JPH0269960U - - Google Patents
Info
- Publication number
- JPH0269960U JPH0269960U JP14847088U JP14847088U JPH0269960U JP H0269960 U JPH0269960 U JP H0269960U JP 14847088 U JP14847088 U JP 14847088U JP 14847088 U JP14847088 U JP 14847088U JP H0269960 U JPH0269960 U JP H0269960U
- Authority
- JP
- Japan
- Prior art keywords
- roll
- trap
- vacuum evaporation
- vapor deposition
- cooling roll
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 6
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims 3
- 230000008020 evaporation Effects 0.000 claims 3
- 238000007740 vapor deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14847088U JPH0269960U (2) | 1988-11-16 | 1988-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14847088U JPH0269960U (2) | 1988-11-16 | 1988-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0269960U true JPH0269960U (2) | 1990-05-28 |
Family
ID=31419826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14847088U Pending JPH0269960U (2) | 1988-11-16 | 1988-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0269960U (2) |
-
1988
- 1988-11-16 JP JP14847088U patent/JPH0269960U/ja active Pending
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