JPH0260053B2 - - Google Patents
Info
- Publication number
- JPH0260053B2 JPH0260053B2 JP59267941A JP26794184A JPH0260053B2 JP H0260053 B2 JPH0260053 B2 JP H0260053B2 JP 59267941 A JP59267941 A JP 59267941A JP 26794184 A JP26794184 A JP 26794184A JP H0260053 B2 JPH0260053 B2 JP H0260053B2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- partition door
- partition
- opening
- middle chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/26—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition
- H10P14/263—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition using melted materials
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59267941A JPS61144016A (ja) | 1984-12-17 | 1984-12-17 | 液相エピタキシヤル結晶成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59267941A JPS61144016A (ja) | 1984-12-17 | 1984-12-17 | 液相エピタキシヤル結晶成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61144016A JPS61144016A (ja) | 1986-07-01 |
| JPH0260053B2 true JPH0260053B2 (2) | 1990-12-14 |
Family
ID=17451729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59267941A Granted JPS61144016A (ja) | 1984-12-17 | 1984-12-17 | 液相エピタキシヤル結晶成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61144016A (2) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101157201B1 (ko) | 2010-04-30 | 2012-06-20 | 주식회사 테라세미콘 | Ｃｉｇｓ층 형성장치 |
-
1984
- 1984-12-17 JP JP59267941A patent/JPS61144016A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61144016A (ja) | 1986-07-01 |
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