JPH0324768B2 - - Google Patents

Info

Publication number
JPH0324768B2
JPH0324768B2 JP58150953A JP15095383A JPH0324768B2 JP H0324768 B2 JPH0324768 B2 JP H0324768B2 JP 58150953 A JP58150953 A JP 58150953A JP 15095383 A JP15095383 A JP 15095383A JP H0324768 B2 JPH0324768 B2 JP H0324768B2
Authority
JP
Japan
Prior art keywords
substrate
coating layer
clean
film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58150953A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6043833A (ja
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP58150953A priority Critical patent/JPS6043833A/ja
Publication of JPS6043833A publication Critical patent/JPS6043833A/ja
Publication of JPH0324768B2 publication Critical patent/JPH0324768B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • Drying Of Semiconductors (AREA)
JP58150953A 1983-08-20 1983-08-20 表面汚染防止法並にその装置 Granted JPS6043833A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58150953A JPS6043833A (ja) 1983-08-20 1983-08-20 表面汚染防止法並にその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58150953A JPS6043833A (ja) 1983-08-20 1983-08-20 表面汚染防止法並にその装置

Publications (2)

Publication Number Publication Date
JPS6043833A JPS6043833A (ja) 1985-03-08
JPH0324768B2 true JPH0324768B2 (de) 1991-04-04

Family

ID=15508032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58150953A Granted JPS6043833A (ja) 1983-08-20 1983-08-20 表面汚染防止法並にその装置

Country Status (1)

Country Link
JP (1) JPS6043833A (de)

Also Published As

Publication number Publication date
JPS6043833A (ja) 1985-03-08

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