JPH0351834U - - Google Patents

Info

Publication number
JPH0351834U
JPH0351834U JP11203689U JP11203689U JPH0351834U JP H0351834 U JPH0351834 U JP H0351834U JP 11203689 U JP11203689 U JP 11203689U JP 11203689 U JP11203689 U JP 11203689U JP H0351834 U JPH0351834 U JP H0351834U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
reaction chamber
growth apparatus
vertical vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11203689U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11203689U priority Critical patent/JPH0351834U/ja
Publication of JPH0351834U publication Critical patent/JPH0351834U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図および第２図は本考案の一実施例を示す
もので、第１図は要部を示す図、第２図は装置の
概略的構成図、第３図および第４図は従来装置を
示すもので、第３図は装置の概略的構成図、第４
図は反応室内における反応ガスの挙動を示す図で
ある。 ５……ベルジヤ、７……反応室、２０……排気
手段（排気管）、２０ａ……吸込口、Ｇ……反応
ガス、Ｗ……被処理物（ウエハ）。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) ベルジヤにより囲繞された反応室内に反応
    ガスを導き前記反応室内にある被処理物に対する
    気相成長を行う縦型気相成長装置において、 前記反応室内頂部に吸込口を臨ませた排気手段
    を設けたことを特徴とする縦型気相成長装置。 (2) 排気手段が、石英ガラスからなる排気管で
    構成される請求項１記載の縦型気相成長装置。
JP11203689U 1989-09-27 1989-09-27 Pending JPH0351834U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11203689U JPH0351834U (ja) 1989-09-27 1989-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11203689U JPH0351834U (ja) 1989-09-27 1989-09-27

Publications (1)

Publication Number Publication Date
JPH0351834U true JPH0351834U (ja) 1991-05-20

Family

ID=31660490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11203689U Pending JPH0351834U (ja) 1989-09-27 1989-09-27

Country Status (1)

Country Link
JP (1) JPH0351834U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008136745A (ja) * 2006-12-04 2008-06-19 Roiyaru:Kk 陳列用アタッチメントベース及び陳列用支持装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008136745A (ja) * 2006-12-04 2008-06-19 Roiyaru:Kk 陳列用アタッチメントベース及び陳列用支持装置

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