JP2003192492A5 - - Google Patents

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Publication number: JP2003192492A5
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP2002303232A

Other languages

Japanese (ja)

Other versions

JP4299523B2 (ja

JP2003192492A (ja

Filing date

2002-10-17

Publication date

2005-06-23

2002-10-17 Application filed filed Critical

2003-07-09 Publication of JP2003192492A publication Critical patent/JP2003192492A/ja

2005-06-23 Publication of JP2003192492A5 publication Critical patent/JP2003192492A5/ja

2009-07-22 Application granted granted Critical

2009-07-22 Publication of JP4299523B2 publication Critical patent/JP4299523B2/ja

2018-04-09 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

JP2002303232A 1997-04-09 2002-10-17 低欠陥密度の空孔優勢シリコン Expired - Fee Related JP4299523B2 (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US4184597P	1997-04-09	1997-04-09
US60/041,845		1997-04-09

Related Parent Applications (1)

Application Number	Title	Priority Date	Filing Date
JP54318198A Division JP3544676B2 (ja)	1997-04-09	1998-04-09	単結晶シリコンインゴットの製造方法

Publications (3)

Publication Number	Publication Date
JP2003192492A JP2003192492A (ja)	2003-07-09
JP2003192492A5 true JP2003192492A5 (2)	2005-06-23
JP4299523B2 JP4299523B2 (ja)	2009-07-22

Family

ID=21918645

Family Applications (9)

Application Number	Title	Priority Date	Filing Date
JP54318298A Expired - Fee Related JP3449730B2 (ja)	1997-04-09	1998-04-09	単結晶シリコンインゴットを製造する方法
JP54318198A Expired - Fee Related JP3544676B2 (ja)	1997-04-09	1998-04-09	単結晶シリコンインゴットの製造方法
JP54318998A Expired - Lifetime JP3449731B2 (ja)	1997-04-09	1998-04-09	単結晶シリコンインゴットを製造する方法
JP2002303285A Expired - Lifetime JP4291559B2 (ja)	1997-04-09	2002-10-17	低欠陥密度シリコン
JP2002303232A Expired - Fee Related JP4299523B2 (ja)	1997-04-09	2002-10-17	低欠陥密度の空孔優勢シリコン
JP2002303272A Expired - Fee Related JP3782387B2 (ja)	1997-04-09	2002-10-17	低欠陥密度の自己格子間物優勢シリコンを製造する方法
JP2004054483A Expired - Fee Related JP4274973B2 (ja)	1997-04-09	2004-02-27	低欠陥密度の空孔優勢シリコンウエハおよびインゴット
JP2005309456A Expired - Lifetime JP4313356B2 (ja)	1997-04-09	2005-10-25	低欠陥密度シリコン
JP2005318604A Expired - Fee Related JP4477569B2 (ja)	1997-04-09	2005-11-01	低欠陥密度の空孔優勢シリコンウエハおよびインゴット

Family Applications Before (4)

Application Number	Title	Priority Date	Filing Date
JP54318298A Expired - Fee Related JP3449730B2 (ja)	1997-04-09	1998-04-09	単結晶シリコンインゴットを製造する方法
JP54318198A Expired - Fee Related JP3544676B2 (ja)	1997-04-09	1998-04-09	単結晶シリコンインゴットの製造方法
JP54318998A Expired - Lifetime JP3449731B2 (ja)	1997-04-09	1998-04-09	単結晶シリコンインゴットを製造する方法
JP2002303285A Expired - Lifetime JP4291559B2 (ja)	1997-04-09	2002-10-17	低欠陥密度シリコン

Family Applications After (4)

Application Number	Title	Priority Date	Filing Date
JP2002303272A Expired - Fee Related JP3782387B2 (ja)	1997-04-09	2002-10-17	低欠陥密度の自己格子間物優勢シリコンを製造する方法
JP2004054483A Expired - Fee Related JP4274973B2 (ja)	1997-04-09	2004-02-27	低欠陥密度の空孔優勢シリコンウエハおよびインゴット
JP2005309456A Expired - Lifetime JP4313356B2 (ja)	1997-04-09	2005-10-25	低欠陥密度シリコン
JP2005318604A Expired - Fee Related JP4477569B2 (ja)	1997-04-09	2005-11-01	低欠陥密度の空孔優勢シリコンウエハおよびインゴット

Country Status (10)

Country	Link
US (11)	US6254672B1 (2)
EP (7)	EP0973963B1 (2)
JP (9)	JP3449730B2 (2)
KR (6)	KR20010006227A (2)
CN (7)	CN1280455C (2)
DE (7)	DE69840690D1 (2)
MY (6)	MY120036A (2)
SG (3)	SG105510A1 (2)
TW (3)	TW494146B (2)
WO (3)	WO1998045510A1 (2)

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* Cited by examiner, † Cited by third party
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