JPH0195278U - - Google Patents
Info
- Publication number
- JPH0195278U JPH0195278U JP19163987U JP19163987U JPH0195278U JP H0195278 U JPH0195278 U JP H0195278U JP 19163987 U JP19163987 U JP 19163987U JP 19163987 U JP19163987 U JP 19163987U JP H0195278 U JPH0195278 U JP H0195278U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- carrier
- water vapor
- liquid tank
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 230000004888 barrier function Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案一実施例の概略構成図である。
１…液槽、２…センサ、３…バリヤ、４…ホル
ダ（担体保持手段）、５…基板、６…ガラスケー
ス（囲い手段）、７…水蒸気発生手段。
ダ（担体保持手段）、５…基板、６…ガラスケー
ス（囲い手段）、７…水蒸気発生手段。
Claims (1)
- 【実用新案登録請求の範囲】 成膜分子を展開するための液槽と、展開した成
膜分子を移しとる成膜担体を移動可能に保持する
担体保持手段とを備えた成膜装置において、 少なくとも前記担体保持手段によつて保持され
た成膜担体が移動しうる前記液槽上の領域を覆う
囲い手段と、該囲い手段で覆われた領域に水蒸気
を供給する水蒸気供給手段とを具備することを特
徴とする成膜装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19163987U JPH0195278U (ja) | 1987-12-16 | 1987-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19163987U JPH0195278U (ja) | 1987-12-16 | 1987-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0195278U true JPH0195278U (ja) | 1989-06-23 |
Family
ID=31482542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19163987U Pending JPH0195278U (ja) | 1987-12-16 | 1987-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0195278U (ja) |
-
1987
- 1987-12-16 JP JP19163987U patent/JPH0195278U/ja active Pending