JPH0267633U - - Google Patents
Info
- Publication number
- JPH0267633U JPH0267633U JP14663188U JP14663188U JPH0267633U JP H0267633 U JPH0267633 U JP H0267633U JP 14663188 U JP14663188 U JP 14663188U JP 14663188 U JP14663188 U JP 14663188U JP H0267633 U JPH0267633 U JP H0267633U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- sample
- processing
- processing chamber
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005684 electric field Effects 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は、本考案の一実施例の有磁場マイクロ
波プラズマ処理装置の要部縦断面図である。
１０……放電管、２０……容器、３０……空間
、４０，４１……導波管、５０……電磁コイル、
６０……試料台、７０……ガイド溝、７１……突
起、８０……移動具、８１……柱状部材、８２，
８３……鍔部材、９０，９１……コイルバネ、１
００……永久磁石、１１０……試料。
FIG. 1 is a longitudinal sectional view of a main part of a magnetic field microwave plasma processing apparatus according to an embodiment of the present invention. 10... Discharge tube, 20... Container, 30... Space, 40, 41... Waveguide, 50... Electromagnetic coil,
60... Sample stage, 70... Guide groove, 71... Protrusion, 80... Moving tool, 81... Column member, 82,
83... Flange member, 90, 91... Coil spring, 1
00...Permanent magnet, 110...Sample.
Claims (1)
たプラズマを利用して試料を処理する装置におい
て、前記磁場を利用して前記処理室内で前記試料
を移動させる手段を具備したことを特徴とする有
磁場プラズマ処理装置。 An apparatus for processing a sample using plasma generated within a processing chamber by the action of an electric field and a magnetic field, characterized by comprising means for moving the sample within the processing chamber using the magnetic field. Magnetic field plasma processing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14663188U JPH0267633U (en) | 1988-11-11 | 1988-11-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14663188U JPH0267633U (en) | 1988-11-11 | 1988-11-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0267633U true JPH0267633U (en) | 1990-05-22 |
Family
ID=31416301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14663188U Pending JPH0267633U (en) | 1988-11-11 | 1988-11-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0267633U (en) |
-
1988
- 1988-11-11 JP JP14663188U patent/JPH0267633U/ja active Pending
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