JPH0194969A - Sample stand of spin coater - Google Patents

Abstract

PURPOSE:To enlarge an effective area becoming a coating film having a uniform thickness, by bringing the sample stand of a spin coater to a shape larger than the inscribed circle of a rectangular base plate and subjected to trimming processing by the thickness of the base plate in a base plate fixing region. CONSTITUTION:In the sample stand of the spin coater used in a base plate preparing process of a liquid crystal display body, the shape thereof is made larger than the inscribed circle of a square base plate 4 centering around the center 1 of rotation. Further, trimming processing is performed by the thickness of the square base plate 4 with respect to a square base plate fixing region 3. By this method, the surface having the square base plate fixing region 3 of the sample stand becomes the original plane by placing the square base plate 4 and, therefore, a turblent stream is not generated from a glass end surface at the time of rotation. Therefore, uniform coating can be performed to the square base plate fixing region.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention relates to a spin coater used for forming a uniform coating film on a substrate in the manufacturing process of a substrate for a liquid crystal display.
This relates to the shape of a sample stage that has the function of fixing a substrate and applying rotation.

(Prior art) The sample stage of a conventional spin coater was generally made smaller than the substrate to be coated. This was because they did not want the liquid to get on the sample stage.

[Problem that the invention seeks to solve]

However, with the above-mentioned conventional technology, a coating film with a uniform thickness can be produced on a polygonal substrate: especially in the area within the inscribed circle of a rectangular substrate, but in the area outside of the inscribed circle, coating film is formed from the edge surface of the substrate during rotation. The problem is that the turbulent flow creates a low pressure, resulting in a thick film that cannot be used effectively.

The present invention is intended to solve these problems, and its purpose is to provide a method for coating a polygonal substrate with a uniform film thickness in areas outside the inscribed circle as well as in the inscribed circle. There are K places that offer this.

(Means for Solving the Problems) The spin coater sample stand of the present invention has a substrate placed and fixed thereon, and has a rotating function. A disk having a diameter larger than an inscribed circle of the substrate centered at the center, and a fixing surface between the disk and the substrate is within the substrate fixing area and at a depth corresponding to the thickness of the substrate. It is characterized by having a concave portion.

[Effect]

According to the above structure of the present invention, turbulent flow from the end face of the glass does not occur in the area where the polygonal substrate is fixed on the disk-shaped sample stage, so that coating can be performed without being affected by this. , it is possible to expand the area that can be effectively used with a film thickness similar to that within the inscribed circle of any polygonal substrate.

〔Example〕

FIG. 1 is a plan view showing a sample stage of a spin coater according to the present invention and a rectangular substrate fixed thereto.

The sample stage is obtained by processing a circular plate 2 centered on the rotation center 1 by cleaning the rectangular substrate fixing area 3 by the thickness of the rectangular substrate 4. Furthermore, suction grooves 5 are machined in the rectangular substrate fixing area 3 to perform vacuum suction for the purpose of fixing the rectangular substrate 4. Further, on the back side of the surface where the rectangular substrate fixing area 5 is located, a rotation axis for transmitting rotation from the sliding source to the sample stage is fixed.

When spinco F is performed using this sample stage, the surface of the sample stage with the rectangular substrate fixing area 5 becomes the original plane by placing the rectangular substrate 4, so no turbulent flow is generated from the end face of the glass during rotation. Therefore, when spin footing was performed on the rectangular substrate 4 using the sample stage according to the present invention, a uniform coating film could be formed on the rectangular substrate fixing area 5.

This is similar to treating the disk 2 on the sample stage as a single substrate and performing a spin code on it.

Here, the size of the disk 2 needs to be at least larger than the inscribed circle 6 of the rectangular substrate in order to increase the effective area that can obtain a uniform coating film. Circumcircle of a rectangular board.

7 is the same as when the disk 2 has the same size as the circumscribed circle 7 of a rectangular substrate in the effect of expanding its effective area, but on the other hand, the moment of inertia of the disk increases and it becomes more powerful. This is undesirable because it requires driving force.

From the viewpoint of effective area, it is desirable that the size of the disk 2 is the same as the circumscribed circle 7 of the rectangular board.However, considering the attachment and detachment of the board, the size of the disk 2 should be slightly smaller than the circumscribed circle 7 of the rectangular board. Ideally, the four ends of the rectangular substrate 4 can be supported.

Further, in this embodiment, an example was shown in which the polygonal substrate is a square, but it goes without saying that similar effects can be obtained with a shape with rounded corners or other polygons.

〔Effect of the invention〕

As described above, according to the present invention, a disk larger than the inscribed circle of the rectangular substrate centered around the rotation center of the sample stage of the spin coater is processed by sweeping the rectangular substrate fixing area by the thickness of the rectangular substrate. By making the shape,
This has the effect of expanding the effective area on which a uniform coating film can be obtained on the square substrate to the fixed area of the square substrate!

[Brief explanation of the drawing]

FIG. 1 is a plan view showing a rectangular substrate fixed to a sample stage of a spin coater according to the present invention. , 1...
...Rotation center 2...Circle Plate 3...Rectangular board fixing area 4...
...Square board 5 ...... Suction groove

Claims (1)

[Claims] In a sample stand of a spin coater on which a substrate is mounted and fixed and has a rotation function, the sample stand is a disk having a diameter larger than an inscribed circle of the substrate centered on the rotation center of the sample stand. . A sample stage for a spin coater, wherein a fixing surface between the disk and the substrate has a recess within the substrate fixing area and having a depth corresponding to the thickness of the substrate.