IL100651A - Stabilizer color-stabilized laser ink interferometer - Google Patents

Stabilizer color-stabilized laser ink interferometer

Info

Publication number: IL100651A
Authority: IL; Israel
Prior art keywords: wavelength; laser diode; output; optical; radiation
Prior art date: 1991-02-08

Application number

IL10065192A

Other languages

English (en)

Hebrew (he)

Other versions

IL100651A0 (en

Original Assignee

Hughes Aircraft Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1991-02-08

Filing date

1992-01-14

Publication date

1994-08-26

1992-01-14 Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co

1992-09-06 Publication of IL100651A0 publication Critical patent/IL100651A0/xx

1994-08-26 Publication of IL100651A publication Critical patent/IL100651A/en

Links

230000003287 optical effect Effects 0.000 claims description 83
238000005259 measurement Methods 0.000 claims description 60
BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 claims description 32
238000000034 method Methods 0.000 claims description 16
238000000926 separation method Methods 0.000 claims description 15
238000006073 displacement reaction Methods 0.000 claims description 14
238000012937 correction Methods 0.000 claims description 9
230000000087 stabilizing effect Effects 0.000 claims description 5
230000001276 controlling effect Effects 0.000 claims description 3
230000002596 correlated effect Effects 0.000 claims description 2
230000005855 radiation Effects 0.000 claims 15
238000005070 sampling Methods 0.000 claims 4
230000006641 stabilisation Effects 0.000 description 17
238000011105 stabilization Methods 0.000 description 17
238000005305 interferometry Methods 0.000 description 14
230000007774 longterm Effects 0.000 description 7
230000008901 benefit Effects 0.000 description 5
238000004422 calculation algorithm Methods 0.000 description 5
230000000875 corresponding effect Effects 0.000 description 5
230000008859 change Effects 0.000 description 4
238000004458 analytical method Methods 0.000 description 3
238000013459 approach Methods 0.000 description 3
230000000694 effects Effects 0.000 description 3
230000007613 environmental effect Effects 0.000 description 3
238000012986 modification Methods 0.000 description 3
230000004048 modification Effects 0.000 description 3
230000010355 oscillation Effects 0.000 description 3
230000009897 systematic effect Effects 0.000 description 3
230000005540 biological transmission Effects 0.000 description 2
238000012360 testing method Methods 0.000 description 2
229910001374 Invar Inorganic materials 0.000 description 1
230000002411 adverse Effects 0.000 description 1
230000003321 amplification Effects 0.000 description 1
230000001427 coherent effect Effects 0.000 description 1
230000002301 combined effect Effects 0.000 description 1
230000008602 contraction Effects 0.000 description 1
230000007812 deficiency Effects 0.000 description 1
230000001419 dependent effect Effects 0.000 description 1
238000013461 design Methods 0.000 description 1
238000010586 diagram Methods 0.000 description 1
230000009977 dual effect Effects 0.000 description 1
238000002474 experimental method Methods 0.000 description 1
238000001093 holography Methods 0.000 description 1
238000003384 imaging method Methods 0.000 description 1
238000000691 measurement method Methods 0.000 description 1
238000003199 nucleic acid amplification method Methods 0.000 description 1
238000005191 phase separation Methods 0.000 description 1
239000010453 quartz Substances 0.000 description 1
230000009467 reduction Effects 0.000 description 1
230000006903 response to temperature Effects 0.000 description 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
238000001228 spectrum Methods 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02062—Active error reduction, i.e. varying with time
- G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
- G01B9/02069—Synchronization of light source or manipulator and detector
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
- H01S5/0687—Stabilising the frequency of the laser
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Engineering & Computer Science (AREA)
Automation & Control Theory (AREA)
Condensed Matter Physics & Semiconductors (AREA)
Electromagnetism (AREA)
Spectroscopy & Molecular Physics (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)
Spectrometry And Color Measurement (AREA)

IL10065192A 1991-02-08 1992-01-14 Stabilizer color-stabilized laser ink interferometer IL100651A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US07/652,753 US5127731A (en)	1991-02-08	1991-02-08	Stabilized two-color laser diode interferometer

Publications (2)

Publication Number	Publication Date
IL100651A0 IL100651A0 (en)	1992-09-06
IL100651A true IL100651A (en)	1994-08-26

Family

ID=24618019

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IL10065192A IL100651A (en)	1991-02-08	1992-01-14	Stabilizer color-stabilized laser ink interferometer

Country Status (6)

Country	Link
US (1)	US5127731A (fr)
EP (1)	EP0498575B1 (fr)
JP (1)	JPH0785008B2 (fr)
KR (1)	KR920016869A (fr)
DE (1)	DE69215248T2 (fr)
IL (1)	IL100651A (fr)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE4039955A1 (de) *	1990-12-14	1992-06-17	Zeiss Carl Fa	Anordnung mit zwei laserdioden zur erzeugung von licht mit zwei wellenlaengen
JP2914037B2 (ja) *	1991-09-30	1999-06-28	キヤノン株式会社	スペックル干渉装置
AT396841B (de) *	1992-04-02	1993-12-27	Rsf Elektronik Gmbh	Anordnung zur stabilisierung der wellenlänge des von einer laserdiode abgegebenen lichtstrahlesund laser-interferometer
JP3054494B2 (ja) *	1992-05-20	2000-06-19	株式会社トプコン	波長安定化光源装置
JP3235738B2 (ja) *	1992-05-20	2001-12-04	株式会社トプコン	アブソリュート測長器
DE4306756A1 (de) *	1993-03-04	1994-09-08	Sios Mestechnik Gmbh	Lichtwellenleitergekoppelte Temperaturmeßvorrichtung
ES2079282B1 (es) *	1993-09-13	1997-11-16	Fagor S Coop	Dispositivo interferometrico y metodo para medir y para estabilizar la longitud de onda de diodo laser.
DE59505311D1 (de) *	1994-08-19	1999-04-15	Leica Geosystems Ag	Stabilisierte multifrequenz-lichtquelle sowie verfahren zur erzeugung von synthetischer lichtwellenlänge
DE19520305C2 (de) *	1995-06-02	1997-04-17	Fraunhofer Ges Forschung	Verfahren und Meßvorrichtung zur interferometrischen Abstandsmessung
US5841125A (en) *	1997-06-06	1998-11-24	Trw Inc.	High energy laser focal sensor (HELFS)
US6181430B1 (en) *	1999-03-15	2001-01-30	Ohio Aerospace Institute	Optical device for measuring a surface characteristic of an object by multi-color interferometry
US6304330B1 (en)	1999-10-06	2001-10-16	Metrolaser, Inc.	Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry
US6423925B1 (en)	2000-02-17	2002-07-23	Universal Laser Systems, Inc.	Apparatus and method for combining multiple laser beams in laser material processing systems
US6687008B1 (en)	2000-10-19	2004-02-03	Kla-Tencor Corporation	Waveguide based parallel multi-phaseshift interferometry for high speed metrology, optical inspection, and non-contact sensing
US6747742B1 (en) *	2001-06-22	2004-06-08	Tanner Research, Inc.	Microspectrometer based on a tunable fabry-perot interferometer and microsphere cavities
US7365858B2 (en) *	2001-12-18	2008-04-29	Massachusetts Institute Of Technology	Systems and methods for phase measurements
US7557929B2 (en)	2001-12-18	2009-07-07	Massachusetts Institute Of Technology	Systems and methods for phase measurements
US20050138934A1 (en) *	2002-02-14	2005-06-30	Martin Weigert	Optoelectronic component with a peltier cooler
DE10247882B4 (de) *	2002-10-14	2005-03-10	Deutsch Zentr Luft & Raumfahrt	Verfahren zum Verringern von bei optischer Freiraum-Kommunikation auftretenden Fading
DE10260256B9 (de) *	2002-12-20	2007-03-01	Carl Zeiss	Interferometersystem und Meß-/Bearbeitungswerkzeug
DE10336839A1 (de) *	2003-08-11	2005-03-24	Technische Universität München	Vorrichtung und Verfahren zur Stabilisierung einer kohärente Strahlung emittierenden Strahlungsquelle
JP2005098902A (ja) *	2003-09-26	2005-04-14	Fujinon Corp	光源出力安定化方法
GB0403468D0 (en) *	2004-02-17	2004-03-24	Qinetiq Ltd	Laser vibrometer
US20050286599A1 (en) *	2004-06-29	2005-12-29	Rafac Robert J	Method and apparatus for gas discharge laser output light coherency reduction
JP4804058B2 (ja) *	2005-07-28	2011-10-26	キヤノン株式会社	干渉測定装置
WO2007041852A1 (fr) *	2005-10-13	2007-04-19	Sensilaser Technologies Inc.	Procede et dispositif permettant de reduire le bruit de phase d'un laser
US7620081B2 (en) *	2006-09-21	2009-11-17	Ciena Corporation	Semiconductor laser utilizing real-time linewidth reduction method
DE102008020584B3 (de) *	2008-04-24	2009-09-10	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Interferometer und Verfahren zur Untersuchung einer Oberfläche eines Objektes mittels eines Interferometers
US8662962B2 (en) *	2008-06-30	2014-03-04	3M Innovative Properties Company	Sandpaper with non-slip coating layer and method of using
US8120781B2 (en)	2008-11-26	2012-02-21	Zygo Corporation	Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US8107084B2 (en) *	2009-01-30	2012-01-31	Zygo Corporation	Interference microscope with scan motion detection using fringe motion in monitor patterns
JP2010249808A (ja) *	2009-03-24	2010-11-04	Olympus Corp	分光透過率可変素子を備えた分光イメージング装置及び分光イメージング装置における分光透過率可変素子の調整方法
US8159737B2 (en) *	2009-04-27	2012-04-17	Phase Sensitive Innovations, Inc.	Controlling the phase of optical carriers
JP2014022547A (ja) *	2012-07-18	2014-02-03	Canon Inc	光源装置および制御方法
US9485049B2 (en) *	2013-03-29	2016-11-01	Infinera Corporation	Adjusting carrier spacing in a channel
EP2796938B1 (fr) *	2013-04-25	2015-06-10	VOCO GmbH	Dispositif d'enregistrement d'une structure 3D d'un objet
US9513145B2 (en) *	2013-10-29	2016-12-06	Baker Hughes Incorporated	Apparatus to reduce pressure and thermal sensitivity of high precision optical displacement sensors
DE102016110892B4 (de) *	2015-06-17	2018-02-08	Eagleyard Photonics Gmbh	Vorrichtung zur spektralen Stabilisierung einer Laserdiode
CN106482839B (zh) *	2015-08-24	2019-06-21	南京理工大学	斐索式双波长干涉测试装置及其合成波长相位提取方法
KR102736235B1 (ko) *	2022-06-16	2024-12-03	한국원자력연구원	다파장 레이저 카메라 기반 기체 검출시스템 및 광원결합방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4832489A (en) *	1986-03-19	1989-05-23	Wyko Corporation	Two-wavelength phase-shifting interferometer and method
JPH0728077B2 (ja) *	1986-04-16	1995-03-29	株式会社トプコン	半導体レ−ザ−の発振周波数・発振出力安定化装置
JPS6412202A (en) *	1987-07-03	1989-01-17	Hitachi Electr Eng	Semiconductor laser length measuring apparatus
JPH01216201A (ja) *	1988-02-24	1989-08-30	Yokogawa Electric Corp	測長器の光源
JPH01274002A (ja) *	1988-04-27	1989-11-01	Hitachi Electron Eng Co Ltd	レーザ測長器
JPH01304303A (ja) *	1988-06-01	1989-12-07	Yokogawa Electric Corp	測長器
CH678109A5 (fr) *	1988-06-13	1991-07-31	Althis Ag
DE3837593A1 (de) *	1988-11-05	1990-05-10	Kerner Anna	Wellenlaengenstabilisierung
US4930133A (en) *	1989-06-05	1990-05-29	The Boeing Company	Multiple laser frequency stabilization

1991
- 1991-02-08 US US07/652,753 patent/US5127731A/en not_active Expired - Lifetime
1992
- 1992-01-14 IL IL10065192A patent/IL100651A/en not_active IP Right Cessation
- 1992-01-31 DE DE69215248T patent/DE69215248T2/de not_active Expired - Fee Related
- 1992-01-31 EP EP92300839A patent/EP0498575B1/fr not_active Expired - Lifetime
- 1992-02-07 JP JP4022968A patent/JPH0785008B2/ja not_active Expired - Lifetime
- 1992-02-07 KR KR1019920001786A patent/KR920016869A/ko not_active Ceased

Also Published As

Publication number	Publication date
EP0498575B1 (fr)	1996-11-20
EP0498575A2 (fr)	1992-08-12
US5127731A (en)	1992-07-07
DE69215248D1 (de)	1997-01-02
KR920016869A (ko)	1992-09-25
DE69215248T2 (de)	1997-06-19
JPH0650710A (ja)	1994-02-25
JPH0785008B2 (ja)	1995-09-13
IL100651A0 (en)	1992-09-06
EP0498575A3 (en)	1993-02-24

Legal Events

Date	Code	Title	Description
1998-12-27	RH	Patent void

Publication	Publication Date	Title
EP0498575B1 (fr)	1996-11-20	Interféromètre à diode laser stabilisées à 2 couleurs
US5153669A (en)	1992-10-06	Three wavelength optical measurement apparatus and method
US5589938A (en)	1996-12-31	Method and apparatus for optical interferometric measurements with reduced sensitivity to vibration
JP4388695B2 (ja)	2009-12-24	形状又は距離間隔、例えば粗面の面形状又は距離間隔の干渉計形測定装置
US5159408A (en)	1992-10-27	Optical thickness profiler using synthetic wavelengths
EP0235920B1 (fr)	1991-01-02	Contrôle et commande de la stabilité d'une source de radiations
JPH0552540A (ja)	1993-03-02	干渉計レーザ表面粗さ計
US10338219B2 (en)	2019-07-02	Measuring apparatus comprising an interferometer and an absorption medium defining a dense line spectrum
US5748313A (en)	1998-05-05	Signal-to-noise ratio of second harmonic interferometers
Ishii	1991	Recent developments in laser-diode interferometry
US5189677A (en)	1993-02-23	Arrangement having two laser diodes for generating light having two wavelengths
Ishii	1999	Wavelength-tunable laser-diode interferometer
Suzuki et al.	1996	Absolute distance measurement using wavelength-multiplexed phase-locked laser diode interferometry
Onodera et al.	1995	Effect of laser-diode power change on optical heterodyne interferometry
CN100565094C (zh)	2009-12-02	基于改变频率的干涉测量法
US5555089A (en)	1996-09-10	Absolute distance measuring interferometry using multi-pass resonant cavity referenced to a stabilized laser source
US5189489A (en)	1993-02-23	Interferometric measurement device with non stabilized light source
Ishii	2004	Laser-diode interferometry
Gerstner et al.	1994	New diode laser light source for absolute ranging two-wavelength interferometry
US6538746B1 (en)	2003-03-25	Method and device for measuring absolute interferometric length
Sydnev et al.	2022	An ultra-coherent semiconductor laser locked to a short delay fiber Mach-Zehnder interferometer with active fiber noise cancellation
Sasaki et al.	1998	Sinusoidal wavelength-scanning interferometers
van de Sande et al.	2023	Wavelength-modulated Interferometer without Inter-axis Dependency
Gerstner et al.	1994	New diode-laser light source for two-wavelength interferometry
Yamaguchi et al.	1999	Robust interferometry using optical feedback of a laser diode