JPH0221131B2 - - Google Patents
Info
- Publication number
- JPH0221131B2 JPH0221131B2 JP62146377A JP14637787A JPH0221131B2 JP H0221131 B2 JPH0221131 B2 JP H0221131B2 JP 62146377 A JP62146377 A JP 62146377A JP 14637787 A JP14637787 A JP 14637787A JP H0221131 B2 JPH0221131 B2 JP H0221131B2
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- exposure amount
- time
- value
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 9
- 102100031584 Cell division cycle-associated 7-like protein Human genes 0.000 description 7
- 101000777638 Homo sapiens Cell division cycle-associated 7-like protein Proteins 0.000 description 7
- 101100325756 Arabidopsis thaliana BAM5 gene Proteins 0.000 description 6
- 101150046378 RAM1 gene Proteins 0.000 description 6
- 101100476489 Rattus norvegicus Slc20a2 gene Proteins 0.000 description 6
- 230000007423 decrease Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62146377A JPS6323316A (ja) | 1987-06-12 | 1987-06-12 | 露光量制御方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62146377A JPS6323316A (ja) | 1987-06-12 | 1987-06-12 | 露光量制御方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55147090A Division JPS5771132A (en) | 1980-10-21 | 1980-10-21 | Exposure controlling system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6323316A JPS6323316A (ja) | 1988-01-30 |
| JPH0221131B2 true JPH0221131B2 (2) | 1990-05-11 |
Family
ID=15406337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62146377A Granted JPS6323316A (ja) | 1987-06-12 | 1987-06-12 | 露光量制御方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6323316A (2) |
-
1987
- 1987-06-12 JP JP62146377A patent/JPS6323316A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6323316A (ja) | 1988-01-30 |
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