JPH0214361U - - Google Patents
Info
- Publication number
- JPH0214361U JPH0214361U JP9086488U JP9086488U JPH0214361U JP H0214361 U JPH0214361 U JP H0214361U JP 9086488 U JP9086488 U JP 9086488U JP 9086488 U JP9086488 U JP 9086488U JP H0214361 U JPH0214361 U JP H0214361U
- Authority
- JP
- Japan
- Prior art keywords
- rotating
- rotating plate
- fixed
- substrate holder
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例を示す基板ホルダー
回転装置の一実施例を示す平面図ａおよび側面図
ｂ、第２図はターゲツト上を通る基板の軌跡を示
す説明図、第３図は従来の基板ホルダーとターゲ
ツト選択板の関係を示す斜視図、第４図は従来装
置によるスパツタ金属の分布状態を示す図である
。
１……基板ホルダー回転装置、２……第１の回
転手段、３……第１の回転板、４……第２の回転
手段、５……第２の回転板、６……第３の回転手
段、７……基板ホルダー、８……基板。
FIG. 1 is a plan view a and a side view b showing an embodiment of a substrate holder rotating device according to an embodiment of the present invention, FIG. 2 is an explanatory diagram showing the trajectory of a substrate passing over a target, and FIG. FIG. 4 is a perspective view showing the relationship between a conventional substrate holder and a target selection plate, and FIG. 4 is a diagram showing the distribution of sputtered metal by the conventional device. DESCRIPTION OF SYMBOLS 1... Substrate holder rotating device, 2... First rotating means, 3... First rotating plate, 4... Second rotating means, 5... Second rotating plate, 6... Third rotating plate. Rotating means, 7...substrate holder, 8... substrate.
Claims (1)
前記第１の回転板上に固定された少なくとも１つ
の第２の回転手段と、前記第２の回転手段に固定
された第２の回転板と、前記第２の回転板に固定
された少なくとも１つの第３の回転手段と、前記
第３の回転手段に固定された基板ホルダーを有す
ることを特徴とする基板ホルダー回転装置。 a first rotating plate fixed to the first rotating means;
at least one second rotating means fixed on the first rotating plate; a second rotating plate fixed on the second rotating means; and at least one second rotating plate fixed on the second rotating plate. 1. A substrate holder rotation device comprising: a third rotation means; and a substrate holder fixed to the third rotation means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9086488U JPH0214361U (en) | 1988-07-08 | 1988-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9086488U JPH0214361U (en) | 1988-07-08 | 1988-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0214361U true JPH0214361U (en) | 1990-01-29 |
Family
ID=31315373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9086488U Pending JPH0214361U (en) | 1988-07-08 | 1988-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214361U (en) |
-
1988
- 1988-07-08 JP JP9086488U patent/JPH0214361U/ja active Pending
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