JPH02102722U - - Google Patents

Info

Publication number
JPH02102722U
JPH02102722U JP1989010534U JP1053489U JPH02102722U JP H02102722 U JPH02102722 U JP H02102722U JP 1989010534 U JP1989010534 U JP 1989010534U JP 1053489 U JP1053489 U JP 1053489U JP H02102722 U JPH02102722 U JP H02102722U
Authority
JP
Japan
Prior art keywords
frequency electrode
flat high
electrode
substrate support
plasma cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989010534U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989010534U priority Critical patent/JPH02102722U/ja
Publication of JPH02102722U publication Critical patent/JPH02102722U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図ａは本考案の一実施例のプラズマＣＶＤ
装置の一部水平断面図、第１図ｂは第１図ａの要
部拡大図、第２図、第３図は従来のプラズマＣＶ
Ｄ装置を示し、第２図は第３図のＢ―Ｂ線矢視断
面図、第３図は第２図のＡ―Ａ線矢視断面図であ
る。 １：成膜基板、２３：ＣＶＤ処理室、４１：真
空源、４２：ガス導入管、５：高周波電極、６：
基板支持体、７１：移動板、７３：電極フレーム
、７４：ガイド、７５：ばね。

Claims (1)

    【実用新案登録請求の範囲】
  1. 反応ガス導入可能の真空室内に一方の電極を兼
    ね加熱体を備えた基板支持体と、対向して配置さ
    れた平板状高周波電極を有するものにおいて、平
    板状高周波電極にその電極の板面内の複数方向に
    張力を加える弾性体を備えたことを特徴とするプ
    ラズマＣＶＤ装置。
JP1989010534U 1989-01-31 1989-01-31 Pending JPH02102722U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989010534U JPH02102722U (ja) 1989-01-31 1989-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989010534U JPH02102722U (ja) 1989-01-31 1989-01-31

Publications (1)

Publication Number Publication Date
JPH02102722U true JPH02102722U (ja) 1990-08-15

Family

ID=31218281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989010534U Pending JPH02102722U (ja) 1989-01-31 1989-01-31

Country Status (1)

Country Link
JP (1) JPH02102722U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005158982A (ja) * 2003-11-26 2005-06-16 Kaneka Corp Ｃｖｄ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005158982A (ja) * 2003-11-26 2005-06-16 Kaneka Corp Ｃｖｄ装置

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