93109942 T ES93109942 T ES 93109942T ES 93109942 T ES93109942 T ES 93109942T ES 2094968 T3 ES2094968 T3 ES 2094968T3
Authority
ES
Spain
Prior art keywords
screen
tightening ring
deposition chamber
tightening
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES93109942T
Other languages
English (en)
Inventor
Donald M Mintz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of ES2094968T3 publication Critical patent/ES2094968T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0007—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by explosions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Electrodes For Compound Or Non-Metal Manufacture (AREA)

Abstract

EN UN METODO PARA PREPARA UNA PANTALLA (17) Y/O ANILLO DE APRIETE (16) PREVIO AL USO EN UN PROCESO DE DEPOSICION DE VAPOR FISICO, LA PANTALLA (17) Y/O ANILLO DE APRIETE (16) SE INYECTA PRIMERO EN ESCORIA UTILIZANDO UN POLVO ABRASIVO, A CONTINUACION SE TRATA EN UNA CAMARA DE LIMPIEZA ULTRASONICA PARA ELIMINAR PARTICULAS SUELTAS Y DESPUES UN CHISPORROTEADO CON ACIDO O TRATATO CON UN PLASMA. EL CHISPORROTEO O EL TRATAMIENTO DE PLASMA SIRVE A SOLTAR CONTAMINACION QUE PUEDE FORMAR UNA BARRERA DE DIFUSION Y PREVENIR LOS DEPOSITOS A PARTIR DE EL ENLACE DE LA PANTALLA (17) Y TAMBIEN SIRVE PARA HACER ASPERA LA SUPERFICIE DE LA PANTALLA (17) Y/O EL ANILLO DE APRIETE (16), PARA REDUCIR LOS VACIOS DE INTERFASE Y MEJORAR LA ADHESION DE MATERIA CHISPORROTEADO SOBRE LA PANTALLA (17) Y/O ANILLO DE APRIETE (16). LOS PROCESOS DE LA INVENCION DA COMO RESULTADO UNA LIMPIEZA MEJORADA DE LA PANTALLA (17) Y/O EL ANILLO DE APRIETE (16) Y UNA ADHESION MEJORADA MATERIAL CHISPORROTEADO SOBRE ESTOS, CON LO QUE SE INCREMENTA EL TIEMPO ANTES DE QUE LA PANTALLA/ANILLO DE APRIETE DEBEN SER LIMPIADO Y SE REDUCE EL TIEMPO DE LA CAMARA DE DEPOSICION DE VAPOR FISICO (14).
ES93109942T 1992-08-11 1993-06-22 Procedimiento para preparar un blindaje para reducir las particulas dentro de una camara de deposicion fisica por vapor. Expired - Lifetime ES2094968T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/928,566 US5391275A (en) 1990-03-02 1992-08-11 Method for preparing a shield to reduce particles in a physical vapor deposition chamber

Publications (1)

Publication Number Publication Date
ES2094968T3 true ES2094968T3 (es) 1997-02-01

Family

ID=25456439

Family Applications (1)

Application Number Title Priority Date Filing Date
ES93109942T Expired - Lifetime ES2094968T3 (es) 1992-08-11 1993-06-22 Procedimiento para preparar un blindaje para reducir las particulas dentro de una camara de deposicion fisica por vapor.

Country Status (6)

Country Link
US (1) US5391275A (es)
EP (1) EP0584483B1 (es)
JP (1) JP3133196B2 (es)
KR (1) KR100272111B1 (es)
DE (1) DE69305291T2 (es)
ES (1) ES2094968T3 (es)

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Also Published As

Publication number Publication date
DE69305291T2 (de) 1997-05-28
KR100272111B1 (ko) 2000-11-15
DE69305291D1 (de) 1996-11-14
EP0584483A1 (en) 1994-03-02
US5391275A (en) 1995-02-21
JPH06192859A (ja) 1994-07-12
EP0584483B1 (en) 1996-10-09
JP3133196B2 (ja) 2001-02-05
KR940004712A (ko) 1994-03-15

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