JPH0189452U - - Google Patents
Info
- Publication number
- JPH0189452U JPH0189452U JP18512687U JP18512687U JPH0189452U JP H0189452 U JPH0189452 U JP H0189452U JP 18512687 U JP18512687 U JP 18512687U JP 18512687 U JP18512687 U JP 18512687U JP H0189452 U JPH0189452 U JP H0189452U
- Authority
- JP
- Japan
- Prior art keywords
- evacuated chamber
- dust suction
- high voltage
- evacuating
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
Description
第１図は本考案の一実施例の概略構成図、第２
図は高電圧吸塵筒を説明するための図である。
１：被排気室、２：排気管、３：排気ポンプ、
４：排気バルブ、５：リーク管、６：リークバル
ブ、７：高電圧吸塵筒、８：シリカゲル容器、９
：絶縁部材、１０：保護容器、１１：リークスイ
ツチ、１２：高電圧電源、１３：高圧導入端子。
Figure 1 is a schematic configuration diagram of one embodiment of the present invention;
The figure is a diagram for explaining a high voltage dust collection cylinder. 1: Exhaust chamber, 2: Exhaust pipe, 3: Exhaust pump,
4: Exhaust valve, 5: Leak pipe, 6: Leak valve, 7: High voltage dust suction cylinder, 8: Silica gel container, 9
: Insulating member, 10: Protective container, 11: Leak switch, 12: High voltage power supply, 13: High voltage introduction terminal.
Claims (1)
の排気ポンプとを備えた装置において、前記被排
気室の大気導入経路に高電圧吸塵手段を設けたこ
とを特徴とする電子顕微鏡。 An electron microscope comprising an evacuated chamber and an evacuation pump for evacuating the evacuated chamber to a vacuum, characterized in that a high-voltage dust suction means is provided in an air introduction path of the evacuated chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987185126U JPH0610610Y2 (en) | 1987-12-04 | 1987-12-04 | electronic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987185126U JPH0610610Y2 (en) | 1987-12-04 | 1987-12-04 | electronic microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0189452U true JPH0189452U (en) | 1989-06-13 |
| JPH0610610Y2 JPH0610610Y2 (en) | 1994-03-16 |
Family
ID=31476454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987185126U Expired - Lifetime JPH0610610Y2 (en) | 1987-12-04 | 1987-12-04 | electronic microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610610Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5853829A (en) * | 1981-09-26 | 1983-03-30 | Fujitsu Ltd | Electron beam exposing device |
| JPS611485A (en) * | 1984-06-13 | 1986-01-07 | Mitsubishi Electric Corp | Electron beam welding equipment |
-
1987
- 1987-12-04 JP JP1987185126U patent/JPH0610610Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5853829A (en) * | 1981-09-26 | 1983-03-30 | Fujitsu Ltd | Electron beam exposing device |
| JPS611485A (en) * | 1984-06-13 | 1986-01-07 | Mitsubishi Electric Corp | Electron beam welding equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610610Y2 (en) | 1994-03-16 |