JPH0222371U - - Google Patents
Info
- Publication number
- JPH0222371U JPH0222371U JP3379188U JP3379188U JPH0222371U JP H0222371 U JPH0222371 U JP H0222371U JP 3379188 U JP3379188 U JP 3379188U JP 3379188 U JP3379188 U JP 3379188U JP H0222371 U JPH0222371 U JP H0222371U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- growth apparatus
- epitaxial growth
- heating
- beam sources
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案に係る分子線源の断面図、第２
図は分子線エピタキシヤル成長の概念図、である
。 ２，２′は分子線源、３は被処理基板、７は坩
堝、８はシヤツタ、９，１８はヒータ、１０，１
９は反射板、１１はシユラウド、１３は回転導入
器、１４は本体部、１５は加熱源、である。
図は分子線エピタキシヤル成長の概念図、である
。 ２，２′は分子線源、３は被処理基板、７は坩
堝、８はシヤツタ、９，１８はヒータ、１０，１
９は反射板、１１はシユラウド、１３は回転導入
器、１４は本体部、１５は加熱源、である。
Claims (1)
- 【実用新案登録請求の範囲】 真空チヤンバ１の中に設けた複数の分子線源２
，２′を加熱し、該分子線源２，２′に対向して
設けられている被処理基板３に分子線を照射し、
被処理基板３の上に該分子よりなる薄膜を形成す
る結晶成長装置において、 分子線源２，２′の前に設けられているシヤツ
タ８の開口動作終了位置に加熱源１５を設け、前
記シヤツタ８の開口時に加熱源１５に通電し、加
熱する機構を備えたことを特徴とする分子線エピ
タキシヤル成長装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3379188U JPH057251Y2 (ja) | 1988-03-16 | 1988-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3379188U JPH057251Y2 (ja) | 1988-03-16 | 1988-03-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0222371U true JPH0222371U (ja) | 1990-02-14 |
| JPH057251Y2 JPH057251Y2 (ja) | 1993-02-24 |
Family
ID=31260496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3379188U Expired - Lifetime JPH057251Y2 (ja) | 1988-03-16 | 1988-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057251Y2 (ja) |
-
1988
- 1988-03-16 JP JP3379188U patent/JPH057251Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057251Y2 (ja) | 1993-02-24 |
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