JPH0157491B2 - - Google Patents

Info

Publication number
JPH0157491B2
JPH0157491B2 JP60177655A JP17765585A JPH0157491B2 JP H0157491 B2 JPH0157491 B2 JP H0157491B2 JP 60177655 A JP60177655 A JP 60177655A JP 17765585 A JP17765585 A JP 17765585A JP H0157491 B2 JPH0157491 B2 JP H0157491B2
Authority
JP
Japan
Prior art keywords
region
film
laser beam
substrate
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60177655A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6239009A (ja
Inventor
Kenichi Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60177655A priority Critical patent/JPS6239009A/ja
Publication of JPS6239009A publication Critical patent/JPS6239009A/ja
Publication of JPH0157491B2 publication Critical patent/JPH0157491B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
JP60177655A 1985-08-14 1985-08-14 Ｓｏｉ基板形成方法 Granted JPS6239009A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60177655A JPS6239009A (ja) 1985-08-14 1985-08-14 Ｓｏｉ基板形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60177655A JPS6239009A (ja) 1985-08-14 1985-08-14 Ｓｏｉ基板形成方法

Publications (2)

Publication Number Publication Date
JPS6239009A JPS6239009A (ja) 1987-02-20
JPH0157491B2 true JPH0157491B2 (cs) 1989-12-06

Family

ID=16034784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60177655A Granted JPS6239009A (ja) 1985-08-14 1985-08-14 Ｓｏｉ基板形成方法

Country Status (1)

Country Link
JP (1) JPS6239009A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105161498B (zh) * 2015-08-03 2017-09-19 京东方科技集团股份有限公司 薄膜晶体管及其制作方法、阵列基板以及显示装置

Also Published As

Publication number Publication date
JPS6239009A (ja) 1987-02-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term