JPH0310461U - - Google Patents
Info
- Publication number
- JPH0310461U JPH0310461U JP6983689U JP6983689U JPH0310461U JP H0310461 U JPH0310461 U JP H0310461U JP 6983689 U JP6983689 U JP 6983689U JP 6983689 U JP6983689 U JP 6983689U JP H0310461 U JPH0310461 U JP H0310461U
- Authority
- JP
- Japan
- Prior art keywords
- filaments
- detecting
- thermionic
- issuing
- disconnected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Description
第１図は本案の実施例としてのイオン打込装置
の打込室の概念図、第２図は本案の実施例のエレ
シヤワ電源の構成図である。
１……打込室、２……円板、３……ウエーハ、
４……フイラメント、５……フイラメント電源、
６……電子加速電源、７……シヤツタ、８……円
板電流検出器、９……イオンビーム電流計、２０
……差動帰還増幅器、２１……エレクトロンシヤ
ワ電源、２２……制御装置、２３……フイラメン
ト。
FIG. 1 is a conceptual diagram of an implantation chamber of an ion implantation apparatus as an embodiment of the present invention, and FIG. 2 is a configuration diagram of an electric power source of the embodiment of the present invention. 1... Imprinting chamber, 2... Disc, 3... Wafer,
4... Filament, 5... Filament power supply,
6...Electron acceleration power supply, 7...Shutter, 8...Disc current detector, 9...Ion beam ammeter, 20
... Differential feedback amplifier, 21 ... Electron shower power supply, 22 ... Control device, 23 ... Filament.
Claims (1)
に使用される熱電子発生装置において、フイラメ
ントに流れる電流を検出する手段と、あらかじめ
設定されたフイラメント電流比較値を発生する手
段とを有し、前２手段の２つの信号を比較して、
２本以上のフイラメントの一部が断線したことを
検出し、表示し、警告を発生する手段を有する熱
電子発生装置。 A thermionic generation device in which two or more filaments are used simultaneously as a thermionic source, has means for detecting the current flowing through the filaments, and means for generating a preset filament current comparison value, and the former two means Compare the two signals of
A thermoelectron generator having means for detecting, displaying, and issuing a warning that a part of two or more filaments is disconnected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6983689U JPH0310461U (en) | 1989-06-16 | 1989-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6983689U JPH0310461U (en) | 1989-06-16 | 1989-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0310461U true JPH0310461U (en) | 1991-01-31 |
Family
ID=31605482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6983689U Pending JPH0310461U (en) | 1989-06-16 | 1989-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0310461U (en) |
-
1989
- 1989-06-16 JP JP6983689U patent/JPH0310461U/ja active Pending
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