JPH01118399U - - Google Patents

Info

Publication number
JPH01118399U
JPH01118399U JP1233588U JP1233588U JPH01118399U JP H01118399 U JPH01118399 U JP H01118399U JP 1233588 U JP1233588 U JP 1233588U JP 1233588 U JP1233588 U JP 1233588U JP H01118399 U JPH01118399 U JP H01118399U
Authority
JP
Japan
Prior art keywords
window
electron beam
irradiation device
window foil
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1233588U
Other languages
English (en)
Other versions
JPH0734399Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988012335U priority Critical patent/JPH0734399Y2/ja
Publication of JPH01118399U publication Critical patent/JPH01118399U/ja
Application granted granted Critical
Publication of JPH0734399Y2 publication Critical patent/JPH0734399Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一例を示す非走査型電子線照
射装置の略縦断面図。第２図は第１図の装置に於
て照射窓近傍の拡大断面図。第３図は第２図中の
―断面図。第４図は従来例の非走査型電子線
照射装置の照射窓近傍の縦断面図。第５図は走査
型電子線照射装置に本考案を適用したものを示す
照射窓近傍の断面図。 １……加速チヤンバ、２……カソードフイラメ
ント部、３……カソードシールド、４……照射窓
、５……チヤンバ下底面、６……窓箔、７……窓
箔押えフランジ、８……搬送コンベア、９……被
処理物、１０……窒素吹き出し口、１１……窒素
吸い込み口、１２……たまり、１３……温風逃が
し穴、１４……筐体、１５……Ｘ線遮蔽板、２０
……横桟、２１……冷却水パイプ、２２……走査
管、２３……走査管フランジ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空中に於て電子線を発生し加速して、照射窓
    ４に設けた窓箔６を通して大気圧であつて窒素ガ
    ス又は不活性ガス雰囲気中に飛出させ被処理物９
    に照射するようにした電子線照射装置において、
    窓箔６を照射窓４に固定する窓箔押えフランジ７
    に、温風逃がし穴１３を水平方向に穿孔してある
    事を特徴とする電子線照射装置。
JP1988012335U 1988-02-01 1988-02-01 電子線照射装置 Expired - Lifetime JPH0734399Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988012335U JPH0734399Y2 (ja) 1988-02-01 1988-02-01 電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988012335U JPH0734399Y2 (ja) 1988-02-01 1988-02-01 電子線照射装置

Publications (2)

Publication Number Publication Date
JPH01118399U true JPH01118399U (ja) 1989-08-10
JPH0734399Y2 JPH0734399Y2 (ja) 1995-08-02

Family

ID=31221689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988012335U Expired - Lifetime JPH0734399Y2 (ja) 1988-02-01 1988-02-01 電子線照射装置

Country Status (1)

Country Link
JP (1) JPH0734399Y2 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3417246B2 (ja) 1996-09-25 2003-06-16 日本電気株式会社 階調表示方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5346598A (en) * 1976-10-07 1978-04-26 Ebara Corp Cooling system and device of particle accelerator irradiation aperture

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5346598A (en) * 1976-10-07 1978-04-26 Ebara Corp Cooling system and device of particle accelerator irradiation aperture

Also Published As

Publication number Publication date
JPH0734399Y2 (ja) 1995-08-02

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