JPH02120746U - - Google Patents

Info

Publication number
JPH02120746U
JPH02120746U JP3076489U JP3076489U JPH02120746U JP H02120746 U JPH02120746 U JP H02120746U JP 3076489 U JP3076489 U JP 3076489U JP 3076489 U JP3076489 U JP 3076489U JP H02120746 U JPH02120746 U JP H02120746U
Authority
JP
Japan
Prior art keywords
wafer
holding mechanism
wafer holding
springs
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3076489U
Other languages
English (en)
Other versions
JPH0733364Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989030764U priority Critical patent/JPH0733364Y2/ja
Publication of JPH02120746U publication Critical patent/JPH02120746U/ja
Application granted granted Critical
Publication of JPH0733364Y2 publication Critical patent/JPH0733364Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の実施例１を示す正面図、第２
図は同断面図、第３図は本考案の実施例２を示す
正面図、第４図ａは従来例を示す正面図、ｂは同
断面図、第５図はイオン注入装置のエンドステー
シヨンを示す図である。 １……半導体ウエハー、２……板ばね、３……
分割リング、４……押えリング、５……フロント
プレート、６……コイル状ばね、７……プラテン
、８…ウエハー保持リング、９……ウエハー保持
構構、１０……フアラデー、１１……ウエハーピ
ツク。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエハーに不純物を注入するイオン注入
    装置のエンドステーシヨン等で用いられるウエハ
    ーを１枚ずつ保持するウエハー保持機構において
    、半導体ウエハーの周囲を保持する複数個の板ば
    ねを複数個に分割された分割リングに固定し、こ
    の分割されたリングをばねで別個独立に支持した
    ことを特徴とするウエハー保持機構。
JP1989030764U 1989-03-17 1989-03-17 ウエハー保持機構 Expired - Lifetime JPH0733364Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989030764U JPH0733364Y2 (ja) 1989-03-17 1989-03-17 ウエハー保持機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989030764U JPH0733364Y2 (ja) 1989-03-17 1989-03-17 ウエハー保持機構

Publications (2)

Publication Number Publication Date
JPH02120746U true JPH02120746U (ja) 1990-09-28
JPH0733364Y2 JPH0733364Y2 (ja) 1995-07-31

Family

ID=31256117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989030764U Expired - Lifetime JPH0733364Y2 (ja) 1989-03-17 1989-03-17 ウエハー保持機構

Country Status (1)

Country Link
JP (1) JPH0733364Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118747U (ja) * 1982-02-08 1983-08-13 日本電気株式会社 基板支持具
JPS63191634U (ja) * 1987-05-29 1988-12-09

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118747U (ja) * 1982-02-08 1983-08-13 日本電気株式会社 基板支持具
JPS63191634U (ja) * 1987-05-29 1988-12-09

Also Published As

Publication number Publication date
JPH0733364Y2 (ja) 1995-07-31

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term