ES8607575A1 - Un procedimiento para la produccion de imagenes en relieve. - Google Patents
Un procedimiento para la produccion de imagenes en relieve.Info
- Publication number
- ES8607575A1 ES8607575A1 ES540587A ES540587A ES8607575A1 ES 8607575 A1 ES8607575 A1 ES 8607575A1 ES 540587 A ES540587 A ES 540587A ES 540587 A ES540587 A ES 540587A ES 8607575 A1 ES8607575 A1 ES 8607575A1
- Authority
- ES
- Spain
- Prior art keywords
- radiation
- sensitive composition
- acid
- acid cleavable
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002253 acid Substances 0.000 title abstract 3
- 150000001875 compounds Chemical class 0.000 title abstract 3
- 230000005855 radiation Effects 0.000 title abstract 3
- 239000011230 binding agent Substances 0.000 abstract 2
- -1 alkenyl phenol Chemical compound 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 239000000178 monomer Substances 0.000 abstract 1
- 229920003986 novolac Polymers 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/04—Chromates
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/016—Diazonium salts or compounds
- G03F7/021—Macromolecular diazonium compounds; Macromolecular additives, e.g. binders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
- Y10S430/111—Polymer of unsaturated acid or ester
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Polymerisation Methods In General (AREA)
- Steroid Compounds (AREA)
- Nitrogen Condensed Heterocyclic Rings (AREA)
- Golf Clubs (AREA)
- Prostheses (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Manufacture Or Reproduction Of Printing Formes (AREA)
- Silver Salt Photography Or Processing Solution Therefor (AREA)
Abstract
PROCEDIMIENTO PARA LA PRODUCCION DE IMAGENES EN RELIEVE, EN PARTICULAR PARA LA PREPARACION DE COMPOSICIONES SENSIBLES A LA RADIACION. COMPRENDE LAS SIGUIENTES OPERACIONES: PRIMERA, SE PREPARA UNA CAPA REPRODUCTORA DE LA IMAGEN CONSTITUIDA POR UN POLIMERO QUE COMPRENDE UNIDADES ALQUENILFENOL COMO LIGANTE POLIMERICO, POR UN COMPUESTO QUE FORMA UN ACIDO FUERTE BAJO LA ACCION DE LA RADIACION ACTINICA, Y POR UN COMPUESTO QUE CONTIENE POR LO MENOS UN ENLACE C-O-C ESCINDIBLE POR ACIDOS; SEGUNDA, SE PREPARA EL MATERIAL DE REPRODUCCION SENSIBLE A LA RADIACION FORMADO POR UN SOPORTE Y POR LA CAPA REPRODUCTORA PREVIAMENTE PREPARADA; Y POR ULTIMO, EL MATERIAL DE REPRODUCCION SENSIBLE A LA RADIACION ES IRRADIADO BAJO UNA IMAGEN CON RADIACION ACTINICA Y A CONTINUACION SE ELIMINAN LAS REGIONES IRRADIADAS DE LA CAPA MEDIANTE UNA SOLUCION ACUOSA ALCALINA.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19843406927 DE3406927A1 (de) | 1984-02-25 | 1984-02-25 | Strahlungsempfindliches gemisch auf basis von saeurespaltbaren verbindungen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ES540587A0 ES540587A0 (es) | 1986-06-01 |
| ES8607575A1 true ES8607575A1 (es) | 1986-06-01 |
Family
ID=6228854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES540587A Expired ES8607575A1 (es) | 1984-02-25 | 1985-02-21 | Un procedimiento para la produccion de imagenes en relieve. |
Country Status (14)
| Country | Link |
|---|---|
| US (1) | US4678737A (es) |
| EP (1) | EP0153682B1 (es) |
| JP (1) | JP2653374B2 (es) |
| KR (1) | KR910006542B1 (es) |
| CN (1) | CN85101459A (es) |
| AT (1) | ATE53917T1 (es) |
| AU (1) | AU577830B2 (es) |
| BR (1) | BR8500785A (es) |
| CA (1) | CA1273521A (es) |
| DE (2) | DE3406927A1 (es) |
| ES (1) | ES8607575A1 (es) |
| FI (1) | FI80155C (es) |
| HK (1) | HK76895A (es) |
| ZA (1) | ZA851110B (es) |
Families Citing this family (90)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3582697D1 (de) * | 1984-06-07 | 1991-06-06 | Hoechst Ag | Positiv arbeitende strahlungsempfindliche beschichtungsloesung. |
| DE3421448A1 (de) * | 1984-06-08 | 1985-12-12 | Hoechst Ag, 6230 Frankfurt | Perfluoralkylgruppen aufweisende polymere, sie enthaltende reproduktionsschichten und deren verwendung fuer den wasserlosen offsetdruck |
| DE3442756A1 (de) * | 1984-11-23 | 1986-05-28 | Hoechst Ag, 6230 Frankfurt | Strahlungsempfindliches gemisch, daraus hergestelltes aufzeichnungsmaterial und verfahren zur herstellung von waermebestaendigen reliefaufzeichnungen |
| JPH0650392B2 (ja) * | 1985-07-12 | 1994-06-29 | 富士写真フイルム株式会社 | 感光性平版印刷版の製造方法 |
| DE3528929A1 (de) * | 1985-08-13 | 1987-02-26 | Hoechst Ag | Strahlungsempfindliches gemisch, dieses enthaltendes strahlungsempfindliches aufzeichnungsmaterial und verfahren zur herstellung von reliefbildern |
| DE3537441A1 (de) * | 1985-10-22 | 1987-04-23 | Hoechst Ag | Loesemittel zum entfernen von photoresists |
| DE3541534A1 (de) * | 1985-11-25 | 1987-05-27 | Hoechst Ag | Positiv arbeitendes strahlungsempfindliches gemisch |
| US4822716A (en) * | 1985-12-27 | 1989-04-18 | Kabushiki Kaisha Toshiba | Polysilanes, Polysiloxanes and silicone resist materials containing these compounds |
| JPS62227143A (ja) * | 1986-03-28 | 1987-10-06 | Toshiba Corp | 感光性組成物 |
| US5310619A (en) * | 1986-06-13 | 1994-05-10 | Microsi, Inc. | Resist compositions comprising a phenolic resin, an acid forming onium salt and a tert-butyl ester or tert-butyl carbonate which is acid-cleavable |
| US5362607A (en) * | 1986-06-13 | 1994-11-08 | Microsi, Inc. | Method for making a patterned resist substrate composite |
| DE3750275T3 (de) * | 1986-06-13 | 1998-10-01 | Microsi Inc | Lackzusammensetzung und -anwendung. |
| US5300380A (en) * | 1986-08-06 | 1994-04-05 | Ciba-Geigy Corporation | Process for the production of relief structures using a negative photoresist based on polyphenols and epoxy compounds or vinyl ethers |
| DE3766315D1 (de) * | 1986-08-06 | 1991-01-03 | Ciba Geigy Ag | Negativ-photoresist auf basis von polyphenolen und epoxidverbindungen oder vinylethern. |
| US4931379A (en) * | 1986-10-23 | 1990-06-05 | International Business Machines Corporation | High sensitivity resists having autodecomposition temperatures greater than about 160° C. |
| JPH07120039B2 (ja) * | 1986-11-14 | 1995-12-20 | 富士写真フイルム株式会社 | 感光性組成物 |
| US4788127A (en) * | 1986-11-17 | 1988-11-29 | Eastman Kodak Company | Photoresist composition comprising an interpolymer of a silicon-containing monomer and an hydroxystyrene |
| DE3716848A1 (de) * | 1987-05-20 | 1988-12-01 | Hoechst Ag | Verfahren zur bebilderung lichtempfindlichen materials |
| DE3721741A1 (de) * | 1987-07-01 | 1989-01-12 | Basf Ag | Strahlungsempfindliches gemisch fuer lichtempfindliche beschichtungsmaterialien |
| DE3729035A1 (de) * | 1987-08-31 | 1989-03-09 | Hoechst Ag | Positiv arbeitendes lichtempfindliches gemisch und daraus hergestelltes photolithographisches aufzeichnungsmaterial |
| DE3821585A1 (de) * | 1987-09-13 | 1989-03-23 | Hoechst Ag | Positiv arbeitendes strahlungsempfindliches gemisch und daraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial fuer hochenergetische strahlung |
| US4927956A (en) * | 1987-09-16 | 1990-05-22 | Hoechst Celanese Corporation | 3,5-disubstituted-4-acetoxystyrene and process for its production |
| DE3737734A1 (de) * | 1987-11-06 | 1989-05-18 | Hoechst Ag | Strahlungsempfindliches gemisch |
| US4869994A (en) * | 1988-01-25 | 1989-09-26 | Hoechst Celanese Corp. | Photoresist compositions based on hydroxystyrene copolymers |
| DE3812325A1 (de) * | 1988-04-14 | 1989-10-26 | Basf Ag | Strahlungsempfindliches gemisch fuer lichtempfindliche beschichtungsmaterialien und verfahren zur herstellung von reliefmustern und reliefbildern |
| DE3812326A1 (de) * | 1988-04-14 | 1989-10-26 | Basf Ag | Positiv arbeitendes, strahlungsempfindliches gemisch auf basis von saeurespaltbaren und photochemisch saeurebildenden verbindungen und verfahren zur herstellung von reliefmustern und reliefbildern |
| DE3817011A1 (de) * | 1988-05-19 | 1989-11-30 | Basf Ag | Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefmustern |
| DE3817009A1 (de) * | 1988-05-19 | 1989-11-30 | Basf Ag | Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefmustern |
| DE3817010A1 (de) * | 1988-05-19 | 1989-11-30 | Basf Ag | Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefmustern |
| DE3820699A1 (de) * | 1988-06-18 | 1989-12-21 | Hoechst Ag | Strahlungsempfindliches gemisch und hieraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial |
| DE3821584A1 (de) * | 1988-06-25 | 1989-12-28 | Hoechst Ag | Strahlungshaertbares gemisch und daraus hergestelltes strahlungsempfindliches aufzeichungsmaterial fuer hochenergetische strahlung |
| US5114827A (en) * | 1988-06-28 | 1992-05-19 | Microelectronics Center Of N.C. | Photoresists resistant to oxygen plasmas |
| US4968582A (en) * | 1988-06-28 | 1990-11-06 | Mcnc And University Of Nc At Charlotte | Photoresists resistant to oxygen plasmas |
| US5342727A (en) * | 1988-10-21 | 1994-08-30 | Hoechst Celanese Corp. | Copolymers of 4-hydroxystyrene and alkyl substituted-4-hydroxystyrene in admixture with a photosensitizer to form a photosensitive composition |
| US6051659A (en) * | 1992-08-20 | 2000-04-18 | International Business Machines Corporation | Highly sensitive positive photoresist composition |
| DE3837438A1 (de) * | 1988-11-04 | 1990-05-10 | Basf Ag | Strahlungsempfindliches gemisch |
| DE3837513A1 (de) * | 1988-11-04 | 1990-05-10 | Basf Ag | Strahlungsempfindliches gemisch |
| DE3841437A1 (de) * | 1988-12-09 | 1990-06-13 | Basf Ag | Strahlungsempfindliches gemisch |
| DE3907953A1 (de) * | 1989-03-11 | 1990-09-13 | Hoechst Ag | Strahlungshaertbares gemisch und daraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial fuer hochenergetische strahlung |
| DE3907954A1 (de) * | 1989-03-11 | 1990-09-13 | Hoechst Ag | Positiv arbeitendes strahlungsempfindliches gemisch und daraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial fuer hochenergetische strahlung |
| US5210000A (en) * | 1989-05-22 | 1993-05-11 | Shipley Company Inc. | Photoresist and method for forming a relief image utilizing composition with copolymer binder having a major proportion of phenolic units and a minor proportion of non-aromatic cyclic alcoholic units |
| US5128232A (en) * | 1989-05-22 | 1992-07-07 | Shiply Company Inc. | Photoresist composition with copolymer binder having a major proportion of phenolic units and a minor proportion of non-aromatic cyclic alcoholic units |
| DE3935875A1 (de) * | 1989-10-27 | 1991-05-02 | Basf Ag | Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefmustern |
| US5252436A (en) * | 1989-12-15 | 1993-10-12 | Basf Aktiengesellschaft | Process for developing a positive-working photoresist containing poly(p-hydroxystyrene) and sulfonium salt with an aqueous developer containing basic organic compounds |
| DE4002397A1 (de) * | 1990-01-27 | 1991-08-01 | Hoechst Ag | Strahlungsempfindliches gemisch und hieraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial |
| EP0440374B1 (en) * | 1990-01-30 | 1997-04-16 | Wako Pure Chemical Industries Ltd | Chemical amplified resist material |
| DE4003025A1 (de) * | 1990-02-02 | 1991-08-08 | Hoechst Ag | Strahlungsempfindliches gemisch, hiermit hergestelltes strahlungsempfindliches aufzeichnungsmaterial und verfahren zur herstellung von reliefaufzeichnungen |
| DE4004719A1 (de) * | 1990-02-15 | 1991-08-22 | Hoechst Ag | Strahlungsempfindliches gemisch, hiermit hergestelltes strahlungsempfindliches aufzeichnungsmaterial und verfahren zur herstellung von reliefaufzeichnungen |
| DE4005212A1 (de) * | 1990-02-20 | 1991-08-22 | Basf Ag | Strahlungsempfindliches gemisch |
| US5164278A (en) * | 1990-03-01 | 1992-11-17 | International Business Machines Corporation | Speed enhancers for acid sensitized resists |
| DE4007924A1 (de) * | 1990-03-13 | 1991-09-19 | Basf Ag | Strahlungsempfindliches gemisch |
| US5145764A (en) * | 1990-04-10 | 1992-09-08 | E. I. Du Pont De Nemours And Company | Positive working resist compositions process of exposing, stripping developing |
| US5077174A (en) * | 1990-04-10 | 1991-12-31 | E. I. Du Pont De Nemours And Company | Positive working dry film element having a layer of resist composition |
| US5071731A (en) * | 1990-04-10 | 1991-12-10 | E. I. Du Pont De Nemours And Company | Aqueous processable photosensitive element with an elastomeric layer |
| US5093221A (en) * | 1990-04-10 | 1992-03-03 | E. I. Du Pont De Nemours And Company | Process of making colored images using aqueous processable photosensitive elements |
| JPH0480758A (ja) * | 1990-07-23 | 1992-03-13 | Fuji Photo Film Co Ltd | 感光性組成物 |
| EP0476840B1 (en) * | 1990-08-30 | 1997-06-18 | AT&T Corp. | Process for fabricating a device |
| DE4032162A1 (de) * | 1990-10-10 | 1992-04-16 | Basf Ag | Strahlungsempfindliches gemisch, enthaltend saeurelabile gruppierungen und verfahren zur herstellung von reliefmustern und reliefbildern |
| JPH04158363A (ja) * | 1990-10-22 | 1992-06-01 | Mitsubishi Electric Corp | パターン形成用レジスト材料 |
| EP0501919A1 (de) * | 1991-03-01 | 1992-09-02 | Ciba-Geigy Ag | Strahlungsempfindliche Zusammensetzungen auf der Basis von Polyphenolen und Acetalen |
| DE4111283A1 (de) * | 1991-04-08 | 1992-10-15 | Basf Ag | Strahlungsempfindliches gemisch, enthaltend saeurelabile gruppierungen und verfahren zur herstellung von reliefmustern und reliefbildern |
| KR950000482B1 (ko) * | 1991-04-30 | 1995-01-20 | 가부시키가이샤 도시바 | 패턴형성용 레지스트 |
| JP3030672B2 (ja) * | 1991-06-18 | 2000-04-10 | 和光純薬工業株式会社 | 新規なレジスト材料及びパタ−ン形成方法 |
| DE4136213A1 (de) * | 1991-11-02 | 1993-05-06 | Basf Ag, 6700 Ludwigshafen, De | Positiv arbeitendes strahlungsempfindliches gemisch und verfahren zur herstellung von reliefmustern |
| EP0552548B1 (en) * | 1991-12-16 | 1997-03-19 | Wako Pure Chemical Industries Ltd | Resist material |
| DE4202845A1 (de) * | 1992-01-31 | 1993-08-05 | Basf Ag | Strahlungsempfindliches gemisch |
| US5342734A (en) * | 1992-02-25 | 1994-08-30 | Morton International, Inc. | Deep UV sensitive photoresist resistant to latent image decay |
| US5384229A (en) * | 1992-05-07 | 1995-01-24 | Shipley Company Inc. | Photoimageable compositions for electrodeposition |
| US5286612A (en) * | 1992-10-23 | 1994-02-15 | Polaroid Corporation | Process for generation of free superacid and for imaging, and imaging medium for use therein |
| DE69322946T2 (de) * | 1992-11-03 | 1999-08-12 | International Business Machines Corp., Armonk, N.Y. | Photolackzusammensetzung |
| JPH06214395A (ja) * | 1993-01-18 | 1994-08-05 | Sumitomo Chem Co Ltd | ポジ型フォトレジスト組成物 |
| US5314782A (en) * | 1993-03-05 | 1994-05-24 | Morton International, Inc. | Deep UV sensitive resistant to latent image decay comprising a diazonaphthoquinone sulfonate of a nitrobenzyl derivative |
| US5346803A (en) * | 1993-09-15 | 1994-09-13 | Shin-Etsu Chemical Co., Ltd. | Photoresist composition comprising a copolymer having a di-t-butyl fumarate |
| DE19507618A1 (de) * | 1995-03-04 | 1996-09-05 | Hoechst Ag | Polymere und diese enthaltendes lichtempfindliches Gemisch |
| KR100293130B1 (ko) * | 1995-04-12 | 2001-09-17 | 카나가와 치히로 | 고분자화합물및화학증폭포지티브형레지스트재료 |
| JP2956824B2 (ja) * | 1995-06-15 | 1999-10-04 | 東京応化工業株式会社 | ポジ型レジスト膜形成用塗布液 |
| DE19533608A1 (de) * | 1995-09-11 | 1997-03-13 | Basf Ag | Positivarbeitendes strahlungsempfindliches Gemisch und Verfahren zur Herstellung von Reliefstrukturen |
| DE19533607A1 (de) * | 1995-09-11 | 1997-03-13 | Basf Ag | Positivarbeitendes strahlungsempfindliches Gemisch und Verfahren zur Herstellung von Reliefstrukturen |
| US5942367A (en) | 1996-04-24 | 1999-08-24 | Shin-Etsu Chemical Co., Ltd. | Chemically amplified positive resist composition, pattern forming method, and method for preparing polymer having a crosslinking group |
| US6228552B1 (en) * | 1996-09-13 | 2001-05-08 | Kabushiki Kaisha Toshiba | Photo-sensitive material, method of forming a resist pattern and manufacturing an electronic parts using photo-sensitive material |
| US6060222A (en) | 1996-11-19 | 2000-05-09 | Kodak Polcyhrome Graphics Llc | 1Postitve-working imaging composition and element and method of forming positive image with a laser |
| WO1999004319A1 (en) | 1997-07-15 | 1999-01-28 | E.I. Du Pont De Nemours And Company | Improved dissolution inhibition resists for microlithography |
| DE19803564A1 (de) | 1998-01-30 | 1999-08-05 | Agfa Gevaert Ag | Polymere mit Einheiten aus N-substituiertem Maleimid und deren Verwendung in strahlungsempfindlichen Gemischen |
| JP3299215B2 (ja) | 1999-03-12 | 2002-07-08 | 松下電器産業株式会社 | パターン形成方法 |
| US6890855B2 (en) * | 2001-06-27 | 2005-05-10 | International Business Machines Corporation | Process of removing residue material from a precision surface |
| JP4153912B2 (ja) * | 2002-10-23 | 2008-09-24 | Azエレクトロニックマテリアルズ株式会社 | 化学増幅ポジ型感光性樹脂組成物 |
| JP4452563B2 (ja) * | 2004-06-14 | 2010-04-21 | 富士フイルム株式会社 | ポジ型レジスト組成物及びそれを用いたパターン形成方法 |
| JP4368282B2 (ja) * | 2004-09-24 | 2009-11-18 | 富士フイルム株式会社 | ポジ型レジスト組成物及びそれを用いたパターン形成方法 |
| US7998992B2 (en) | 2007-03-30 | 2011-08-16 | Institute Of Medicinal Molecular Design, Inc. | Oxazolidinone derivative having inhibitory activity on 11β-hydroxysteroid dehydrogenase type 1 |
| US9063420B2 (en) * | 2013-07-16 | 2015-06-23 | Rohm And Haas Electronic Materials Llc | Photoresist composition, coated substrate, and method of forming electronic device |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE42562C (de) * | W. J. ludlow in Cleveland, Ohio, V. St. A | Neuerungen an Primär- und Secundärbatterien und in der Methode ihres Betriebes | ||
| FR66452E (fr) * | 1949-12-16 | 1957-03-08 | Kalker Trieurfabrik Fabr | Tarare |
| DE1797282A1 (de) * | 1967-11-21 | 1971-03-04 | Inst Fuer Grafische Technik | Kopierloesung zur Herstellung von Kopierschichten fuer fotomechanische Verfahren |
| GB1375461A (es) * | 1972-05-05 | 1974-11-27 | ||
| JPS5241050B2 (es) * | 1974-03-27 | 1977-10-15 | ||
| JPS51120712A (en) * | 1975-04-15 | 1976-10-22 | Toshiba Corp | Positive type photo-resistant compound |
| DE2718254C3 (de) * | 1977-04-25 | 1980-04-10 | Hoechst Ag, 6000 Frankfurt | Strahlungsempfindliche Kopiermasse |
| DE2829512A1 (de) * | 1978-07-05 | 1980-01-17 | Hoechst Ag | Strahlungsempfindliches gemisch und verfahren zur herstellung von reliefbildern |
| DE3023201A1 (de) * | 1980-06-21 | 1982-01-07 | Hoechst Ag, 6000 Frankfurt | Positiv arbeitendes strahlungsempfindliches gemisch |
| DE3038605A1 (de) * | 1980-10-13 | 1982-06-03 | Hoechst Ag, 6000 Frankfurt | Verfahren zur herstellung von reliefkopien |
| DE3039926A1 (de) * | 1980-10-23 | 1982-05-27 | Hoechst Ag, 6000 Frankfurt | Lichtempfindliches gemisch, daraus hergestelltes lichtempfindliches kopiermaterial und verfahren zur herstellung einer druckform aus dem kopiermaterial |
| DE3107109A1 (de) * | 1981-02-26 | 1982-09-09 | Hoechst Ag, 6000 Frankfurt | Lichtempfindliches gemisch und daraus hergestelltes kopiermaterial |
| JPS5865430A (ja) * | 1981-05-27 | 1983-04-19 | Konishiroku Photo Ind Co Ltd | 感光性印刷版用感光性組成物 |
| DE3144499A1 (de) * | 1981-11-09 | 1983-05-19 | Hoechst Ag, 6230 Frankfurt | Lichtempfindliches gemisch und daraus hergestelltes lichtempfindliches kopiermaterial |
| DE3151078A1 (de) * | 1981-12-23 | 1983-07-28 | Hoechst Ag, 6230 Frankfurt | Verfahren zur herstellung von reliefbildern |
| JPS58114030A (ja) * | 1981-12-28 | 1983-07-07 | Fujitsu Ltd | ポジ型レジスト材料 |
| US4439516A (en) * | 1982-03-15 | 1984-03-27 | Shipley Company Inc. | High temperature positive diazo photoresist processing using polyvinyl phenol |
| JPS58205147A (ja) * | 1982-05-25 | 1983-11-30 | Sumitomo Chem Co Ltd | ポジ型フオトレジスト組成物 |
-
1984
- 1984-02-25 DE DE19843406927 patent/DE3406927A1/de not_active Withdrawn
-
1985
- 1985-02-14 ZA ZA851110A patent/ZA851110B/xx unknown
- 1985-02-16 AT AT85101726T patent/ATE53917T1/de not_active IP Right Cessation
- 1985-02-16 DE DE8585101726T patent/DE3577484D1/de not_active Expired - Lifetime
- 1985-02-16 EP EP85101726A patent/EP0153682B1/de not_active Expired - Lifetime
- 1985-02-18 CA CA000474536A patent/CA1273521A/en not_active Expired - Fee Related
- 1985-02-21 ES ES540587A patent/ES8607575A1/es not_active Expired
- 1985-02-21 FI FI850719A patent/FI80155C/fi not_active IP Right Cessation
- 1985-02-22 BR BR8500785A patent/BR8500785A/pt not_active IP Right Cessation
- 1985-02-22 KR KR1019850001105A patent/KR910006542B1/ko not_active Expired
- 1985-02-25 JP JP60034712A patent/JP2653374B2/ja not_active Expired - Lifetime
- 1985-02-25 AU AU39184/85A patent/AU577830B2/en not_active Ceased
- 1985-04-01 CN CN198585101459A patent/CN85101459A/zh active Pending
-
1986
- 1986-11-25 US US06/931,986 patent/US4678737A/en not_active Expired - Lifetime
-
1995
- 1995-05-18 HK HK76895A patent/HK76895A/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| EP0153682A2 (de) | 1985-09-04 |
| HK76895A (en) | 1995-05-26 |
| DE3577484D1 (de) | 1990-06-07 |
| CN85101459A (zh) | 1987-01-17 |
| US4678737A (en) | 1987-07-07 |
| FI80155B (fi) | 1989-12-29 |
| CA1273521A (en) | 1990-09-04 |
| BR8500785A (pt) | 1985-10-08 |
| FI80155C (fi) | 1990-04-10 |
| JPS60205444A (ja) | 1985-10-17 |
| AU577830B2 (en) | 1988-10-06 |
| JP2653374B2 (ja) | 1997-09-17 |
| FI850719L (fi) | 1985-08-26 |
| EP0153682B1 (de) | 1990-05-02 |
| AU3918485A (en) | 1985-09-05 |
| KR850006232A (ko) | 1985-10-02 |
| ES540587A0 (es) | 1986-06-01 |
| ATE53917T1 (de) | 1990-06-15 |
| DE3406927A1 (de) | 1985-08-29 |
| ZA851110B (en) | 1985-09-25 |
| KR910006542B1 (ko) | 1991-08-27 |
| FI850719A0 (fi) | 1985-02-21 |
| EP0153682A3 (en) | 1987-04-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FD1A | Patent lapsed |
Effective date: 19970203 |