JPH0380336B2 - - Google Patents

Info

Publication number
JPH0380336B2
JPH0380336B2 JP60253071A JP25307185A JPH0380336B2 JP H0380336 B2 JPH0380336 B2 JP H0380336B2 JP 60253071 A JP60253071 A JP 60253071A JP 25307185 A JP25307185 A JP 25307185A JP H0380336 B2 JPH0380336 B2 JP H0380336B2
Authority
JP
Japan
Prior art keywords
region
semiconductor film
film
laser beam
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60253071A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62112315A (ja
Inventor
Kenichi Koyama
Takemitsu Kunio
Tadayoshi Enomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP60253071A priority Critical patent/JPS62112315A/ja
Publication of JPS62112315A publication Critical patent/JPS62112315A/ja
Publication of JPH0380336B2 publication Critical patent/JPH0380336B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
JP60253071A 1985-11-11 1985-11-11 Ｓｏｉ基板形成方法 Granted JPS62112315A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60253071A JPS62112315A (ja) 1985-11-11 1985-11-11 Ｓｏｉ基板形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60253071A JPS62112315A (ja) 1985-11-11 1985-11-11 Ｓｏｉ基板形成方法

Publications (2)

Publication Number Publication Date
JPS62112315A JPS62112315A (ja) 1987-05-23
JPH0380336B2 true JPH0380336B2 (cs) 1991-12-24

Family

ID=17246085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60253071A Granted JPS62112315A (ja) 1985-11-11 1985-11-11 Ｓｏｉ基板形成方法

Country Status (1)

Country Link
JP (1) JPS62112315A (cs)

Also Published As

Publication number Publication date
JPS62112315A (ja) 1987-05-23

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