JPH0139215B2 - - Google Patents
Info
- Publication number
- JPH0139215B2 JPH0139215B2 JP56198117A JP19811781A JPH0139215B2 JP H0139215 B2 JPH0139215 B2 JP H0139215B2 JP 56198117 A JP56198117 A JP 56198117A JP 19811781 A JP19811781 A JP 19811781A JP H0139215 B2 JPH0139215 B2 JP H0139215B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- silicon nitride
- bonding pad
- wiring
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/69—Inorganic materials
- H10P14/694—Inorganic materials composed of nitrides
- H10P14/6943—Inorganic materials composed of nitrides containing silicon
- H10P14/69433—Inorganic materials composed of nitrides containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/951—Materials of bond pads
- H10W72/952—Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/981—Auxiliary members, e.g. spacers
- H10W72/983—Reinforcing structures, e.g. collars
Landscapes
- Local Oxidation Of Silicon (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56198117A JPS5898939A (ja) | 1981-12-08 | 1981-12-08 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56198117A JPS5898939A (ja) | 1981-12-08 | 1981-12-08 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5898939A JPS5898939A (ja) | 1983-06-13 |
| JPH0139215B2 true JPH0139215B2 (2) | 1989-08-18 |
Family
ID=16385742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56198117A Granted JPS5898939A (ja) | 1981-12-08 | 1981-12-08 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5898939A (2) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2642257B1 (fr) * | 1989-01-20 | 1996-05-24 | Dassault Electronique | Procede de scellement verre-aluminium, notamment pour traversee electrique de boitier de circuit hybride, objet composite et composition de verre correspondants |
| US5367125A (en) * | 1989-01-20 | 1994-11-22 | Dassault Electronique | Aluminum based article having an insert with vitreous material hermetically sealed thereto |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5796542A (en) * | 1980-12-08 | 1982-06-15 | Nec Corp | Semiconductor device |
-
1981
- 1981-12-08 JP JP56198117A patent/JPS5898939A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5898939A (ja) | 1983-06-13 |
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