JPH01133218A - Production of aluminum substrate for magnetic disk - Google Patents

Production of aluminum substrate for magnetic disk

Info

Publication number
JPH01133218A
JPH01133218A JP29115887A JP29115887A JPH01133218A JP H01133218 A JPH01133218 A JP H01133218A JP 29115887 A JP29115887 A JP 29115887A JP 29115887 A JP29115887 A JP 29115887A JP H01133218 A JPH01133218 A JP H01133218A
Authority
JP
Japan
Prior art keywords
film
aluminum substrate
anodic oxidation
oxidation treatment
substrate material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29115887A
Other languages
Japanese (ja)
Inventor
Kazuyoshi Nishizawa
西沢 和由
Tatsuo Otsuka
大塚 達雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Altemira Co Ltd
Original Assignee
Showa Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Aluminum Corp filed Critical Showa Aluminum Corp
Priority to JP29115887A priority Critical patent/JPH01133218A/en
Publication of JPH01133218A publication Critical patent/JPH01133218A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To prevent generation of a characteristic change and crack by high- temp. heating and to increase hardness by subjecting an aluminum substrate material to an anodic oxidation treatment to form a hard oxide film thereon, then subjecting the film to a post-stage anodic oxidation treatment using a chromic acid electrolyte. CONSTITUTION:While the aluminum substrate material is not particularly limited, an alloy which consists of high-purity aluminum having >=99.99% purity as a base and is added with 4-5wt.% Mg is preferably used. The substrate material 1 is subjected to the fore-stage anodic oxidation treatment to form the hard oxide film 2 thereon. The oxalic acid anodic oxidation treatment is preferable as said treatment and the film thickness thereof is preferably set at 5-20mum. The film is then subjected to the post-stage anodic oxidation treatment by using the chromic acid electrolyte by which the heat resistance of the film 2 is improved. The boundary face to the base material is roughened and the crack at the time of heating is prevented by the chromic acid-anodized film 3 formed by the post-stage anodic oxidation treatment. The surface of such substrate material is polished to form the finished substrate.

Description

【発明の詳細な説明】 産業上の利用分野 この発明は、コンピュータ等における磁気記録媒体とし
ての磁気ディスクを構成するアルミニウム基板の製造方
法、特に磁性膜をスパッタリング法等により薄膜状に付
着形成せしめた形式の磁気ディスクに好適なアルミニウ
ム基板の製造方法に関する。
[Detailed Description of the Invention] Industrial Application Field This invention relates to a method for manufacturing an aluminum substrate constituting a magnetic disk as a magnetic recording medium in a computer, etc., and in particular a method for depositing a magnetic film in the form of a thin film by sputtering or the like. The present invention relates to a method of manufacturing an aluminum substrate suitable for magnetic disks of this type.

従来の技術 磁気ディスクとしては、従来より、アルミニウム基板の
表面に磁性媒体を塗布したいわゆる塗布型のものが用い
られているが、この塗布型ディスクでは磁性膜の厚さが
厚くならざるを得ないことから、昨今要求されている磁
気ディスクの高記録密度化に対処するには限界がある。
Conventional technology Conventionally, so-called coated type magnetic disks have been used, in which a magnetic medium is coated on the surface of an aluminum substrate, but with this coated type disks, the thickness of the magnetic film is unavoidable. Therefore, there is a limit to the ability to meet the recent demands for higher recording densities on magnetic disks.

そこで、アルミニウム基板表面にスパッタリング法等に
より磁性媒体を薄膜状に付着形成せしめた形式の磁気デ
ィスクが開発提供されるようになってきている。
Therefore, magnetic disks in which a magnetic medium is deposited as a thin film on the surface of an aluminum substrate by sputtering or the like have been developed and provided.

かかる磁気ディスクに用いられるアルミニウム基板では
、表面硬度の向上、磁性膜との密着性の向上等を目的と
して、一般に、その表面に下地皮膜層が被覆形成される
ものとなされる。
The aluminum substrate used in such magnetic disks is generally coated with a base film layer for the purpose of improving surface hardness and adhesion to a magnetic film.

従来、上記の下地皮膜としては、無電解N1−Pメツキ
膜や硫酸陽極酸化皮膜、クロム酸陽極酸化皮膜が採用さ
れていたが、次のような欠点があった。
Conventionally, an electroless N1-P plating film, a sulfuric acid anodic oxide film, or a chromic acid anodic oxide film has been employed as the base film, but these have the following drawbacks.

発明が解決しようとする問題点 即ち、下地皮膜表面に被覆形成される磁性膜が、例えば
酸化物薄膜等である場合には、該薄膜の形成工程中30
0〜400℃程度の加熱処理が行われるが、下地皮膜が
無電解N1−Pメツキ膜では、約200℃以上の加熱に
より結晶化が進み磁性を有するようになることから、磁
気ディスクへの適用範囲が限られるという欠点があった
。また、硫酸陽極酸化皮膜では耐熱性に劣るため、加熱
時のクラックの発生を防止すべく、皮膜の厚さを3μm
以下に限定する必要があるが、膜厚を薄くすると充分な
硬度が得られないという欠点があった。また、クロム酸
陽極酸化皮膜では、耐熱性は比較的良好であるが、硬度
が最大350 Hv程度であってN1−Pメツキ膜程の
硬度を有さないため、C8S特性が悪いという欠点があ
った。しかもクロム酸陽極酸化皮膜では皮膜生成効率が
悪く、例えば15μmの厚さの皮膜を作るのに90分間
程度にも及ぶ処理時間を要し、コストが高くつくという
ような問題もあった。
The problem to be solved by the invention is that when the magnetic film to be formed on the surface of the base film is, for example, an oxide thin film, 30%
Heat treatment is performed at a temperature of about 0 to 400°C, but if the base film is an electroless N1-P plating film, heating above about 200°C will cause it to crystallize and become magnetic, making it suitable for application to magnetic disks. The drawback was that the range was limited. In addition, since the sulfuric acid anodic oxide film has poor heat resistance, the thickness of the film was reduced to 3 μm to prevent cracks from occurring during heating.
Although it is necessary to limit the thickness to the following, there is a drawback that if the film thickness is made thin, sufficient hardness cannot be obtained. Furthermore, although the chromic acid anodic oxide film has relatively good heat resistance, it has a maximum hardness of about 350 Hv, which is not as hard as the N1-P plating film, so it has the disadvantage of poor C8S properties. Ta. Moreover, the chromic acid anodic oxidation film has poor film formation efficiency, and it takes a processing time of about 90 minutes to form a film with a thickness of 15 μm, for example, resulting in high costs.

この発明は、かかる技術的背景に鑑みてなされたもので
あって、高温加熱による特性変化やクラックを生じるこ
とがなく、かつ硬度も高い下地皮膜を有するアルミニウ
ム基板の提供を目的とするものである。
The present invention was made in view of this technical background, and aims to provide an aluminum substrate that does not cause characteristic changes or cracks due to high temperature heating and has a base film that has high hardness. .

問題点を解決するための手段 かかる目的のもとに、発明者は種々実験と研究を重ねた
結果、下地皮膜を硬質酸化皮膜形成用の前段陽極酸化処
理とクロム酸電解液を用いた後段陽極酸化処理の順次的
実施により形成することで、上記目的を達成しうろこと
を見出し、この発明を完成しえたものである。
Means for Solving the Problems With this objective in mind, the inventor conducted various experiments and research, and as a result of conducting various experiments and research, the inventor applied a first-stage anodic oxidation treatment to form a hard oxide film on the base film, and a second-stage anodization process using a chromic acid electrolyte. The inventors have discovered that the above object can be achieved by sequentially performing oxidation treatments, and have completed the present invention.

即ちこの発明は、アルミニウム基板材に、前段の陽極酸
化処理を行って硬質酸化皮膜を形成したのち、クロム酸
電解液を用いて後段の陽極酸化処理を行うことを特徴と
する磁気ディスク用アルミニウム基板の製造方法を要旨
とするものである。
That is, the present invention provides an aluminum substrate for a magnetic disk, which is characterized in that an aluminum substrate material is subjected to a first-stage anodization treatment to form a hard oxide film, and then a second-stage anodic oxidation treatment is performed using a chromic acid electrolyte. The gist is the manufacturing method.

アルミニウム基板材の組成は特に限定されるものではな
いが、好ましい組成のものとして純度99.99%以上
の高純度アルミニウムをベースとしてこれにMg:4〜
5%を添加含有せしめた合金を用いるのが良い。この場
合Mgは磁気ディスクとしての高速回転に耐えうる強度
を付与するための元素であるが、その含有量が4vt%
未満では該効果に乏しく、逆に5νt%を越えると加工
性、機械的性質、表面平滑性が劣化する。また高純度ア
ルミニウムをベースとするのは、磁気的特性に悪影響を
及ぼすFe5Slの析出を可及的防止するためである。
The composition of the aluminum substrate material is not particularly limited, but a preferred composition is based on high-purity aluminum with a purity of 99.99% or more, and Mg: 4 to 4.
It is preferable to use an alloy containing 5%. In this case, Mg is an element that provides strength to withstand high-speed rotation as a magnetic disk, and its content is 4vt%.
If it is less than 5vt%, the effect will be poor, and if it exceeds 5vt%, workability, mechanical properties, and surface smoothness will deteriorate. Furthermore, the reason why high-purity aluminum is used as a base is to prevent the precipitation of Fe5Sl, which adversely affects magnetic properties, as much as possible.

次にアルミニウム基板の製造工程について説明すると、
まず所定形状のアルミニウム板にダイヤモンド旋削、ボ
リシング加工、荒旋削加工等を施すことにより、所期す
る板厚、チャンファ−形状、表面精度を有するアルミニ
ウム基板材を製作する。
Next, I will explain the manufacturing process of aluminum substrates.
First, an aluminum substrate having a desired thickness, chamfer shape, and surface accuracy is manufactured by subjecting an aluminum plate of a predetermined shape to diamond turning, boring, rough turning, and the like.

次いで、該基板材に前段の陽極酸化処理を行う。この陽
極酸化処理は、硬質陽極酸化皮膜を形成するためのもの
である。硬質酸化皮膜としは、蓚酸皮膜やその他の有機
酸皮膜を挙げることができ、これを形成する前段処理と
しては、電解液として蓚酸、スルホサリチル酸、クレゾ
ールスルホン酸、フェノールスルホン酸、スルホフタル
酸等の有機酸を用いた陽極酸化処理を挙げうる。なかで
も好適なものとして、蓚酸法による陽極酸化処理を挙げ
つる。この蓚酸陽極酸化処理の好ましい電解条件を例示
すると、蓚酸濃度:1〜5wt%、電流密度:1.5A
/dd前後の定電流電解処理が良く、またより硬質な皮
膜を形成するために、液温:0〜20℃に設定するのが
良い。また蓚酸皮膜に限らず、前段処理による硬質酸化
皮膜の膜厚は5〜20μmに設定するのが良い。5μm
未満では皮膜硬度が充分ではなくなるおそれがあり、逆
に20μmを超えると下地皮膜の耐熱性を劣化させる原
因となり、温度条件によっては皮膜にクラック等を生じ
る危険があるからである。
Next, the substrate material is subjected to a preliminary anodic oxidation treatment. This anodizing treatment is for forming a hard anodic oxide film. Examples of the hard oxide film include an oxalic acid film and other organic acid films, and as a preliminary treatment for forming this, organic acids such as oxalic acid, sulfosalicylic acid, cresol sulfonic acid, phenolsulfonic acid, and sulfophthalic acid are used as an electrolyte. An example of this is anodizing using an acid. Among these, anodic oxidation treatment using an oxalic acid method is preferred. Preferred electrolytic conditions for this oxalic acid anodization treatment are as follows: oxalic acid concentration: 1 to 5 wt%, current density: 1.5 A
In order to obtain good constant current electrolytic treatment around /dd and to form a harder film, it is preferable to set the liquid temperature at 0 to 20°C. In addition to the oxalic acid film, the thickness of the hard oxide film formed by the pre-treatment is preferably set to 5 to 20 μm. 5 μm
If it is less than 20 μm, the hardness of the film may not be sufficient, and if it exceeds 20 μm, the heat resistance of the base film may be deteriorated, and depending on the temperature conditions, there is a risk of cracking the film.

電解液としてクロム酸を用いる後段陽極酸化処理は、皮
膜の耐熱性を向上するために実施するものである。この
クロム酸法による電解処理条件は特に限定されるもので
はないが、皮膜の一層優れた耐熱性を実現するための好
ましい条件としては、液濃度1〜10wt%、液温;1
5〜45℃、電圧70〜120Vの定電圧電解処理を挙
げることができ、また膜厚は0,5〜5μmとするのが
良い。
The latter stage anodic oxidation treatment using chromic acid as an electrolyte is carried out to improve the heat resistance of the film. The conditions for electrolytic treatment using this chromic acid method are not particularly limited, but the preferred conditions for achieving even better heat resistance of the film are: liquid concentration: 1 to 10 wt%; liquid temperature;
A constant voltage electrolytic treatment at 5 to 45° C. and a voltage of 70 to 120 V can be used, and the film thickness is preferably 0.5 to 5 μm.

前後2段の陽極酸化処理を終了したアルミニウム基板材
は、その表面を研磨して完成品とする。研磨の一例とし
ては、アルミナ粒子を研磨材するパフ研磨を挙げうる。
The surface of the aluminum substrate material that has undergone two stages of anodizing treatment, front and rear, is polished to form a finished product. An example of polishing is puff polishing in which alumina particles are used as an abrasive.

なお、上記により得られたアルミニウム基板を用いた磁
気ディスクの製作は、一般的には、基板表面にスパッタ
リング法等により磁性膜を形成し、さらにその上に保護
層を形成することによって行われる。
Note that manufacturing a magnetic disk using the aluminum substrate obtained above is generally performed by forming a magnetic film on the surface of the substrate by sputtering or the like, and further forming a protective layer thereon.

ところで、クロム酸法による後段陽極酸化処理の実施に
より皮膜の耐熱性が向上するのは次の理由によるものと
推測される。即ち、前段の陽極酸化処理により、第1図
に示すように、アルミニウム基板材(1)の表面には所
定膜厚の多孔性硬質酸化皮膜(2)が形成されているが
、第2図に示すように、後段の陽極酸化処理によるクロ
ム酸陽極酸化皮膜(3)の生成により、皮膜は基板材(
1)との界面において粗面化するものと考えられる。硫
酸陽極酸化皮膜等において高温加熱時にクラックが生じ
るのは、基板材と皮膜との熱膨張係数の違いに起因する
ものであるが、上記のように粗面形状を有する構造が加
熱時の皮膜中の内部応力を軽減させ、クラックの発生を
防止する結果、耐熱性が向上するものと推測される。
Incidentally, the reason why the heat resistance of the film is improved by performing the post-stage anodizing treatment using the chromic acid method is presumed to be due to the following reason. That is, as shown in FIG. 1, a porous hard oxide film (2) of a predetermined thickness is formed on the surface of the aluminum substrate material (1) due to the anodizing treatment in the previous stage, but as shown in FIG. As shown, due to the formation of a chromic acid anodic oxide film (3) in the subsequent anodizing process, the film becomes similar to the substrate material (
It is thought that the surface becomes rough at the interface with 1). Cracks occur in sulfuric acid anodic oxide films, etc. when heated at high temperatures, due to the difference in thermal expansion coefficient between the substrate material and the film. It is presumed that heat resistance improves as a result of reducing internal stress and preventing the occurrence of cracks.

発明の効果 この発明は上述の次第であるから、表面に下地皮膜とし
て硬度及び耐熱性に優れた陽極酸化皮膜を有する磁気デ
ィスク用基板を提供できる。
Effects of the Invention Since the present invention is as described above, it is possible to provide a magnetic disk substrate having an anodic oxide film having excellent hardness and heat resistance on its surface as a base film.

従って、磁気ディスクの製作に際して下地皮膜表面に被
覆される磁性膜が、被覆形成工程において300〜40
0℃で加熱保持する必要のある種類のものであっても、
下地皮膜に加熱によるクラックや特性変化が生じないか
ら、これを何ら問題なく被覆形成することができ、磁気
ディスク用基板としての適用範囲を拡大することができ
る。しかも下地皮膜自体硬度に優れているのに加えて、
下地皮膜の耐熱性を向上させるため皮膜厚さを薄くする
必要がないから、皮膜厚さを充分に確保しえて愈々硬度
に優れたものとなしえ、従って磁性膜のヘッドクラッシ
ュを低減しえ、磁性膜の耐久性を向上しうる。さらにま
た、クロム酸陽極酸化処理による単独の処理ではないか
ら、皮膜の形成を短時間で行うことができ皮膜生成効率
も良いものとなり、ひいては低コストなアルミニウム基
板の提供が可能となる。
Therefore, during the production of magnetic disks, the magnetic film coated on the surface of the undercoating film has a 300 to 400%
Even if it is a type that needs to be heated and maintained at 0℃,
Since no cracks or changes in properties occur in the base film due to heating, it can be coated without any problems, and the range of applications as a magnetic disk substrate can be expanded. Moreover, in addition to the base film itself having excellent hardness,
Since there is no need to reduce the thickness of the base film in order to improve its heat resistance, the film can be thick enough and have excellent hardness, which reduces head crashes of the magnetic film. The durability of the magnetic film can be improved. Furthermore, since the chromic acid anodic oxidation treatment is not the only treatment, the film can be formed in a short time and the film formation efficiency is good, which makes it possible to provide a low-cost aluminum substrate.

実施例 [実施例1コ 純度99.99%のアルミニウムをベースとするAQ−
4νt%Mg合金からなるドーナツ状アルミニウム板(
外径95mm、内径25InI11、板厚1.3mm)
を複数組用意し、該合金板の表面を平滑仕上げしたのち
、非侵食性洗浄剤で洗浄してアルミニウム基板材を製作
した。
Example [Example 1] AQ-based aluminum with a purity of 99.99%
Donut-shaped aluminum plate made of 4νt%Mg alloy (
Outer diameter 95mm, inner diameter 25InI11, plate thickness 1.3mm)
A plurality of sets were prepared, and the surfaces of the alloy plates were smoothed and then cleaned with a non-erosive cleaning agent to produce aluminum substrate materials.

次にこれら基板材を、蓚酸濃度:1.5νt%、液温:
10℃の蓚酸電解液中で電流密度:1゜5A/dTIt
、電解時間26分の条件でまず直流定電流電解処理によ
る前段の陽極酸化処理を行い、厚さ10μmの蓚酸皮膜
を形成した。次いで、後段の陽極酸化処理として、クロ
ム酸濃度:3wt%、液?m : 30℃のクロム酸電
解液中で浴電圧100vの条件で定電圧電解処理を行い
、厚さ1μmのクロム酸皮膜を形成して、本発明に係る
アルミニウム基板を得た。
Next, these substrate materials were mixed with oxalic acid concentration: 1.5 νt% and liquid temperature:
Current density in oxalic acid electrolyte at 10°C: 1°5A/dTIt
First, a preliminary anodic oxidation treatment was carried out by constant current electrolysis treatment under conditions of electrolysis time of 26 minutes to form an oxalic acid film with a thickness of 10 μm. Next, as a subsequent anodic oxidation treatment, chromic acid concentration: 3 wt%, liquid? m: A constant voltage electrolytic treatment was performed in a chromic acid electrolyte at 30° C. at a bath voltage of 100 V to form a chromic acid film with a thickness of 1 μm, thereby obtaining an aluminum substrate according to the present invention.

一方、前段処理の処理時間を適当に変えた以外は上記と
同一の条件で前後段陽極酸化処理を行い、蓚酸皮膜の厚
さ3μms 6μm、20μmの各アルミニウム基板を
得た。
On the other hand, pre- and post-stage anodizing treatments were performed under the same conditions as above, except that the processing time of the pre-processing was changed appropriately to obtain aluminum substrates with oxalic acid coatings having thicknesses of 3 μm, 6 μm, and 20 μm.

[比較例1] 実施例1と同じアルミニウム基板材を用い、蓚酸濃度:
1.5vt%、液温:10℃の蓚酸電解液中にて、電流
密度: 1.5A/dmで電解時間を各種に変えて、直
流定電流電解処理による蓚酸性単独の陽極酸化処理を実
施し、皮膜厚さ3μms 6μm、10μm120μm
の各種基板を得た。なお本処理においては、処理時間2
6分で膜厚10.czm、40分で膜厚15μmに達し
た。
[Comparative Example 1] Using the same aluminum substrate material as in Example 1, oxalic acid concentration:
Oxalic acid alone was anodized by direct current constant current electrolytic treatment in an oxalic acid electrolyte with a temperature of 1.5 vt% and a liquid temperature of 10°C, with a current density of 1.5 A/dm and various electrolytic times. and film thickness 3μms 6μm, 10μm 120μm
Various types of substrates were obtained. In addition, in this process, processing time 2
Film thickness: 10. czm, the film thickness reached 15 μm in 40 minutes.

[比較例2] 実施例1と同じアルミニウム基板材を用い、硫酸濃度:
15wt%、液温:15℃の硫酸電解液中にて、電流密
度: 1.5A/dTdで電解時間を各種に変えて、直
流定電流電解処理による硫酸性単独の陽極酸化処理を実
施し、皮膜厚さ3μm、6μm、10μm120μmの
各種基板を得た。なお本処理においては、処理時間26
分で膜厚10μm、40分で膜厚15μmに達した。
[Comparative Example 2] Using the same aluminum substrate material as in Example 1, sulfuric acid concentration:
In a sulfuric acid electrolyte containing 15 wt% and a liquid temperature of 15°C, anodic oxidation treatment using sulfuric acid alone was carried out by direct current constant current electrolysis treatment at a current density of 1.5 A/dTd and various electrolysis times. Various substrates with film thicknesses of 3 μm, 6 μm, 10 μm, and 120 μm were obtained. Note that in this process, the processing time is 26
The film thickness reached 10 μm in minutes and 15 μm in 40 minutes.

[比較例3] 実施例1と同じアルミニウム基板材を用い、クロム酸濃
度:3vt%、液温:40°Cの無水クロム酸電解液中
にて、電流密度+0.8A/dHで電解時間を各種に変
えて、直流定電流電解処理によるクロム酸性単独の陽極
酸化処理を実施し、皮膜厚さ3μm、6μm、10μm
、20μmの各種基板を得た。なお本処理においては、
処理時間60分で膜厚10μm、90分で膜厚15μm
に達した。
[Comparative Example 3] Using the same aluminum substrate material as in Example 1, electrolysis time was increased at a current density of +0.8 A/dH in an anhydrous chromic acid electrolyte with a chromic acid concentration of 3 vt% and a liquid temperature of 40°C. Instead of various types, we carried out anodizing treatment using chromium acid alone using DC constant current electrolytic treatment, resulting in film thicknesses of 3 μm, 6 μm, and 10 μm.
, 20 μm various substrates were obtained. In this process,
Film thickness: 10 μm after 60 minutes, 15 μm after 90 minutes
reached.

そして上記により得られたアルミニウム合金基板につき
、耐熱性を調べるため、皮膜表面を研磨したのち電気炉
にて皮膜表面を200°C1300℃、400℃の温度
にそれぞれ加熱して、クラックの有無を目視観察した。
In order to examine the heat resistance of the aluminum alloy substrate obtained above, the film surface was polished and then heated in an electric furnace to temperatures of 200°C, 1300°C, and 400°C, respectively, and the presence or absence of cracks was visually observed. Observed.

また微小硬度計を用いて加熱前の表面皮膜硬度を測定し
た。
Furthermore, the hardness of the surface film before heating was measured using a microhardness meter.

それらの結果を第1表に示す。The results are shown in Table 1.

[以下余白] 上記結果から明らかなように、本発明実施品は比較品に
較べて基板表面の耐熱性、硬度ともに優れていることを
確認しえた。
[Blank below] As is clear from the above results, it was confirmed that the product implementing the present invention was superior to the comparative product in both heat resistance and hardness of the substrate surface.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、前段陽極酸化処理後の皮膜と基板材との界面
付近を模式的に示す拡大部分断面図、第2図は後段陽極
酸化処理後の皮膜と基板材との界面付近を模式的に示す
拡大部分断面図である。 (1)・・・アルミニウム基板材、(2)・・・硬質皮
膜、(3)・・・クロム酸皮膜。 以上
Figure 1 is an enlarged partial sectional view schematically showing the vicinity of the interface between the film and the substrate material after the first-stage anodizing treatment, and Figure 2 is a schematic diagram showing the vicinity of the interface between the film and the substrate material after the second-stage anodizing treatment. FIG. 3 is an enlarged partial cross-sectional view shown in FIG. (1)...Aluminum substrate material, (2)...Hard film, (3)...Chromic acid film. that's all

Claims (5)

【特許請求の範囲】[Claims] (1)アルミニウム基板材に、前段の陽極酸化処理を行
って硬質酸化皮膜を形成したのち、クロム酸電解液を用
いて後段の陽極酸化処理を行うことを特徴とする磁気デ
ィスク用アルミニウム基板の製造方法。
(1) Manufacture of an aluminum substrate for a magnetic disk, which is characterized in that the aluminum substrate material is subjected to a first-stage anodizing treatment to form a hard oxide film, and then a second-stage anodic oxidation treatment is performed using a chromic acid electrolyte. Method.
(2)アルミニウム基板材が、純度99.99%以上の
高純度アルミニウムをベースとして、Mg:4〜5wt
%を添加含有した組成のものである特許請求の範囲第1
項記載の磁気ディスク用アルミニウム基板の製造方法。
(2) The aluminum substrate material is based on high-purity aluminum with a purity of 99.99% or more, and Mg: 4 to 5 wt.
Claim 1, which has a composition containing %
A method for manufacturing an aluminum substrate for a magnetic disk as described in .
(3)硬質酸化皮膜の膜厚が5〜20μmである特許請
求の範囲第1項または第2項記載の磁気ディスク用アル
ミニウム基板の製造方法。
(3) The method for manufacturing an aluminum substrate for a magnetic disk according to claim 1 or 2, wherein the hard oxide film has a thickness of 5 to 20 μm.
(4)前段の陽極酸化処理を蓚酸電解液を用いて行う特
許請求の範囲第1項ないし第3項のいずれか1に記載の
磁気ディスク用アルミニウム基板の製造方法。
(4) The method for manufacturing an aluminum substrate for a magnetic disk according to any one of claims 1 to 3, wherein the anodizing treatment in the first stage is performed using an oxalic acid electrolyte.
(5)蓚酸電解液の温度が0〜20℃である特許請求の
範囲第4項記載の磁気ディスク用アルミニウム基板の製
造方法。
(5) The method for manufacturing an aluminum substrate for a magnetic disk according to claim 4, wherein the temperature of the oxalic acid electrolyte is 0 to 20°C.
JP29115887A 1987-11-18 1987-11-18 Production of aluminum substrate for magnetic disk Pending JPH01133218A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29115887A JPH01133218A (en) 1987-11-18 1987-11-18 Production of aluminum substrate for magnetic disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29115887A JPH01133218A (en) 1987-11-18 1987-11-18 Production of aluminum substrate for magnetic disk

Publications (1)

Publication Number Publication Date
JPH01133218A true JPH01133218A (en) 1989-05-25

Family

ID=17765195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29115887A Pending JPH01133218A (en) 1987-11-18 1987-11-18 Production of aluminum substrate for magnetic disk

Country Status (1)

Country Link
JP (1) JPH01133218A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02270130A (en) * 1989-04-10 1990-11-05 Sony Corp Substrate for hard disk and production thereof
US6204169B1 (en) 1997-03-24 2001-03-20 Motorola Inc. Processing for polishing dissimilar conductive layers in a semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02270130A (en) * 1989-04-10 1990-11-05 Sony Corp Substrate for hard disk and production thereof
US6204169B1 (en) 1997-03-24 2001-03-20 Motorola Inc. Processing for polishing dissimilar conductive layers in a semiconductor device

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