JPH01137533U - - Google Patents
Info
- Publication number
- JPH01137533U JPH01137533U JP1988032938U JP3293888U JPH01137533U JP H01137533 U JPH01137533 U JP H01137533U JP 1988032938 U JP1988032938 U JP 1988032938U JP 3293888 U JP3293888 U JP 3293888U JP H01137533 U JPH01137533 U JP H01137533U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor pellet
- semiconductor
- substrate
- see
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
Landscapes
- Die Bonding (AREA)
Description
第１図は本考案の実施例を示す側断面図、第２
図及び第３図は本考案装置によつて得られる透視
図、第４図及び第５図は電力用半導体装置の問題
点を説明する要部側断面図を示す。 １……基板、２……半田、４……半導体ペレツ
ト、７，８……Ｘ線透視装置、７……撮像カメラ
、８……Ｘ線発生源。
図及び第３図は本考案装置によつて得られる透視
図、第４図及び第５図は電力用半導体装置の問題
点を説明する要部側断面図を示す。 １……基板、２……半田、４……半導体ペレツ
ト、７，８……Ｘ線透視装置、７……撮像カメラ
、８……Ｘ線発生源。
Claims (1)
- 半田を介して半導体ペレツトをマウントした基
板の移動経路を横切つて半導体ペレツトのマウン
ト領域を透視するＸ線透視装置を配置したことを
特徴とする半導体製造装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988032938U JPH01137533U (ja) | 1988-03-11 | 1988-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988032938U JPH01137533U (ja) | 1988-03-11 | 1988-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01137533U true JPH01137533U (ja) | 1989-09-20 |
Family
ID=31259544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988032938U Pending JPH01137533U (ja) | 1988-03-11 | 1988-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01137533U (ja) |
-
1988
- 1988-03-11 JP JP1988032938U patent/JPH01137533U/ja active Pending