JPH01110871U - - Google Patents
Info
- Publication number
- JPH01110871U JPH01110871U JP452788U JP452788U JPH01110871U JP H01110871 U JPH01110871 U JP H01110871U JP 452788 U JP452788 U JP 452788U JP 452788 U JP452788 U JP 452788U JP H01110871 U JPH01110871 U JP H01110871U
- Authority
- JP
- Japan
- Prior art keywords
- film
- forming
- carrier
- molecules
- drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Description
第１図は本考案一実施例の概略構成図、第２図
Ａ乃至Ｄは成膜工程の説明図である。 １……液槽、２……センサ、３……バリヤ、４
……ホルダ（担体保持手段）、５……基板（成膜
担体）、６……送風器（乾燥手段）。
Ａ乃至Ｄは成膜工程の説明図である。 １……液槽、２……センサ、３……バリヤ、４
……ホルダ（担体保持手段）、５……基板（成膜
担体）、６……送風器（乾燥手段）。
Claims (1)
- 成膜分子を展開するための液槽と、展開した成
膜分子を移しとる成膜担体を移動可能に保持する
担体保持手段と、該担体保持手段で保持された成
膜担体あるいは成膜担体上の成膜分子の表面を乾
燥させる乾燥手段とを備えることを特徴とする成
膜装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP452788U JPH01110871U (ja) | 1988-01-18 | 1988-01-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP452788U JPH01110871U (ja) | 1988-01-18 | 1988-01-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01110871U true JPH01110871U (ja) | 1989-07-26 |
Family
ID=31207116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP452788U Pending JPH01110871U (ja) | 1988-01-18 | 1988-01-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01110871U (ja) |
-
1988
- 1988-01-18 JP JP452788U patent/JPH01110871U/ja active Pending