JPH01192794A - ダイヤモンドの気相合成法 - Google Patents

ダイヤモンドの気相合成法

Info

Publication number
JPH01192794A
JPH01192794A JP63013724A JP1372488A JPH01192794A JP H01192794 A JPH01192794 A JP H01192794A JP 63013724 A JP63013724 A JP 63013724A JP 1372488 A JP1372488 A JP 1372488A JP H01192794 A JPH01192794 A JP H01192794A
Authority
JP
Japan
Prior art keywords
diamond
gas
hydrogen
graphite
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63013724A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0474315B2 (2
Inventor
Kazutaka Kanda
一隆 神田
Seiki Takehata
竹端　精己
Shoichi Yoshida
吉田　昇一
Kenichiro Yamagishi
山岸　憲一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nachi Fujikoshi Corp
Original Assignee
Nachi Fujikoshi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nachi Fujikoshi Corp filed Critical Nachi Fujikoshi Corp
Priority to JP63013724A priority Critical patent/JPH01192794A/ja
Publication of JPH01192794A publication Critical patent/JPH01192794A/ja
Publication of JPH0474315B2 publication Critical patent/JPH0474315B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP63013724A 1988-01-26 1988-01-26 ダイヤモンドの気相合成法 Granted JPH01192794A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63013724A JPH01192794A (ja) 1988-01-26 1988-01-26 ダイヤモンドの気相合成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63013724A JPH01192794A (ja) 1988-01-26 1988-01-26 ダイヤモンドの気相合成法

Publications (2)

Publication Number Publication Date
JPH01192794A true JPH01192794A (ja) 1989-08-02
JPH0474315B2 JPH0474315B2 (2) 1992-11-25

Family

ID=11841195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63013724A Granted JPH01192794A (ja) 1988-01-26 1988-01-26 ダイヤモンドの気相合成法

Country Status (1)

Country Link
JP (1) JPH01192794A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5587207A (en) * 1994-11-14 1996-12-24 Gorokhovsky; Vladimir I. Arc assisted CVD coating and sintering method
US5747118A (en) * 1994-04-06 1998-05-05 The Regents Of The University Of California Plasma enhanced chemical transport process for forming diamond films

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS616198A (ja) * 1984-06-19 1986-01-11 Meidensha Electric Mfg Co Ltd ダイヤモンド薄膜の製造法
JPS61183198A (ja) * 1984-12-29 1986-08-15 Kyocera Corp ダイヤモンド膜の製法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS616198A (ja) * 1984-06-19 1986-01-11 Meidensha Electric Mfg Co Ltd ダイヤモンド薄膜の製造法
JPS61183198A (ja) * 1984-12-29 1986-08-15 Kyocera Corp ダイヤモンド膜の製法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5747118A (en) * 1994-04-06 1998-05-05 The Regents Of The University Of California Plasma enhanced chemical transport process for forming diamond films
US5587207A (en) * 1994-11-14 1996-12-24 Gorokhovsky; Vladimir I. Arc assisted CVD coating and sintering method

Also Published As

Publication number Publication date
JPH0474315B2 (2) 1992-11-25

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